Gyroscope Dynamic Balance Counterweight Prediction Based on Multi-Head ResGAT Networks

The dynamic balance assessment during the assembly of the coordinator gyroscope significantly impacts the guidance accuracy of precision-guided equipment.In dynamic balance debugging,reliance on rudimentary counterweight empirical formulas persists,resulting in suboptimal debugging accuracy and an increased repetition rate.To mitigate this challenge,we present a multi-head residual graph attention network(ResGAT)model,designed to predict dynamic balance counterweights with high precision.In this research,we employ graph neural networks for interaction feature extraction from assembly graph data.An SDAE-GPC model is designed for the assembly condition classification to derive graph data inputs for the ResGAT regression model,which is capable of predicting gyroscope counterweights under small-sample conditions.The results of our experiments demonstrate the effectiveness of the proposed approach in predicting dynamic gyroscope counterweight in its assembly process.Our approach surpasses current methods in mitigating repetition rates and enhancing the assembly efficiency of gyroscopes.

Quasi-anti-parity–time-symmetric single-resonator micro-optical gyroscope with Kerr nonlinearity

Parity–time(PT) and quasi-anti-parity–time(quasi-APT) symmetric optical gyroscopes have been proposed recently which enhance Sagnac frequency splitting. However, the operation of gyroscopes at the exceptional point(EP) is challenging due to strict fabrication requirements and experimental uncertainties. We propose a new quasi-APT-symmetric micro-optical gyroscope which can be operated at the EP by easily shifting the Kerr nonlinearity. A single resonator is used as the core sensitive component of the quasi-APT-symmetric optical gyroscope to reduce the size, overcome the strict structural requirements and detect small rotation rates. Moreover, the proposed scheme also has an easy readout method for the frequency splitting. As a result, the device achieves a frequency splitting 10~5 times higher than that of a classical resonant optical gyroscope with the Earth's rotation. This proposal paves the way for a new and valuable method for the engineering of micro-optical gyroscopes.

Design and Characterization of a Novel Z-axis Quartz Cross-fork Micromachined Gyroscope

The existing researches on quartz gyroscope mainly focus on the structure design of the tuning fork, which aim at obtaining a better vibration characterization. However, the fabrication of complicated structure is a challenge for present processes, and the imperfect fabrication process seriously affects the performances of the sensors. In this paper, a novel quartz cross-fork structure micromachined gyroscope is proposed. The sensor has a simple structure in x-y plane of quartz crystal. Unlike other quartz gyroscopes, the proposed gyroscope is based on shear stress detection to sense Coriolis’ force rather than normal stress detection. This feature can simplify the sensing electrode patterns and miniaturize the structure easily. Then the mechanical analysis of the structure is discussed. In order to obtain high sensitivities and uniform characteristics between different structures, the sensing beam is designed to be tapered, and the taper should be appreciably greater than 1°. This scheme is validated by finite element analysis software. The dynamic characteristic of the structure is analyzed by lumped parameter model. The dynamic stress in the beam and the detection sensitivity are deduced to optimize the structure parameter of gyroscope. Finally, the gyroscope is fabricated by quartz anisotropic wet etching. The prototype is characterized as follows. The drive mode frequency is 13.38 kHz, and the quality factor is about 900 in air. The scale factor is 1.45 mV/（（°） s –1 ） and the nonlinearity is 3.6% in the dynamic range of ±200°/s. Process and test results show that the proposed quartz gyroscope can achieve a high performance at atmosphere pressure. The research can simplify the fabrication of the quartz gyroscope, and is taken as a novel method for the design of quartz gyroscope.

A Silicon Micromachined Gyroscope Driven by the Rotating Carrier Self

This paper reported a silicon micromachined gyroscope which is driven by the rotating carrier's angular velocity,the silicon was manufactured by anisotropy etching.The design,fabrication and packing of the sensing element were introduced in the paper.The imitation experimentation and performance test have certificated that the principle of the gyroscope is correct and the gyroscope can be used to sense yawing or pitching angular velocity of the rotating carrier,and the angular velocity of the rotating carrier itself.

Improved Design and Modeling of Micromachined Tuning Fork Gyroscope Characterized by High Quality Factor

This paper proposes an improved design of micromachined tuning fork gyroscope （M-TFG） to decouple the cross talk between driving and sensing directions better and to increase resolution. By employing dual-folds spring suspension, the drive mode and the sense mode are mechanically decoupled. Through careful layout design of the location of the dual-folds spring suspension and the drive combs, the mechanical coupling effect is further decreased by isolating the unwanted excitation from detection. The quality factor investigation demonstrates that high quality factor can be attained by using this structure, which can bring in accurate resolution. As a result, this design has the potential to accomplish low bias drift and accurate resolution for initial level applications.

Influence of the instability of angular velocity of the rotating carrier itself on the stability of silicon micromachined gyroscope

In order to find out the influence of the instability of angular velocity of the rotating carrier itself on the stability of silicon micromachined gyroscope, the digital models for relative error of the high and low damping gyroscope's output signal are given respectively, based on the motion equations of the silicon micromachined gyroscope. Theory proves that the output signal error of the silicon micromachined sensor is mainly caused by the instability of damping factor and the angular velocity of the rotating carrier itself. The experiment result indicates that the error of proportionality coefficient of output voltage which is caused by the instability of the angular velocity of the rotating carrier itself reaches to 4.1 %. Theoretical demonstration and experimental verification show that the instability of angular velocity of the rotating carrier itself has an important effect on the stability of low damping silicon micromachined gyroscope.

Design and simulation of a tuning fork micromachined gyroscope with slide film damping

A novel tuning fork micromachined gyroscope, based on slide-film damping, is presented. The electrostatic driving gyroscope consists of two driving masses each of which supports one sensitive mass. The angular rate is sensed by the differential capacitances consisted of movable bar electrodes and fixed bar electrodes located on the glass wafer. The gyroscope can operate at atmospheric pressure with slide film damping in the driving and sensing directions, eliminate vacuum packaging and restrain cross-axis acceleration signal. The results of design and simulation show that the driving and sensing mode frequencies are 3 106 Hz and 3 175 Hz,respectively, and the Q-values in driving and sensitive modes are 1 721 and 1 450 respectively. The design resolution is 0.025°/s.

Complete decoupling rebalance loop design of a micromachined electrostatically suspended gyroscope

A micromachined electrostatically suspended gyroscope(MESG)based on UV-LIGA microfabrication process was introduced.By close-loop control,the suspended rotor is kept in null position and through the torque rebalance loop,in which the output control voltages reflects the input angular velocity,a dual-axis input angular velocity can be measured simultaneously.First,the system model of MESG was established by dynamic analysis based on the torque analysis.Then,the rebalance loop under ideal condition is designed using modern control technique.The performance of the designed decoupling rebalance loop was compared with that of conventional proportional integral differential(PID)rebalance loop combined with the compensation loop.In order to realize the decoupling of the output voltages,a compensated decoupling matrix and its difference equation were presented and realized by a digital decoupling method employing digital signal processor(DSP).It was confirmed that the controller could realize the complete decoupling and improve the performance of the gyroscope,which includes merits of fast response speed,low overshoot and good dynamic performance,as the simulation results shown.At last,the circuit and digital realization scheme were given.

Online asymmetry estimation for whole angle mode coriolis vibratory gyroscopes by high frequency injection

The whole angle mode gyroscope(WAMG)is considered to be the next generation architecture,but it is suffered from the asymmetry errors to conduct real products.This paper proposes a novel high frequency injection based approach for the error parameters online identification for the WAMG.The significance is that it can separate physical and error fingerprints to enable online calibration.The nonlinear WAMG dynamics are discretized to meet the requirement of numerical precision and computation efficiency.The optimized estimation methods are then constructed and compared to track asymmetry error parameters continuously.In the validation part,its results firstly prove that the proposed scheme can accurately identify constant asymmetry parameters with an overall tracking error of less than 1 ppm and the extreme numerical convergence can reach 10^(-12)ppm.Under the dynamic asymmetry variation condition,the root mean square errors(RMSE)indicate that the tracking accuracy can reach the level of10^(-3),which shows the robustness of the proposed scheme.In summary,the proposed method can effectively estimate the WAMG asymmetry errors online with satisfied performance and practical values.

Design and simulation of a silicon-based hybrid integrated optical gyroscope system

By combining a silicon-based lithium niobate modulator and a silicon-based Si3N4resonator with silicon-based photonics technology,a highly systematic design of a hybrid integrated optical gyroscope with enhanced reciprocity sensitivity and a dual micro-ring structure is proposed for the first time in this paper.The relationship between the device's structural parameters and optical performance is also analyzed by constructing a complete simulation link,which provides a theoretical design reference to improve the system's sensitivity.When the wavelength is 1550 nm,the conversion frequency of the dual-ring optical path is 50 MHz,the coupling coefficient is 0.2,and the radius R is 1000μm,the quality factor of the silicon-based Si_(3)N_(4)resonator is 2.58×10^(5),which is 1.58 times that of the silicon-on-insulator resonator.Moreover,the effective number of times the light travels around the ring before leaving the micro-ring is 5.93,which is 1.62 times that of the silicon-on-insulator resonator.The work fits the gyro dynamic output diagram,and solves the problem of low sensitivity at low speed by setting the phase offset.This results provide a basis for the further optimization of design and chip processing of the integrated optical gyroscope.

The Correlation of Gyroscope Axial Velocities

In engineering,all movable expanse revolving objects manifest gyroscopic effects.These effects are created by the action of the outer load on the revolving items whose rotating mass originates eight inertial torques about two axes.Two torques of centrifugal forces,one torque of the Coriolis force originated by the rotating distributed mass,and the torque of the change in the angular momentum of the center mass act about each axis.The inertial torques activate rotations of the gyroscope by the determined correlation.Inertial torques depend on their geometry and orientation at the spatial coordinate system.The known analytical model for the rotation of the revolving disc about axes contains a mechanical error.This error was obtained by the incorrect integration of the centrifugal inertial torque.The corrected inertial torque yields the accurate expression for the interacted rotations of the revolving disc about axes.

Data Analysis and Modeling of Fiber Optic Gyroscope Drift

A data gathering system is designed for the interferometric fiber optic gyroscope (IFOG) of land strapdown inertial system. IFOG is tested and the testing curve is given. The test data of IFOG are analyzed with Allan variance method and each error coefficient is identified. Furthermore, a random drift error model for IFOG is built by the method of time series analysis. The conclusion provides supports for improving IFOG design and compensating for errors of IFOG in practice.

Application of fast wavelet transformation in signal processing of MEMS gyroscope

Decomposition and reconstruction of Mallat fast wavelet transformation （WT） is described. A fast algorithm, which can greatly decrease the processing burden and can be very easy for hardware implementation in real-time, is analyzed. The algorithm will no longer have the processing of decimation and interpolation of usual WT. The formulae of the decomposition and the reconstruction are given. Simulation results of the MEMS （micro-electro mechanical systems） gyroscope drift signal show that the algorithm spends much less processing time to finish the de-noising process than the usual WT. And the de-noising effect is the same. The fast algorithm has been implemented in a TMS320C6713 digital signal processor. The standard variance of the gyroscope static drift signal decreases from 78. 435 5 （°）/h to 36. 763 5 （°）/h. It takes 0. 014 ms to process all input data and can meet the real-time analysis of signal.

Structure design and simulation of MEMS vibrating ring gyroscope

MEMS gyroscope is a new inertial navigation sensor,which can measure the input angular rate of sensitive axis using Coriolis effect.Compared to the conventional gyroscope,it owns many unique advantages.A novel structure of vibrating ring gyroscope is proposed and the finite element model of the oscillator is established based on MEMS technology.Through the modal analysis,the natural frequency and mode shapes of the oscillator are obtained.By analyzing the effects of the structural parameters on the mode shapes and frequency of the harmonic oscillator,the optimal design parameters are got.The frequency difference between the operating mode and the other modes is greater than 1kHz after optimization,which can avoid the frequency coupling of the operating mode and other vibrating modes of the oscillator.The simulation results show that the performance parameters of the ring structure meet the design requirements and have obvious advantages.

MATHEMATICAL MODEL OF ~4He QUANTUM INTERFEROMETER GYROSCOPE

The mathematical model of 4He quantum interferometer gyroscope is presented. The model includes the driven equation, the current equation and the position equation. Therefore, it can sufficiently describe the gyro- scope system. The driven equation shows the thermally driven gyroscope can work for a long time but the pres- sure driven one cannot. From the current equation, the superfluid currents passing through the weak link contain the AC currents which show the rotation flux, and other currents caused by drive. As shown in the position equa- tion, the displacement of diaphragm is the only detectable parameter in the gyroscope system. The model is tested by the simulations based on experimental parameters, and can be used to research performance of the gyroscope and analyse the gyroscope error.

Poly-Silicon Micromachined Switch

By using LPCVD SiO 2 and poly silicon as sacrificial layer and cantilever respectively,a poly silicon micromachined RF MEMS(radio frequency microelectronic mechanical system) switch is fabricated.During the fabrication process,the stress of poly silicon is released to prevent poly silicon membrane from bending,and the issue of compatibility between RF switch and IC process technology is also resolved.The low residual tensile stress poly silicon cantilever is obtained by the optimization.The switch is tested,and the preliminary test results show:the pull down voltage is 89V,and the switch speed is about 5μs.The switch provides the potential to build a new fully monolithic integrated RF MEMS for radar and communications applications.

Finite Element Simulation of the Vibratory Characteristics for Quartz Tuning Fork Gyroscope

The micro quartz crystal tuning fork gyroscope is a new type of vibratory gyroscope. The gyroscope should be analyzed and simulated early in the design stage in order to offer reliable basis for design and to shorten the period of development. Thus the vibratory characteristics of the gyroscope is simulated with the finite element method of coupled field. The optimum exciting frequency and the factors which influence the gyroscope sensitivity are determined. The method for adjusting the frequency deviation between driving and detecting modes is also proposed.

New digital drive phase control for improving bias stability of silicon MEMS gyroscope

In order to improve the bias stability of the micro-electro mechanical system（MEMS） gyroscope and reduce the impact on the bias from environmental temperature,a digital signal processing method is described for improving the accuracy of the drive phase in the gyroscope drive mode.Through the principle of bias signal generation,it can be concluded that the deviation of the drive phase is the main factor affecting the bias stability.To fulfill the purpose of precise drive phase control,a digital signal processing circuit based on the field-programmable gate array（FPGA） with the phase-lock closed-loop control method is described and a demodulation method for phase error suppression is given.Compared with the analog circuit,the bias drift is largely reduced in the new digital circuit and the bias stability is improved from 60 to 19 °/h.The new digital control method can greatly increase the drive phase accuracy,and thus improve the bias stability.

Gross errors identification and correction of in-vehicle MEMS gyroscope based on time series analysis

This paper presents a novel approach to identify and correct the gross errors in the microelectromechanical system （MEMS） gyroscope used in ground vehicles by means of time series analysis. According to the characteristics of autocorrelation function （ACF） and partial autocorrelation function （PACF）, an autoregressive integrated moving average （ARIMA） model is roughly constructed. The rough model is optimized by combining with Akaike＇s information criterion （A/C）, and the parameters are estimated based on the least squares algorithm. After validation testing, the model is utilized to forecast the next output on the basis of the previous measurement. When the difference between the measurement and its prediction exceeds the defined threshold, the measurement is identified as a gross error and remedied by its prediction. A case study on the yaw rate is performed to illustrate the developed algorithm. Experimental results demonstrate that the proposed approach can effectively distinguish gross errors and make some reasonable remedies.

Periodic Error Compensation for Quartz MEMS Gyroscope Drift of INS

In order to improve the navigation accuracy of an inertial navigation system （INS）, composed of quartz gyroscopes, the existing real-time compensation methods for periodic errors in quartz gyroscope drift and the periodic error term relationship between sampled original data and smoothed data are reviewed. On the base of the results, a new compensation method called using former period characteristics to compensate latter smoothness data （UFCL for short） method is proposed considering the INS working characteristics. This new method uses the original data without smoothing to work out an error conversion formula at the INS initial alignment time and then compensate the smoothed data errors by way of the formula at the navigation time. Both theoretical analysis and experimental results demonstrate that this method is able to cut down on computational time and raise the accuracy which makes it a better real-time compensation approach for periodic error terms of quartz micro electronic mechanical system （MEMS） gyroscope＇s zero drift.