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Optimal parameter space for stabilizing the ferroelectric phase of Hf_(0.5)Zr_(0.5)O_(2) thin films under strain and electric fields
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作者 王侣锦 王聪 +4 位作者 周霖蔚 周谐宇 潘宇浩 吴幸 季威 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第7期509-517,共9页
Hafnia-based ferroelectric materials, like Hf_(0.5)Zr_(0.5)O_(2)(HZO), have received tremendous attention owing to their potentials for building ultra-thin ferroelectric devices. The orthorhombic(O)-phase of HZO is fe... Hafnia-based ferroelectric materials, like Hf_(0.5)Zr_(0.5)O_(2)(HZO), have received tremendous attention owing to their potentials for building ultra-thin ferroelectric devices. The orthorhombic(O)-phase of HZO is ferroelectric but metastable in its bulk form under ambient conditions, which poses a considerable challenge to maintaining the operation performance of HZO-based ferroelectric devices. Here, we theoretically addressed this issue that provides parameter spaces for stabilizing the O-phase of HZO thin-films under various conditions. Three mechanisms were found to be capable of lowering the relative energy of the O-phase, namely, more significant surface-bulk portion of(111) surfaces, compressive c-axis strain,and positive electric fields. Considering these mechanisms, we plotted two ternary phase diagrams for HZO thin-films where the strain was applied along the in-plane uniaxial and biaxial, respectively. These diagrams indicate the O-phase could be stabilized by solely shrinking the film-thickness below 12.26 nm, ascribed to its lower surface energies. All these results shed considerable light on designing more robust and higher-performance ferroelectric devices. 展开更多
关键词 Hf_(0.5)Zr_(0.5)O_(2) orthorhombic phase ferroelectric films phase stability thickness-dependent ternary phase diagrams
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Effect of Ba_(0.5)Bi_(0.5)Fe_(0.9)Sn_(0.1)O_3 addition on electrical properties of BaCo_(0.02)~ⅡCo_(0.04)~ⅢBi_(0.94)O_3 thick-film thermistors
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作者 杨云 袁昌来 +3 位作者 陈国华 杨涛 骆颖 周昌荣 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2015年第12期4008-4017,共10页
Thick-film thermistor with negative temperature coefficient(NTC), low room-temperature resistivity and modest thermistor constant was screen-printed on the alumina substrate by the combination of 30.94III0.04II0.02 ... Thick-film thermistor with negative temperature coefficient(NTC), low room-temperature resistivity and modest thermistor constant was screen-printed on the alumina substrate by the combination of 30.94III0.04II0.02 B OBi Coa Co with Ba0.5Bi0.5Fe0.9Sn0.1O3. The electrical properties of the thick films were characterized by a digital multimeter, a Keithley 2400 and an impedance analyzer. The results show that with the Ba0.5Bi0.5Fe0.9Sn0.1O3 content increasing from 0.05 to 0.25, the values of room-temperature resistivity, thermistor constant and peak voltage of the thick films increases and are in the ranges of 1.47-26.5 ?·cm, 678-1345 K and 18.9-47.0 V, respectively. The corresponding current at the peak voltage of the thick films decreases and is in the range of 40-240 m A. The impedance spectroscopy measurement demonstrates that the as-prepared thick films show the abnormal electrical heterogeneous microstructure, consisting of high-resistive grains and less resistive grain boundary regions. It can be concluded that the addition of Ba0.5Bi0.5Fe0.9Sn0.1O3 into 30.94III0.04II0.02 Ba Co OBi Co improves the thermistor behavior and but also deteriorates the current characteristics. 展开更多
关键词 NTC thick films BaCo0.02ⅡCo0.04ⅢBi0.94O3 Ba0.5Bi0.5Fe0.9Sn0.1O3 electrical property
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Electronic Modeling and Optical Properties of CuIn<sub>0.5</sub>Ga<sub>0.5</sub>Se<sub>2</sub>Thin Film Solar Cell
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作者 Rongzhen Chen Clas Persson 《Journal of Applied Mathematics and Physics》 2014年第1期41-46,共6页
In this work, the band structure and optical-related properties of CuIn0.5Ga0.5Se2 thin film are presented. The calculation is performed by the full-potential linearized augmented plane wave (FPLAPW) method. The spin-... In this work, the band structure and optical-related properties of CuIn0.5Ga0.5Se2 thin film are presented. The calculation is performed by the full-potential linearized augmented plane wave (FPLAPW) method. The spin-orbit coupling is considered. The result for the dielectric function is in good agreement with earlier experimental measurements and simulations. Based on the complex dielectric function, the dielectric constant, the absorption coefficient, the complex refractive index and the reflectivity at normal incidence are explored. We found that they are comparable with the earlier results. 展开更多
关键词 Thin film CuIn0.5Ga0.5Se2 Band Structure DIELECTRIC Function DIELECTRIC CONSTANT Absorption Coefficient Complex Refractive Index REFLECTIVITY SPIN-ORBIT Coupling
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金属有机分解法制备无铅K_(0.5)Bi_(0.5)TiO_3铁电薄膜 被引量:3
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作者 杨长红 王卓 韩建儒 《人工晶体学报》 EI CAS CSCD 北大核心 2004年第5期762-764,共3页
采用金属有机分解法(MOD)在p型Si(111)衬底上制备了K0.5Bi0.5TiO3(KBT)薄膜。用X射线衍射技术研究了薄膜的结构和结晶性。同时还研究了薄膜的绝缘性和存储性能。结果发现在740℃下退火4min的KBT薄膜呈钙钛矿结构;在0~8V范围内,薄膜的漏... 采用金属有机分解法(MOD)在p型Si(111)衬底上制备了K0.5Bi0.5TiO3(KBT)薄膜。用X射线衍射技术研究了薄膜的结构和结晶性。同时还研究了薄膜的绝缘性和存储性能。结果发现在740℃下退火4min的KBT薄膜呈钙钛矿结构;在0~8V范围内,薄膜的漏电流小于1.5×10-9A;在-12^+8V的偏压范围内,C-V记忆窗口宽度为10V。 展开更多
关键词 金属有机分解法 制备 无铅铁电薄膜 结构 结晶性 绝缘性能 存储性能 KBT
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PbSc_(0.5)Ta_(0.5)O_3热释电材料及其红外探测器列阵 被引量:1
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作者 于光龙 肖定全 +2 位作者 朱建国 余萍 袁小武 《功能材料》 EI CAS CSCD 北大核心 2003年第5期505-508,共4页
 热释电红外探测器具有探测波长范围广、室温工作、无需致冷等优点。近年来,工作于介电方式下的PbSc0.5Ta0.5O3(PST)热释电材料由于具有热释电系数大,热释电探测优值高等特点,成为热释电应用研究的热点之一。本文综述了目前PST热释电...  热释电红外探测器具有探测波长范围广、室温工作、无需致冷等优点。近年来,工作于介电方式下的PbSc0.5Ta0.5O3(PST)热释电材料由于具有热释电系数大,热释电探测优值高等特点,成为热释电应用研究的热点之一。本文综述了目前PST热释电陶瓷材料的介电,热释电性能及其探测器列阵的发展。由于小型化的要求,PST薄膜亦倍受关注,因此本文还对目前PST热释电薄膜的制备方法,薄膜的热释电、介电性能及薄膜型探测器结构和发展进行了概述。 展开更多
关键词 热释电材料 红外探测器列阵 PbSc0.5Ta0.5O3 铁电薄膜 PST
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退火处理对室温制备Bi_(0.5)Sb_(1.5)Te_3薄膜热电性质的影响 被引量:1
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作者 娄本浊 《热加工工艺》 CSCD 北大核心 2012年第14期180-182,共3页
利用射频磁控溅镀法在SiO2/Si基板上制备了Bi0.5Sb1.5Te3薄膜样品,并且测量了薄膜样品在不同退火时间与退火温度下的热电性质。结果表明,薄膜样品经30 h退火后的热电性质与1 h退火后的热电性质相差不大,这说明长时间退火并不是Bi0.5Sb1.... 利用射频磁控溅镀法在SiO2/Si基板上制备了Bi0.5Sb1.5Te3薄膜样品,并且测量了薄膜样品在不同退火时间与退火温度下的热电性质。结果表明,薄膜样品经30 h退火后的热电性质与1 h退火后的热电性质相差不大,这说明长时间退火并不是Bi0.5Sb1.5Te3薄膜的最佳退火时间。而在不同退火温度下,样品的塞贝克系数在275~300℃退火下降比较快,当退火温度为300℃时降至最小,约为181μV/K;而其电阻率则随退火温度的升高呈现出先减小后增大的趋势,退火温度为225℃时具有最小的电阻率,约为6.1 mΩ.cm。最后本文得出经225℃退火10 min后可得到最佳的热电性质,即薄膜样品的塞贝克系数为208μV/K,电阻率为6.1mΩ.cm,功率因子则为6.9×10-4W/(m.K2)。 展开更多
关键词 Bi0.5Sb1.5Te3薄膜 退火处理 热电性质
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La_2Co_xCu_(1-x)O_4(x=0~0.5)氧敏性能研究
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作者 赵伟杰 薛丽梅 李成林 《仪表技术与传感器》 CSCD 北大核心 2010年第8期7-8,11,共3页
将La2CoxCu1-xO4(x=0-0.5)复合氧化物做成了厚膜型气敏器件,研究了烧结温度、膜厚对材料氧敏性能的影响,结果表明:800℃烧结、膜厚为80μm时所制得的厚膜型La2Co0.1Cu0.9O4在400~700℃测试区间内的氧敏性能最优,在400℃时的灵敏度最... 将La2CoxCu1-xO4(x=0-0.5)复合氧化物做成了厚膜型气敏器件,研究了烧结温度、膜厚对材料氧敏性能的影响,结果表明:800℃烧结、膜厚为80μm时所制得的厚膜型La2Co0.1Cu0.9O4在400~700℃测试区间内的氧敏性能最优,在400℃时的灵敏度最大,可以达到6。 展开更多
关键词 La2CoxCu1-xO4 厚膜 氧敏性
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0.5LaFe_(0.5)Co_(0.5)O_3-Bi_4Ti_3O_(12)薄膜的制备及电学性能的研究 被引量:1
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作者 张灿 宿杰 +2 位作者 冯林燕 李进 罗莉 《青岛大学学报(自然科学版)》 CAS 2017年第2期36-38,44,共4页
采用溶胶-凝胶法在(111)Pt/Ti/SiO_2/Si衬底上制备了0.5LaFe_(0.5)Co_(0.5)O_3-Bi_4Ti_3O_(12)(0.5LFCO-BTO)薄膜。X射线衍射分析表明薄膜为纯相层状钙钛矿结构,扫描电子显微镜显示薄膜结晶度良好且无裂缝,粒径为100~400nm。0.5LFCO-BT... 采用溶胶-凝胶法在(111)Pt/Ti/SiO_2/Si衬底上制备了0.5LaFe_(0.5)Co_(0.5)O_3-Bi_4Ti_3O_(12)(0.5LFCO-BTO)薄膜。X射线衍射分析表明薄膜为纯相层状钙钛矿结构,扫描电子显微镜显示薄膜结晶度良好且无裂缝,粒径为100~400nm。0.5LFCO-BTO薄膜在室温条件下呈现出良好的铁电性能,其剩余极化值2Pr和矫顽场2Ec分别为48μC/cm2和290kV/cm。在频率为10kHz下,其相对介电常数εr和介电损耗tanδ分别为218.7和0.015。 展开更多
关键词 0.5lfco-bto薄膜 溶胶-凝胶法 铁电 介电
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脉冲激光沉积法制备La_(0.5)Sr_(0.5)CoO_3薄膜及其结构和表面特性 被引量:2
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作者 刘建 李美亚 +2 位作者 官文杰 国世上 赵兴中 《武汉大学学报(理学版)》 CAS CSCD 北大核心 2004年第3期320-324,共5页
利用脉冲激光沉积法在(001)取向的LaAlO_3(LAO)衬底上实现了La_(0.5)Sr_(0.5)CoO_3(LSCO)薄膜的外延)对薄膜结构和表面形貌的影响.X射线衍射结果生长.主要研究了衬底温度(Ts),激光能量(El)和氧气压强(pO2显示在Ts=700~850℃的范围内沉... 利用脉冲激光沉积法在(001)取向的LaAlO_3(LAO)衬底上实现了La_(0.5)Sr_(0.5)CoO_3(LSCO)薄膜的外延)对薄膜结构和表面形貌的影响.X射线衍射结果生长.主要研究了衬底温度(Ts),激光能量(El)和氧气压强(pO2显示在Ts=700~850℃的范围内沉积的LSCO薄膜都具有c轴取向.从扫描电子显微镜和原子力显微镜照片可以看出上述3个沉积参数中,氧压对LSCO薄膜表面形貌的影响最为显著,较低氧压下沉积的薄膜具有较光滑的表面.通过实验,确立了能够制备同时具有c轴取向和光滑表面的薄膜的最佳沉积参数范围. 展开更多
关键词 La0.5Sr0.5CoO3 外延生长 脉冲激光沉积 薄膜
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La_(0.5)Sr_(0.5)CoO_3的化学溶液淀积法制备与表征及其应用 被引量:1
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作者 钟宇 王晓光 +2 位作者 林殷茵 黄维宁 汤庭鳌 《固体电子学研究与进展》 CAS CSCD 北大核心 2005年第2期280-284,共5页
采用化学溶液淀积法制备了具有纯钙钛矿结构和良好导电性能的La_(0.5)Sr_(0.5)CoO_3(LSCO)薄膜。LSCO的电阻率随着退火温度的升高、退火时间的增长和厚度增加而减小。650°C退火可以得到7mΩ·cm的电阻率。分别在LSCO和Pt衬底... 采用化学溶液淀积法制备了具有纯钙钛矿结构和良好导电性能的La_(0.5)Sr_(0.5)CoO_3(LSCO)薄膜。LSCO的电阻率随着退火温度的升高、退火时间的增长和厚度增加而减小。650°C退火可以得到7mΩ·cm的电阻率。分别在LSCO和Pt衬底上制备了Bi_4Ti_3O_(12)(BTO)薄膜,分析结果表明,使用LSCO衬底对BTO的析晶有影响,击穿电压、铁电特性均有较大改善。 展开更多
关键词 镧锶钴氧 钛酸铋 化学溶液淀积 铁电薄膜
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石墨烯/Bi_(0.5)Sb_(1.5)Te_(3)柔性热电薄膜及其面内散热器件的设计制备与性能评价 被引量:1
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作者 聂晓蕾 余灏成 +3 位作者 朱婉婷 桑夏晗 魏平 赵文俞 《物理学报》 SCIE EI CAS CSCD 北大核心 2022年第15期229-238,共10页
基于柔性热电薄膜制冷的面内散热技术有望为电子器件高效面内散热提供解决方案,但柔性热电薄膜电输运性能太低和面内散热器件结构设计困难严重制约了该技术在电子元器件散热中的应用.本文通过在环氧树脂/Bi_(0.5)Sb_(1.5)Te_(3)柔性热... 基于柔性热电薄膜制冷的面内散热技术有望为电子器件高效面内散热提供解决方案,但柔性热电薄膜电输运性能太低和面内散热器件结构设计困难严重制约了该技术在电子元器件散热中的应用.本文通过在环氧树脂/Bi_(0.5)Sb_(1.5)Te_(3)柔性热电薄膜中掺入具有同时调控电热输运行为功能的石墨烯,发现不仅有助于Bi_(0.5)Sb_(1.5)Te_(3)晶粒沿(000l)择优取向,而且还提供了载流子快速传输通道,石墨烯/Bi_(0.5)Sb_(1.5)Te_(3)柔性热电薄膜的载流子浓度和迁移率同时显著增大;石墨烯掺入量为1.0%的柔性热电薄膜室温最高功率因子达到1.56 mW/(K^(2)·m),与环氧树脂/Bi_(0.5)Sb_(1.5)Te_(3)柔性热电薄膜相比提高了71%,其最大制冷温差提高了1倍.利用这种高性能石墨烯/Bi_(0.5)Sb_(1.5)Te_(3)柔性热电薄膜制冷,设计并制备出了级联结构高效面内散热器件,发现该器件可以将热量从热源区逐级传输至散热区,实现热源区温度下降1.4—1.9℃,展现出了高效稳定的面内散热能力. 展开更多
关键词 石墨烯/Bi_(0.5)Sb_(1.5)Te_(3)柔性热电薄膜 电输运性能 载流子快速传输通道 面内散热器件
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Exploring high-voltage fluorinated carbonate electrolytes for LiNi0.5Mn1.5O4 cathode in Li-ion batteries 被引量:10
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作者 Xi Zheng Ying Liao +6 位作者 Zhongru Zhang Jianping Zhu Fucheng Ren Huajin He Yuxuan Xiang Yezhen Zheng Y.Yang 《Journal of Energy Chemistry》 SCIE EI CAS CSCD 2020年第3期62-70,共9页
Ethyl-(2,2,2-trifluoroethyl)carbonate(ETFEC)is investigated as a solvent component in high-voltage electrolytes for LiNi0.5Mn1.5O4(LNMO).Our results show that the self-discharge behavior and the high temperature cycle... Ethyl-(2,2,2-trifluoroethyl)carbonate(ETFEC)is investigated as a solvent component in high-voltage electrolytes for LiNi0.5Mn1.5O4(LNMO).Our results show that the self-discharge behavior and the high temperature cycle performance can be significantly improved by the addition of 10%ETFEC into the normal carbonate electrolytes,e.g.,the capacity retention improved from 65.3%to 77.1%after 200 cycles at 60℃.The main reason can be ascribed to the high stability of ETFEC which prevents large oxidation of the electrolyte on the cathode surface.In addition,we also explore the feasibility of electrolytes using single fluoriated-solvents with and without additives.Our results show that the cycle performance of LNMO material can be greatly improved in 1 MLiPF6+pure ETFEC-solvent system with 2 wt%ethylene carbonate(EC)or ethylene sulfate(DTD).The capacity retention of the LNMO materials is 93%after 300 cycles,even better than that of carbonate-based electrolytes.It is shown that the additives are oxidized on the surface of LNMO particles and contribute to the formation of cathode/electrolyte interphase(CEI)films.This composite CEI film plays a crucial role in suppressing the serious decomposition of the electrolyte at high voltage. 展开更多
关键词 FLUORINATED solvent High voltage electrolyte LINI0.5MN1.5O4 INTERPHASE film Additive LITHIUM-ION batteries
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Microstructure and corrosion behavior of as-homogenized and as-extruded Mg-xLi-3Al-2Zn-0.5Y alloys(x=4,8,12) 被引量:6
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作者 Xiang PENG Jia-wei SUN +2 位作者 Hong-jie LIU Guo-hua WU Wen-cai LIU 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2022年第1期134-146,共13页
The microstructure and corrosion behavior of the as-homogenized and as-extruded Mg-xLi-3Al-2Zn-0.5Y alloys(x=4,8,12,wt.%)were studied.The results show that as the Li content increases from 4%to 12%,the matrix transfer... The microstructure and corrosion behavior of the as-homogenized and as-extruded Mg-xLi-3Al-2Zn-0.5Y alloys(x=4,8,12,wt.%)were studied.The results show that as the Li content increases from 4%to 12%,the matrix transfers from singleα-Mg phase,(α-Mg+β-Li)dual phase to singleβ-Li phase.A mixed corrosion feature of intergranular corrosion and pitting corrosion occurs in the Mg-4Li-3Al-2Zn-0.5Y and Mg-12Li-3Al-2Zn-0.5Y alloys.The former is related to the precipitated AlLi phase along the grain boundaries,and the latter is related to the high potential difference between the second phase and the matrix.The corrosion resistance of the as-extruded alloys is better than that of the as-homogenized alloys.The superior corrosion resistance of the as-extruded Mg-8Li-3Al-2Zn-0.5Y alloy with the lowest corrosion rate(P_(W)=(0.63±0.26)mm/a)is attributed to the more uniform distribution of second phases,the protectiveα-Mg phase via sacrificing theβ-Li phase and the relatively integrated oxide film. 展开更多
关键词 Mg-xLi-3Al-2Zn-0.5Y alloys MICROSTRUCTURE corrosion behavior HOMOGENIZATION extrusion second phase oxide film
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Hf_(0.5)Zr_(0.5)O_(2)超薄薄膜铁电性及其晶相演变
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作者 何业法 徐华义 +2 位作者 邬海龙 周海芳 赖云锋 《福州大学学报(自然科学版)》 CAS 北大核心 2022年第5期616-620,共5页
制备不同厚度的Hf_(0.5)Zr_(0.5)O_(2)(HZO)薄膜,并使用不同退火温度对其进行热处理.在最优热处理条件下,所制备薄膜的两倍剩余极化强度可达约40μC·cm^(-2),矫顽场强低至约±1.15 MV·cm^(-1),其响应速度明显优于传统铁... 制备不同厚度的Hf_(0.5)Zr_(0.5)O_(2)(HZO)薄膜,并使用不同退火温度对其进行热处理.在最优热处理条件下,所制备薄膜的两倍剩余极化强度可达约40μC·cm^(-2),矫顽场强低至约±1.15 MV·cm^(-1),其响应速度明显优于传统铁电材料.结果表明,HZO薄膜正交相与其铁电性有较大关系,过高的退火温度会导致四方相向单斜相转变,从而降低其铁电性.实验所得结果可为高性能HZO铁电器件的研究与制备提供一定参考. 展开更多
关键词 铪锆氧 铁电薄膜 剩余极化强度 退火温度 正交相
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强磁场退火处理对La_(0.5)Ca_(0.5)MnO_(3)薄膜晶粒尺寸演化和磁性能的影响
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作者 张科军 戴建明 +2 位作者 朱雪斌 罗静 孙玉平 《真空科学与技术学报》 CAS CSCD 北大核心 2021年第11期1053-1058,共6页
采用脉冲激光沉积法制备了La_(0.5)Ca_(0.5)MnO_(3)(LCMO)薄膜,然后在不同强磁场作用下进行原位后退火处理。利用XRD、FESEM和SQUID对薄膜进行微结构表征和磁特性测量。结果显示,强磁场退火使得薄膜的面外晶格参数拉长,晶粒尺寸明显增大... 采用脉冲激光沉积法制备了La_(0.5)Ca_(0.5)MnO_(3)(LCMO)薄膜,然后在不同强磁场作用下进行原位后退火处理。利用XRD、FESEM和SQUID对薄膜进行微结构表征和磁特性测量。结果显示,强磁场退火使得薄膜的面外晶格参数拉长,晶粒尺寸明显增大,同时使低温磁化强度降低。通过建立强磁场下的晶粒生长速率方程对晶粒尺寸演化机理做了分析。分析认为,强磁场引入的额外驱动力降低了LCMO薄膜的临界晶粒尺寸,有利于晶粒生长。此外,本文通过建立一个基于相分离的反铁磁-铁磁核壳模型对薄膜的磁结构演化进行了探讨。认为晶粒尺寸增大导致铁磁相体积分数下降,从而导致低温磁化强度下降。 展开更多
关键词 强磁场退火 La_(0.5)Ca_(0.5)MnO_(3)薄膜 脉冲激光沉积 微结构 磁性能
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Impact of annealing temperature on the ferroelectric properties of W/Hf_(0.5)Zr_(0.5)O_(2)/W capacitor
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作者 王岛 张岩 +3 位作者 郭永斌 尚真真 符方健 陆旭兵 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第9期492-497,共6页
Crystallization annealing is a crucial process for the formation of the ferroelectric phase in HfO_(2)-based ferroelectric thin films.Here,we systematically investigate the impact of the annealing process,with tempera... Crystallization annealing is a crucial process for the formation of the ferroelectric phase in HfO_(2)-based ferroelectric thin films.Here,we systematically investigate the impact of the annealing process,with temperature varied from 350℃to 550℃,on the electricity,ferroelectricity and reliability of a Hf_(0.5)Zr_(0.5)O_(2)(HZO;7.5 nm)film capacitor.It was found that HZO film annealed at a low temperature of 400℃can effectively suppress the formation of the monoclinic phase and reduce the leakage current.HZO film annealed at 400℃also exhibits better ferroelectric properties than those annealed at 350℃and 550℃.Specifically,the 400℃-annealed HZO film shows an outstanding 2Pr value of 54.6μC·cm^(-2)at±3.0 MV·cm^(-1),which is relatively high compared with previously reported values for HZO film under the same electric field and annealing temperature.When the applied electric field increases to±5.0 MV·cm^(-1),the 2Pr value can reach a maximum of 69.6μC·cm^(-2).In addition,the HZO films annealed at 400℃and 550℃can endure up to bout 2.3×10^(8)cycles under a cycling field of 2.0 MV·cm^(-1)before the occurrence of breakdown.In the 400℃-annealed HZO film,72.1%of the initial polarization is maintained while only 44.9%is maintained in the 550℃-annealed HZO film.Our work demonstrates that HZO film with a low crystallization temperature(400℃)has quite a high ferroelectric polarization,which is of significant importance in applications in ferroelectric memory and negative capacitance transistors. 展开更多
关键词 Hf_(0.5)Zr_(0.5)O_(2)thin film annealing temperature ferroelectric polarization ENDURANCE
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非醇盐法制备铌酸钾钠薄膜的工艺及性能研究
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作者 朱海勇 张伟 《中国陶瓷》 CAS CSCD 北大核心 2024年第8期39-46,共8页
为了利用低成本的Nb_(2)O_(5)为原料在传统硅衬底上制备高质量的K_(0.5)Na_(0.5)NbO_(3)(KNN)薄膜,利用溶胶-凝胶法非醇盐法制备KNN薄膜,对比了典型和改良的两种工艺流程,并利用表征工具分析两种工艺制备薄膜结构和性能。同时,通过改良... 为了利用低成本的Nb_(2)O_(5)为原料在传统硅衬底上制备高质量的K_(0.5)Na_(0.5)NbO_(3)(KNN)薄膜,利用溶胶-凝胶法非醇盐法制备KNN薄膜,对比了典型和改良的两种工艺流程,并利用表征工具分析两种工艺制备薄膜结构和性能。同时,通过改良的工艺制备不同层数的薄膜,利用表征工具和理论计算分析层数对KNN薄膜的晶体结构、应变、表面形貌和电性能的影响。XRD结果表明利用改进的工艺可以在硅衬底上制备出(100)高度择优取向的KNN薄膜,薄膜的最佳热解温度从500℃降低为150℃,并且薄膜的介电性能和铁电性能都得到改善。利用Scherrer和SSP公式计算表明随着薄膜层数的增加,薄膜的晶粒尺寸随之增加,晶相由四方相向立方相转变。当层数为14层时,观察到这种转变,此时薄膜应变达到最低值。SEM再次表明随着层数的增加,薄膜的晶粒尺寸随之增加,薄膜表面缺陷也得到改善。在层数为18时,1 kHz下薄膜的介电常数值达到最大值622.9。 展开更多
关键词 Nb_(2)O_(5) K_(0.5)Na_(0.5)NbO_(3)薄膜 层数 非醇盐法
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Effect of Different Calcination Temperatures and Post Annealing on the Properties of Acetic Acid Based Sol-Gel (Na_(0.5)K_(0.5))NbO_3(NKN) Thin Films 被引量:2
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作者 Sebastian Wiegand Stefan Flege +1 位作者 Olaf Baake Wolfgang Ensinger 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2013年第2期142-148,共7页
(Na0.5K0.5)NbO3 (NKN) lead free thin films were synthesized by means of an acetic acid based sol-gel process on Pt/Ti/SiO2/Si substrates. Na-acetate, K-acetate and Nb-pentaethoxide were used as metal precursors an... (Na0.5K0.5)NbO3 (NKN) lead free thin films were synthesized by means of an acetic acid based sol-gel process on Pt/Ti/SiO2/Si substrates. Na-acetate, K-acetate and Nb-pentaethoxide were used as metal precursors and acetic acid as the solvent. The effect of different calcination temperatures on the properties of the NKN films was investigated by X-ray diffraction, scanning electron microscopy, leakage current and hysteresis measurements. Low calcination temperatures led to low currents at high electric fields whereas high calcination temperatures led to low currents at low electric fields. Based on these findings calcination at low temperature was combined with a post annealing treatment. Low leakage currents of 4×10^-4 A/cm2 at 150 kV/cm and 2Pr and 2Ec values of 28 μC/cm2 and 150 kV/cm, respectively, could be obtained. All films were single phase NKN with random crystal orientations and no crack or pore formation was visible on the surface. 展开更多
关键词 Sol-gel process (Na0.5K0.5)NbO3 Thin film PEROVSKITE LEAD-FREE Piezo material
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Enhanced ferroelectric polarization with less wake-up effect and improved endurance of Hf_(0.5)Zr_(0.5)O_(2)thin films by implementing W electrode 被引量:3
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作者 Dao Wang Yan Zhang +10 位作者 Jiali Wang Chunlai Luo Ming Li Wentao Shuai Ruiqiang Tao Zhen Fan Deyang Chen Min Zeng Jiyan Y.Dai Xubing B.Lu J-M.Liu 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2022年第9期1-7,共7页
This paper reports the improvement of electrical,ferroelectric and endurance of Hf_(0.5)Zr_(0.5)O_(2)(HZO)thinfilm capacitors by implementing W electrode.The W/HZO/W capacitor shows excellent pristine 2 P_(r)values of... This paper reports the improvement of electrical,ferroelectric and endurance of Hf_(0.5)Zr_(0.5)O_(2)(HZO)thinfilm capacitors by implementing W electrode.The W/HZO/W capacitor shows excellent pristine 2 P_(r)values of 45.1 gC/cm^(2)at±6 V,which are much higher than those of TiN/HZO/W(34.4μC/cm^(2))and W/HZO/TiN(26.9μC/cm^(2))capacitors.Notably,the maximum initial 2 P_(r)value of W/HZO/W capacitor can reach as high as 57.9μC/cm^(2)at±7.5 V.These strong ferroelectric polarization effects are ascribed to the W electrode with a fairly low thermal expansion coefficient which provides a larger in-plane tensile strain compared with TiN electrode,allowing for enhancement of o-phase formation.Moreover,the W/HZO/W capacitor also exhibits higher endurance,smaller wake-up effect(10.1%)and superior fatigue properties up to 1.5×10^(10)cycles compared to the TiN/HZO/W and W/HZO/TiN capacitors.Such improvements of W/HZO/W capacitor are mainly due to the decreased leakage current by more than an order of magnitude compared to the W/HZO/TiN capacitor.These results demonstrate that capping electrode material plays an important role in the enhancement of o-phase formation,reduces oxygen vacancies,mitigates wake-up effect and improves reliability. 展开更多
关键词 Hf_(0.5)Zr_(0.5)O_(2)films Ferroelectric polarization Endurance properties Thermal expansion coefficient W electrode
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Epitaxial growth and electrical transport properties of La_(0.5)Sr_(0.5)CoO_3 thin films prepared by pulsed laser deposition 被引量:1
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作者 李美亚 熊光成 +3 位作者 王忠烈 范守善 赵清太 林揆训 《Science China Mathematics》 SCIE 1999年第8期865-872,共8页
Epitaxial growth of the Lag0.5Sr0.5CoO3(LSCO) thin films has been realized on LaAl03, SrTiO3 and MgO substrates by pulsed laser deposition. The epitaxial growth behavior and the electrical transport properties of thes... Epitaxial growth of the Lag0.5Sr0.5CoO3(LSCO) thin films has been realized on LaAl03, SrTiO3 and MgO substrates by pulsed laser deposition. The epitaxial growth behavior and the electrical transport properties of these films were studied systematically. The temperature dependencies of the resistivity of the film have been determined. Studies indicate that close dependencies exist between the crystal structures and the electrical transport properties of the epitaxial LSCO films, and that the epitaxial thin films are of low resistivity and metallic conductive features. The epitaxial films deposited on the LaAlO3 substrates at about 700℃ possess the optimal properties compared with the others. Discussions of the dependencies and the mechanisms of the epitaxial structures on the electrical transport properties of the LSCO films have been made. 展开更多
关键词 EPITAXIAL growth PULSED laser DEPOSITION La0.5Sr0.5CoO3 THIN film electrical transport properties.
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