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A Novel Empirical Model of I-V Characteristics for LDD MOSFET Including Substrate Current
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作者 于春利 郝跃 杨林安 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2004年第7期778-783,共6页
A compact model for LDD MOSFET is proposed,which involves the hyperbolic tangent function description and the physics of device with emphasis on the substrate current modeling.The simulation results demonstrate good ... A compact model for LDD MOSFET is proposed,which involves the hyperbolic tangent function description and the physics of device with emphasis on the substrate current modeling.The simulation results demonstrate good agreement with measurement,and show that deep submicron LDD MOSFET has larger substrate current than submicron device does.The improved model costs low computation consumption,and is effective in manifestation of hot carrier effect and other effects in deep submicron devices,in turn is suitable for design and reliability analysis of scaling down devices. 展开更多
关键词 LDD MOSFET substrate current hot carrier effect deep submicron
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