In order to meet the requirements of nondestructive testing of true 3D topography of micro-nano structures,a novel three-dimensional atomic force microscope(3D-AFM)based on flared tip is developed.A high-precision sca...In order to meet the requirements of nondestructive testing of true 3D topography of micro-nano structures,a novel three-dimensional atomic force microscope(3D-AFM)based on flared tip is developed.A high-precision scanning platform is designed to achieve fast servo through moving probe and sample simultaneously,and several combined nanopositioning stages are used to guarantee linearity and orthogonality of displacement.To eliminate the signal deviation caused by AFM-head movement,a traceable optical lever system is designed for cantilever deformation detection.In addition,a method of tailoring the cantilever of commercial probe with flared tip is proposed to reduce the lateral force applied on the tip in measurement.The tailored probe is mounted on the 3D-AFM,and 3D imaging experiments are conducted on different samples by use of adaptive-angle scanning strategy.The results show the roob-mean-square value of the vertical displacement noise(RMS)of the prototype is less than 0.1 nm and the high/width measurement repeatability(peak-to-peak)is less than 2.5 nm.展开更多
The TiN, TiAlN, and TiAlSiN coatings were prepared on YT14 cutting tool surface with CAIP（cathode arc ion plating）, the surface morphologies and phases were analyzed with FESEM（field emission scanning electron micr...The TiN, TiAlN, and TiAlSiN coatings were prepared on YT14 cutting tool surface with CAIP（cathode arc ion plating）, the surface morphologies and phases were analyzed with FESEM（field emission scanning electron microscopy）, and XRD（X-ray diffraction）, respectively, and the coating parameters such as 3D surface micro-topography, grain size, surface height, hierarchy, profile height, and power spectral density, etc, were measured with AFM（atomic force microscope）. The results show that the phases of TiN, TiAlN, and TiAlSiN coatings are TiN, TiN＋TiAlN, TiN＋Si_3N_4＋TiAlN, respectively, while the surface roughness Sa of TiN, TiAlN, and TiAlSiN coatings is 75.3, 98.9, and 42.1 nm, respectively, and the roughness depth Sk is 209, 389, and 54 nm, respectively, the sequence of average grain sizes is TiAlN〉TiN〉TiAlSiN. The surface bearing index Sbi of TiN, TiAlN, and TiAlSiN coatings is 0.884, 1.01, and 0.37, respectively, and the sequence of surface bearing capability is TiAlN〉TiN〉TiAlSiN. At the lower wavelength（102-103 nm）, the power spectral densities have a certain correlation, and the sequence of TiN〉TiAlN〉TiAlSiN, while the correlation is low at the higher wavelength（〉103 nm）.展开更多
Hydration lubrication has long been invoked to account for the ultralow sliding friction between charged surfaces in aqueous environments,but still not well understood at molecular-level.Herein,we explored the lubrica...Hydration lubrication has long been invoked to account for the ultralow sliding friction between charged surfaces in aqueous environments,but still not well understood at molecular-level.Herein,we explored the lubrication effect of hydrated halogen anions on positively charged surface at the atomic scale by using three-dimensional atomic force microscopy and friction force microscopy.Atomically resolved three-dimensional imaging revealed that the anion layer was topped by a few hydration layers.The mechanical properties of the hydration layers were found mainly dependent on the concentration of electrolyte solutions and independent of the species of hydrated anions.Atomic-scale friction experiments showed that the hydration friction coefficient and friction dissipation at low concentrations were orders of magnitude lower than that at high concentrations and in pure water.Superlubricity can be achieved in low concentration electrolyte solution.These results indicated that the changes of electrolyte solution concentrations led to different adsorption state of anions on the positively charged surface which gave rise to the difference of the friction behaviors.The findings in this study reveal the role of hydrated anions in hydration lubrication and provide deep insights into the origins of hydration lubrication.展开更多
基金National Key Research and Development Pragram of China(No.2016YFF0200602)National Natural Science Foundation of China(No.61973233)。
文摘In order to meet the requirements of nondestructive testing of true 3D topography of micro-nano structures,a novel three-dimensional atomic force microscope(3D-AFM)based on flared tip is developed.A high-precision scanning platform is designed to achieve fast servo through moving probe and sample simultaneously,and several combined nanopositioning stages are used to guarantee linearity and orthogonality of displacement.To eliminate the signal deviation caused by AFM-head movement,a traceable optical lever system is designed for cantilever deformation detection.In addition,a method of tailoring the cantilever of commercial probe with flared tip is proposed to reduce the lateral force applied on the tip in measurement.The tailored probe is mounted on the 3D-AFM,and 3D imaging experiments are conducted on different samples by use of adaptive-angle scanning strategy.The results show the roob-mean-square value of the vertical displacement noise(RMS)of the prototype is less than 0.1 nm and the high/width measurement repeatability(peak-to-peak)is less than 2.5 nm.
基金supported in part by the National Key Research and Development Program of China(2018YFB1304903)in part by the National Natural Science Foundation of China(62003116,61925304,and 62127810)+1 种基金in part by the Project funded by China Postdoctoral Science Foundation(2021M690832)in part by the Heilongjiang Postdoctoral Fund of China(LBH-Z20138)。
文摘本文介绍了一种基于磁驱动正交悬臂探针(magnetically driven-orthogonal cantilever probes,MDOCP)的三维原子力显微镜(three-dimensional atomic force microscopy,3D-AFM)表征方法,该方法采用两个独立的三自由度纳米扫描器,能够实现探针沿可控矢量角度跟踪扫描样品表面。该3D-AFM系统还配备了高精度旋转台,可实现360°全向成像。定制的MD-OCP包含水平悬臂、垂直悬臂和磁球三部分,其中磁球可在磁场中机械驱动OCP实现激振。垂直悬臂具有一个突出的尖端,可检测深槽和具有悬垂/凹边特征的结构。首先,对MD-OCP的设计、模拟、制造和性能分析进行了描述;其次,详细介绍了探针振幅补偿和360°旋转原点定位的方法。通过使用标准AFM阶梯光栅进行对比实验,验证了所提出方法对于陡峭侧壁和拐角处细节的表征能力,其中采用了三维地形重建方法将图像整合。通过对具有微梳结构的微机电系统(MEMS)器件进行3D表征,进一步证实了所提出基于MD-OCP的3D-AFM技术的有效性。最后,该技术被用于确定微阵列芯片的关键尺寸(critical dimensions,CD)。实验结果表明,所提出的方法可以高精度地获取三维结构的CD信息,相比于难以获得侧壁信息的二维技术,在三维微纳制造检测领域具有更好的潜力。
基金Funded by the Jiangsu Province Science and Technology Support Program(Industry)(No.BE2014818)
文摘The TiN, TiAlN, and TiAlSiN coatings were prepared on YT14 cutting tool surface with CAIP（cathode arc ion plating）, the surface morphologies and phases were analyzed with FESEM（field emission scanning electron microscopy）, and XRD（X-ray diffraction）, respectively, and the coating parameters such as 3D surface micro-topography, grain size, surface height, hierarchy, profile height, and power spectral density, etc, were measured with AFM（atomic force microscope）. The results show that the phases of TiN, TiAlN, and TiAlSiN coatings are TiN, TiN＋TiAlN, TiN＋Si_3N_4＋TiAlN, respectively, while the surface roughness Sa of TiN, TiAlN, and TiAlSiN coatings is 75.3, 98.9, and 42.1 nm, respectively, and the roughness depth Sk is 209, 389, and 54 nm, respectively, the sequence of average grain sizes is TiAlN〉TiN〉TiAlSiN. The surface bearing index Sbi of TiN, TiAlN, and TiAlSiN coatings is 0.884, 1.01, and 0.37, respectively, and the sequence of surface bearing capability is TiAlN〉TiN〉TiAlSiN. At the lower wavelength（102-103 nm）, the power spectral densities have a certain correlation, and the sequence of TiN〉TiAlN〉TiAlSiN, while the correlation is low at the higher wavelength（〉103 nm）.
基金This work was financially supported by the Grant for Taishan Scholar Advantage Characteristic Discipline of Shandong Province,the Start-up Grant for QiLu Young Scholars of Shandong University,the Youth Fund from the Natural Science Foundation of Shandong Province(No.ZR2021QB045)the General Program from China Postdoctoral Science Foundation(No.2019M662325)+1 种基金the Grant from Danish Council for Independent Research(No.9040-00219B)EU H2020RISE 2016-MNR4S Cell project.
文摘Hydration lubrication has long been invoked to account for the ultralow sliding friction between charged surfaces in aqueous environments,but still not well understood at molecular-level.Herein,we explored the lubrication effect of hydrated halogen anions on positively charged surface at the atomic scale by using three-dimensional atomic force microscopy and friction force microscopy.Atomically resolved three-dimensional imaging revealed that the anion layer was topped by a few hydration layers.The mechanical properties of the hydration layers were found mainly dependent on the concentration of electrolyte solutions and independent of the species of hydrated anions.Atomic-scale friction experiments showed that the hydration friction coefficient and friction dissipation at low concentrations were orders of magnitude lower than that at high concentrations and in pure water.Superlubricity can be achieved in low concentration electrolyte solution.These results indicated that the changes of electrolyte solution concentrations led to different adsorption state of anions on the positively charged surface which gave rise to the difference of the friction behaviors.The findings in this study reveal the role of hydrated anions in hydration lubrication and provide deep insights into the origins of hydration lubrication.
