The characteristics of cold plasma,especially for a dual-frequency capacitively coupled plasma（CCP）, play an important role for plasma enhanced chemical vapor deposition,which stimulates further studies using differ...The characteristics of cold plasma,especially for a dual-frequency capacitively coupled plasma（CCP）, play an important role for plasma enhanced chemical vapor deposition,which stimulates further studies using different methods.In this paper,a 2D fluid model was constructed for N_2 gas plasma simulations with CFD-ACE＋, a commercial multi-physical software package.First,the distributions of electric potential（E_（pot））,electron number density（N_e）,N number density（N） and electron temperature（T_e） are described under the condition of high frequency（HF）,13.56 MHz,HF voltage,300 V,and low-frequency（LF） voltage,0 V,particularly in the sheath. Based on this,the influence of HF on N_e is further discussed under different HF voltages of 200 V,300 V,400 V, separately,along with the influence of LF,0.3 MHz,and various LF voltages of 500 V,600 V,700 V.The results show that sheaths of about 3 mm are formed near the two electrodes,in which E_（pot） and T_e vary extensively with time and space,while in the plasma bulk E_（pot） changes synchronously with an electric potential of about 70 V and T_e varies only in a small range.N is also modulated by the radio frequency,but the relative change in N is small. N_e varies only in the sheath,while in the bulk it is steady at different time steps.So,by comparing N_e in the plasma bulk at the steady state,we can see that N_e will increase when HF voltage increases.Yet,N_e will slightly decrease with the increase of LF voltage.At the same time,the homogeneity will change in both x and y directions.So both HF and LF voltages should be carefully considered in order to obtain a high-density,homogeneous plasma.展开更多
基金supported by the Important National Science & Technology Specific Projects No.2(No.2011ZX02403-004)the Independent Research Subject from the State Key Laboratory of Tribology in Tsinghua University(No.SKLT11C2)
文摘The characteristics of cold plasma,especially for a dual-frequency capacitively coupled plasma（CCP）, play an important role for plasma enhanced chemical vapor deposition,which stimulates further studies using different methods.In this paper,a 2D fluid model was constructed for N_2 gas plasma simulations with CFD-ACE＋, a commercial multi-physical software package.First,the distributions of electric potential（E_（pot））,electron number density（N_e）,N number density（N） and electron temperature（T_e） are described under the condition of high frequency（HF）,13.56 MHz,HF voltage,300 V,and low-frequency（LF） voltage,0 V,particularly in the sheath. Based on this,the influence of HF on N_e is further discussed under different HF voltages of 200 V,300 V,400 V, separately,along with the influence of LF,0.3 MHz,and various LF voltages of 500 V,600 V,700 V.The results show that sheaths of about 3 mm are formed near the two electrodes,in which E_（pot） and T_e vary extensively with time and space,while in the plasma bulk E_（pot） changes synchronously with an electric potential of about 70 V and T_e varies only in a small range.N is also modulated by the radio frequency,but the relative change in N is small. N_e varies only in the sheath,while in the bulk it is steady at different time steps.So,by comparing N_e in the plasma bulk at the steady state,we can see that N_e will increase when HF voltage increases.Yet,N_e will slightly decrease with the increase of LF voltage.At the same time,the homogeneity will change in both x and y directions.So both HF and LF voltages should be carefully considered in order to obtain a high-density,homogeneous plasma.
