集成电路生产制造作为高科技行业中的劳动密集型产业,包括几十种生产流程,每道流程之间都需要进行物料流转,在这种情况下,物料流转的精确性和稳定性就极为重要。自动物料搬运系统(AMHS,Automated Material Handling System)应运而生,其...集成电路生产制造作为高科技行业中的劳动密集型产业,包括几十种生产流程,每道流程之间都需要进行物料流转,在这种情况下,物料流转的精确性和稳定性就极为重要。自动物料搬运系统(AMHS,Automated Material Handling System)应运而生,其是半导体制造实现自动化的重要一环。本文结合某300mm晶圆制造厂的实际情况,基于仿真模型理论,对工厂的AMHS系统进行了建模,并搭建三维仿真模型,分析研究其工程设计、轨道布局设计,提出了符合实际工程情况的评价模型的指标,提高了实际工程问题中AMHS的搬运效率。展开更多
To quickly and accurately estimate the expected work-in-process (WIP)of material intersection points in continuous automated material handling systems (AMHSs) ,a queuing-based performance analytical model was presente...To quickly and accurately estimate the expected work-in-process (WIP)of material intersection points in continuous automated material handling systems (AMHSs) ,a queuing-based performance analytical model was presented for continuous flow transporters (CFTs) . In the modeling procedure which considered layout of crossovers and the variability of service time of turntables, an M /G /1 queuing model with multi-class customers and a non-preemptive priority M /G /1 queuing model with multi-class customers were introduced to accurately present the queuing WIP of each material intersection point and perform the analytical model. Finally,300 mm wafer fabrication facilities (fabs)with 24 bays were applied to evaluating the proposed model. Compared with results of an Arena simulation, the model performs well in evaluating the number of queuing WIP of the intersection points and overall system of CFTs in AMHSs.展开更多
为研究Amh基因在TSD(Temperature-dependent sex determination,温度依赖型性别决定)中的功能,文章以红耳龟Trachemys scripta为TSD动物模型,分析了Amh在胚胎性腺中的精细表达特征和细胞定位;通过基因功能缺失和获得研究手段,验证了Amh...为研究Amh基因在TSD(Temperature-dependent sex determination,温度依赖型性别决定)中的功能,文章以红耳龟Trachemys scripta为TSD动物模型,分析了Amh在胚胎性腺中的精细表达特征和细胞定位;通过基因功能缺失和获得研究手段,验证了Amh在TSD中的具体功能。表达分析结果显示,Amh基因在性腺分化启动前的第15期便已呈现产雄温度(Male-producing temperature,MPT)性腺高表达;AMH蛋白主要定位在MPT性腺sertoli前体细胞上,而在各个发育时期的FPT(Female-producing temperature,产雌温度)性腺中仅检测到极其微弱的Amh mRNA和蛋白表达信号。RNA干扰实验显示,敲低Amh后的MPT性腺出现了雄性向雌性完全性逆转,雄性分化因子Sox9明显下调,雌性分化因子Foxl2和Cyp19a1显著上调;相反地,异位表达Amh后的FPT性腺则转向睾丸方向分化,Foxl2和Cyp19a1表达被抑制,Sox9表达上升。上述研究表明,Amh是启动红耳龟早期睾丸分化必需且充分的关键因子,处于TSD雄性分化分子通路上游。展开更多
ASYST近13宣布推出Agile Automation，这是一种在半导体晶圆厂新的自动化物料处理（Automated Material Handling）方式。Agile Automation是开创业界先例的解决方案。它大幅增加晶圆厂的生产力，”通过模块化增强现有AMHS制度。Agile A...ASYST近13宣布推出Agile Automation，这是一种在半导体晶圆厂新的自动化物料处理（Automated Material Handling）方式。Agile Automation是开创业界先例的解决方案。它大幅增加晶圆厂的生产力，”通过模块化增强现有AMHS制度。Agile Automation具有并行加载和卸载几项工具的功能，同时大幅度减少对搭载置顶输送工具（Overhead Transport Vehicles，OHV）的依赖。展开更多
文摘集成电路生产制造作为高科技行业中的劳动密集型产业,包括几十种生产流程,每道流程之间都需要进行物料流转,在这种情况下,物料流转的精确性和稳定性就极为重要。自动物料搬运系统(AMHS,Automated Material Handling System)应运而生,其是半导体制造实现自动化的重要一环。本文结合某300mm晶圆制造厂的实际情况,基于仿真模型理论,对工厂的AMHS系统进行了建模,并搭建三维仿真模型,分析研究其工程设计、轨道布局设计,提出了符合实际工程情况的评价模型的指标,提高了实际工程问题中AMHS的搬运效率。
基金National Natural Science Foundations of China(No.61273035,No.71071115)National High-Tech R&D Program for CIMS,China(No.2009AA043000)
文摘To quickly and accurately estimate the expected work-in-process (WIP)of material intersection points in continuous automated material handling systems (AMHSs) ,a queuing-based performance analytical model was presented for continuous flow transporters (CFTs) . In the modeling procedure which considered layout of crossovers and the variability of service time of turntables, an M /G /1 queuing model with multi-class customers and a non-preemptive priority M /G /1 queuing model with multi-class customers were introduced to accurately present the queuing WIP of each material intersection point and perform the analytical model. Finally,300 mm wafer fabrication facilities (fabs)with 24 bays were applied to evaluating the proposed model. Compared with results of an Arena simulation, the model performs well in evaluating the number of queuing WIP of the intersection points and overall system of CFTs in AMHSs.
文摘ASYST近13宣布推出Agile Automation，这是一种在半导体晶圆厂新的自动化物料处理（Automated Material Handling）方式。Agile Automation是开创业界先例的解决方案。它大幅增加晶圆厂的生产力，”通过模块化增强现有AMHS制度。Agile Automation具有并行加载和卸载几项工具的功能，同时大幅度减少对搭载置顶输送工具（Overhead Transport Vehicles，OHV）的依赖。
