Recent progresses in magnetic tunnel junctions with perpendicular magnetic anisotropy （PMA） are reviewed and summarized. At first, the concept and source of perpendicular magnetic anisotropy （PMA） are introduced. ...Recent progresses in magnetic tunnel junctions with perpendicular magnetic anisotropy （PMA） are reviewed and summarized. At first, the concept and source of perpendicular magnetic anisotropy （PMA） are introduced. Next, a historical overview of PMA materials as magnetic electrodes, such as the RE-TM alloys TbFeCo and GdFeCo, novel tetragonal manganese alloys Mn-Ga, L10-ordered （Co, Fe）/Pt alloy, multilayer film [Co, Fe, CoFe/Pt, Pd, Ni, AU]N, and ultra-thin magnetic metal/oxidized barrier is offered. The other part of the article focuses on the optimization and fabrication of CoFeB/MgO/CoFeB p-MTJs, which is thought to have high potential to meet the main demands for non-volatile magnetic random access memory.展开更多
The 1-Mb and 4-Mb commercial toggle magnetoresistive random-access memories（MRAMs） with 0.13 μm and 0.18-μm complementary metal–oxide–semiconductor（CMOS） process respectively and different magnetic tunneling j...The 1-Mb and 4-Mb commercial toggle magnetoresistive random-access memories（MRAMs） with 0.13 μm and 0.18-μm complementary metal–oxide–semiconductor（CMOS） process respectively and different magnetic tunneling junctions（MTJs） are irradiated with a Cobalt-60 gamma source. The electrical functions of devices during the irradiation and the room temperature annealing behavior are measured. Electrical failures are observed until the dose accumulates to 120-krad（Si） in 4-Mb MRAM while the 1-Mb MRAM keeps normal. Thus, the 0.13-μm process circuit exhibits better radiation tolerance than the 0.18-μm process circuit. However, a small quantity of read bit-errors randomly occurs only in 1-Mb MRAM during the irradiation while their electrical function is normal. It indicates that the store states of MTJ may be influenced by gamma radiation, although the electrical transport and magnetic properties are inherently immune to the radiation. We propose that the magnetic Compton scattering in the interaction of gamma ray with magnetic free layer may be the origin of the read bit-errors. Our results are useful for MRAM toward space application.展开更多
新型非易失磁性随机存储器(magnetic random access memory,MRAM)具有读写速度快、数据保持时间长、功耗低等优点,引起了研究人员的广泛关注。其优异的抗辐照能力被人们深入挖掘,有望进一步应用于航天等领域。本文回顾了MRAM的产业化发...新型非易失磁性随机存储器(magnetic random access memory,MRAM)具有读写速度快、数据保持时间长、功耗低等优点,引起了研究人员的广泛关注。其优异的抗辐照能力被人们深入挖掘,有望进一步应用于航天等领域。本文回顾了MRAM的产业化发展历程、技术变革及应用情况,列举了近年成熟的MRAM产品,对不同的代际MRAM的优缺点进行了剖析;对MRAM核心存储单元——磁隧道结(magnetic tunnel junction,MTJ)和外围基于互补金属氧化物半导体(complementary metal oxide semiconductor,CMOS)的读写电路的辐射效应分别进行了探讨;总结了近年来MRAM抗辐照加固设计方面的最新成果;对抗辐照MRAM在航空航天领域甚至核能领域的发展前景进行了展望。展开更多
基金supported by the State Key Project of Fundamental Research of Ministry of Science and Technology,China(Grant No.2010CB934400)the National Natural Science Foundation of China(Grant Nos.51229101 and 11374351)
文摘Recent progresses in magnetic tunnel junctions with perpendicular magnetic anisotropy （PMA） are reviewed and summarized. At first, the concept and source of perpendicular magnetic anisotropy （PMA） are introduced. Next, a historical overview of PMA materials as magnetic electrodes, such as the RE-TM alloys TbFeCo and GdFeCo, novel tetragonal manganese alloys Mn-Ga, L10-ordered （Co, Fe）/Pt alloy, multilayer film [Co, Fe, CoFe/Pt, Pd, Ni, AU]N, and ultra-thin magnetic metal/oxidized barrier is offered. The other part of the article focuses on the optimization and fabrication of CoFeB/MgO/CoFeB p-MTJs, which is thought to have high potential to meet the main demands for non-volatile magnetic random access memory.
基金supported by the National Natural Science Foundation of China(Grant No.61404161)
文摘The 1-Mb and 4-Mb commercial toggle magnetoresistive random-access memories（MRAMs） with 0.13 μm and 0.18-μm complementary metal–oxide–semiconductor（CMOS） process respectively and different magnetic tunneling junctions（MTJs） are irradiated with a Cobalt-60 gamma source. The electrical functions of devices during the irradiation and the room temperature annealing behavior are measured. Electrical failures are observed until the dose accumulates to 120-krad（Si） in 4-Mb MRAM while the 1-Mb MRAM keeps normal. Thus, the 0.13-μm process circuit exhibits better radiation tolerance than the 0.18-μm process circuit. However, a small quantity of read bit-errors randomly occurs only in 1-Mb MRAM during the irradiation while their electrical function is normal. It indicates that the store states of MTJ may be influenced by gamma radiation, although the electrical transport and magnetic properties are inherently immune to the radiation. We propose that the magnetic Compton scattering in the interaction of gamma ray with magnetic free layer may be the origin of the read bit-errors. Our results are useful for MRAM toward space application.
文摘新型非易失磁性随机存储器(magnetic random access memory,MRAM)具有读写速度快、数据保持时间长、功耗低等优点,引起了研究人员的广泛关注。其优异的抗辐照能力被人们深入挖掘,有望进一步应用于航天等领域。本文回顾了MRAM的产业化发展历程、技术变革及应用情况,列举了近年成熟的MRAM产品,对不同的代际MRAM的优缺点进行了剖析;对MRAM核心存储单元——磁隧道结(magnetic tunnel junction,MTJ)和外围基于互补金属氧化物半导体(complementary metal oxide semiconductor,CMOS)的读写电路的辐射效应分别进行了探讨;总结了近年来MRAM抗辐照加固设计方面的最新成果;对抗辐照MRAM在航空航天领域甚至核能领域的发展前景进行了展望。
