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Effect of Duty Cycle on Properties of Pulse-electro-deposited SnS:Ag Thin Films 被引量:1
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作者 LU Peimin1, JIA Hongjie1, YANG Yongli2, CHENG Shuying1 (1. College of Physics and Information Engineering, Institute of Micro-Nano Devices & Solar Cells, Fuzhou University, Fuzhou 350108, CHN 2. Key Laboratory of Analysis and Detection Technology for Food Safety of the Ministry of Education, Department of Chemistry, Fuzhou University, Fuzhou 350108, CHN) 《Semiconductor Photonics and Technology》 CAS 2010年第4期132-136,145,共6页
SnS∶Ag thin films were deposited on ITO glasses by pulse electro-deposition. By studying the effect of duty cycle on the properties of SnS∶Ag thin films, the optimum off-time(toff) is obtained to be 5 s, namely, the... SnS∶Ag thin films were deposited on ITO glasses by pulse electro-deposition. By studying the effect of duty cycle on the properties of SnS∶Ag thin films, the optimum off-time(toff) is obtained to be 5 s, namely, the optimal duty cycle is about 67%. The primary phase of SnS∶Ag films deposited on optimum parameters condition is SnS compound with good crystallization, and the films prefer to grow towards (111) plane. The films are dense, smooth and uniform with good microstructure, and the grains in the films are densely packed together, and their direct bandgap is about 1.40 eV. In addition, the bandgap of the films first rises and then drops with the increase of the duty cycle. 展开更多
关键词 DUTY cycle PULSE ELECTRODEPOSITION SnS∶ag thin films optical properties
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基于ICP的Ar等离子体干法刻蚀Ti/Ni/Ag薄膜
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作者 黄梦茹 卢林红 +2 位作者 郭丰杰 马奎 杨发顺 《半导体技术》 CAS 北大核心 2024年第10期893-898,共6页
在电感耦合等离子体(ICP)刻蚀工艺中,选择合适的刻蚀条件对Ti/Ni/Ag薄膜的刻蚀至关重要。使用氩气(Ar)作为刻蚀气体,研究了射频偏压功率、气体体积流量、腔体压强、刻蚀时间等多个参数对功率芯片背面Ti/Ni/Ag薄膜刻蚀深度的影响,并优化... 在电感耦合等离子体(ICP)刻蚀工艺中,选择合适的刻蚀条件对Ti/Ni/Ag薄膜的刻蚀至关重要。使用氩气(Ar)作为刻蚀气体,研究了射频偏压功率、气体体积流量、腔体压强、刻蚀时间等多个参数对功率芯片背面Ti/Ni/Ag薄膜刻蚀深度的影响,并优化刻蚀工艺参数。实验结果表明,调节射频偏压功率和Ar体积流量可以显著影响刻蚀速率,进而对薄膜的微结构进行有效调控。通过优化工艺参数,在射频偏压功率300 W、Ar体积流量40 cm^(3)/min、腔体压强1.2 Pa、刻蚀时间50 min下,芯片Ti/Ni/Ag薄膜的刻蚀深度达到283.25μm,有效提升了刻蚀效率和刻蚀精度。 展开更多
关键词 Ti/Ni/ag薄膜 电感耦合等离子体(ICP) 刻蚀深度 AR 射频偏压功率
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Preparation and Properties of Ag-TiO_2 Thin Films on Glass Substrates 被引量:1
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作者 魏建红 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2002年第3期21-23,共3页
Ag TiO 2 thin films were prepared on glasses.The morphology and structure of Ag TiO 2 films were investigated by XRD, SEM and FT IR.The photocatalytic and hydrophilic properties of Ag TiO 2 thin films were also... Ag TiO 2 thin films were prepared on glasses.The morphology and structure of Ag TiO 2 films were investigated by XRD, SEM and FT IR.The photocatalytic and hydrophilic properties of Ag TiO 2 thin films were also evaluated by examining photocatalytic degradation dichlorophos under sunlight illumination and the change of contact angle respectively.The research results show that the Ag TiO 2 thin film is mainly composed of 20-100nm Ag and TiO 2 particles.The Ag TiO 2 thin films possess a super hydrophilic ability and higher photocatalytic activity than that of pure TiO 2 thin film. 展开更多
关键词 ag TiO 2 thin film MICROSCOPE PHOTOCATALYTIC HYDROPHILIC
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Enhanced optical absorption by Ag nanoparticles in a thin film Si solar cell
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作者 陈凤翔 汪礼胜 许文英 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第4期330-333,共4页
Thin film solar cells have the potential to significantly reduce the cost of photovoltaics. Light trapping is crucial to such a thin film silicon solar cell because of a low absorption coefficient due to its indirect ... Thin film solar cells have the potential to significantly reduce the cost of photovoltaics. Light trapping is crucial to such a thin film silicon solar cell because of a low absorption coefficient due to its indirect band gap. In this paper, we investigate the suitability of surface plasmon resonance Ag nanoparticles for enhancing optical absorption in the thin film solar cell. For evaluating the transmittance capability of Ag nanoparticles and the conventional antireflection film, an enhanced transmittance factor is introduced. We find that under the solar spectrum AM1.5, the transmittance of Ag nanoparticles with radius over 160 nm is equivalent to that of conventional textured antireflection film, and its effect is better than that of the planar antireflection film. The influence of the surrounding medium is also discussed. 展开更多
关键词 TRANSMITTANCE surface plasmon resonance ag nanoparticles thin film solar cells
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Preparation of Ag-doped TiO_2 Thin Film by Sol-gel Method
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作者 魏建红 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2001年第4期27-30,共4页
The Ag-TiO2 thin film has been prepared on glass substrate by sol-gel process . The structure and properties of the materials were studied by DTA , XRD, and EPR. The photocatalytic activity was examined by the photoca... The Ag-TiO2 thin film has been prepared on glass substrate by sol-gel process . The structure and properties of the materials were studied by DTA , XRD, and EPR. The photocatalytic activity was examined by the photocatalytic degradation of dichlorophos. The analysis results indicate that the photocatalytic activity of the Ag-TiO2 thin film is higher than that of pure TiO2 thin film. It is also influenced by the content of anatase and heating temperature . The ESR result shows that the Ag-TiO2 thin film has more hydroxide radicals than pure TiO2 thin film after illuminated by UV light. 展开更多
关键词 sol-gel process ag-TiO2 thin film PROPERTIES photocatolytic activity
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NUMERICAL CHARACTERIZATION OF CURRENT-INDUCED CHANGES IN SURFACE MORPHOLOGY OF THIN Ag FILMS
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作者 A.V.Parian H.G.Chun +2 位作者 A.R.Shuourov S.V.Panin N.V.Pykhtin 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2003年第4期249-255,共7页
The changes in surface topography of thin conducting Ag films under high-density current condition are studied by optical and scanning tunnelling microscopy (STM). It is established that the loss of conductivity in sp... The changes in surface topography of thin conducting Ag films under high-density current condition are studied by optical and scanning tunnelling microscopy (STM). It is established that the loss of conductivity in specimens occurs through depletion of the material due to their overheating and electromigration process. It has been shown that the r.m.s. roughness, the fractal dimension of voids and the fractal dimension of the surface allow complete numerical characterization of surface topography changes in thin Ag films. 展开更多
关键词 STM thin ag films surface roughness fractal dimension
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Effect of additional element and heat treating temperature on micro-structure and mechanical behavior of Ag alloy thin film
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作者 ISHIGURO S A RIZONO T HASEGAWA K 《中国有色金属学会会刊:英文版》 CSCD 2006年第B01期217-219,共3页
For Ag alloy film used for the storage media, it is required to have heat-resistance, anti-constant temperature and anti-constant humidity characteristics, corrosion resistance, while high reflectivity over Al is main... For Ag alloy film used for the storage media, it is required to have heat-resistance, anti-constant temperature and anti-constant humidity characteristics, corrosion resistance, while high reflectivity over Al is maintained. An Ag alloy thin film (additive element Pd, Cu, P) was created on glass substrates, and various heat treatment was conducted. Then, fine structure was observed on this thin film using AFM, and fine structure evaluation of the inside was carried out by the in-plane diffractometry and X-ray diffractometry, and in addition, residual stress analysis was carried out. These results were compared and were examined, and fine structure and physical property in a metallic thin film were evaluated, and usefulness of evaluation method was verified. 展开更多
关键词 银合金薄膜 添加元素 热处理温度 显微结构 力学行为
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Effect of Ag Addition on the Microstructure and Magnetic Properties of FePt Thin Films
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作者 程晓敏 杨晓非 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2008年第5期670-674,共5页
FePt thin films and [FePt/Ag]n multilayer thin films were prepared by magnetron sputtering technique and subsequent annealing process. By comparing the microstructure and magnetic properties of these two kinds of thin... FePt thin films and [FePt/Ag]n multilayer thin films were prepared by magnetron sputtering technique and subsequent annealing process. By comparing the microstructure and magnetic properties of these two kinds of thin films, effects of Ag addition on the structure and properties of FePt thin films were investigated. Proper Ag addition was found helpful for FePt phase transition at lower annealing temperature. With Ag addition, the magnetic domain pattern of FePt thin film changed from maze-like pattern to more discrete island-like domain pattern in [FePt/Ag]n multilayer thin films. In addition, introducing nonmagnetic Ag hindered FePt grains from growing larger. The in-depth defects in FePt films and [FePt/Ag]n multilayer films verify that Ag addition is attributed to a large number of pinning site defects in [FePt/Ag]n film and therefore has effects on its magnetic properties and microstructure. 展开更多
关键词 [FePt/ag]n multilayer thin films FePt thin films COERCIVITY magnetic domain patterns pinning sites
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Synthesis and Characterization of Ag Nanoparticles Addition on BPSCCO Superconducting Thin Films
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作者 Saad F. Oboudi Mustafa Q. Mustafa 《Advances in Nanoparticles》 2016年第1期75-82,共8页
The growth of epitaxial Ag nanoparticles doped (Bi, Pb)-2223 thin films on Si (111) substrates by pulsed laser deposition (PLD) and post-deposition oxygen annealing have been achieved. The phase identification and gro... The growth of epitaxial Ag nanoparticles doped (Bi, Pb)-2223 thin films on Si (111) substrates by pulsed laser deposition (PLD) and post-deposition oxygen annealing have been achieved. The phase identification and gross structural characteristics of synthesized films explored through X-ray diffractometer reveal that all the samples crystallize in orthorhombic structure. DC electrical resistivity measurements were done by the standard four-probe method and the results showed improvement in T<sub>c</sub> by increasing Ag nanoparticles to 1.0 wt% which had a maximum enhancement in T<sub>c</sub> for all investigated films. The surface morphology investigated through scanning electron microscope (SEM) and atomic force microscopy (AFM) results showed that an increase in T<sub>c</sub> with the appropriate Ag nanoparticles addition in the samples is associated with the enhancement of Bi (Pb)-2223 phase formation. 展开更多
关键词 PLD thin films Superconductors Bi (Pb)-2223 ag Nanoparticle
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(001)-oriented FePt/Ag composite films for perpendicular recording 被引量:1
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作者 Wenfeng LIU Fang WANG Xiaohong XU 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2009年第5期392-396,共5页
FePt/Ag thin films were deposited by magnetron sputtering onto 7059 glass substrates, then were annealed at 550 ℃ for 30 min. Nanostructured FePt/Ag films were successfully obtained with the magnetic easy axis of L10... FePt/Ag thin films were deposited by magnetron sputtering onto 7059 glass substrates, then were annealed at 550 ℃ for 30 min. Nanostructured FePt/Ag films were successfully obtained with the magnetic easy axis of L10 FePt perpendicular to the film plane. It was found that the development of (001) texture depended strongly on the thicknesses of FePt magnetic layer and Ag underlayer. The L10 ordered FePt(15 nm)/Ag(50 nm) with (001) orientation can be obtained. And the perpendicular coercivity of FePt(15 nm)/Ag(50 nm) film reached to 7.2× 10^5 A/m, whereas the longitudinal one was only 3.2×10^4 A/m. The non-magnetic Ag underlayer can not only induce (001) orientation and ordering of FePt grains, but also reduce the intergrain interactions. 展开更多
关键词 FePt/ag thin films (001) orientation FePt magnetic layer agunderlayer Intergrain interaction
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Characterization of Silver Nanoparticles Thin Films with Various Thicknesses by AFM
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作者 Ling Li Ling Li +3 位作者 Weidong Chen Jie Zheng Linwen Wang Yan Chen 《Journal of Materials Science and Chemical Engineering》 2016年第1期34-39,共6页
Ag nanoparticles (NPs) thin films with various thicknesses were prepared by thermal evaporation method. Atomic force microscopy (AFM) and UV-Vis spectrophotometer were used to study the surface morphology, growth natu... Ag nanoparticles (NPs) thin films with various thicknesses were prepared by thermal evaporation method. Atomic force microscopy (AFM) and UV-Vis spectrophotometer were used to study the surface morphology, growth nature and optical properties of the films. The results indicate that the growth rates of Ag particles in lateral and vertical direction are variable, and the dominant growth rate of Ag particles in lateral direction will convert into dominant growth rate in vertical direction as films grow thicker. The mean value and distribution of Ag NPs height related with the location and width of SPR (surface plasmonresonance) peak. Higher mean height shifts SPR peak to longer wavelengths, and smaller deviation results in narrower width of SPR peaks. 展开更多
关键词 ag NPs thin films Surface Morphology AFM SPR Growth Nature
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Effect of Change in Thickness of Ag Toplayer on the Structure and Magnetic Properties of FePd Films Grown on Glass Substrate
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作者 ZHANG Yanli CHENG Gang +1 位作者 XU Xiaozong LI Lin 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2018年第5期1082-1085,共4页
A series of FePd based alloy films were deposited on glass substrates by DC magnetron sputtering. The Ag toplayer effect was studied using FePd(67.5 nm)/Ag(3.875, 7.75, 15.50, 31 and 38.75 nm) films annealed at 6... A series of FePd based alloy films were deposited on glass substrates by DC magnetron sputtering. The Ag toplayer effect was studied using FePd(67.5 nm)/Ag(3.875, 7.75, 15.50, 31 and 38.75 nm) films annealed at 600 ℃ for different time in order to find the role of the Ag toplayer in disorder-order of FePd film. The results show that the Ag toplayer can accelerate the phase transition from FCC to FCT in films. The magnetic easy axis of the crystallites in this film is in-plane of substrate. The Ag toplayer can greatly enhance the coercive of FePd films. When the thickness of Ag is equal to 31 nm, the film has a very large in-plane coercivity of 2.8 kOe and a very low out-of-plane coercivity of 1.04 kOe. 展开更多
关键词 FePd thin film phase transition ag toplayer
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Ag/TiO_2薄膜结构和光催化性能研究 被引量:43
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作者 何超 于云 +1 位作者 周彩华 胡行方 《无机材料学报》 SCIE EI CAS CSCD 北大核心 2002年第5期1025-1033,共9页
采用溶胶-凝胶技术制备了Ag掺杂的TiO2薄膜.用XRD、氮吸附法、UV-VIS-NIR分光光度计以及XPS对Ag掺杂后TiO2薄膜结构的变化进行了分析;用分光光学法通过在紫外光照下分解亚甲基蓝的实验比较了TiO2薄膜与Ag/TiO2薄膜的光催化性能.结果发现... 采用溶胶-凝胶技术制备了Ag掺杂的TiO2薄膜.用XRD、氮吸附法、UV-VIS-NIR分光光度计以及XPS对Ag掺杂后TiO2薄膜结构的变化进行了分析;用分光光学法通过在紫外光照下分解亚甲基蓝的实验比较了TiO2薄膜与Ag/TiO2薄膜的光催化性能.结果发现,掺杂适量的Ag有助于TiO2薄膜光催化氧化性能的提高,原因在于:(1)Ag通过引入耗尽层提高了TiO2的电荷分离能力,并吸引空穴向薄膜表面移动,结果使薄膜表面空穴的浓度提高,薄膜光催化效率提高;(2)Ag减小了TiO2粒子的粒径,使TiO2禁带宽度增大,薄膜光催化氧化的能力提高;(3)Ag掺杂后,TiO2薄膜表面对-OH基和水的吸附增加,使光照后TiO2薄膜表面活性自由基·OH的浓度增加,空穴向薄膜所吸附物质的转移能力提高. 展开更多
关键词 ag/TiO2薄膜 溶胶-凝胶法 掺杂 结构 光催化性能 二氧化钛 掺杂 光催化剂 污染治理
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ITO/Ag光子晶体薄膜的制备及性能 被引量:14
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作者 赵亚丽 马富花 +3 位作者 江波 李克训 张青翠 魏学红 《光学精密工程》 EI CAS CSCD 北大核心 2015年第6期1516-1522,共7页
考虑材料的电磁屏蔽特性和可见光透过的矛盾,设计了以铝/氧化铟锡(Ag/ITO)为周期的光子晶体薄膜以实现电磁屏蔽和可见光透过的兼容。首先根据电磁屏蔽和可视的双重需求,优化了光子晶体的组份并对其性能进行了研究。接着采用磁控溅射方... 考虑材料的电磁屏蔽特性和可见光透过的矛盾,设计了以铝/氧化铟锡(Ag/ITO)为周期的光子晶体薄膜以实现电磁屏蔽和可见光透过的兼容。首先根据电磁屏蔽和可视的双重需求,优化了光子晶体的组份并对其性能进行了研究。接着采用磁控溅射方法制备了以Ag/ITO为周期的光子晶体薄膜,并对光子晶体薄膜的屏蔽和可见光透光率进行了测试和分析。实验结果表明:这种光子晶体薄膜在金属Ag总膜厚大于可见光趋肤深度而远小于微波波段趋肤深度时,在可见光波段的最高透光率高达55%,而在微波x频率段的屏蔽性能最高可达65dB。通过结构设计,使薄膜的可见光透光率曲线与人眼的敏感曲线相吻合。随着每个周期Ag膜层的厚度增加,方阻相应降低,微波屏蔽性能相应提高。随着周期数的增加,薄膜的可见光透光率没有相应降低、屏蔽性能没有相应提高。设计的光子晶体薄膜在30 MHz^18GHz较宽波段的屏蔽性能均大于40dB。这种设计方法为材料的电磁屏蔽和可见光透明兼容开辟了一条新的技术途径。 展开更多
关键词 光子晶体 光子晶体薄膜 ITO/ag薄膜 电磁屏蔽 透明金属
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非晶态TiO_2-Ag薄膜的光催化性能研究 被引量:4
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作者 黄佳木 赵磊 +1 位作者 蔡小平 张兴元 《功能材料》 EI CAS CSCD 北大核心 2007年第7期1049-1052,共4页
采用磁控溅射技术在玻璃基片上制备了非晶态的TiO2-Ag薄膜,用XRD、XPS、STS和椭圆偏光测厚仪等对薄膜的晶体结构、表面成分、电子结构和薄膜厚度进行了测试分析。试验和测试结果表明,薄膜呈非晶态,在薄膜表面存在单质Ag,其与Ti的原子浓... 采用磁控溅射技术在玻璃基片上制备了非晶态的TiO2-Ag薄膜,用XRD、XPS、STS和椭圆偏光测厚仪等对薄膜的晶体结构、表面成分、电子结构和薄膜厚度进行了测试分析。试验和测试结果表明,薄膜呈非晶态,在薄膜表面存在单质Ag,其与Ti的原子浓度比为1.8∶1。STS测试得到薄膜的禁带宽度为1.8eV。对10mg/L的亚甲基蓝溶液光催化脱色实验表明,随着薄膜厚度的增加,光催化脱色率递增,当厚度达360nm时,薄膜对亚甲基蓝的脱色率在2h达90%以上,当厚度>360nm时,光催化脱色率不再增加;对2mg/L罗丹明B溶液光催化脱色实验表明,其脱色率对薄膜厚度的增加不敏感,薄膜对罗丹明B的脱色率在3h内达到88.7%。 展开更多
关键词 磁控溅射 TiO2-ag薄膜 光催化 亚甲基蓝 罗丹明B
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Ag/TiO_2薄膜光催化性能的研究 被引量:10
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作者 侯兴刚 吴晓玲 刘安东 《北京师范大学学报(自然科学版)》 CAS CSCD 北大核心 2005年第6期604-607,共4页
用含有AgNO3的复合溶胶凝胶制备Ag/TiO2薄膜,然后对其进行了SEM,XRD,RBS研究,以甲基橙为反应物检验了含有不同n(Ag)/n(Ti)的Ag/TiO2薄膜在365 nm紫外光作用下的光催化降解效率.具有最佳光催化降解效率的是溶胶中n(Ag)/n(Ti)=0.064的Ag/T... 用含有AgNO3的复合溶胶凝胶制备Ag/TiO2薄膜,然后对其进行了SEM,XRD,RBS研究,以甲基橙为反应物检验了含有不同n(Ag)/n(Ti)的Ag/TiO2薄膜在365 nm紫外光作用下的光催化降解效率.具有最佳光催化降解效率的是溶胶中n(Ag)/n(Ti)=0.064的Ag/TiO2薄膜,与未掺银TiO2薄膜相比,效率提高了73%. 展开更多
关键词 复合溶胶凝胶法 TiOe ag/TiO2薄膜 光催化剂
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TiO_2(Ag)纳米半导体薄膜的制备及其光催化性能 被引量:4
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作者 何进 陈星弼 +1 位作者 杨传仁 刘世程 《电子元件与材料》 CAS CSCD 1999年第1期13-14,17,共3页
对热解Ti(OC4H9)4+AgNO3溶胶制备的TiO2(Ag)纳米半导体薄膜光催化特性与其结构的关系进行了研究。薄膜对二卡基砜的光催化降解结果表明,热解温度显著影响薄膜的光催化作用,这与TiO2微粒的长大和晶相转变... 对热解Ti(OC4H9)4+AgNO3溶胶制备的TiO2(Ag)纳米半导体薄膜光催化特性与其结构的关系进行了研究。薄膜对二卡基砜的光催化降解结果表明,热解温度显著影响薄膜的光催化作用,这与TiO2微粒的长大和晶相转变有关;适量的Ag作活性剂可以显著改善薄膜的光催化性能。 展开更多
关键词 光催化 二氧化钛 纳米薄膜 半导体薄膜 制备
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Ag掺杂ZnO薄膜光催化降解苯酚的试验研究 被引量:9
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作者 王英连 叶君耀 +1 位作者 吴汉水 胡跃辉 《人工晶体学报》 EI CAS CSCD 北大核心 2008年第4期1033-1036,共4页
本文采用溶胶-凝胶法在石英玻璃基底上制备出性能优良的Ag掺杂的纳米ZnO薄膜,并通过XRD、AFM和UV-Vis吸收光谱对薄膜的结构及光吸收特性进行表征。以苯酚为被降解物,进一步研究了不同掺杂浓度对其光催化性能的影响。结果表明,ZnO:Ag摩... 本文采用溶胶-凝胶法在石英玻璃基底上制备出性能优良的Ag掺杂的纳米ZnO薄膜,并通过XRD、AFM和UV-Vis吸收光谱对薄膜的结构及光吸收特性进行表征。以苯酚为被降解物,进一步研究了不同掺杂浓度对其光催化性能的影响。结果表明,ZnO:Ag摩尔比为30∶1的样品催化效果最佳。 展开更多
关键词 ag掺杂ZnO薄膜 溶胶-凝胶 光催化 苯酚
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Ag/SiO_2复合薄膜的紫外光还原制备及其光学性能 被引量:5
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作者 孙小飞 魏长平 +1 位作者 李启源 许洁 《无机化学学报》 SCIE CAS CSCD 北大核心 2008年第11期1895-1899,共5页
采用溶胶凝胶法(sol-gel)制备不同Ag掺杂量的Ag/SiO2复合薄膜,通过紫外辐射技术对薄膜进行了还原处理,采用XRD、SEM、IR、UV-Vis、Raman和荧光光谱(PL)等技术对薄膜样品结构进行了表征和光学性能测试。XRD结果表明,复合薄膜样品中的Ag... 采用溶胶凝胶法(sol-gel)制备不同Ag掺杂量的Ag/SiO2复合薄膜,通过紫外辐射技术对薄膜进行了还原处理,采用XRD、SEM、IR、UV-Vis、Raman和荧光光谱(PL)等技术对薄膜样品结构进行了表征和光学性能测试。XRD结果表明,复合薄膜样品中的Ag纳米粒子呈面心立方相,利用谢乐公式计算出金属银的平均晶粒尺寸约为10.2nm;SEM结果显示,所得Ag/SiO2复合薄膜均匀性良好,薄膜中绝大部分纳米颗粒尺寸较小,薄膜约厚1μm;UV-Vis结果表明,随着nAg/nSi的增加,Ag纳米粒子在420nm附近的表面等离子共振吸收峰逐渐增强,并伴有一定的红移;PL谱表明,由于Ag纳米粒子的表面等离子共振,薄膜样品在442nm处发出强光,并且随着Ag浓度增大,发光强度略有降低,出现蓝移;从Raman光谱可以看出由于Ag纳米颗粒表面局域电磁场增强造成的表面增强的拉曼散射(SERS)。 展开更多
关键词 ag/SiO2 复合薄膜 紫外辐射 光学性能
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纯银溅射靶材的制备、微观结构及溅射成膜研究
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作者 宁哲达 唐可 +1 位作者 施晨琦 闻明 《贵金属》 CAS 北大核心 2024年第2期1-10,共10页
银薄膜作为高新技术领域极具潜力的新材料,在现代工业中得到了广泛的应用。以银靶为源材料的磁控溅射已成为制备银薄膜的常用方法。本研究比较了冷轧状态和退火状态下Ag靶的溅射性能,探讨了Ag靶与Ag薄膜之间的关系。结果表明:冷轧变形量... 银薄膜作为高新技术领域极具潜力的新材料,在现代工业中得到了广泛的应用。以银靶为源材料的磁控溅射已成为制备银薄膜的常用方法。本研究比较了冷轧状态和退火状态下Ag靶的溅射性能,探讨了Ag靶与Ag薄膜之间的关系。结果表明:冷轧变形量为83.33%后进行600℃退火可以有效提高Ag{110}的织构密度。冷轧态和退火态Ag靶具有相似的沉积速率。两种Ag薄膜的电阻率均随溅射时间的延长而降低。在溅射时间相同的情况下,退火态Ag靶溅射的Ag薄膜电阻率低于冷轧态Ag靶溅射的Ag薄膜。退火态Ag靶组织均匀,溅射后溅射跑道较浅。 展开更多
关键词 ag溅射靶材 冷轧 再结晶退火 ag薄膜 微观结构
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