DYNAMIC CHARACTERISTIC ANALY-SIS OF PRECISE LONG STROKE LINEAR MOTOR WITH AIR-BEARING IN OPTICAL LITHOGRAPHY

Dynamic characteristic is presented by identifying the model and the dynamic parameters of a precise long stroke linear motor （PLSLM） with the air-bearing in optical lithography. The PLSLM is supported by air-bearing on the stator, and is driven by on-board two large linear motors in a cross-configuration. Firstly, a model of the PLSLM is established by finite element method （FEM）. Secondly, based on the model, the natural frequencies and model shapes are discusse＆ And the contribution of each active mode is evaluated by computing the modal participation factors （MPF）, which indicates the major vibration direction. Furthermore, by the experimental modal analysis, the experimental results are in agreement with simulation results, which it is sure that the FEM is reasonable. What＇s more, comparing with the effects on the frequency due to the air-bearing stiffness, the relations of the natural frequencies with the air-bearing stiffness are found. It is found that the frequency response curve is fluctuant with the air-bearing stiffness in each direction. Finally, it is conclusion that the natural frequency of the PLSLM is largely affected by the air-bearing stiffness variety. This research is contributed to the dynamic characteristics resulted from the air-beating stiffness. Further work will include better optimization on the dynamic parameter in the controller design through the control algorithm for the precise long stroke motor.

CFD-based design and analysis of air-bearing-supported paint spray spindle

In this paper, an analytical scientific approach is presented for the design and analysis of an air-turbine-driven paint spray spindle, and it is used to improve further the design concept of the existing spindle applied in automotive coating and paint spraying applications. The current spindle on the market can operate at a maximum speed of 100,000 rpm and features a maximum bell size of 70 mm diameter. Given the increasing demands for high automotive coating/painting quality and productivity in assembly, the design and development of a paint spray spindle with a speed of 145,000 rpm or higher is needed. Computational fluid dynamics(CFD)-based simulation is applied in the approach. Accordingly, CFD simulation-based design and analysis are undertaken, covering the characteristic factors of velocity, pressure of the air supply, rotational speed of the air-turbine, and torque and force reaction on the turbine blades. Furthermore, the turbine blade geometric shape is investigated through the simulations. Three geometrical concepts have been investigated against the original model. The results on Concept_03 verified the higher angular velocity speeds against the theoretical model. The pressure and velocity effects in the blades have been investigated. The results show that the pressure and velocity of the air supply driving the turbine are critical factors influencing the stability of turbine spinning. The results also demonstrate that the force acting on the blades is at the highest level when the adjacent face changes from a straight surface into a curve. Finally, changing the geometrical shape in the turbine likely increases the tangential air pressure at the blades surface and relatively increases the magnitude of the lateral torque and force in the spindle. Notwithstanding this condition, the analytical values surpass the theoretical target values.

Unified gas-kinetic simulation of slider air bearing

The unified gas-kinetic scheme （UGKS） is presented and used in this letter to study the slider air bearing problem. The UGKS solutions are first val- idated by comparison with direct simulation Monte Carlo results. After valida- tion, the UGKS is used to study the air-bearing problem under different non- equilibrium conditions. On the surface of the slider, the dependency of the gas pressure and normal force on the Mach and Knudsen numbers are fully evaluated. The non-equilibrium effect on the force loading in the whole transition regime up to the free molecular limit is also studied.

Fault tolerant attitude control of under-actuated spacecraft:Theory and experiment

This paper investigates fault tolerant attitude control theory and experiment for underactuated spacecraft with one reaction wheel completely broken and two others suffering actuator faults of partial loss of effectiveness or bias.A non-smooth robust adaptive fault tolerant control law is proposed under the zero-momentum and input saturation conditions.It shows that the available reaction wheels need to produce sufficient control torque for the fault tolerance.Such a new control method is implemented in a semi-physical simulation system of an air-bearing platform.Experimental results show the effectiveness of the proposed method in spacecraft practical engineering.

Control performance simulation and tests for Microgravity Active vibration Isolation System onboard the Tianzhou-1 cargo spacecraft

The Microgravity Active vibration Isolation System(MAIS),which was onboard China’s first cargo-spacecraft Tianzhou-1 launched on April 20,2017,aims to provide high-level microgravity at an order of 10^(-5)–10^(-6)g for specific scientific experiments.MAIS is mainly composed of a stator and a floater,and payloads are mounted on the floater.Sensing relative motion with respect to the stator fixed on the spacecraft,the floater is isolated from vibration on the stator via control forces and torques generated by electromagnetic actuators.This isolation results in a high-level microgravity environment.Before MAIS was launched into space,its control performance had been simulated on computers and tested by air-bearing platform levitation and aircraft parabolic flight.This article first presents an overview of the MAIS’s hardware system,particularly system structure,measurement sensors,and control actuators.Its system dynamics,state estimation,and control laws are then discussed,followed by the results of computer simulation and engineering tests,including the test of the six-degree-of-freedom motion by aircraft parabolic flight.Simulation and test results verify the accuracy of the control strategy design,effectiveness of the control algorithms,and performance of the entire control system,paving the way for operation of MAIS in space.This article also presents the steps recommended for the control performance simulation and tests of MAIS-like devices.These devices are expected to be used on China’s Space Station for various scientific experiments that require a high-level microgravity environment.