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Structure distortion, optical and electrical properties of ZnO thin films co-doped with Al and Sb by sol-gel spin coating 被引量:1
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作者 钟文武 刘发民 +3 位作者 蔡鲁刚 周传仓 丁芃 张嬛 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第10期515-519,共5页
ZnO thin films co-doped with A1 and Sb with different concentrations and a fixed molar ratio of AlCl3 to SbCl3 at 1:2, are prepared by a sol-gel spin-coating method on glass annealed at 550 ℃ for 2 h in air. The x-r... ZnO thin films co-doped with A1 and Sb with different concentrations and a fixed molar ratio of AlCl3 to SbCl3 at 1:2, are prepared by a sol-gel spin-coating method on glass annealed at 550 ℃ for 2 h in air. The x-ray diffraction results confirm that the ZnO thin films co-doped with Al distortion, and the biaxial stresses are 1.03× 10^8. 3.26× 10^8 and Sb are of wurtzite hexagonal ZnO with a very small 5.23 × 10^8, and 6.97× 10^8 Pa, corresponding to those of the ZnO thin films co-doped with Al and Sb in concentrations of 1.5, 3.0, 4.5, 6.0 at% respectively. The optical properties reveal that the ZnO thin films co-doped with Al and Sb have obviously enhanced transmittance in the visible region. The electrical properties show that ZnO thin film co-doped with Al and Sb in a concentration of 1.5 at% has a lowest resistivity of 2.5 Ω·cm. 展开更多
关键词 zno thin films co-doped with al and Sb sol-gel spin-coating method structure distortion optical and electrical properties
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膜厚对Zr,Al共掺杂ZnO透明导电薄膜结构和光电性能的影响 被引量:12
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作者 袁玉珍 王辉 +2 位作者 张化福 刘汉法 刘云燕 《人工晶体学报》 EI CAS CSCD 北大核心 2010年第1期169-173,共5页
采用直流磁控溅射法在玻璃衬底上制备出Zr,Al共掺杂ZnO(AZZO)透明导电薄膜。用XRD和SEM分析和观察了薄膜样品的组织结构和表面形貌。研究表明:制备的AZZO透明导电薄膜为六角纤锌矿结构的多晶薄膜,且具有c轴择优取向。另外还研究了薄膜... 采用直流磁控溅射法在玻璃衬底上制备出Zr,Al共掺杂ZnO(AZZO)透明导电薄膜。用XRD和SEM分析和观察了薄膜样品的组织结构和表面形貌。研究表明:制备的AZZO透明导电薄膜为六角纤锌矿结构的多晶薄膜,且具有c轴择优取向。另外还研究了薄膜的结构、光学和电学性质随薄膜厚度的变化关系。当薄膜厚度为843nm时,电阻率具有最小值1.18×10-3Ω.cm,在可见光区(500~800nm)平均透过率超过93%。 展开更多
关键词 磁控溅射 zr al共掺杂zno 膜厚 透明导电薄膜
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溅射功率对Zr,Al共掺杂ZnO薄膜结构和性能的影响 被引量:6
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作者 袁玉珍 王辉 +2 位作者 刘汉法 张化福 刘云燕 《电子元件与材料》 CAS CSCD 北大核心 2010年第2期48-50,61,共4页
室温下,采用直流磁控溅射法,在载玻片衬底上制备出了Zr,Al共掺杂ZnO(AZZO)透明导电薄膜。研究了溅射功率对薄膜的组织结构、表面形貌和光电学性能的影响。结果表明,制备的AZZO透明导电薄膜为六角纤锌矿结构的多晶薄膜,且具有c轴择优取... 室温下,采用直流磁控溅射法,在载玻片衬底上制备出了Zr,Al共掺杂ZnO(AZZO)透明导电薄膜。研究了溅射功率对薄膜的组织结构、表面形貌和光电学性能的影响。结果表明,制备的AZZO透明导电薄膜为六角纤锌矿结构的多晶薄膜,且具有c轴择优取向。当溅射功率为150W时,薄膜电阻率达到最小值1.66×10–3Ω·cm,在可见光区平均透过率超过93%。 展开更多
关键词 磁控溅射 zr al共掺杂 zno 溅射功率 透明导电薄膜
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Structural, ferromagnetic, and optical properties of Fe and Al co-doped ZnO diluted magnetic semiconductor nanoparticles synthesized under high magnetic field
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作者 Muhammad Tariq Ying Li +8 位作者 Wen-Xian Li Zhong-Rui Yu Jia-Mei Li Ye-Min Hu Ming-Yuan Zhu Hong-Ming Jin Yang Liu Yi-Bing Li Katerina Skotnicova 《Advances in Manufacturing》 SCIE CAS CSCD 2019年第2期248-255,共8页
In this study, 2% Fe and 3% Al co-doped ZnO nanoparticles were synthesized using a hydrothermal method under high magnetic field (HMF). The influences of HMF on the structural, optical, and ferromagnetic properties of... In this study, 2% Fe and 3% Al co-doped ZnO nanoparticles were synthesized using a hydrothermal method under high magnetic field (HMF). The influences of HMF on the structural, optical, and ferromagnetic properties of Fe and Al co-doped ZnO nanoparticles were characterized and analyzed. The single-phase wurtzite structure of the synthesized samples was confirmed using X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), and Raman spectroscopy analysis. The application of HMF decreases the particle size of the spherical nanocrystal as observed by scanning electron microscopy (SEM). Optical analysis indicated that the absoqjtion edge shifted towards a higher wavelength (red shift). The nanoparticles synthesized under the HMF exhibited high room temperature ferromagnetism (RTFM) performance because of the high oxygen vacancy (VO) content as revealed by X-ray photoelectron spectroscopy (XPS), which was in agreement with the prediction of the bound magnetic polarons theory. 展开更多
关键词 FE and al co-doped zno NANOPARTICLES Room temperature FERROMAGNETISM (RTFM) High magnetic field Hydrothermal OPTICal property
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太阳电池用共掺杂ZnO透明导电薄膜的结构及性能 被引量:3
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作者 王辉 袁玉珍 +3 位作者 刘汉法 张化福 刘云燕 刘俊成 《太阳能学报》 EI CAS CSCD 北大核心 2011年第4期476-480,共5页
采用直流磁控溅射法在室温条件下制备出Al,压共掺杂ZnO透明导电薄膜。用XRD和SEM分析和观察了薄膜的组织结构和表面形貌,着重分析了靶基距对薄膜结构和光电性能的影响。研究结果表明,制备的灿,乙共掺杂ZnO透明导电薄膜为具有C轴择... 采用直流磁控溅射法在室温条件下制备出Al,压共掺杂ZnO透明导电薄膜。用XRD和SEM分析和观察了薄膜的组织结构和表面形貌,着重分析了靶基距对薄膜结构和光电性能的影响。研究结果表明,制备的灿,乙共掺杂ZnO透明导电薄膜为具有C轴择优取向、六角纤锌矿结构的多晶薄膜。靶基距对Al,Zr共掺杂ZnO透明导电薄膜的结构和电阻率影响显著。薄膜的厚度随靶基距的增加而变薄,在靶基距为60mm时,制备的薄膜厚度为790nm,电阻率具有最小值1.05×10^-3Ω·cm,在可见光区(500—800nm)平均透过率超过92%,在硅基薄膜太阳电池中具有良好的应用前景。 展开更多
关键词 al zr共掺杂zno 透明导电薄膜 磁控溅射 太阳电池
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