A new membrane type Al_2O_3 micromachining material is used.We develop an environmental multi-parameter detection micro-system,which implements the detection to temperature,humidity,wind speed,and CO.The test results ...A new membrane type Al_2O_3 micromachining material is used.We develop an environmental multi-parameter detection micro-system,which implements the detection to temperature,humidity,wind speed,and CO.The test results illustrate that the heat-release unit in micro-system intercross greatly affects other sensing units on the temperature.We study the method of etching process,which formed cavity to reduce the heat exchange efficiency and decrease temperature intercross effect.展开更多
Integrated gas sensor suspending bridge style micro-structure has been developed on Al_2O_3 new type membrane based on MEMS.CH_4 gas sensing unit and CO gas sensing unit were fabricated separately on 4 unit array styl...Integrated gas sensor suspending bridge style micro-structure has been developed on Al_2O_3 new type membrane based on MEMS.CH_4 gas sensing unit and CO gas sensing unit were fabricated separately on 4 unit array style suspending bridge structure.We have studied on time-sequence modulation form voltage pulse heating method which forms different work temperature展开更多
Alumina membranes without pinholes and cracks were prepared by the sol-gel process using anunordum aluminium sulphate as the starting material. The effects of different preparing conditions on morphology characteristi...Alumina membranes without pinholes and cracks were prepared by the sol-gel process using anunordum aluminium sulphate as the starting material. The effects of different preparing conditions on morphology characteristics of the membrane were investigated by scanning electron microscopy and 3D rotational microscopy. The preparing conditions include the amounts of drying control chemical additives （DCCA）, sintering procedure and sol-gel concentration. The results showed that PVA is a good crack-preventing reagent and the morphology of supported membranes was affected by ninny factors, including Al2O3 concentration, PVA/Al2O3 ratio, heating rate, membrane thickness and intrinsic defects of the substrate surface.展开更多
Al 2O 3-SiO 2-TiO 2-ZrO 2 supported membranes were prepar ed by Sol-Gel method. These composite ceramic membranes are level, even and no macro crack. There exist several crystalline phases such as Al 2O 3, TiO...Al 2O 3-SiO 2-TiO 2-ZrO 2 supported membranes were prepar ed by Sol-Gel method. These composite ceramic membranes are level, even and no macro crack. There exist several crystalline phases such as Al 2O 3, TiO 2(a natase), Al 2SiO 5, and ZrO 2 in these membranes. Changing the molar ratio of Al∶Si∶Ti∶Zr,the kinds and content of crystal phases of composite membranes could be different, which may lead to a variety of microstructure of membranes. The surface nanoscale topography and microstructure of membranes were investiga ted by XRD,SEM,AFM,EPMA. The effects of additives and heat treatments on the sur face nanoscale topography and microstructure of composite ceramic membranes were also analyzed.展开更多
Using a liquid-solid phase inversion method, a hybrid matrix poly（vinylidene fluoride）（PVDF） membrane was prepared with alumina（Al2O3） nanoparticle addition. Pd/Fe nanoparticles（NPs） were successfully immobili...Using a liquid-solid phase inversion method, a hybrid matrix poly（vinylidene fluoride）（PVDF） membrane was prepared with alumina（Al2O3） nanoparticle addition. Pd/Fe nanoparticles（NPs） were successfully immobilized on the Al2O3/PVDF membrane, which was characterized by Scanning Electron Microscopy（SEM） and Transmission Electron Microscopy（TEM）. The micrographs showed that the Pd/Fe NPs were dispersed homogeneously. Several important experimental parameters were optimized, including the mechanical properties, contact angle and surface area of Al2O3/PVDF composite membranes with different Al2O3 contents. At the same time, the ferrous ion concentration and the effect of hydrophilization were studied. The results showed that the modified Al2O3/PVDF membrane functioned well as a support. The Al2O3/PVDF membrane with immobilized Pd/Fe NPs exhibited high efficiency in terms of dichloroacetic acid（DCAA） dechlorination. Additionally, a reaction pathway for DCAA dechlorination by Pd/Fe NPs immobilized on the Al2O3/PVDF membrane system was proposed.展开更多
文摘A new membrane type Al_2O_3 micromachining material is used.We develop an environmental multi-parameter detection micro-system,which implements the detection to temperature,humidity,wind speed,and CO.The test results illustrate that the heat-release unit in micro-system intercross greatly affects other sensing units on the temperature.We study the method of etching process,which formed cavity to reduce the heat exchange efficiency and decrease temperature intercross effect.
文摘Integrated gas sensor suspending bridge style micro-structure has been developed on Al_2O_3 new type membrane based on MEMS.CH_4 gas sensing unit and CO gas sensing unit were fabricated separately on 4 unit array style suspending bridge structure.We have studied on time-sequence modulation form voltage pulse heating method which forms different work temperature
基金Project supported by National Natural Science Foundation ofChina (Grant No .20373040) Science Foundation of Science andTechnology Commission of Zhejiang Province ( Grant No .0252nm101) Science Foundation of Shanghai MunicipalCommission of Science and Technology (Grant No .0452nm019)
文摘Alumina membranes without pinholes and cracks were prepared by the sol-gel process using anunordum aluminium sulphate as the starting material. The effects of different preparing conditions on morphology characteristics of the membrane were investigated by scanning electron microscopy and 3D rotational microscopy. The preparing conditions include the amounts of drying control chemical additives （DCCA）, sintering procedure and sol-gel concentration. The results showed that PVA is a good crack-preventing reagent and the morphology of supported membranes was affected by ninny factors, including Al2O3 concentration, PVA/Al2O3 ratio, heating rate, membrane thickness and intrinsic defects of the substrate surface.
文摘Al 2O 3-SiO 2-TiO 2-ZrO 2 supported membranes were prepar ed by Sol-Gel method. These composite ceramic membranes are level, even and no macro crack. There exist several crystalline phases such as Al 2O 3, TiO 2(a natase), Al 2SiO 5, and ZrO 2 in these membranes. Changing the molar ratio of Al∶Si∶Ti∶Zr,the kinds and content of crystal phases of composite membranes could be different, which may lead to a variety of microstructure of membranes. The surface nanoscale topography and microstructure of membranes were investiga ted by XRD,SEM,AFM,EPMA. The effects of additives and heat treatments on the sur face nanoscale topography and microstructure of composite ceramic membranes were also analyzed.
基金supported by the Nature Science Foundation of Heilongjiang Province (No. B201410)the Postdoctoral Foundation Project of Heilongjiang Province (No. LBH-Z13128)+3 种基金the Science and Technology Research Program of Education Bureau of Heilongjiang Province (No. 12531206)the Special Scientific Research Projects of Harbin Normal University (12XQXG02)the National Nature Science Foundation of China (No. 41030743)the National Nature Science Foundation of China (No. 42171217)
文摘Using a liquid-solid phase inversion method, a hybrid matrix poly（vinylidene fluoride）（PVDF） membrane was prepared with alumina（Al2O3） nanoparticle addition. Pd/Fe nanoparticles（NPs） were successfully immobilized on the Al2O3/PVDF membrane, which was characterized by Scanning Electron Microscopy（SEM） and Transmission Electron Microscopy（TEM）. The micrographs showed that the Pd/Fe NPs were dispersed homogeneously. Several important experimental parameters were optimized, including the mechanical properties, contact angle and surface area of Al2O3/PVDF composite membranes with different Al2O3 contents. At the same time, the ferrous ion concentration and the effect of hydrophilization were studied. The results showed that the modified Al2O3/PVDF membrane functioned well as a support. The Al2O3/PVDF membrane with immobilized Pd/Fe NPs exhibited high efficiency in terms of dichloroacetic acid（DCAA） dechlorination. Additionally, a reaction pathway for DCAA dechlorination by Pd/Fe NPs immobilized on the Al2O3/PVDF membrane system was proposed.
