This paper presents an all-SiC fiber-optic Fabry-Perot(FP)pressure sensor based on the hydrophilic direct bonding technology for the applications in the harsh environment.The operating principle,fabrication,interface ...This paper presents an all-SiC fiber-optic Fabry-Perot(FP)pressure sensor based on the hydrophilic direct bonding technology for the applications in the harsh environment.The operating principle,fabrication,interface characteristics,and pressure response test of the proposed all-SiC pressure sensor are discussed.The FP cavity is formed by hermetically direct bonding of two-layer SiC wafers,including a thinned SiC diaphragm and a SiC wafer with an etched cavity.White light interference is used for the detection and demodulation of the sensor pressure signals.Experimental results demonstrate the sensing capabilities for the pressure range up to 800 kPa.The all-SiC structure without any intermediate layer can avoid the sensor failure caused by the thermal expansion coefficient mismatch and therefore has a great potential for pressure measurement in high temperature environments.展开更多
基金This work was supported by the National Natural Science Foundation of China(Grant No.51935011)the fund for Shanxi"1331 Project"Key Subject Construction,Shanxi Natural Science Foundation(Grant Nos.201801D121157 and 201801D221203)Scientific and Technological Innovation Programs of Higher Education Institutions in Shanxi(Grant No.1810600108MZ).
文摘This paper presents an all-SiC fiber-optic Fabry-Perot(FP)pressure sensor based on the hydrophilic direct bonding technology for the applications in the harsh environment.The operating principle,fabrication,interface characteristics,and pressure response test of the proposed all-SiC pressure sensor are discussed.The FP cavity is formed by hermetically direct bonding of two-layer SiC wafers,including a thinned SiC diaphragm and a SiC wafer with an etched cavity.White light interference is used for the detection and demodulation of the sensor pressure signals.Experimental results demonstrate the sensing capabilities for the pressure range up to 800 kPa.The all-SiC structure without any intermediate layer can avoid the sensor failure caused by the thermal expansion coefficient mismatch and therefore has a great potential for pressure measurement in high temperature environments.
