Simulations are conducted on capacitively coupled Ar/O_(2)mixed gas discharges employing a one-dimensional fluid coupled with an electron Monte Carlo(MC)model.The research explores the impact of different O_(2)ratio a...Simulations are conducted on capacitively coupled Ar/O_(2)mixed gas discharges employing a one-dimensional fluid coupled with an electron Monte Carlo(MC)model.The research explores the impact of different O_(2)ratio and pressures on the discharge characteristics of Ar/O_(2)plasma.At a fixed Ar/O_(2)gas ratio,with the increasing pressure,higher ion densities,as well as a slight increase in electron density in the bulk region can be observed.The discharge remains dominated by the drift-ambipolar(DA)mode,and the flux of O(3P)at the electrode increases with the increasing pressure due to higher background gas density,while the fluxes of O(1D)and Ardecrease due to the pronounced loss rate.With the increasing proportion of O_(2),a change in the dominant discharge mode from a mode to DA mode can be detected,and the O_(2)-associated charged particle densities are significantly increased.However,Ar+density shows a trend of increasing and then decreasing,while for neutral fluxes at the electrode,Arflux decreases,and O(3P)flux increases with the reduced Ar gas proportion,while trends in O(1D)flux show slight differences.The evolution of the densities of the charged particle and the neutral fluxes under different discharge parameters are discussed in detail using the ionization characteristics as well as the transport properties.Hopefully,more comprehensive understanding of Ar/O_(2)discharge characteristics in this work will provide a valuable reference for the industry.展开更多
The Jitang metamorphic complex is key to studying the tectonic evolution of the Northern Lancangjiang zone.Through structural-lithological mapping,structural analysis and laboratory testing,the composition of the Jita...The Jitang metamorphic complex is key to studying the tectonic evolution of the Northern Lancangjiang zone.Through structural-lithological mapping,structural analysis and laboratory testing,the composition of the Jitang metamorphic complex was determined.The macro-and microstructural analyses of the ductile detachment shear zone(Guoxuepu ductile shear zone,2–4 km wide)between the metamorphic complex and the overlying sedimentary cap show that the shear sense of the ductile shear zones is top-to-the-southeast.The presence of various deformation features and quartz C-axis electron backscatter diffraction(EBSD)fabric analysis suggests multiple deformation events occurring at different temperatures.The average stress is 25.68 MPa,with the strain rates(έ)ranging from 9.77×10^(−14)s^(−1)to 6.52×10^(−16)s^(−1).The finite strain of the Guoxuepu ductile shear zone indicates an elongated strain pattern.The average kinematic vorticity of the Guoxuepu ductile shear zone is 0.88,implying that the shear zone is dominated by simple shear.The muscovite selected from the protomylonite samples in the Guoxuepu ductile shear zone yields a 40Ar-39Ar age of 60.09±0.38 Ma.It is suggested that,coeval with the initial Indo–Eurasian collision,the development of strike-slip faults led to a weak and unstable crust,upwelling of lower crust magma,then induced the detachment of the Jitang metamorphic complex in the Eocene.展开更多
Radio frequency capacitively coupled plasmas(RF CCPs)play a pivotal role in various applications in etching and deposition processes on a microscopic scale in semiconductor manufacturing.In the discharge process,the p...Radio frequency capacitively coupled plasmas(RF CCPs)play a pivotal role in various applications in etching and deposition processes on a microscopic scale in semiconductor manufacturing.In the discharge process,the plasma series resonance(PSR)effect is easily observed in electrically asymmetric and geometrically asymmetric discharges,which could largely influence the power absorption,ionization rate,etc.In this work,the PSR effect arising from geometrically and electrically asymmetric discharge in argon-oxygen mixture gas is mainly investigated by using a plasma equivalent circuit model coupled with a global model.At relatively low pressures,as Ar content(α)increases,the inductance of the bulk is weakened,which leads to a more obvious PSR phenomenon and a higher resonance frequency(ω_(psr)).When the Ar content is fixed,varying the pressure and gap distance could also have different effects on the PSR effect.With the increase of the pressure,the PSR frequency shifts towards the higher order,but in the case of much higher pressure,the PSR oscillation would be strongly damped by frequent electron-neutral collisions.With the increase of the gap distance,the PSR frequency becomes lower.In addition,electrically asymmetric waveforms applied to a geometrically asymmetric chamber may weaken or enhance the asymmetry of the discharge and regulate the PSR effect.In this work,the Ar/O_(2) electronegative mixture gas is introduced in a capacitive discharge to study the PSR effect under geometric asymmetry effect and electrical asymmetry effect,which can provide necessary guidance in laboratory research and current applications.展开更多
基金the National Natural Science Foun-dation of China(Grant Nos.12020101005,11975067,and 12347131)the Fundamental Research Funds for the Cen-tral Universities(Grant No.DUT24BS069).
文摘Simulations are conducted on capacitively coupled Ar/O_(2)mixed gas discharges employing a one-dimensional fluid coupled with an electron Monte Carlo(MC)model.The research explores the impact of different O_(2)ratio and pressures on the discharge characteristics of Ar/O_(2)plasma.At a fixed Ar/O_(2)gas ratio,with the increasing pressure,higher ion densities,as well as a slight increase in electron density in the bulk region can be observed.The discharge remains dominated by the drift-ambipolar(DA)mode,and the flux of O(3P)at the electrode increases with the increasing pressure due to higher background gas density,while the fluxes of O(1D)and Ardecrease due to the pronounced loss rate.With the increasing proportion of O_(2),a change in the dominant discharge mode from a mode to DA mode can be detected,and the O_(2)-associated charged particle densities are significantly increased.However,Ar+density shows a trend of increasing and then decreasing,while for neutral fluxes at the electrode,Arflux decreases,and O(3P)flux increases with the reduced Ar gas proportion,while trends in O(1D)flux show slight differences.The evolution of the densities of the charged particle and the neutral fluxes under different discharge parameters are discussed in detail using the ionization characteristics as well as the transport properties.Hopefully,more comprehensive understanding of Ar/O_(2)discharge characteristics in this work will provide a valuable reference for the industry.
基金financially supported by the China Geological Survey Scientific Research Project(Grant Nos.DD20190167 and DD20190053)the National Natural Science Foundation of China(Grant No.42172259).
文摘The Jitang metamorphic complex is key to studying the tectonic evolution of the Northern Lancangjiang zone.Through structural-lithological mapping,structural analysis and laboratory testing,the composition of the Jitang metamorphic complex was determined.The macro-and microstructural analyses of the ductile detachment shear zone(Guoxuepu ductile shear zone,2–4 km wide)between the metamorphic complex and the overlying sedimentary cap show that the shear sense of the ductile shear zones is top-to-the-southeast.The presence of various deformation features and quartz C-axis electron backscatter diffraction(EBSD)fabric analysis suggests multiple deformation events occurring at different temperatures.The average stress is 25.68 MPa,with the strain rates(έ)ranging from 9.77×10^(−14)s^(−1)to 6.52×10^(−16)s^(−1).The finite strain of the Guoxuepu ductile shear zone indicates an elongated strain pattern.The average kinematic vorticity of the Guoxuepu ductile shear zone is 0.88,implying that the shear zone is dominated by simple shear.The muscovite selected from the protomylonite samples in the Guoxuepu ductile shear zone yields a 40Ar-39Ar age of 60.09±0.38 Ma.It is suggested that,coeval with the initial Indo–Eurasian collision,the development of strike-slip faults led to a weak and unstable crust,upwelling of lower crust magma,then induced the detachment of the Jitang metamorphic complex in the Eocene.
基金Project supported by the National Natural Science Foundation of China (Grant Nos.12020101005 and 11975067)。
文摘Radio frequency capacitively coupled plasmas(RF CCPs)play a pivotal role in various applications in etching and deposition processes on a microscopic scale in semiconductor manufacturing.In the discharge process,the plasma series resonance(PSR)effect is easily observed in electrically asymmetric and geometrically asymmetric discharges,which could largely influence the power absorption,ionization rate,etc.In this work,the PSR effect arising from geometrically and electrically asymmetric discharge in argon-oxygen mixture gas is mainly investigated by using a plasma equivalent circuit model coupled with a global model.At relatively low pressures,as Ar content(α)increases,the inductance of the bulk is weakened,which leads to a more obvious PSR phenomenon and a higher resonance frequency(ω_(psr)).When the Ar content is fixed,varying the pressure and gap distance could also have different effects on the PSR effect.With the increase of the pressure,the PSR frequency shifts towards the higher order,but in the case of much higher pressure,the PSR oscillation would be strongly damped by frequent electron-neutral collisions.With the increase of the gap distance,the PSR frequency becomes lower.In addition,electrically asymmetric waveforms applied to a geometrically asymmetric chamber may weaken or enhance the asymmetry of the discharge and regulate the PSR effect.In this work,the Ar/O_(2) electronegative mixture gas is introduced in a capacitive discharge to study the PSR effect under geometric asymmetry effect and electrical asymmetry effect,which can provide necessary guidance in laboratory research and current applications.
