Atmospheric Pressure Cold Argon/Oxygen Plasma Jet Assisted by Preionization of Syringe Needle Electrode

An atmospheric pressure nonequilibrium argon/oxygen plasma jet assisted by the preionization of syringe needle electrode discharge is reported. With the syringe needle plasma as its pre-ionization source, the hybrid barrier-jet was shown to generate uniform discharge with a lower breakdown voltage and a relatively low gas temperature varying from 390 K to 440 K, even when the vol.% oxygen in argon was up to 6%. Utilizing the actinometry method, the concentration of atomic oxygen was estimated to be about in an orders of magnitude of 10^17 cm^-3. The argon/oxygen plasma jet was then employed to clean out heat transfer oil, with a maximum cleaning rate of 0.1 mm/s achieved.

硅基底和金刚石基底上沉积ZnO薄膜工艺研究

采用射频磁控溅射方法分别在硅基底和金刚石基底上制备ZnO薄膜,研究了硅和金刚石衬底的不同对ZnO薄膜生长机理的影响,同时分析了氩氧比和退火温度这两个工艺参数对薄膜的晶格取向和表面形貌的影响。利用XRD和AFM对ZnO压电薄膜的性能进行了测试。结果显示,金刚石基片上制备的薄膜表面状态远优于硅基片上的薄膜表面状态;在同类型基底上生长的ZnO薄膜,薄膜的晶格取向随着氩氧比的升高而增强;对于硅基底上生长的ZnO薄膜,适当的退火能够成倍地提高薄膜的c轴取向性。