The excimer laser has important applications in many fields. Because of its non-uniform intensity distribution there are some limits in applications. This paper introduces rotational lens array to improve intensity di...The excimer laser has important applications in many fields. Because of its non-uniform intensity distribution there are some limits in applications. This paper introduces rotational lens array to improve intensity distributions. The intensity variation is reduced to 1 percent by computer simulation.展开更多
文摘The excimer laser has important applications in many fields. Because of its non-uniform intensity distribution there are some limits in applications. This paper introduces rotational lens array to improve intensity distributions. The intensity variation is reduced to 1 percent by computer simulation.
