Measurement techniques for aspheric surface parameters

Aspheric surfaces are widely used in advanced optical instruments.Measuring the aspheric surface parameters(ASPs)with high accuracy is vital for manufacturing and aligning optical aspheric surfaces.This paper provides a review of various techniques for measuring ASPs and discusses the advantages/disadvantages of these approaches.The aim of this review is to contribute to advancements in the fabrication and testing of aspheric optical elements and their practical applications in diverse fields.

Sensor-Based Inspection of the Formation Accuracy in Ultra-Precision Grinding （UPG） of Aspheric Surface Considering the Chatter Vibration

This paper proposes an experimental approach for monitoring and inspection of the formation accuracy in ultra-precision grinding （UPG） with respect to the chatter vibration. Two factors related to the grinding progress, the grinding speed of grinding wheel and spindle, and the oil pressure of the hydrostatic bearing are taken into account to determining the accuracy. In the meantime, a mathematical model of the radius deviation caused by the micro vibration is also established and applied in the experiments. The results show that the accuracy is sensitive to the vibration and the forming accuracy is much improved with proper processing parameters. It is found that the accuracy of aspheric surface can be less than 4 μm when the grinding speed is 1400r/min and the wheel speed is 100 r/min with the oil pressure being 1.1 MPa.

A Novel Method of Testing Aspherical Surface

A set-up based on a special shadow method, pinhole method, was made and some experiments were done. The results show that this novel method is simple, easy to operate,and suitable for testing large aspherical surfaces quantitatively.

Designing of Quasi-universal Compensator for Testing Aspherical Surface

According to the theory of testing aspherical surface by normal aberration compensation method,the designing method of quasi-universal compensator is studied.On the basis of third-order aberration theory,after calculating and optimizing with an optical design program,the structure parameters of a compensator are obtained.This new compensator could be used in Twyman-Green interferometer,and in measurement of a certain range of paraboloid ellipsoid and hyperboloid.The compensation accuracy is more than 0.02 λ .

SOFTWARE-CONTROLLED SYSTEM OF ULTRA-PRECISION MACHINING AXISYMMETRIC ASPHERIC MIRROR

In order to improve machining accuracy and efficiency, a software-controlled system of ultra-precision machining for axisymmetric aspheric mirror, using techniques of error compensation, remote transmission and modularization, is designed based on industrial PC, Windows 2000 work platform and Visual Basic 6.0. By experiments, this system realizes functions of ultra-precision machining, machining error compensation, remote data transmission and automatic data transformation among first machining, compensation machining and accuracy measurement. The actual application shows that error compensation improves machining accuracy, remote transmission improves machining efficiency while modularization avoids repeated work and improves design efficiency. Therefore, the system has met ultra-precision machining need for aspheric mirror.

Research on Large Depth Diameter Ratio Ultra-precision Aspheric Grinding System

In this paper, the factors of affecting surface roughness and profiles accuracy of the machined larege depth diamter ratio aspheric surfaces in ultra-precision grinding process are analyzed theoretically. An ultra-precision aspheric grinding system is then designed and manufactured. Aerostatic form is adopted to build the spindle of the workpiece, transverse guideway, longitudinal guideway and the spindle of the grinder in this system. The following specification is achieved, such as the turning accuracy of the spindle of the workpiece is 0.05 μm, radial rigidity of the spindle is GE 220N/μm, axial rigidity is GE 160 N/μm, radial rigidity of the guideway is GE 200N/μm, the highest rotational speed of the grinder is 80 000 rev/min and its turning accuracy is 0.1 μm, the resolution of linear displacement of the transverse and longitudinal guideway is 4.9 nm. Adjusting range of this adjusting mechanism is 2 mm in the Y direction, the adjusting accuracy of the precise adjusting mechanism is 0.1 μm. Micro displacement measuring system of this ultra-precision aspheric grinding adopts two-backfeed strategy, and angle displacement back-feed is realized by photoelectric encoder, it’s resolution is 655 360 pulse/rev. after 4 frequency multiplication, it’s angle displacement resolution is achieved 2 621 440 pulse/rev. Straight-line displacement is monitored by single frequency laser interferometer (DLSTAX LTM-20B, made in Japan). This CNC system adopts inimitable bi-arc step length flex CN interpolation algorithm, it’s CN system resolution is 5 nm.So this aspheric grinding system ensures profile accuracy of the machined part. The resolution of this interferometer is 5 nm. Finally, lots of ultra-precision grinding experiments are carried out on this grinding system. Some optical aspheric parts, with profiles accuracy of 0.3 μm, surface roughness less than 0.01 μm, are obtained.

Optical Antenna System Design for 3D Imaging Lidar

A new aspheric surface pre-collimation lenses system for the optical antenna of three-dimensional （3D） imaging of lidar has been optimally designed and simulated by optical design software CODE-V.Four kinds of aspheric surfaces spherical lenses including the sections of spherical,elliptical,hyperbola,and parabola have been researched.The optical system,including the elliptical cylinder lenses collimation and the optical antenna,can be realized less than 5 rad collimation angle for dot source semiconductor laser beam.

Design of a Modified Cassegrain System Used in Joint Transform Correlator

In order to detect and recognize infrared target with joint transform correlator,a modified Cassegrain optical system is designed.The main advantages of the system are large field-of-view,infrared dual-band common optical path and compact structure.In the modified Cassegrain optical system,the working wavelengths are 3.7~4.8μm and 8~12μm,the field-of-view is 4° and the aperture is 240mm.The paraboloidal primary mirror and hyperboloidal secondary mirror are all replaced by spherical surfaces.So the problems of high machining accuracy and alignment become much easier.In order to balance the aberrations,three compensating lenses are used in the system.The total length of the system is 183mm,and the ratio of the total length to focal length is 0.68.Moreover,the system has a good performance of athermalization between negative 40℃ and positive 60℃.The design results of the system show that the MTF value of each field is greater than 0.72 when the cut-off frequency is 11lp/mm.Due to the excellent image quality of the modified optical system,the ability of Joint transform correlator(JTC)applied in target tracking and identification has been improved for further.

Error compensation for three-dimensional profile measurement system

Three-dimensional （3D） profile measurement is an indispensable process for assisting the manufacture of various optic, especially aspheric surfaces. This work presents the measurement error calibration of a 3D profile measurement system, namely PMI700. Measurement errors induced by measuring tool radius, alignment error and the temperature variation were analyzed through geometry analysis and simulation. A quantitative method for the compensation of tool radius and an alignment error compensation model based on the least square method were proposed to reduce the measurement error. To verify the feasibility of PMI700, a plane and a non-uniform hyperboloidal mirror were measured by PMI700 and interferometer, respectively. The data provided by two systems were high coincident. The direct subtractions of results from two systems indicate RMS deviations for both segments were less than 0.22.