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A Study on HA Titanium Surface with Atomic Force Microscope (AFM)
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作者 杨晓喻 刘长虹 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2005年第B12期242-245,共4页
Three kinds of titanium surface especially the HA surface are analyzed. Titanium was treated by 3 kinds of methods that were acid & alkali, calcic solution and apathe solution. Samples were observed by optic micros... Three kinds of titanium surface especially the HA surface are analyzed. Titanium was treated by 3 kinds of methods that were acid & alkali, calcic solution and apathe solution. Samples were observed by optic microscope and atomic force microscope ( AFM ) . The typical surface morphology of the acid and alkali group is little holes, and on the two HA surface the tiny protuberances is typical. The surface treated by apatite solution was smoother than the two formers. The rough surface treated with acid and alkali was propitious to Ca^+ , P^- and proteins' adhesion, and the relatively smooth HA surface was of benefit to the cell adhesion. 展开更多
关键词 TITANIUM surface morphology atomic force microscope afm
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基于光偏转原理的AFM光电检测系统设计
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作者 王旭东 温阳 +3 位作者 王慧云 秦丽 温焕飞 马宗敏 《传感器与微系统》 CSCD 北大核心 2024年第3期76-79,共4页
利用光偏转原理设计并实现了原子力显微镜(AFM)的光电检测系统,研究了影响光偏转噪声的影响因素。设计了新型螺旋式嵌套结构调节准直光斑,使激光发散角降低到0.053°,利用压电陶瓷特性设计了高精度三维调节结构,可以在α,β,γ方向... 利用光偏转原理设计并实现了原子力显微镜(AFM)的光电检测系统,研究了影响光偏转噪声的影响因素。设计了新型螺旋式嵌套结构调节准直光斑,使激光发散角降低到0.053°,利用压电陶瓷特性设计了高精度三维调节结构,可以在α,β,γ方向精准调节偏转角度,36mm的聚焦焦距满足了小型化、集成化的设计目标。基于该高灵敏度光电检测系统的设计,AFM系统得到了清晰的硅材料表面台阶结构,系统分辨率达到了0.1nm,为今后的亚原子测量奠定了实验基础。 展开更多
关键词 原子力显微镜 光偏转 准直调节 压电陶瓷
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Sorting Gold and Sand(Silica) Using Atomic Force Microscope-Based Dielectrophoresis 被引量:1
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作者 Chungman Kim Sunghoon Hong +3 位作者 Dongha Shin Sangmin An Xingcai Zhang Wonho Jhe 《Nano-Micro Letters》 SCIE EI CAS CSCD 2022年第2期1-11,共11页
Additive manufacturing-also known as 3D printing-has attracted much attention in recent years as a powerful method for the simple and versatile fabrication of complicated three-dimensional structures.However,the curre... Additive manufacturing-also known as 3D printing-has attracted much attention in recent years as a powerful method for the simple and versatile fabrication of complicated three-dimensional structures.However,the current technology still exhibits a limitation in realizing the selective deposition and sorting of various materials contained in the same reservoir,which can contribute significantly to additive printing or manufacturing by enabling simultaneous sorting and deposition of different substances through a single nozzle.Here,we propose a dielectrophoresis(DEP)-based material-selective deposition and sorting technique using a pipette-based quartz tuning fork(QTF)-atomic force microscope(AFM) platform DEPQA and demonstrate multi-material sorting through a single nozzle in ambient conditions.We used Au and silica nanoparticles for sorting and obtained 95% accuracy for spatial separation,which confirmed the surfaceenhanced Raman spectroscopy(SERS).To validate the scheme,we also performed a simulation for the system and found qualitative agreement with the experimental results.The method that combines DEP,pipette-based AFM,and SERS may widely expand the unique capabilities of 3D printing and nano-micro patterning for multi-material patterning,materials sorting,and diverse advanced applications. 展开更多
关键词 Dielectrophoresis-empowered Pipette/afm platform On-demand materials sorting Additive 3D printing Multimaterial nano-patterning Nanopipette-based atomic force microscope
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IMPROVED FABRICATION METHOD FOR CARBON NANOTUBE PROBE OF ATOMIC FORCE MICROSCOPY(AFM) 被引量:1
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作者 XU Zongwei DONG Shen +1 位作者 GUO Liqiu ZHAO Qingliang 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2006年第3期373-375,共3页
An improved arc discharge method is developed to fabricate carbon nanotube probe of atomic force microscopy (AFM) here. First, silicon probe and carbon nanotube are manipulated under an optical microscope by two hig... An improved arc discharge method is developed to fabricate carbon nanotube probe of atomic force microscopy (AFM) here. First, silicon probe and carbon nanotube are manipulated under an optical microscope by two high precision microtranslators. When silicon probe and carbon nanotube are very close, several tens voltage is applied between them. And carbon nanotube is divided and attached to the end of silicon probe, which mainly due to the arc welding function. Comparing with the arc discharge method before, the new method here needs no coat silicon probe with metal film in advance, which can greatly reduce the fabrication's difficulty. The fabricated carbon nanotube probe shows good property of higher aspect ratio and can more accurately reflect the true topography of silicon grating than silicon probe. Under the same image drive force, carbon nanotube probe had less indentation depth on soft triblock copolymer sample than silicon probe. This showed that carbon nanotube probe has lower spring constant and less damage to the scan sample than silicon probe. 展开更多
关键词 Carbon nanotube (CNT) atomic force microscope afm Probe Fabrication
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基于AFM的SBS改性沥青老化过程力学特性研究 被引量:1
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作者 曲恒辉 丁昕 +4 位作者 李孟 田冬军 冯美军 王飞 王鹏 《市政技术》 2024年第1期212-218,共7页
为了探究改性沥青在老化过程中宏观与微观性能的变化,制备了掺量为5.5%的SBS改性沥青,并进行了短期与长期老化试验,分析了其基本性能指标。采用温度扫描与频率扫描试验研究了SBS改性沥青的流变性能,采用AFM试验分析了其表面微观形貌和... 为了探究改性沥青在老化过程中宏观与微观性能的变化,制备了掺量为5.5%的SBS改性沥青,并进行了短期与长期老化试验,分析了其基本性能指标。采用温度扫描与频率扫描试验研究了SBS改性沥青的流变性能,采用AFM试验分析了其表面微观形貌和耗散力,并结合力曲线分析了其黏附力及杨氏模量在老化前后的变化。研究结果表明,短期老化对SBS改性沥青流变性能的影响较小,长期老化对其流变性能影响显著,弹性模量和黏性模量均增大,呈现出变硬、变脆的特性;AFM试验表明SBS改性沥青在老化后高度增大,且蜂状结构尺寸增大、数量增多,黏附力和耗散力均降低,杨氏模量增大,验证了宏观流变试验的结果。 展开更多
关键词 afm SBS改性沥青 老化 力学特性
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Damage of DNA ends induced by mechanical force during AFM nano-manipulation
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作者 DUAN Na WANG Xinyan +2 位作者 ZHANG Chen ZHANG Yi HU Jun 《Nuclear Science and Techniques》 SCIE CAS CSCD 2013年第1期26-31,共6页
An experimental and statistical study was carried out to explore the effects of mechanical forces on the ends of linear double-stranded DNA (dsDNA) fragments. Mechanical force was applied onto individual DNA molecules... An experimental and statistical study was carried out to explore the effects of mechanical forces on the ends of linear double-stranded DNA (dsDNA) fragments. Mechanical force was applied onto individual DNA molecules during atomic force microscope (AFM)-based picking-up manipulation. By comparing the PCR efficiency of two DNA fragments with primers either at ends or at the inner regions, it was found that the ends of DNA fragments were damaged during picking-up process. 展开更多
关键词 机械力 afm DNA损伤 纳米操纵 单个DNA分子 DNA片段 诱导 原子力显微镜
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Monte Carlo method in optical atomic force microscopy
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作者 Ahemd ElMelegy Sarwat Zahwi 《Journal of Measurement Science and Instrumentation》 CAS CSCD 2021年第3期267-271,共5页
Scanning probe microscopy(SPM)is a branch of microscopy that forms images of surfaces using a physical probe that scans the specimen.Atomic force microscopy is one of the SPM family which is considered as a very versa... Scanning probe microscopy(SPM)is a branch of microscopy that forms images of surfaces using a physical probe that scans the specimen.Atomic force microscopy is one of the SPM family which is considered as a very versatile tool for surface imaging and measurements.A wide range of various samples can be measured regardless of being conductive,no-conductive,in vacuum,in air or in a fluid as a unique feature.One of the most challenges in atomic force microscopes(AFMs)is to evaluate the associated uncertainty during the surface measurements by AFMs.Here,an optical AFM is calibrated through the calibration of XYZ stage.The approach is to overcome difficulties experienced when trying to evaluate some uncertainty components which cannot be experimentally determined i.e.tip surface interaction forces and tip geometry.The Monte Carlo method is then used to determine the associated uncertainties due to such factors by randomly drawing the parameters according to their associated tolerances and their probability density functions(PDFs).The whole process follows supplement 2 to“the guide to the expression of the uncertainty in measurement”(GUM).The approach validated in the paper shows that the evaluated uncertainty in AFM is about 10 nm. 展开更多
关键词 MEASUREMENT Monte Carlo method atomic force microscope(afm) NANOMETROLOGY
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An automated AFM for nanoindentation and force related measurements
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作者 BAI Jiang-hua Andres La Rosa 《Journal of Measurement Science and Instrumentation》 CAS CSCD 2018年第4期347-353,共7页
A fully automated atomic force microscope(AFM)is presented.The mechanical motion of the AFM stage was controlled by three steppers.The fine motion of the AFM was controlled by an MCL one-axis piezo plate.A32.768kHz cr... A fully automated atomic force microscope(AFM)is presented.The mechanical motion of the AFM stage was controlled by three steppers.The fine motion of the AFM was controlled by an MCL one-axis piezo plate.A32.768kHz crystal tuning fork(TF)was used as the transducer with a probe attached.An acoustic sensor was used to measure the interactions between the probe and the sample.An SR850lock-in amplifier was used to monitor the TF signals.An additional lock-in amplifier was used to monitor the acoustic signal.A field programmable gate array(FPGA)board was used to collect the data in automatic mode.The main controller was coded with LabVIEW,which was in charge of Z-axis scan,signal processing and data visualization.A manual mode and an automatic mode were implemented in the controller.Users can switch the two modes at any time during the operation.This AFM system showed several advantages during the test operations.It is simple,flexible and easy to use. 展开更多
关键词 atomic force microscope(afm) nano indentation acoustic sensing piezo drive crystal tuning fork LabVIEW lock-in amplifier 8051microcontroller
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Carbon nanotubes as tips for atomic force microscopy
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作者 国立秋 徐宗伟 +3 位作者 赵铁强 赵清亮 张飞虎 董申 《Journal of Harbin Institute of Technology(New Series)》 EI CAS 2004年第2期223-227,共5页
Ordinary AFM probes'characters prevent the AFM' s application in various scopes. Carbon nanotubes represent ideal AFM probe materials for their higher aspect ratio, larger Young's modulus, unique chemical ... Ordinary AFM probes'characters prevent the AFM' s application in various scopes. Carbon nanotubes represent ideal AFM probe materials for their higher aspect ratio, larger Young's modulus, unique chemical structure, and well-defined electronic property. Carbon nanotube AFM probes are obtained by using a new method of attaching carbon nanotubes to the end of ordinary AFM probes, and are then used for doing AFM experiments. These experiments indicated that carbon nanotube probes have higher elastic deformation, higher resolution and higher durability. And it was also found that carbon nanotube probes ean accurately reflect the morphology of deep narrow gaps, while ordinary probes can not reflect. 展开更多
关键词 carbon nanotube atomic force microscope (afm) PROBE
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基于AFM的虚拟纳米手操作策略研究 被引量:6
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作者 侯静 吴成东 +2 位作者 董再励 李孟歆 王文学 《仪器仪表学报》 EI CAS CSCD 北大核心 2013年第5期1167-1172,共6页
针对纳米操作过程中存在的不确定性及AFM单探针带来的纳米粒子的稳定操作问题,提出了虚拟纳米手操作策略。该策略采用蒙特卡洛方法描述粒子的不确定性,在纳米粒子推动操作的运动学模型基础上,对AFM探针的作用参数进行规划,模拟多探针并... 针对纳米操作过程中存在的不确定性及AFM单探针带来的纳米粒子的稳定操作问题,提出了虚拟纳米手操作策略。该策略采用蒙特卡洛方法描述粒子的不确定性,在纳米粒子推动操作的运动学模型基础上,对AFM探针的作用参数进行规划,模拟多探针并行操作效果,将粒子的中心位置限制在规定误差范围内,从而可以避免操作过程中粒子的丢失,实现粒子的稳定高精度纳米操作,仿真结果与实验操作结果相对比,验证了虚拟纳米手操作方法的有效性。 展开更多
关键词 虚拟纳米手策略 纳米粒子 稳定纳米操作 afm
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动态AFM悬臂的高阶谐振特性研究及实验 被引量:7
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作者 黄强先 袁丹 +2 位作者 尤焕杰 赵阳 程真英 《仪器仪表学报》 EI CAS CSCD 北大核心 2013年第12期2647-2652,共6页
为了提高动态原子力显微镜(AFM)的灵敏度、分辨率、扫描速度等,基于硅悬臂器件具有多阶谐振模态的特性,提出一种利用硅悬臂高阶谐振而进行扫描测量的高阶谐振表面测量方法,并对相应动态AFM悬臂的高阶谐振特性进行了理论和实验研究。分... 为了提高动态原子力显微镜(AFM)的灵敏度、分辨率、扫描速度等,基于硅悬臂器件具有多阶谐振模态的特性,提出一种利用硅悬臂高阶谐振而进行扫描测量的高阶谐振表面测量方法,并对相应动态AFM悬臂的高阶谐振特性进行了理论和实验研究。分析了高阶谐振悬臂的工作原理,给出了悬臂的振动方程和振型函数,从理论上证明了高阶谐振悬臂较其初级谐振模式具有更高灵敏度和更高空间分辨率;由于频率的提高,悬臂的动态测量性能明显改善。基于自制的轻敲式AFM,通过实验证实了高阶谐振现象的存在;实验测得的一阶二阶谐振悬臂的灵敏度,空间分辨率和最小可探测力梯度分别为8 V/μm,17 V/μm;1.33 nm,0.47 nm;1.80×10-7N/m,0.54×10-7N/m,实验结果与理论分析结论一致;通过二阶谐振扫描获得了光栅试样表面轮廓图,证明了该高阶谐振特性研究的正确性及利用高阶谐振特性进行扫描测量的可行性。 展开更多
关键词 硅悬臂 高阶谐振 动态afm 最小可探测力梯度
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基于AFM的机器人化纳米操作中纳观力的初步研究 被引量:6
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作者 田孝军 王越超 +1 位作者 席宁 董再励 《机器人》 EI CSCD 北大核心 2007年第4期363-367,共5页
针对基于原子力显微镜(AFM)的机器人化纳米操作,对探针作用下探针—基片—微粒之间纳观力的作用规律进行了初步分析.指出起主要作用的纳观力为范德华力、接触斥力、纳米摩擦力、毛细作用力以及纳米静电力等五种,并初步推导了各种纳观力... 针对基于原子力显微镜(AFM)的机器人化纳米操作,对探针作用下探针—基片—微粒之间纳观力的作用规律进行了初步分析.指出起主要作用的纳观力为范德华力、接触斥力、纳米摩擦力、毛细作用力以及纳米静电力等五种,并初步推导了各种纳观力的表达形式.通过力—距离曲线仿真与实验验证了所进行分析的合理性;该分析有助于进行纳米操作的精确控制. 展开更多
关键词 纳观力分析 力-距离曲线 机器人化纳米操作 原子力显微镜
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DNALB膜的AFM形貌观察 被引量:2
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作者 陈霞 靳健 +6 位作者 杨文胜 杨百全 徐力 江林 白玉白 李铁津 陈曦 《高等学校化学学报》 SCIE EI CAS CSCD 北大核心 2000年第9期1459-1461,共3页
DNA/octadecylamine(ODA) monolayers were transferred onto silicon substrates and the morphologies of the monolayers were investigated by Atomic Force Microscope(AFM). AFM images show that the morphologies of DNA dissol... DNA/octadecylamine(ODA) monolayers were transferred onto silicon substrates and the morphologies of the monolayers were investigated by Atomic Force Microscope(AFM). AFM images show that the morphologies of DNA dissolved in pure water are very different from those of DNA dissolved in the NaCl solution. When DNA molecules are dissovled in pure water, they will form ball-like structure in the monolayer. When the DNA molecules are dissolved in NaCl solution, they will form bunch lines. This DNA line offers a valuable template to direct the formation of unique inorganic nanomaterials. 展开更多
关键词 LB技术 DNA分子 afm LB膜 纳米材料 排列形态
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基于AFM的靶丸表面轮廓仪设计及其测量精度分析 被引量:3
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作者 赵学森 孙涛 +3 位作者 马小军 高党忠 唐永建 董申 《纳米技术与精密工程》 EI CAS CSCD 2006年第4期307-310,共4页
基于商用原子力显微镜(AFM)建立了靶丸表面轮廓测量仪系统,并对该系统的精密回转轴系进行了结构设计.为了评价系统的测量不确定度,进行了气浮轴系回转精度测试,确定了回转轴系的误差曲线,其最小二乘圆度误差为48nm;同时对安装回转轴系后... 基于商用原子力显微镜(AFM)建立了靶丸表面轮廓测量仪系统,并对该系统的精密回转轴系进行了结构设计.为了评价系统的测量不确定度,进行了气浮轴系回转精度测试,确定了回转轴系的误差曲线,其最小二乘圆度误差为48nm;同时对安装回转轴系后AFM的测量噪声进行了测试,并通过结构改进使静态噪声幅值降为约10nm.应用这一系统进行了靶丸表面圆周迹线的测量实验,实验测量出该系统运转测量时噪声幅值约13nm,综合测量误差约49.7nm,此测量精度可以通过回转轴系的误差分离来进一步提高. 展开更多
关键词 靶丸表面轮廓仪 原于力显微镜 轴系设计 测量精度
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利用AFM和SNOM对淋巴细胞膜表面超微结构及其光学性质的初步研究 被引量:8
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作者 刘美莉 陈勇 +1 位作者 蔡继业 吴扬哲 《分子科学学报》 CAS CSCD 2005年第1期25-30,共6页
 利用原子力显微镜(AtomicForceMicroscopy,AFM)对淋巴细胞表面形貌进行了形态学的初步研究,观察到了其膜表面其他显微技术所不能发现的超微结构.同时也运用扫描近场光学显微镜(ScanningNearfieldOpticalMi croscopy,SNOM)对淋巴细胞...  利用原子力显微镜(AtomicForceMicroscopy,AFM)对淋巴细胞表面形貌进行了形态学的初步研究,观察到了其膜表面其他显微技术所不能发现的超微结构.同时也运用扫描近场光学显微镜(ScanningNearfieldOpticalMi croscopy,SNOM)对淋巴细胞进行成像,观察了其对光的透射、吸收等光学性质,并对两种成像方法进行了比较.研究发现:淋巴细胞膜表面凹凸不平,分布着大量直径几十到几百纳米不等的小颗粒;淋巴细胞中央部位有自发荧光现象.结果表明,AFM和SNOM可作为进一步探讨淋巴细胞的结构与功能关系的有力工具. 展开更多
关键词 afm 淋巴细胞膜 超微结构 光学性质 生物体 原子力显微镜技术
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AFM观察稳恒磁场对细胞表面精细结构的影响 被引量:4
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作者 齐浩 艾霞 +2 位作者 孙润广 刘颖 郭伟 《电子显微学报》 CAS CSCD 北大核心 2009年第2期150-156,共7页
利用原子力显微镜(AFM)观察稳恒磁场(SMF)处理后,悬浮生长细胞(K562人白血病细胞)、贴壁生长细胞(人结肠癌SW480细胞)、小鼠肝癌细胞Hepa1-6和原代小鼠肝细胞表面精细结构的变化,以了解SMF杀伤肿瘤细胞的可能机制。观察结果显示:随曝磁... 利用原子力显微镜(AFM)观察稳恒磁场(SMF)处理后,悬浮生长细胞(K562人白血病细胞)、贴壁生长细胞(人结肠癌SW480细胞)、小鼠肝癌细胞Hepa1-6和原代小鼠肝细胞表面精细结构的变化,以了解SMF杀伤肿瘤细胞的可能机制。观察结果显示:随曝磁时间延长,SMF可在肿瘤细胞表面造成不同程度损伤,主要表现为细胞膜上出现许多大小不一的凹陷,且凹陷数量和直径随着曝磁时间延长而增加。与MTT检测相比,AFM观察到的各类细胞表面损伤远早于细胞的生长抑制。实验观察显示,悬浮生长细胞比贴壁生长细胞对磁场处理更为敏感,小鼠肝癌细胞比肝细胞对磁处理更敏感。实验结果显示,AFM能够及早观察到细胞表面因SMF作用而产生的精细结构方面的变化。 展开更多
关键词 原子力显微镜(afm) 细胞表面结构 肿瘤细胞 稳恒磁场(SMF)
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表面活性剂及复配在云母片上吸附的AFM研究 被引量:3
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作者 毛逢银 黄小兵 +1 位作者 曹理兵 金晓伟 《润滑与密封》 EI CAS CSCD 北大核心 2006年第8期115-117,共3页
借助原子力显微镜对十二烷基硫酸钠(SDS)/十六烷基三甲基溴化铵(CTAB)及其复配溶液在云母表面的吸附以及吸附后不同的表面形貌和微摩擦特性进行了研究,探讨了摩擦力与表面形貌的关系。结果表明,SDS与CTAB表面活性剂分子都以纳米级颗粒... 借助原子力显微镜对十二烷基硫酸钠(SDS)/十六烷基三甲基溴化铵(CTAB)及其复配溶液在云母表面的吸附以及吸附后不同的表面形貌和微摩擦特性进行了研究,探讨了摩擦力与表面形貌的关系。结果表明,SDS与CTAB表面活性剂分子都以纳米级颗粒吸附于云母表面;摩擦力受表面形貌的影响,但不成一一对应关系;在0.8和2倍临界胶束浓度(CMC)下,SDS/CTAB=1∶1复配溶液在云母表面吸附后的润滑效应较其它配比好。 展开更多
关键词 阴/阳离子表面活性剂 复配 表面吸附 原子力显微镜 摩擦力
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原子力显微镜(AFM)在光盘检测及其质量控制中的应用 被引量:6
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作者 景蔚萱 蒋庄德 《光学精密工程》 EI CAS CSCD 2003年第4期368-374,共7页
Applications of Atomic Force Microscopy (AFM) in optical disc technology are summarized. AFM is ideally suited to the characterization of nanometerscale pit and bump structures in CD/DVD manufacturing, so the relati... Applications of Atomic Force Microscopy (AFM) in optical disc technology are summarized. AFM is ideally suited to the characterization of nanometerscale pit and bump structures in CD/DVD manufacturing, so the relationship between production variables and pits/bumps geometry as well as relations between pits/bumps geometry and electrical performance of discs can be established to perform direct quality control of CD/DVD manufacturing. Applications of AFM in optical disc technology mainly fall into three parts: qualitative analysis of topography of discs/stampers, semiquantitative analysis of pits/bumps geometry of discs/stampers and length analysis of data marks on bump with statistics technology. Qualitative analysis of topography of discs/stampers and semiquantitative analysis of pits/bumps geometry of discs/stampers are chiefly oriented to the measurements of high error rate at beginning of play, pit morphology and block error rate, track pitch variations, pit depth monitoring as well as bump morphology and its surface roughness. It is discovered that the efficiency of the cooling channels of the mold has deteriorated, resulting in the discs being separated from the stamper while they are too soft due to inadequate cooling in the area where high error rate and block error rate are frequently produced. Length analysis of data marks with statistics technology is aimed at the analysis of track pitch and pitch variation, bump length (offset, deviation, asymmetry) and AFM jitter, bump width and width variation, bump height and height variation as well as side wall angle (slope) and slope variation. Statistical analysis of AFM images yields important information about optical disc microstructure and in turn provides information about the performance of the manufacturing process. It is very useful to analyze geometric parameters by considering the fundamental length groups of the data marks. The obtained results demonstrate that AFM have particular advantages in the quality control of discs/stampers manufacturing. 展开更多
关键词 光盘 质量检测 原子力显微镜 质量控制 模板 凹坑 凸台 抖晃
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用于减小控制对测量影响的AFM新工作模式 被引量:3
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作者 王岳宇 赵学增 褚巍 《纳米技术与精密工程》 EI CAS CSCD 2008年第6期442-449,共8页
原子力显微镜(atomic force microscope,AFM)是纳米尺度线宽成像和测量的重要工具.但系统的非线性和控制器参数选择的多样性导致AFM控制的不确定性,影响了AFM测量结果的精确性和重复性.为克服这个缺点,分析了AFM的测量原理和工作模式的... 原子力显微镜(atomic force microscope,AFM)是纳米尺度线宽成像和测量的重要工具.但系统的非线性和控制器参数选择的多样性导致AFM控制的不确定性,影响了AFM测量结果的精确性和重复性.为克服这个缺点,分析了AFM的测量原理和工作模式的特点,在此基础上提出了一种新的工作模式——补偿模式.在这种工作模式中,结合了扫描器和悬臂梁的位置信息而得到被测试样表面的形貌图像.与恒力接触模式相比,在补偿模式下,AFM能够在高速度下以更好的精确性和重复性进行成像和测量.仿真和实验结果证明了这种新工作模式的可行性和适用性.实验结果说明该工作模式可以提高扫描速度16倍或减小均方根误差到约1/5. 展开更多
关键词 原子力显微镜 补偿模式 扫描器 悬臂梁
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基于RTLinux的AFM实时反馈控制系统 被引量:3
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作者 周娴玮 方勇纯 +1 位作者 董晓坤 张玉东 《计算机工程》 CAS CSCD 北大核心 2008年第15期226-228,共3页
为了提高原子力显微镜(AFM)的测量性能,利用RTLinux良好的实时性,设计了一种开放式的反馈控制平台,完成了基于RTLinux的AFM实时反馈控制系统的软硬件设计,并在PC上具体实现这种实时反馈系统。测试结果表明,该系统能较好地实现AFM在Z方... 为了提高原子力显微镜(AFM)的测量性能,利用RTLinux良好的实时性,设计了一种开放式的反馈控制平台,完成了基于RTLinux的AFM实时反馈控制系统的软硬件设计,并在PC上具体实现这种实时反馈系统。测试结果表明,该系统能较好地实现AFM在Z方向上的实时反馈控制。利用该平台良好的开放性,可以将各种先进的控制方法应用于AFM系统中,以提高原子力显微镜的扫描速度和精度。此外,该基于RT-Linux的AFM系统还可以扩展成为一个开放式的纳米操作平台。 展开更多
关键词 原子力显微镜 RTLinux系统 反馈控制
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