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高可靠性Cu BCE a-IGZO TFTs的制作(英文)
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作者 王晓 葛世民 李珊 《液晶与显示》 CAS CSCD 北大核心 2018年第11期925-930,共6页
背沟道刻蚀型(BCE)非晶氧化铟镓锌薄膜晶体管(a^-IGZO TFT)具有工艺简单、寄生电容小以及开口率高等优点,但BCE IGZO器件背沟道易受酸液和等离子体损伤,进而引起TFT均匀性和稳定性等方面问题,随着GOA技术的导入,对TFT器件电学性能的均... 背沟道刻蚀型(BCE)非晶氧化铟镓锌薄膜晶体管(a^-IGZO TFT)具有工艺简单、寄生电容小以及开口率高等优点,但BCE IGZO器件背沟道易受酸液和等离子体损伤,进而引起TFT均匀性和稳定性等方面问题,随着GOA技术的导入,对TFT器件电学性能的均匀性和稳定性提升的要求也日益迫切,因此开发高信赖性BCE IGZO TFT是技术和市场的迫切要求。本文主要分析了基于IGZO的背沟道刻蚀型薄膜晶体管电学性质,通过优化钝化层材料,色阻材料以及GOA TFT结构等削弱因背沟道水汽吸附引起的器件劣化,偏压温度应力测试结果显示优化后的TFT展现了良好的稳定性——在80℃,栅极30V负向偏压条件下,2 000s的ΔV_(th)小于1V。最终,利用优化的IGZO TFT制作了215.9mm(85in)8K4K120Hz液晶显示器。 展开更多
关键词 背沟道刻蚀型非晶氧化物薄膜晶体管 215.9mm(85in) 8K4K GOA
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一种新型a-IGZO TFT集成栅极驱动电路设计 被引量:1
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作者 徐宏霞 邹忠飞 董承远 《液晶与显示》 CAS CSCD 北大核心 2018年第12期996-1001,共6页
在传统集成栅驱动电路中采用非晶InGaZnO薄膜晶体管(a-IGZO TFT)后会造成信赖性的降低,经过分析确定原因为驱动TFT阈值电压漂移。本文提出了一种改进的集成栅驱动电路,通过对驱动TFT栅节点电压的稳定控制,获得了较大的驱动TFT阈值电压... 在传统集成栅驱动电路中采用非晶InGaZnO薄膜晶体管(a-IGZO TFT)后会造成信赖性的降低,经过分析确定原因为驱动TFT阈值电压漂移。本文提出了一种改进的集成栅驱动电路,通过对驱动TFT栅节点电压的稳定控制,获得了较大的驱动TFT阈值电压漂移冗余度(从原来的不到±-3V扩大到±-9V),克服了a-IGZO TFT阈值电压漂移所造成的电路失效,稳定了集成栅驱动电路并延长了液晶显示器面板的寿命。 展开更多
关键词 非晶铟镓锌氧(a-igzo) 薄膜晶体管(tft) 集成栅极驱动(GIA)
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High performance active image sensor pixel design with circular structure oxide TFT 被引量:1
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作者 Rui Geng Yuxin Gong 《Journal of Semiconductors》 EI CAS CSCD 2019年第2期29-32,共4页
We report a high-performance active image sensor pixel design by utilizing amorphous-indium-gallium-zinc-oxide(aIGZO) thin-film transistors(TFTs) with a circular structure. The TFT, configured with the inner electrode... We report a high-performance active image sensor pixel design by utilizing amorphous-indium-gallium-zinc-oxide(aIGZO) thin-film transistors(TFTs) with a circular structure. The TFT, configured with the inner electrode as source and outer electrode as drain, typically exhibits good saturation electrical characteristics, where the device has a constant drive current despite variations in drain voltage. Due to the very high output resistance exhibited by this asymmetric TFT structure with a circular shape, the pixel circuit considered here in common-drain configuration provides a higher gain of operation than a pixel circuit implemented with rectangular a-IGZO TFTs. They can be used as driving TFTs in active image sensor circuits. They are, therefore,good candidates for digital X-ray detectors in applications such as medical diagnostic procedures. 展开更多
关键词 a-igzo tft ACTIVE image sensor CIRCULAR structure high GAIN
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Fluorination-mitigated high-current degradation of amorphous InGaZnO thin-film transistors
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作者 Yanxin Wang Jiye Li +4 位作者 Fayang Liu Dongxiang Luo Yunping Wang Shengdong Zhang Lei Lu 《Journal of Semiconductors》 EI CAS CSCD 2023年第9期57-61,共5页
As growing applications demand higher driving currents of oxide semiconductor thin-film transistors(TFTs),severe instabilities and even hard breakdown under high-current stress(HCS)become critical challenges.In this w... As growing applications demand higher driving currents of oxide semiconductor thin-film transistors(TFTs),severe instabilities and even hard breakdown under high-current stress(HCS)become critical challenges.In this work,the triggering voltage of HCS-induced self-heating(SH)degradation is defined in the output characteristics of amorphous indium-galliumzinc oxide(a-IGZO)TFTs,and used to quantitatively evaluate the thermal generation process of channel donor defects.The fluorinated a-IGZO(a-IGZO:F)was adopted to effectively retard the triggering of the self-heating(SH)effect,and was supposed to originate from the less population of initial deep-state defects and a slower rate of thermal defect transition in a-IGZO:F.The proposed scheme noticeably enhances the high-current applications of oxide TFTs. 展开更多
关键词 amorphous indium-gallium-zinc oxide(a-igzo) thin-film transistors(tfts) current stress self-heating(SH) FLUORINATION
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High-performance amorphous In–Ga–Zn–O thin-film transistor nonvolatile memory with a novel p-SnO/n-SnO_(2) heterojunction charge trapping stack
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作者 熊文 霍景永 +3 位作者 吴小晗 刘文军 张卫 丁士进 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第1期580-584,共5页
Amorphous In–Ga–Zn–O(a-IGZO)thin-film transistor(TFT)memories with novel p-SnO/n-SnO_(2) heterojunction charge trapping stacks(CTSs)are investigated comparatively under a maximum fabrication temperature of 280℃.Co... Amorphous In–Ga–Zn–O(a-IGZO)thin-film transistor(TFT)memories with novel p-SnO/n-SnO_(2) heterojunction charge trapping stacks(CTSs)are investigated comparatively under a maximum fabrication temperature of 280℃.Compared to a single p-SnO or n-SnO_(2) charge trapping layer(CTL),the heterojunction CTSs can achieve electrically programmable and erasable characteristics as well as good data retention.Of the two CTSs,the tunneling layer/p-SnO/nSnO_(2)/blocking layer architecture demonstrates much higher program efficiency,more robust data retention,and comparably superior erase characteristics.The resulting memory window is as large as 6.66 V after programming at 13 V/1 ms and erasing at-8 V/1 ms,and the ten-year memory window is extrapolated to be 4.41 V.This is attributed to shallow traps in p-SnO and deep traps in n-SnO_(2),and the formation of a built-in electric field in the heterojunction. 展开更多
关键词 nonvolatile memory a-igzo thin-film transistor(tft) charge trapping stack p-SnO/n-SnO_(2)heterojunction
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非晶In-Ga-Zn-O沟道薄膜晶体管存储器研究 被引量:1
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作者 崔兴美 陈笋 丁士进 《半导体技术》 CAS CSCD 北大核心 2013年第7期481-486,共6页
非晶铟镓锌氧化物(a-IGZO)沟道薄膜晶体管存储器在先进系统面板领域具有重要的应用前景。首先阐明了a-IGZO材料在系统面板和柔性器件等应用中所具有的优势,然后对a-IGZO薄膜的制备方法及材料性能进行了归纳。最后对基于a-IGZO沟道薄膜... 非晶铟镓锌氧化物(a-IGZO)沟道薄膜晶体管存储器在先进系统面板领域具有重要的应用前景。首先阐明了a-IGZO材料在系统面板和柔性器件等应用中所具有的优势,然后对a-IGZO薄膜的制备方法及材料性能进行了归纳。最后对基于a-IGZO沟道薄膜晶体管存储器的结构、编程和擦除特性等文献报道进行了总结,重点讨论了该类存储器在通常情况下擦除效率低的原因及其改善措施。因此,对今后开发高性能a-IGZO沟道薄膜晶体管存储器具有很好的指导意义。 展开更多
关键词 非晶铟镓锌氧化物(a-igzo) 薄膜晶体管(tft) 存储器 系统面板(SoP) 柔性器件
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非晶铟镓锌氧化物薄膜晶体管电学性能研究 被引量:1
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作者 郭晓晴 《中国新技术新产品》 2016年第19期13-14,共2页
非晶态氧化物半导体材料因其优良的性能而发展迅速,而非晶铟镓锌氧化物薄膜晶体管(a-IGZO TFT)更是凭借其电学特性的优良以及高可见光透过率而成为研究的热点。本文综述了a-IGZO TFT与非晶硅TFT(a-Si∶H)在载流子迁移率、亚阈值摆幅等... 非晶态氧化物半导体材料因其优良的性能而发展迅速,而非晶铟镓锌氧化物薄膜晶体管(a-IGZO TFT)更是凭借其电学特性的优良以及高可见光透过率而成为研究的热点。本文综述了a-IGZO TFT与非晶硅TFT(a-Si∶H)在载流子迁移率、亚阈值摆幅等电学特性方面产生较大差异的原因,并且探究了a-IGZO TFT的沟道宽度对其电学性能的影响。 展开更多
关键词 a-igzo tft 电学特性 沟道宽度
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Analytical drain current model for amorphous IGZO thin-film transistors in above-threshold regime 被引量:2
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作者 何红宇 郑学仁 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2011年第7期34-37,共4页
An analytical drain current model is presented for amorphous In-Ga-Zn-oxide thin-film transistors in the above-threshold regime,assuming an exponential trap states density within the bandgap.Using a charge sheet appro... An analytical drain current model is presented for amorphous In-Ga-Zn-oxide thin-film transistors in the above-threshold regime,assuming an exponential trap states density within the bandgap.Using a charge sheet approximation,the trapped and free charge expressions are calculated,then the surface potential based drain current expression is developed.Moreover,threshold voltage based drain current expressions are presented using the Taylor expansion to the surface potential based drain current expression.The calculated results of the surface potential based and threshold voltage based drain current expressions are compared with experimental data and good agreements are achieved. 展开更多
关键词 amorphous In-Ga-Zn-oxide(a-igzo thin-film transistors(tfts) surface potential threshold voltage trap states
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