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975 nm multimode semiconductor lasers with high-order Bragg diffraction gratings
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作者 Zhenwu Liu Li Zhong +1 位作者 Suping Liu Xiaoyu Ma 《Journal of Semiconductors》 EI CAS CSCD 2024年第3期38-44,共7页
The 975 nm multimode diode lasers with high-order surface Bragg diffraction gratings have been simulated and calcu-lated using the 2D finite difference time domain(FDTD)algorithm and the scattering matrix method(SMM).... The 975 nm multimode diode lasers with high-order surface Bragg diffraction gratings have been simulated and calcu-lated using the 2D finite difference time domain(FDTD)algorithm and the scattering matrix method(SMM).The periods and etch depth of the grating parameters have been optimized.A board area laser diode(BA-LD)with high-order diffraction grat-ings has been designed and fabricated.At output powers up to 10.5 W,the measured spectral width of full width at half maxi-mum(FWHM)is less than 0.5 nm.The results demonstrate that the designed high-order surface gratings can effectively nar-row the spectral width of multimode semiconductor lasers at high output power. 展开更多
关键词 laser diodes distributed bragg reflector high order gratings high power laser diodes narrow spectrum width
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基于方向领导粒子群算法的Bragg光栅测量土壤水分研究
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作者 邵明省 《广东水利电力职业技术学院学报》 2024年第2期40-43,53,共5页
为提高Bragg光栅测量土壤水分效果,提出方向领导粒子群算法。首先建立光纤Bragg光栅反射谱中心波长与温度变化关系。接着通过粒子适应度标准差选择领导粒子,采用不同的策略调整方向领导粒子飞行速度,收缩因子限制粒子离开搜索空间的可... 为提高Bragg光栅测量土壤水分效果,提出方向领导粒子群算法。首先建立光纤Bragg光栅反射谱中心波长与温度变化关系。接着通过粒子适应度标准差选择领导粒子,采用不同的策略调整方向领导粒子飞行速度,收缩因子限制粒子离开搜索空间的可能性。然后以最小化最大折射率调制深度为优化目标,最后给出算法流程。实验显示方向领导粒子群算法对粉壤土、细砂土测量比较接近真实值,评价指标较优。 展开更多
关键词 bragg光栅 方向领导 测量 土壤
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Mechanism of Bragg Diffraction-Assisted Light Extraction in GaN-based Light-Emitting Diodes Based on a Self-Consistent Model
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作者 LIU Wen-De GAN Zi-Zhao 《Communications in Theoretical Physics》 SCIE CAS CSCD 2009年第9期545-548,共4页
By introducing the distribution of the light energy density in GaN-based light-emitting diode (LED),theLED model based on the incoherent regime and the light extraction efficiency are investigated.The energy density a... By introducing the distribution of the light energy density in GaN-based light-emitting diode (LED),theLED model based on the incoherent regime and the light extraction efficiency are investigated.The energy density asa function of the angle of incidence is calculated to demonstrate the mechanism of the light extraction.The deviationbetween the tendencies of the transmissivity of the output layer and the extraction efficiency is also demonstrated. 展开更多
关键词 light-emitting diodes extraction efficiency bragg diffraction photonic crystals
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Multifrequency Magneto-optic Bragg Diffraction and Radio Frequency Signal Parallel Processing
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作者 SHANG Dan WU Bao-jian QIU Kun 《Semiconductor Photonics and Technology》 CAS 2008年第1期22-27,共6页
Magneto-optic(MO)coupling of guided optical waves with microwave magnetostatic waves(MSWs)simultaneously excited by multiple radio frequency(RF)signals can lead to multifrequency diffraction effects and then parallel ... Magneto-optic(MO)coupling of guided optical waves with microwave magnetostatic waves(MSWs)simultaneously excited by multiple radio frequency(RF)signals can lead to multifrequency diffraction effects and then parallel processing of RF signals can be realized by using of the characteristics that diffraction efficiencies(DEs)are approximately in direct proportion to RF signals intensities and diffraction angles are related to frequencies of the corresponding RF signals within linear MO interaction region.In this paper,studied is the multifrequency MO Bragg diffraction in first-order MO interaction approximation,and obtained was the approximate analytical expression for principle diffraction efficiency(PDE).Also,put forward was a parallel imaging method of relative intensity of RF signals based on single-frequency diffraction.By calculation and analysis,it is shown that the relative error is not more than 0.3dB for the case of three RF signals within the frequency space of 60MHz. 展开更多
关键词 microwave magneto-optic effect parallel spectrum analysis magnetostatic forward volumewave bragg diffraction efficiency
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BRIGHT:the three-dimensional X-ray crystal Bragg diffraction code
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作者 Nan-Shun Huang Kai Li Hai-Xiao Deng 《Nuclear Science and Techniques》 SCIE CAS CSCD 2019年第3期28-36,共9页
In pursuit of a fully coherent X-ray free-electron laser(FEL), highly reflective Bragg crystals are used and will be used as a highly selective spectral filter in hard X-ray self-seeding FELs and X-ray FEL oscillators... In pursuit of a fully coherent X-ray free-electron laser(FEL), highly reflective Bragg crystals are used and will be used as a highly selective spectral filter in hard X-ray self-seeding FELs and X-ray FEL oscillators(XFELO), respectively. However, currently, when simulating self-seeding and XFELO, the three-dimensional effect of Bragg diffraction is not fully considered. In this paper, we derive a comprehensive solution for the response function of the crystal in Bragg diffraction. A three-dimensional X-ray crystal Bragg diffraction code, named BRIGHT, is introduced, which can be combined with other FEL-related codes, e.g., GENESIS and OPC. Performance and feasibility are assessed using two numerical examples,namely a self-seeding experiment for the linac coherent light source and XFELO options for Shanghai high repetition rate XFEL. The results indicate that BRIGHT provides a new and useful tool for three-dimensional modeling of FEL. 展开更多
关键词 X-RAY bragg diffraction SELF-SEEDING XFELO
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Photoluminescence and X-ray Diffraction of Distributed Bragg Reflector
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作者 LILin LIUWen-li LUBin JUGuo-xian ZHANGYong-ming HAOYong-qin SUWei ZHONGJing-chang 《Semiconductor Photonics and Technology》 CAS 2004年第3期179-181,193,共4页
Spectral and structural characteristics of distributed Bragg reflector (DBR) in vertical-cavity surface-emitting lasers were studied with photoluminescence and double-crystal X-ray diffraction measurement.The expected... Spectral and structural characteristics of distributed Bragg reflector (DBR) in vertical-cavity surface-emitting lasers were studied with photoluminescence and double-crystal X-ray diffraction measurement.The expected high quality epitaxial DBR structure was verified.In the X-ray double-crystal rocking curves of DBR the zeroth-order peak,the first and second order satellite peaks were measured.Splitting of diffraction peak appeared in the rocking curves was analyzed.The effects of introduced deep energy levels on the structural perfection and optical properties were discussed. 展开更多
关键词 Distributed bragg reflector PHOTOLUMINESCENCE Double-crystal X-ray diffraction
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Microstructures and micromechanical behaviors of high -entropy alloys investigated by synchrotron X-ray and neutron diffraction techniques: A review 被引量:1
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作者 Yubo Huang Ning Xu +3 位作者 Huaile Lu Yang Ren Shilei Li Yandong Wang 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 2024年第6期1333-1349,共17页
High-entropy alloys(HEAs)possess outstanding features such as corrosion resistance,irradiation resistance,and good mechan-ical properties.A few HEAs have found applications in the fields of aerospace and defense.Exten... High-entropy alloys(HEAs)possess outstanding features such as corrosion resistance,irradiation resistance,and good mechan-ical properties.A few HEAs have found applications in the fields of aerospace and defense.Extensive studies on the deformation mech-anisms of HEAs can guide microstructure control and toughness design,which is vital for understanding and studying state-of-the-art structural materials.Synchrotron X-ray and neutron diffraction are necessary techniques for materials science research,especially for in situ coupling of physical/chemical fields and for resolving macro/microcrystallographic information on materials.Recently,several re-searchers have applied synchrotron X-ray and neutron diffraction methods to study the deformation mechanisms,phase transformations,stress behaviors,and in situ processes of HEAs,such as variable-temperature,high-pressure,and hydrogenation processes.In this review,the principles and development of synchrotron X-ray and neutron diffraction are presented,and their applications in the deformation mechanisms of HEAs are discussed.The factors that influence the deformation mechanisms of HEAs are also outlined.This review fo-cuses on the microstructures and micromechanical behaviors during tension/compression or creep/fatigue deformation and the application of synchrotron X-ray and neutron diffraction methods to the characterization of dislocations,stacking faults,twins,phases,and intergrain/interphase stress changes.Perspectives on future developments of synchrotron X-ray and neutron diffraction and on research directions on the deformation mechanisms of novel metals are discussed. 展开更多
关键词 high-entropy alloys MICROSTRUCTURES micromechanical behaviors synchrotron X-ray diffraction neutron diffraction
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Bragg-Angle Diffraction in Slant Gratings Fabricated by Single-Beam Interference Lithography
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作者 Xinping Zhang Shengfei Feng Tianrui Zhai 《Optics and Photonics Journal》 2012年第1期13-16,共4页
A single-beam interference-lithography scheme is demonstrated for the fabrication of large-area slant gratings, which requires exposure of the photoresist thin film spin-coated on a glass plate with polished side-wall... A single-beam interference-lithography scheme is demonstrated for the fabrication of large-area slant gratings, which requires exposure of the photoresist thin film spin-coated on a glass plate with polished side-walls to a single laser beam in the ultraviolet and requires small coherence length of the laser. No additional beam splitting scheme and no adjustments for laser-beam overlapping and for optical path-length balancing are needed. Bragg-angle diffractions are observed as strong optical extinction that is tunable with changing the angle of incidence. This device is important for the design of efficient filters, beam splitters, and photonic devices. 展开更多
关键词 Slant GRATING SINGLE-BEAM Interference Lithography bragg-Angle diffraction
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An introduction to Bragg diffraction-based cold atom interferometry gravimeter
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作者 HU Qingqing YANG Jun +3 位作者 LUO Yukun JIA Aiai WEI Chunhua LI Zehuan 《Instrumentation》 2015年第4期47-55,共9页
This paper presents a new type of cold atom interferometry gravimeter based on Bragg diffraction,w hich is able to increase the gravity m easurem ent sensitivity and stability of com m on Ram an atom gravim eters sign... This paper presents a new type of cold atom interferometry gravimeter based on Bragg diffraction,w hich is able to increase the gravity m easurem ent sensitivity and stability of com m on Ram an atom gravim eters significantly. By com paring w ith Ram an transition,the principles and advantages of Bragg diffraction-based atom gravim eters have been introduced. The theoretical m odel for a tim e-dom ain Bragg atom gravim eter has been constructed. Som e key technical requirem ents for an n-order Bragg diffraction-based atom gravim eter have been deduced,including the tem perature of atom cloud,the diam eter,curvature radius,frequency,intensity,and tim ing sequence of Bragg lasers,etc. The analysis results are verified by the existing experim ental data in discussion. The present study provides a good reference for the understanding and construction of a Bragg atom gravim eter. 展开更多
关键词 cold ATOM INTERFEROMETRY GRAVIMETER n-order bragg diffraction large MOMENTUM transfer.
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基于光纤Bragg光栅的模型桨叶弯矩解耦方法
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作者 徐诗恒 陈焕 +1 位作者 刘正江 程起有 《科技与创新》 2024年第2期129-131,135,共4页
近年来,光纤Bragg光栅(FBGFiber Bragg Grating,FBG)这种具有体积小、质量轻、抗电磁干扰能力强、可实现准分布式测量等独特优势的新型传感器受到了人们的广泛关注。为了实现其在直升机飞行试验中的工程应用,引入基于应变差值计算的桨... 近年来,光纤Bragg光栅(FBGFiber Bragg Grating,FBG)这种具有体积小、质量轻、抗电磁干扰能力强、可实现准分布式测量等独特优势的新型传感器受到了人们的广泛关注。为了实现其在直升机飞行试验中的工程应用,引入基于应变差值计算的桨叶弯矩解耦方法,通过标定实验确定不同光纤Bragg光栅组合桥路测量弯矩的耦合系数,选择最优弯矩解耦组合桥路,完成载荷标定。实验结果表明,光纤Bragg光栅传感器适用于直升机桨叶弯矩测量,可以实现挥舞、摆振、扭转弯矩的有效解耦和准分布式测量。 展开更多
关键词 光纤bragg光栅 弯矩解耦 桨叶标定 直升机飞行试验
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准确检测液位的光纤Bragg光栅弹性膜片传感器
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作者 杜锋 姚建南 +3 位作者 陶奕霏 许愿 丁超 刘洋 《压电与声光》 CAS 北大核心 2024年第5期794-800,共7页
为了准确测量液位,研制了一种耦合光纤布喇格光栅和弹性膜片的液位传感器。该传感器由两个光纤光栅(FBG_1和FBG_2)、弹性膜片、弹性橡胶密封垫片、空心管(导气管)和光纤光栅固定装置组成。光纤光栅固定装置材料为聚甲基丙烯酸甲酯。FBG_... 为了准确测量液位,研制了一种耦合光纤布喇格光栅和弹性膜片的液位传感器。该传感器由两个光纤光栅(FBG_1和FBG_2)、弹性膜片、弹性橡胶密封垫片、空心管(导气管)和光纤光栅固定装置组成。光纤光栅固定装置材料为聚甲基丙烯酸甲酯。FBG_1和FBG_2固定在弹性膜片表面。FBG_1用于监测液位高度和温度。将FBG_2封装在不锈钢毛细管中进行温度检测,消除液相温度变化对液位测量的负面影响。为了提高传感器检测液位的线性度,实验研究了弹性膜片厚度对液位测量结果的影响,并在此基础上研究了液位变化率和外部振动对液位测量精度的影响。结果表明,当弹性膜片厚度为2 mm时,传感器检测液位的线性范围为0~380 cm,灵敏度为(19.65±6.3)pm/cm。该传感器可在0~100 cm/min液位变化速率和0~5.27 mm/s外部振动强度范围内准确监测液位,最大检测误差为7.2%。 展开更多
关键词 光纤布喇格光栅 液位传感器 测量范围 精度 灵敏度
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基于光纤Bragg光栅超声复合检测金属腐蚀与振动状态方法研究
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作者 葛峰 别雄波 +3 位作者 武惠华 张兴红 钟年丙 何雪丰 《激光杂志》 CAS 北大核心 2024年第2期78-84,共7页
为了实现钢板腐蚀前后及冲击振动状态复合检测,构建了基于光纤布拉格光栅(FBG)超声检测系统。首先分析了基于可调激光光源的光纤光栅的解调原理。在此基础上,实验研究了钢板腐蚀前后的兰姆波信号变化规律,分析了钢板在不同垂直冲击强度... 为了实现钢板腐蚀前后及冲击振动状态复合检测,构建了基于光纤布拉格光栅(FBG)超声检测系统。首先分析了基于可调激光光源的光纤光栅的解调原理。在此基础上,实验研究了钢板腐蚀前后的兰姆波信号变化规律,分析了钢板在不同垂直冲击强度撞击下的时频变化特性以及钢板腐蚀前后冲击振动信号的时频变化规律。研究表明:所搭建的光纤布拉格光栅超声检测系统能够有效地实现钢板腐蚀及冲击振动信号的复合检测,通过兰姆波信号的幅值大小及是否有新的频率分量出现,可以准确识别钢板是否遭受腐蚀。冲击信号的幅值变化与冲击大小存在线性关系,同时通过频域分析证明钢板腐蚀后的频率各分量平均呈现出12 Hz右移。 展开更多
关键词 光纤布拉格光栅 腐蚀 兰姆波 振动 超声波 钢板
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Metasurface-driven dots projection based on generalized Rayleigh-Sommerfeld diffraction theory
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作者 Tianlun Jin Chenxu Zhu +7 位作者 Yang Qiu Xingyan Zhao Qize Zhong Yuan Dong Qinghua Song Bo Cui Shaonan Zheng Ting Hu 《Chinese Optics Letters》 SCIE EI CAS CSCD 2024年第10期112-117,共6页
The diffractive optical element(DOE)is an important component of three-dimensional(3D)imaging systems based on structured light.In this work,we designed the metasurface-driven DOEs based on generalized Rayleigh–Somme... The diffractive optical element(DOE)is an important component of three-dimensional(3D)imaging systems based on structured light.In this work,we designed the metasurface-driven DOEs based on generalized Rayleigh–Sommerfeld diffraction theory to project large field of view(FOV)pseudo-random dot array for 3D imaging.We measured an efficiency of 61.04%and root-mean-square error(RMSE)of 0.45 for the 60°FOV sample and an efficiency of 42.96%and RMSE of 0.75 for the 144°FOV sample.Because the pattern is designed based on the generalized Rayleigh–Sommerfeld diffraction theory,the projected pattern is similar to the target pattern and has even intensity. 展开更多
关键词 metasurface diffractive optical element Rayleigh–Sommerfeld diffraction structured light
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Direct visualization of laser-driven dynamic fragmentation in tin by in situ x-ray diffraction
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作者 Jing Yang Xinxin Wang +9 位作者 Liang Xu Qiannan Wang Yi Sun Jiangtao Li Lin Zhang Yinghua Li Yuying Yu Pei Wang Qiang Wu Jianbo Hu 《Matter and Radiation at Extremes》 SCIE EI CSCD 2024年第5期109-114,共6页
We present a novel method for investigating laser-driven dynamic fragmentation in tin using in situ X-ray diffraction.Our experimental results demonstrate the feasibility of the method for simultaneously identifying t... We present a novel method for investigating laser-driven dynamic fragmentation in tin using in situ X-ray diffraction.Our experimental results demonstrate the feasibility of the method for simultaneously identifying the phase and temperature of fragments through analysis of the diffraction pattern.Surprisingly,we observe a deviation from the widely accepted isentropic release assumption,with the temperature of the fragments being found to be more than 100 K higher than expected,owing to the release of plastic work during dynamic fragmentation.Our findings are further verified through extensive large-scale molecular dynamics simulations,in which strain energies are found to be transferred into thermal energies during the nucleation and growth of voids,leading to an increase in temperature.Our findings thus provide crucial insights into the impact-driven dynamic fragmentation phenomenon and reveal the significant influence of plastic work on material response during shock release. 展开更多
关键词 DYNAMIC RELEASE diffraction
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Intensity correlation properties of x-ray beams split with Laue diffraction
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作者 赵昌哲 司尚禹 +3 位作者 张海鹏 薛莲 李中亮 肖体乔 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第1期379-383,共5页
Beam splitting is one of the main approaches to achieving x-ray ghost imaging, and the intensity correlation between diffraction beam and transmission beam will directly affect the imaging quality. In this paper, we i... Beam splitting is one of the main approaches to achieving x-ray ghost imaging, and the intensity correlation between diffraction beam and transmission beam will directly affect the imaging quality. In this paper, we investigate the intensity correlation between the split x-ray beams by Laue diffraction of stress-free crystal. The analysis based on the dynamical theory of x-ray diffraction indicates that the spatial resolution of diffraction image and transmission image are reduced due to the position shift of the exit beam. In the experimental setup, a stress-free crystal with a thickness of hundredmicrometers-level is used for beam splitting. The crystal is in a non-dispersive configuration equipped with a double-crystal monochromator to ensure that the dimension of the diffraction beam and transmission beam are consistent. A correlation coefficient of 0.92 is achieved experimentally and the high signal-to-noise ratio of the x-ray ghost imaging is anticipated.Results of this paper demonstrate that the developed beam splitter of Laue crystal has the potential in the efficient data acquisition of x-ray ghost imaging. 展开更多
关键词 x-ray ghost imaging beam splitting with Laue diffraction intensity correlation dynamical theory of x-ray diffraction
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Dispersion Relations in Diffraction in Time
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作者 Salvador Godoy Karen Villa 《Applied Mathematics》 2024年第7期464-468,共5页
In agreement with Titchmarsh’s theorem, we prove that dispersion relations are just the Fourier-transform of the identity, g(x′)=±Sgn(x′)g(x′), which defines the property of being a truncated functions at the... In agreement with Titchmarsh’s theorem, we prove that dispersion relations are just the Fourier-transform of the identity, g(x′)=±Sgn(x′)g(x′), which defines the property of being a truncated functions at the origin. On the other hand, we prove that the wave-function of a generalized diffraction in time problem is just the Fourier-transform of a truncated function. Consequently, the existence of dispersion relations for the diffraction in time wave-function follows. We derive these explicit dispersion relations. 展开更多
关键词 diffraction in Time Dispersion Relations Hilbert Transforms
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Surface diffraction beamline at the SSRF
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作者 Yue-Liang Gu Xu Zheng +6 位作者 Xing-Min Zhang Bin Zhao Guang-Zhi Yin Da-Ming Zhu Yuan-He Sun Xing-Yu Gao Xiao-Long Li 《Nuclear Science and Techniques》 SCIE EI CAS CSCD 2024年第7期47-57,共11页
BL02U2 of the Shanghai Synchrotron Radiation Facility is a surface diffraction beamline with a photon flux of 5.5×10^(12) photons/s at 10 keV and a beam size of 160µm×80µm at the sample site.It is ... BL02U2 of the Shanghai Synchrotron Radiation Facility is a surface diffraction beamline with a photon flux of 5.5×10^(12) photons/s at 10 keV and a beam size of 160µm×80µm at the sample site.It is dedicated to studying surfaces(solid-vacuum,solid-gas)and interfaces(solid-solid,solid-liquid,and liquid-liquid)in nanoscience,condensed matter,and soft matter systems using various surface scattering techniques over an energy range of 4.8-28 keV with transmission and reflection modes.Moreover,BL02U2 has a high energy resolution,high angular resolution,and low beam divergence,which can provide excellent properties for X-ray diffraction experiments,such as grazing incident X-ray diffraction,X-ray reflectivity,crystal truncation rods,and liquid X-ray scattering.Diversity of in situ environments can also be provided for the samples studied.This paper describes the setup of the new beamline and its applications in various fields. 展开更多
关键词 Surface and interface BEAMLINE Surface diffraction MICROSTRUCTURE
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Analytical Method for the Wave Diffraction of Asymmetrically Arranged Breakwaters
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作者 ZHOU Pei-xin ZHANG Hong-sheng 《China Ocean Engineering》 SCIE EI CSCD 2024年第5期797-808,共12页
The layout forms of several breakwater structures can be generalized as asymmetrical arrangements in actual engineering.However,the problem of wave diffraction around asymmetrically arranged breakwaters has not been a... The layout forms of several breakwater structures can be generalized as asymmetrical arrangements in actual engineering.However,the problem of wave diffraction around asymmetrically arranged breakwaters has not been adequately investigated.In this study,we propose an analytical method of wave diffraction for regular waves passing through asymmetrically arranged breakwaters,and we use the Nyström method to obtain the analytical solution numerically.We compared the results of this method with those of previous analytical solutions and with numerical results to demonstrate the validity of our approach.We also provided diffraction coefficient diagrams of breakwaters with different layout forms.Moreover,we described the analytical expression for the problem of diffraction through long-wave incident breakwaters and presented an analysis of the relationship between the diffraction coefficients and the widths of breakwater gates.The analytical method presented in this study contributes to the limited literature on the theory of wave diffraction through asymmetrically arranged breakwaters. 展开更多
关键词 regular waves BREAKWATERS analytical method wave diffraction
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Neutron Back-and Front-Face Bragg Diffraction on a Thin Si Single Crystal Excited by Ultrasound
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作者 E.Raitman V.Gavrilov +3 位作者 D.Mjasischev Ju.Ekmanis A.Hoser T.Hoffmann 《Journal of Modern Physics》 2015年第1期37-45,共9页
In this research project, we measured and analyzed the spatial distribution of neutron beam Bragg diffracted from the front- and back-faces of thin Si single crystal undergoing on ultrasound excitation. For the perfec... In this research project, we measured and analyzed the spatial distribution of neutron beam Bragg diffracted from the front- and back-faces of thin Si single crystal undergoing on ultrasound excitation. For the perfect crystal, it is shown that when the acoustic wave amplitude is increased, the front-face peak position remains unchanged and its value grows linearly. The values of ultrasound wave amplitude were determined. The back-face peak becomes asymmetric and tends to disappear. New types of Pendellosung fringes in the center of the diffraction profiles were observed at the first time. It is supposed that in the perfect crystal this effect may be due to the appearance of the new “sonic” extinction length, depending on the amplitude of the ultrasonic wave. Thus, it leads to the new interference interactions between neutron wave and ultrasonic phonons. It is established that within the framework of the dynamical theory of the neutron scattering, some asymptotic models valid for the case of Laue geometry as well as Kato’s quasi-classical approximation can be applied in the case of Bragg geometry also. Good agreement between experimental data and the theory has been obtained. 展开更多
关键词 Neutron diffraction ULTRASOUND Pendellosung
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A novel self-alignment method for high precision silicon diffraction microlens arrays preparation and its integration with infrared focal plane arrays
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作者 HOU Zhi-Jin CHEN Yan +2 位作者 WANG Xu-Dong WANG Jian-Lu CHU Jun-Hao 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 2024年第5期589-594,共6页
Silicon(Si)diffraction microlens arrays are usually used to integrating with infrared focal plane arrays(IRFPAs)to improve their performance.The errors of lithography are unavoidable in the process of the Si diffrac-t... Silicon(Si)diffraction microlens arrays are usually used to integrating with infrared focal plane arrays(IRFPAs)to improve their performance.The errors of lithography are unavoidable in the process of the Si diffrac-tion microlens arrays preparation in the conventional engraving method.It has a serious impact on its performance and subsequent applications.In response to the problem of errors of Si diffraction microlens arrays in the conven-tional method,a novel self-alignment method for high precision Si diffraction microlens arrays preparation is pro-posed.The accuracy of the Si diffractive microlens arrays preparation is determined by the accuracy of the first li-thography mask in the novel self-alignment method.In the subsequent etching,the etched area will be protected by the mask layer and the sacrifice layer or the protective layer.The unprotection area is carved to effectively block the non-etching areas,accurately etch the etching area required,and solve the problem of errors.The high precision Si diffraction microlens arrays are obtained by the novel self-alignment method and the diffraction effi-ciency could reach 92.6%.After integrating with IRFPAs,the average blackbody responsity increased by 8.3%,and the average blackbody detectivity increased by 10.3%.It indicates that the Si diffraction microlens arrays can improve the filling factor and reduce crosstalk of IRFPAs through convergence,thereby improving the perfor-mance of the IRFPAs.The results are of great reference significance for improving their performance through opti-mizing the preparation level of micro nano devices. 展开更多
关键词 SELF-ALIGNMENT diffraction microlens arrays high precision INTEGRATION SI IRFPAs
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