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多弧法沉积Ti(C,N)膜中的CN相 被引量:3
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作者 辛煜 范叔平 +2 位作者 甘肇强 金宗明 杨礼富 《功能材料》 EI CAS CSCD 北大核心 1997年第6期612-614,共3页
在高速钢基片和〈100〉单晶硅片上,用多弧法在C2H2,N2,Ar的气氛中电弧蒸发Ti靶来制备沉积Ti(C,N)膜。总气压在1.2Pa内,起始镀膜温度为260℃。Ti(C,N)膜的晶格取向以除了〈111〉,〈200〉... 在高速钢基片和〈100〉单晶硅片上,用多弧法在C2H2,N2,Ar的气氛中电弧蒸发Ti靶来制备沉积Ti(C,N)膜。总气压在1.2Pa内,起始镀膜温度为260℃。Ti(C,N)膜的晶格取向以除了〈111〉,〈200〉,〈220〉外,还出现了一些新的衍射峰,配合XPS成份分析,本文认为Ti(C,N)膜中有CN结构相存在。随着C2H2/N2流量比的增加,膜中增加了TiC、CN结构超硬相和石墨相,从而导致了Ti(C,N)薄膜硬度的增加。 展开更多
关键词 氮化钛 碳化钛 薄膜 多弧法 c-n结构
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Computation of Diffusion Activation Energies of C, N in γFe 被引量:2
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作者 苏文勇 张瑞林 邵彬 《Journal of Beijing Institute of Technology》 EI CAS 2002年第1期105-108,共4页
A structure relaxation model based on the empirical electron theory of solids and molecules is developed to compute the diffusion active energies of C, N in γFe. First, adding a restriction, the lattice maintains rig... A structure relaxation model based on the empirical electron theory of solids and molecules is developed to compute the diffusion active energies of C, N in γFe. First, adding a restriction, the lattice maintains rigidity when solute atom migrates to the saddle point. In this step, the hybridization classes of every atom do not change. Then, the restriction is loosed and the atoms are relaxed under the coulomb repulsive forces. It is supposed that the energy needed in the first step would be compensated partly by the second step. In this way, the diffusion active energies of C, N in γFe are computed. Compared with the experiment data, the relative errors are less than 5%, which are good results in the computation of activation energy of diffusion. 展开更多
关键词 diffusion active energy empirical electron theory electronic structure
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