随着Si片尺寸加大和特征尺寸的缩小,对Si片的洁净程度、表面的化学态以及表面缺陷等要求越来越高。针对300 mm 65 nm Cu互连晶片清洗后表面常出现边缘和辐射状污染的问题。在理论分析的基础上,研究了缩短化学药液喷射臂和去离子水喷射...随着Si片尺寸加大和特征尺寸的缩小,对Si片的洁净程度、表面的化学态以及表面缺陷等要求越来越高。针对300 mm 65 nm Cu互连晶片清洗后表面常出现边缘和辐射状污染的问题。在理论分析的基础上,研究了缩短化学药液喷射臂和去离子水喷射臂的间隔时间,实现不同喷射臂无间隔连续喷射技术,并优化化学药液喷射臂的摆臂速度、轨迹和起始终止角度等参数。采用北京七星华创电子股份有限公司自主研发的300 mm 65 nm Cu互连单片清洗机进行工艺实验,结果表明:清洗后晶片表面无边缘和辐射状污染,清洗后晶片表面临界颗粒直径0.12μm,临界颗粒数每片30个;临界尺寸变化不大于2%。展开更多
阐述如何使用NormalCu机型来沉积小线宽50nm产品的Barrier&Seed层,通过调制偏压电压及时间,改善了台阶覆盖性,避免了小线宽产品在开口处overhang的形成,提升了Normal机型工艺极限。使得制品缺陷、电性、良率和可靠性与RFx Cu机型在...阐述如何使用NormalCu机型来沉积小线宽50nm产品的Barrier&Seed层,通过调制偏压电压及时间,改善了台阶覆盖性,避免了小线宽产品在开口处overhang的形成,提升了Normal机型工艺极限。使得制品缺陷、电性、良率和可靠性与RFx Cu机型在最终的产品性能上表现一致,在50nm Nor Flash平台上顺利量产使用。展开更多
A novel Cu(I) complex with the formula of [Cu(DPEphos)(Dicnq)]BF4(CuDD) was synthesized and characterized by X-ray single crystal diffraction method,in which DPEphos and Dicnq denote bis[2-(diphenylphosphino)phenyl]et...A novel Cu(I) complex with the formula of [Cu(DPEphos)(Dicnq)]BF4(CuDD) was synthesized and characterized by X-ray single crystal diffraction method,in which DPEphos and Dicnq denote bis[2-(diphenylphosphino)phenyl]ether and 6,7-Dicyanodipyrido[2,2-d:2 ,3 -f] quinoxaline,respectively.Organic ultraviolet optical sensor based on photovoltaic diode is fabricated by using CuDD as an electron acceptor and 4,4′,4″-tris-(2-methylphenyl phenylamino) triphenylamine(m-MTDATA) as an electron donor.The sensor is sensit...展开更多
S7-1200PLC及DP主站模块CM1243-5在XJZ上悬自动卸料离心机上的应用,为我们又提供了一种新的控制方式,弥补了中档配置的空缺,使我们的产品梯度更优,同时也迎合了部分客户对产品高自动化、高稳定性、价格适中的要求。软件编程采用直观、...S7-1200PLC及DP主站模块CM1243-5在XJZ上悬自动卸料离心机上的应用,为我们又提供了一种新的控制方式,弥补了中档配置的空缺,使我们的产品梯度更优,同时也迎合了部分客户对产品高自动化、高稳定性、价格适中的要求。软件编程采用直观、高效、可靠的IEMENS TIA Portal V11软件,新的编程软件使人耳目一新,编程工作方便而快捷。展开更多
Vibrational properties of silicon nanopowders are discussed with reference to Raman spectroscopic measurements. The powders were produced in a low pressure rf plasma from the cluster induced agglomeration of positive ...Vibrational properties of silicon nanopowders are discussed with reference to Raman spectroscopic measurements. The powders were produced in a low pressure rf plasma from the cluster induced agglomeration of positive ions formed during the dissociation of silane. Influence of thermal treatment and the crystallization phenomena of the powder were studied. Raman spectroscopic measurements reveal size quantization effects for the particles as well as the existence of partially ordered regions in the apparently amorphous primary particles. The crystalline and amorphous volume fraction in the material were calculated from the relative spectraI intensities. The results obtained in these experiments are consistent with the observations from recent high resolution transmission electron microscopy studies of these powders展开更多
Deuterated potassium dihydrogen phosphate damage performance at 351 nm is studied on a large-aperture laser system. Bulk and rear-surface damage are initiated under the 3ω fluences of 6.T J/cm2 and 33/cm2, and show d...Deuterated potassium dihydrogen phosphate damage performance at 351 nm is studied on a large-aperture laser system. Bulk and rear-surface damage are initiated under the 3ω fluences of 6.T J/cm2 and 33/cm2, and show different growth characteristics under multiple laser irradiations with the fluence of 6 J/cm2. The size and number of bulk damage keep unchanged once initiated. However, surface damage size also does not grow, while surface damage number increases linearly with laser shots. Different damage thresholds and growth behaviors suggest different formations of bulk and surface damage precursors. The cause of surface damage is supposed to be near-surface absorbing particles buried under the sol-gel coating.展开更多
The valence change of samarium from trivalent to divalent state in strontium borates (SrB6O10)prepared in air was observed. The high resolution spectra of Sm2+ in matrix were studied between 10 K and 300 K. The result...The valence change of samarium from trivalent to divalent state in strontium borates (SrB6O10)prepared in air was observed. The high resolution spectra of Sm2+ in matrix were studied between 10 K and 300 K. The results showed that three crystallographic sites for Sm2+ were available in the host. Energy transfer among these sites was possible. The vibronic transition of 5D0-7F0 of Sm2+ was studied at room temperature and the Huang-Rhys factor S was calculated. Due to the thermal population, 5D1 -7F0 transition at room temperature was observed展开更多
文摘随着Si片尺寸加大和特征尺寸的缩小,对Si片的洁净程度、表面的化学态以及表面缺陷等要求越来越高。针对300 mm 65 nm Cu互连晶片清洗后表面常出现边缘和辐射状污染的问题。在理论分析的基础上,研究了缩短化学药液喷射臂和去离子水喷射臂的间隔时间,实现不同喷射臂无间隔连续喷射技术,并优化化学药液喷射臂的摆臂速度、轨迹和起始终止角度等参数。采用北京七星华创电子股份有限公司自主研发的300 mm 65 nm Cu互连单片清洗机进行工艺实验,结果表明:清洗后晶片表面无边缘和辐射状污染,清洗后晶片表面临界颗粒直径0.12μm,临界颗粒数每片30个;临界尺寸变化不大于2%。
文摘阐述如何使用NormalCu机型来沉积小线宽50nm产品的Barrier&Seed层,通过调制偏压电压及时间,改善了台阶覆盖性,避免了小线宽产品在开口处overhang的形成,提升了Normal机型工艺极限。使得制品缺陷、电性、良率和可靠性与RFx Cu机型在最终的产品性能上表现一致,在50nm Nor Flash平台上顺利量产使用。
基金supported by the Natural Science Foundationof Jilin Province (No.20060516)the Doctoral Foundation of JilinNormal University (No.2006006 and No.2007009)the Subject and Base Construction Foundation of Jilin Normal University (No.2006041)
文摘A novel Cu(I) complex with the formula of [Cu(DPEphos)(Dicnq)]BF4(CuDD) was synthesized and characterized by X-ray single crystal diffraction method,in which DPEphos and Dicnq denote bis[2-(diphenylphosphino)phenyl]ether and 6,7-Dicyanodipyrido[2,2-d:2 ,3 -f] quinoxaline,respectively.Organic ultraviolet optical sensor based on photovoltaic diode is fabricated by using CuDD as an electron acceptor and 4,4′,4″-tris-(2-methylphenyl phenylamino) triphenylamine(m-MTDATA) as an electron donor.The sensor is sensit...
文摘S7-1200PLC及DP主站模块CM1243-5在XJZ上悬自动卸料离心机上的应用,为我们又提供了一种新的控制方式,弥补了中档配置的空缺,使我们的产品梯度更优,同时也迎合了部分客户对产品高自动化、高稳定性、价格适中的要求。软件编程采用直观、高效、可靠的IEMENS TIA Portal V11软件,新的编程软件使人耳目一新,编程工作方便而快捷。
文摘Vibrational properties of silicon nanopowders are discussed with reference to Raman spectroscopic measurements. The powders were produced in a low pressure rf plasma from the cluster induced agglomeration of positive ions formed during the dissociation of silane. Influence of thermal treatment and the crystallization phenomena of the powder were studied. Raman spectroscopic measurements reveal size quantization effects for the particles as well as the existence of partially ordered regions in the apparently amorphous primary particles. The crystalline and amorphous volume fraction in the material were calculated from the relative spectraI intensities. The results obtained in these experiments are consistent with the observations from recent high resolution transmission electron microscopy studies of these powders
基金Supported by the National Natural Science Foundation of China under Grant No 61505187
文摘Deuterated potassium dihydrogen phosphate damage performance at 351 nm is studied on a large-aperture laser system. Bulk and rear-surface damage are initiated under the 3ω fluences of 6.T J/cm2 and 33/cm2, and show different growth characteristics under multiple laser irradiations with the fluence of 6 J/cm2. The size and number of bulk damage keep unchanged once initiated. However, surface damage size also does not grow, while surface damage number increases linearly with laser shots. Different damage thresholds and growth behaviors suggest different formations of bulk and surface damage precursors. The cause of surface damage is supposed to be near-surface absorbing particles buried under the sol-gel coating.
文摘The valence change of samarium from trivalent to divalent state in strontium borates (SrB6O10)prepared in air was observed. The high resolution spectra of Sm2+ in matrix were studied between 10 K and 300 K. The results showed that three crystallographic sites for Sm2+ were available in the host. Energy transfer among these sites was possible. The vibronic transition of 5D0-7F0 of Sm2+ was studied at room temperature and the Huang-Rhys factor S was calculated. Due to the thermal population, 5D1 -7F0 transition at room temperature was observed
