Carbon nitride thin films were prepared by electron-beam evaporation assisted with nitrogen ion bombardment and TiN/CNx composite films were by unbalanced dc magnetron sputtering, respectively. It was found that the s...Carbon nitride thin films were prepared by electron-beam evaporation assisted with nitrogen ion bombardment and TiN/CNx composite films were by unbalanced dc magnetron sputtering, respectively. It was found that the sputtered films were better than the evaporated films in hardness and adhesion. The experiments of atomic oxygen action, cold welding, friction and wearing were emphasized, and the results proved that the sputtered TiN/CNx composite films were suitable for space application.展开更多
The microstructure, mechanical, and tribological properties of the carbon nitride （CNx） thin films with different nitrogen contents deposited on high-speed steel substrates by reactive magnetron sputtering were stud...The microstructure, mechanical, and tribological properties of the carbon nitride （CNx） thin films with different nitrogen contents deposited on high-speed steel substrates by reactive magnetron sputtering were studied. CNx films with nitrogen contents from 10.7 to 28.2 at.% had an amorphous structure composing of the carbon bonds of sp2C-C, sp2C-N, and sp3C-N. The TiN inter-layer cause the adhesion of CNx films enhancement. The more nitrogen concentration led to larger film hardness and friction coefficient against GCrl5 steel balls, but the wear rates decreased.展开更多
文摘Carbon nitride thin films were prepared by electron-beam evaporation assisted with nitrogen ion bombardment and TiN/CNx composite films were by unbalanced dc magnetron sputtering, respectively. It was found that the sputtered films were better than the evaporated films in hardness and adhesion. The experiments of atomic oxygen action, cold welding, friction and wearing were emphasized, and the results proved that the sputtered TiN/CNx composite films were suitable for space application.
基金supported by the International Science and Technology Cooperation Program of China(No. 2008DFA51470)
文摘The microstructure, mechanical, and tribological properties of the carbon nitride （CNx） thin films with different nitrogen contents deposited on high-speed steel substrates by reactive magnetron sputtering were studied. CNx films with nitrogen contents from 10.7 to 28.2 at.% had an amorphous structure composing of the carbon bonds of sp2C-C, sp2C-N, and sp3C-N. The TiN inter-layer cause the adhesion of CNx films enhancement. The more nitrogen concentration led to larger film hardness and friction coefficient against GCrl5 steel balls, but the wear rates decreased.
