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金刚石膜同步辐射X-射线掩模的研究进展
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作者 万静 立 冉均国 《四川师范大学学报(自然科学版)》 CAS CSCD 2001年第6期618-621,共4页
超大规模集成电路 (VLSI)线宽不断缩小促进了光刻技术的发展和分辩率的提高 ,缩短光波长和改进掩模是提高分辨率的重要途径 .探索采用X 射线光刻技术时 ,用金刚石薄膜作为掩模基膜的研究现状与发展方向 .金刚石薄膜因其具有优异的机械... 超大规模集成电路 (VLSI)线宽不断缩小促进了光刻技术的发展和分辩率的提高 ,缩短光波长和改进掩模是提高分辨率的重要途径 .探索采用X 射线光刻技术时 ,用金刚石薄膜作为掩模基膜的研究现状与发展方向 .金刚石薄膜因其具有优异的机械、光学和热学性能 ,已成为新一代掩模基膜材料的理想候选材料 .介绍了金刚石薄膜用作掩模基膜材料上取得的实验成果 。 展开更多
关键词 金刚石薄膜 X-射线光刻掩模 cvd沉积工艺 薄膜应力 薄膜粗糙度
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Facile Fabrication of AII-SWNT Field-Effect Transistors 被引量:1
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作者 Shinya Aikawa Rong Xiang +4 位作者 Erik Einarsson Shohei Chiashi Junichiro Shiomi Eiichi Nishikawa Shigeo Maruyama 《Nano Research》 SCIE EI CAS CSCD 2011年第6期580-588,共9页
Field-effect transistors (FETs) have been fabricated using as-grown single-walled carbon nanotubes (SWNTs) for the channel as well as both source and drain electrodes. The underlying Si substrate was employed as t... Field-effect transistors (FETs) have been fabricated using as-grown single-walled carbon nanotubes (SWNTs) for the channel as well as both source and drain electrodes. The underlying Si substrate was employed as the back-gate electrode. Fabrication consisted of patterned catalyst deposition by surface modification followed by dip-coating and synthesis of SWNTs by alcohol chemical vapor deposition (CVD). The electrodes and channel were grown simultaneously in one CVD process. The resulting FETs exhibited excellent performance, with an I ON/I OFF ratio of 10^6 and a maximum ON-state current (/ON) exceeding 13 uA. The large I ON is attributed to SWNT bundles connecting the SWNT channel with the SWNT electrodes. Bundling creates a large contact area, which results in a small contact resistance despite the presence of Schottky barriers at metallic-semiconducting interfaces. The approach described here demonstrates a significant step toward the realization of metal-free electronics. 展开更多
关键词 Single-walled carbon nanotube field-effect transistor patterned synthesis self-assembled monolayer Schottky barrier interfacial dipole
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