Audio applications such as mobile communication and hearing aid devices demand a small size but high performance, stable and low cost microphone to reproduce a high quality sound. Capacitive microphone can be designed...Audio applications such as mobile communication and hearing aid devices demand a small size but high performance, stable and low cost microphone to reproduce a high quality sound. Capacitive microphone can be designed to fulfill such requirements with some trade-offs between sensitivity, operating frequency range, and noise level mainly due to the effect of device structure dimensions and viscous damping. Smaller microphone size and air gap will gradually decrease its sensitivity and increase the viscous damping. The aim of this research was to develop a mathematical model of a spring-supported diaphragm capacitive MEMS microphone as well as an approach to optimize a microphone’s performance. Because of the complex shapes in this latest type of diaphragm design trend, analytical modelling has not been previously attempted. A novel diaphragm design is proposed that offers increased mechanical sensitivity of a capacitive microphone by reducing its diaphragm stiffness. A lumped element model of the spring-supported diaphragm microphone is developed to analyze the complex relations between the microphone performance factors and to find the optimum dimensions based on the design requirements. It is shown analytically that the spring dimensions of the spring-supported diaphragm do not have large effects on the microphone performance com pared to the diaphragm and backplate size, diaphragm thickness, and air-gap distance. A 1 mm2 spring-supported diaphragm microphone is designed using several optimized performance parameters to give a –3 dB operating bandwidth of 10.2 kHz, a sensitivity of 4.67 mV/Pa (–46.5 dB ref. 1 V/Pa at 1 kHz using a bias voltage of 3 V), a pull-in voltage of 13 V, and a thermal noise of –22 dBA SPL.展开更多
In this paper, first a circular diaphragm is modeled using the classical plate theory. An analytical solution based on differential transformation method （DTM） and Runge-Kutta method is employed for solving the gove...In this paper, first a circular diaphragm is modeled using the classical plate theory. An analytical solution based on differential transformation method （DTM） and Runge-Kutta method is employed for solving the governing differential equation for the first time. Then the influences of various parameters on central deflection of the diaphragm, stress distribution and capacitance of pressure sensor with a time-dependent pressure are examined. Several case studies are compared with simulations to confirm the proposed method. The analytical results compared with ABAQUS simulation show excellent agreement with the simulation results. This method is very promising for time saving in calculating micro-device characteristics.展开更多
In order to accurately measure the pressure and the pressure difference between two points in the vacuum chamber, a large number of experimental data were used to research the performance of the three capacitance diap...In order to accurately measure the pressure and the pressure difference between two points in the vacuum chamber, a large number of experimental data were used to research the performance of the three capacitance diaphragm gauge and analysis the main influences of the uncertainly degree of pressure in the process. In this paper, three kind of uncertainty, such as the single uncertainty, the synthesis uncertainty and the expanded uncertainty of the three capacitance diaphragm gauges are introduced in detail in pressure measurement. The results show that the performance difference of capacitance diaphragm gauge can be very influential to the accuracy of the pressure difference measurement and the uncertainty of different pressure can be very influential to pressure measurement. That for accurately measuring pressure and pressure difference has certain reference significance.展开更多
文摘Audio applications such as mobile communication and hearing aid devices demand a small size but high performance, stable and low cost microphone to reproduce a high quality sound. Capacitive microphone can be designed to fulfill such requirements with some trade-offs between sensitivity, operating frequency range, and noise level mainly due to the effect of device structure dimensions and viscous damping. Smaller microphone size and air gap will gradually decrease its sensitivity and increase the viscous damping. The aim of this research was to develop a mathematical model of a spring-supported diaphragm capacitive MEMS microphone as well as an approach to optimize a microphone’s performance. Because of the complex shapes in this latest type of diaphragm design trend, analytical modelling has not been previously attempted. A novel diaphragm design is proposed that offers increased mechanical sensitivity of a capacitive microphone by reducing its diaphragm stiffness. A lumped element model of the spring-supported diaphragm microphone is developed to analyze the complex relations between the microphone performance factors and to find the optimum dimensions based on the design requirements. It is shown analytically that the spring dimensions of the spring-supported diaphragm do not have large effects on the microphone performance com pared to the diaphragm and backplate size, diaphragm thickness, and air-gap distance. A 1 mm2 spring-supported diaphragm microphone is designed using several optimized performance parameters to give a –3 dB operating bandwidth of 10.2 kHz, a sensitivity of 4.67 mV/Pa (–46.5 dB ref. 1 V/Pa at 1 kHz using a bias voltage of 3 V), a pull-in voltage of 13 V, and a thermal noise of –22 dBA SPL.
文摘In this paper, first a circular diaphragm is modeled using the classical plate theory. An analytical solution based on differential transformation method （DTM） and Runge-Kutta method is employed for solving the governing differential equation for the first time. Then the influences of various parameters on central deflection of the diaphragm, stress distribution and capacitance of pressure sensor with a time-dependent pressure are examined. Several case studies are compared with simulations to confirm the proposed method. The analytical results compared with ABAQUS simulation show excellent agreement with the simulation results. This method is very promising for time saving in calculating micro-device characteristics.
文摘In order to accurately measure the pressure and the pressure difference between two points in the vacuum chamber, a large number of experimental data were used to research the performance of the three capacitance diaphragm gauge and analysis the main influences of the uncertainly degree of pressure in the process. In this paper, three kind of uncertainty, such as the single uncertainty, the synthesis uncertainty and the expanded uncertainty of the three capacitance diaphragm gauges are introduced in detail in pressure measurement. The results show that the performance difference of capacitance diaphragm gauge can be very influential to the accuracy of the pressure difference measurement and the uncertainty of different pressure can be very influential to pressure measurement. That for accurately measuring pressure and pressure difference has certain reference significance.
