Yttrium iron garnet (YIG) is widely used for microwave ferrite devices, especially for optical isolators. In this paper, ferrite ceramic target using cerium (Ce)-substituted YIG was made using ferric oxide (Fe203...Yttrium iron garnet (YIG) is widely used for microwave ferrite devices, especially for optical isolators. In this paper, ferrite ceramic target using cerium (Ce)-substituted YIG was made using ferric oxide (Fe203), cerium oxide (CeO2) and yttrium oxide (Y2O3) powders as raw material. Ce: YIG thin films were fabricated by radio frequency (RF) magnetron sputtering. The experimental result showed that the polycrystalline YIG was obtained after sintering at 1 350 ℃ for 6 h, and the polycrystalline Ce: YIG thin films were achieved annealing up to 700 ℃ in the air.展开更多
基金National Natural Science Foundation of China(NSFC)(No.51175418)Program for New Century Excellent Talents in University(No.93JXDW02000006)+4 种基金Natural Science Foundation of Shaanxi Province(No.2011JQ7004)Fundamental Research Funds for the Central Universities of Xi'an Jiaotong University(No.2011jdgz09No.2011jdhz23No.xjj2011068)Fund of the State Key Laboratory of Digital Manufacturing Equipment & Technology(No.DMETKF2012009)
文摘Yttrium iron garnet (YIG) is widely used for microwave ferrite devices, especially for optical isolators. In this paper, ferrite ceramic target using cerium (Ce)-substituted YIG was made using ferric oxide (Fe203), cerium oxide (CeO2) and yttrium oxide (Y2O3) powders as raw material. Ce: YIG thin films were fabricated by radio frequency (RF) magnetron sputtering. The experimental result showed that the polycrystalline YIG was obtained after sintering at 1 350 ℃ for 6 h, and the polycrystalline Ce: YIG thin films were achieved annealing up to 700 ℃ in the air.