Large area YBCO superconducting thin films were grown on the Zr(Y)O2 substrate at 750 and 800℃ respectively by magnetron sputtering, and the surface morphology was studied with AEM. STM and SEM with an EDS and ECP at...Large area YBCO superconducting thin films were grown on the Zr(Y)O2 substrate at 750 and 800℃ respectively by magnetron sputtering, and the surface morphology was studied with AEM. STM and SEM with an EDS and ECP attachments. The YBCO thin film was found to be a caxis orientated single crystal. At 800℃, the surface out-growths of the thin film Were mainly CuO particles and many small holes were found on the surface. which resulted in rougher surface; whereas, at 750℃, the out-growths were mainly the 123 structure in the form of rod-like and polygon and the surface was much smoother because of less small holes on the surface. The mechanism of the thin film growth and the formation of the small holes on the surface grown at the two temperature were discussed.展开更多
文摘Large area YBCO superconducting thin films were grown on the Zr(Y)O2 substrate at 750 and 800℃ respectively by magnetron sputtering, and the surface morphology was studied with AEM. STM and SEM with an EDS and ECP attachments. The YBCO thin film was found to be a caxis orientated single crystal. At 800℃, the surface out-growths of the thin film Were mainly CuO particles and many small holes were found on the surface. which resulted in rougher surface; whereas, at 750℃, the out-growths were mainly the 123 structure in the form of rod-like and polygon and the surface was much smoother because of less small holes on the surface. The mechanism of the thin film growth and the formation of the small holes on the surface grown at the two temperature were discussed.
