Hall thruster has the advantages of simple structure, high specific impulse, high efficiency, and long service life, and so on. It is suitable for spacecraft attitude control, North and South position keeping, and oth...Hall thruster has the advantages of simple structure, high specific impulse, high efficiency, and long service life, and so on. It is suitable for spacecraft attitude control, North and South position keeping, and other track tasks. The anode layer Hall thruster is a kind of Hall thruster. The thruster has a longer anode area and a relatively short discharge channel. In this paper, the effect of the channel length on the performance of the anode layer Hall thruster is simulated by the PIC simulation method. The simulation results show that the change of the channel length has significant effect on the plasma parameters, such as potential and plasma density and so on. The ionization region mainly concentrates at the hollow anode outlet position, and can gradually move toward the channel outlet as the channel length decreases. The collision between the ions and the wall increases with the channel length increasing. So the proper shortening of the channel length can increase the life of the thruster. Besides, the results show that there is a best choice of the channel length for obtaining the best performance. In this paper, thruster has the best performance under a channel length of 5 mm.展开更多
The effect of channel length and width on the large and small-signal parameters of the graphene field effect transistor have been explored using an analytical approach.In the case of faster saturation as well as extre...The effect of channel length and width on the large and small-signal parameters of the graphene field effect transistor have been explored using an analytical approach.In the case of faster saturation as well as extremely high transit frequency,the graphene field effect transistor shows outstanding performance.From the transfer curve,it is observed that there is a positive shift of Dirac point from the voltage of 0.15 V to 0.35 V because of reducing channel length from 440 nm to 20 nm and this curve depicts that graphene shows ambipolar behavior.Besides,it is found that because of widening channel the drain current increases and the maximum current is found approximately 2.4 mA and 6 mA for channel width 2μm and 5μm respectively.Furthermore,an approximate symmetrical capacitance-voltage(C-V)characteristic of the graphene field effect transistor is obtained and the capacitance reduces when the channel length decreases but the capacitance can be increased by raising the channel width.In addition,a high transconductance,that demands high-speed radio frequency(RF)applications,of 6.4 mS at channel length 20 nm and 4.45 mS at channel width 5μm along with a high transit frequency of 3.95 THz have been found that demands high-speed radio frequency applications.展开更多
A comprehensive study of the negative and positive bias temperature instability(NBTI/PBTI)of 3D FinFET devices with different small channel lengths is presented.It is found while with the channel lengths shrinking fro...A comprehensive study of the negative and positive bias temperature instability(NBTI/PBTI)of 3D FinFET devices with different small channel lengths is presented.It is found while with the channel lengths shrinking from 100 nm to 30 nm,both the NBTI characteristics of p-FinFET and PBTI characteristics of n-FinFET turn better.Moreover,the channel length dependence on NBTI is more serious than that on PBTI.Through the analysis of the physical mechanism of BTI and the simulation of 3-D stress in the FinFET device,a physical mechanism of the channel length dependence on NBTI/PBTI is proposed.Both extra fluorine passivation in the corner of bulk oxide and stronger channel stress in p-FinFETs with shorter channel length causes less NBTI issue,while the extra nitrogen passivation in the corner of bulk oxide induces less PBTI degradation as the channel length decreasing for n-FinFETs.The mechanism well matches the experimental result and provides one helpful guide for the improvement of reliability issues in the advanced FinFET process.展开更多
An experimental study on the current shot noise of a quantum point contact with short channel length is reported. The experimentally measured maximum energy level spacing between the ground and the first excited state...An experimental study on the current shot noise of a quantum point contact with short channel length is reported. The experimentally measured maximum energy level spacing between the ground and the first excited state of the device reached up to 7.5meV, probably due to the hard wall confinement by using shallow electron gas and sharp point contact geometry. The two-dimensionM non-equilibrium shot noise contour map shows noise suppression characteristics in a wide range of bias voltage. Fano factor analysis indicates spin-polarized transport through a short quantum point contact.展开更多
This article describes the effective channel length degradation under hot carrier stressing. The extraction is based on the IDs-Vcs characteristics by maximum transconductance (maximum slope of IDs & VGS) in the li...This article describes the effective channel length degradation under hot carrier stressing. The extraction is based on the IDs-Vcs characteristics by maximum transconductance (maximum slope of IDs & VGS) in the linear region. The transconductance characteristics are determine for the several devices of difference drawn channel length. The effective channel length of submicron LDD (Lightly Doped Drain) NMOSFETs (Metal Oxide Semiconductor Field Effect Transistor) under hot carrier stressing was measured at the stress time varying from zero to 10,000 seconds. It is shown that the effective channel length was increased with time. This is caused by charges trapping in the oxide during stress. The increased of effective channel length (△Leff) is seem to be increased sharply as the gate channel length is decrease.展开更多
The dependencies of hot-carrier-induced degradations on the effective channel length Lch,eff are investigated for n-type metal-oxide-semiconductor field effect transistor (MOSFETs). Our experiments find that, with d...The dependencies of hot-carrier-induced degradations on the effective channel length Lch,eff are investigated for n-type metal-oxide-semiconductor field effect transistor (MOSFETs). Our experiments find that, with decreasing Lch,eff, the saturation drain current (Iasat ) degradation is unexpectedly alleviated. The further study demonstrates that the anomalous Lch,eff dependence of Idsat degradation is induced by the increasing influence of the substrate current degradation on the lazar degradation with Lch,eff reducing.展开更多
Contrary to general understanding, a test result shows that devices with a shorter channel length have a degraded ESD performance in the advanced silicided CMOS process. Such a phenomenon in a gate-grounded NMOSFET (...Contrary to general understanding, a test result shows that devices with a shorter channel length have a degraded ESD performance in the advanced silicided CMOS process. Such a phenomenon in a gate-grounded NMOSFET (GGNMOS) was investigated, and the current spreading effect was verified as the predominant factor. Due to transmission line pulse (TLP) measurements and Sentaurus technology computer aided design (TCAD) 2-D numerical simulations, parameters such as current gain, on-resistance and power density were discussed in detail.展开更多
This research used the common decomposition of the velocity and pressure in an average part and a fluctuating part, for high Reynolds number, of the Navier-Stokes equation, which leads to the classic problem of turbul...This research used the common decomposition of the velocity and pressure in an average part and a fluctuating part, for high Reynolds number, of the Navier-Stokes equation, which leads to the classic problem of turbulent closure. The Prandtl’s mixing length model, based on the Boussinesq hypothesis and traditionally used for free shear flows, was chosen and adapted for internal flows to solve the closure problem. For channel flows, Johann Nikuradse proposed a model for the Prandtl mixing length. In the present paper, which has an academic character, the authors made a return to the model of the mixing length of Prandtl and the model of Nikuradse, to solve turbulent flows inside a plane channel. It was possible to develop an ordinary differential model for the velocity in the direction of the flow whose solution occurs computationally in a simple but extremely accurate way when compared with Direct Numerical Simulation databases. For the viscous stress on the wall, it was possible to determine the exact mathematical solution of the ordinary differential equation. It is a model of great academic value and even to be used as reference for verification of computational codes destined to the solution of complete numerical and computational models.展开更多
A hydraulic jump is a localized phenomenon that generates on an open hydraulic channel;however, its mathematical demonstration is not possible in the turbulent area of the phenomenon, especially in the area where the ...A hydraulic jump is a localized phenomenon that generates on an open hydraulic channel;however, its mathematical demonstration is not possible in the turbulent area of the phenomenon, especially in the area where the jump occurs and where its length is measured, so the data must be obtained with direct measurements in a laboratory and through empiric equations. This work presents the results of the generated hydraulic jumps and the measure of its length in a series of tests, where we input different flow rates in a transportable open channel hydraulic with a constant gate opening “a” and a slope of S = 0.0035, in the Engineering Faculty Research Centre of the Autonomous University of Chiapas. We also present the experimental method to generate a hydraulic jump, the measure of its length and a comparison with seven empirical equations, including the Sieñchi equation used in H-Canales, the most used software for hydraulic channels design in Latin America. The results show that the calculus of L with the proposed equation has a mean squared error (MSE) of 0.1337, a Bias of -0.0049, a model efficiency (ME) of 0.9991 and a determination coefficient (R2) of 0.9993 when compared with the experimental model. Meanwhile, the comparison of L calculated with the Sieñchi equation versus the experimental model resulted in a MSE of 0.1741, a bias of -0.0437, a ME of 0.9984 and a R2 of 0.9997. Both equations are highly recommended to estimate L in rectangular channels under the conditions presented in this paper, thus, the proposed equation can be applied if??y . Finally, it must be stated that we also proved that the Pavlosky equation is comparable in precision and accuracy concerning to proposed equation and Sieñchi equation.展开更多
Most of multimedia schemes employ variable-length codes (VLCs) like Huffman code as core components in obtaining high compression rates. However VLC methods are very sensitive to channel noise. The goal of this pape...Most of multimedia schemes employ variable-length codes (VLCs) like Huffman code as core components in obtaining high compression rates. However VLC methods are very sensitive to channel noise. The goal of this paper is to salvage as many data from the damaged packets as possible for higher audiovisual quality. This paper proposes an integrated joint source-channel decoder (I-JSCD) at a symbol-level using three-dimensional (3-D) trellis representation for first-order Markov sources encoded with VLC source code and convolutional channel code. This method combines source code and channel code state-spaces and bit-lengths to construct a two-dimensional (2-D) state-space, and then develops a 3-D trellis and a maximum a-posterior (MAP) algorithm to estimate the source sequence symbol by symbol. Experiment results demonstrate that our method results in significant improvement in decoding performance, it can salvage at least half of (50%) data in any channel error rate, and can provide additional error resilience to VLC stream like image, audio, video stream over high error rate links.展开更多
A novel framework for non-Manhattan channel routing considering crosstalk and wire length reduction is proposed. To handle crosstalk and wire length reduction problem, an improved non-Manhattan router in the gridded r...A novel framework for non-Manhattan channel routing considering crosstalk and wire length reduction is proposed. To handle crosstalk and wire length reduction problem, an improved non-Manhattan router in the gridded routing model is developed, and a novel rerouting algorithm based on segment-rerouting technique and layer reassignment is presented. Simulation exDeriments demonstrate that our algorithm achieves verv good results.展开更多
In order to reduce or avoid the fluctuations from interface breakup, a meandering microchannel with curved multi-bends(44 turns) is fabricated, and investigations of scaling bubble/slug length in Taylor flow in a rect...In order to reduce or avoid the fluctuations from interface breakup, a meandering microchannel with curved multi-bends(44 turns) is fabricated, and investigations of scaling bubble/slug length in Taylor flow in a rectangular meandering microchannel are systematically conducted. Based on considerable experimental data,quantitative analyses for the influences of two important characteristic times, liquid phase physical properties and aspect ratio are made on the prediction criteria for the bubble/slug length of Taylor flow in a meandering microchannel. A simple principle is suggested to predict the bubble formation period by using the information of Rayleigh time and capillary time for six gas–liquid systems with average deviation of 10.96%. Considering physical properties of the liquid phase and cross-section configuration of the rectangular mcirochannel,revised scaling laws for bubble length are established by introducing Ca, We, Re and W/h whether for the squeezing-driven or shearing-driven of bubble break. In addition, a simple principle in terms of Garstecki-type model and bubble formation period is set-up to predict slug lengths. A total of 107 sets of experimental data are correlated with the meandering microchannel and operating range: 0.001 b CaTPb 0.05, 0.06 b WeTPb 9.0,18 b ReTPb 460 using the bubble/slug length prediction equation from current work. The average deviation between the correlated data and the experimental data for bubble length and slug length is about 9.42% and9.95%, respectively.展开更多
On the basis of the introduction about water saving irrigation that works as a kind of new irrigation pattern,the method of anti-seep quality estimation of the conveying water and distributing channel which acts as an...On the basis of the introduction about water saving irrigation that works as a kind of new irrigation pattern,the method of anti-seep quality estimation of the conveying water and distributing channel which acts as an important engineering measure of water saving irrigation will be introduced in te paper.that is,by means of unit length of channel's water utilization coefficient(η 0)to estimate the quality of channel,and the calculative method has been explained by the example of an actual project.It can be referred to irrigational workers.展开更多
Laser focused atomic deposition is a unique and effective way to fabricate highly accurate pitch standards in nanometrology.However,the stability and repeatability of the atom lithography fabrication process remains a...Laser focused atomic deposition is a unique and effective way to fabricate highly accurate pitch standards in nanometrology.However,the stability and repeatability of the atom lithography fabrication process remains a challenging problem for massive production.Based on the atom-light interaction theory,channeling is utilized to improve the stability and repeatability.From the comparison of three kinds of atom-light interaction models,the optimal parameters for channeling are obtained based on simulation.According to the experimental observations,the peak to valley height of Cr nano-gratings keeps stable when the cutting proportion changes from 15%to 50%,which means that the channeling shows up under this condition.The channeling proves to be an effective method to optimize the stability and repeatability of laser focused Cr atomic deposition.展开更多
文摘Hall thruster has the advantages of simple structure, high specific impulse, high efficiency, and long service life, and so on. It is suitable for spacecraft attitude control, North and South position keeping, and other track tasks. The anode layer Hall thruster is a kind of Hall thruster. The thruster has a longer anode area and a relatively short discharge channel. In this paper, the effect of the channel length on the performance of the anode layer Hall thruster is simulated by the PIC simulation method. The simulation results show that the change of the channel length has significant effect on the plasma parameters, such as potential and plasma density and so on. The ionization region mainly concentrates at the hollow anode outlet position, and can gradually move toward the channel outlet as the channel length decreases. The collision between the ions and the wall increases with the channel length increasing. So the proper shortening of the channel length can increase the life of the thruster. Besides, the results show that there is a best choice of the channel length for obtaining the best performance. In this paper, thruster has the best performance under a channel length of 5 mm.
基金supported by the National Key Research and Development Program of China(No.2018YFE0204000)the National Natural Science Foundation of China(No.61674141,No.51972300,No.61504134 and No.21975245)+2 种基金The Strategic Priority Research Program of Chinese Academy of Sciences(No.XDB43000000)The World Academy of Sciences(TWAS),and the Key Research Program of Frontier Science,Chinese Academy of Sciences(No.QYZDBSSW-SLH006)support from Youth Innovation Promotion Association,Chinese Academy of Sciences(No.2020114).
文摘The effect of channel length and width on the large and small-signal parameters of the graphene field effect transistor have been explored using an analytical approach.In the case of faster saturation as well as extremely high transit frequency,the graphene field effect transistor shows outstanding performance.From the transfer curve,it is observed that there is a positive shift of Dirac point from the voltage of 0.15 V to 0.35 V because of reducing channel length from 440 nm to 20 nm and this curve depicts that graphene shows ambipolar behavior.Besides,it is found that because of widening channel the drain current increases and the maximum current is found approximately 2.4 mA and 6 mA for channel width 2μm and 5μm respectively.Furthermore,an approximate symmetrical capacitance-voltage(C-V)characteristic of the graphene field effect transistor is obtained and the capacitance reduces when the channel length decreases but the capacitance can be increased by raising the channel width.In addition,a high transconductance,that demands high-speed radio frequency(RF)applications,of 6.4 mS at channel length 20 nm and 4.45 mS at channel width 5μm along with a high transit frequency of 3.95 THz have been found that demands high-speed radio frequency applications.
基金the Science and Technology Program of Beijing Municipal Science and Technology Commission,China(Grant No.Z201100004220001)the National Major Project of Science and Technology of China(Grant No.2017ZX02315001)the Opening Project of Key Laboratory of Microelectronic Devices&Integrated Technology,Institute of Microelectronics,Chinese Academy of Sciences(Grant Nos.Y9YS05X002 and E0YS01X001).
文摘A comprehensive study of the negative and positive bias temperature instability(NBTI/PBTI)of 3D FinFET devices with different small channel lengths is presented.It is found while with the channel lengths shrinking from 100 nm to 30 nm,both the NBTI characteristics of p-FinFET and PBTI characteristics of n-FinFET turn better.Moreover,the channel length dependence on NBTI is more serious than that on PBTI.Through the analysis of the physical mechanism of BTI and the simulation of 3-D stress in the FinFET device,a physical mechanism of the channel length dependence on NBTI/PBTI is proposed.Both extra fluorine passivation in the corner of bulk oxide and stronger channel stress in p-FinFETs with shorter channel length causes less NBTI issue,while the extra nitrogen passivation in the corner of bulk oxide induces less PBTI degradation as the channel length decreasing for n-FinFETs.The mechanism well matches the experimental result and provides one helpful guide for the improvement of reliability issues in the advanced FinFET process.
基金Supported by the Basic Science Research Program through the National Research Foundation of Korea under Grant No 2011-0004949
文摘An experimental study on the current shot noise of a quantum point contact with short channel length is reported. The experimentally measured maximum energy level spacing between the ground and the first excited state of the device reached up to 7.5meV, probably due to the hard wall confinement by using shallow electron gas and sharp point contact geometry. The two-dimensionM non-equilibrium shot noise contour map shows noise suppression characteristics in a wide range of bias voltage. Fano factor analysis indicates spin-polarized transport through a short quantum point contact.
文摘This article describes the effective channel length degradation under hot carrier stressing. The extraction is based on the IDs-Vcs characteristics by maximum transconductance (maximum slope of IDs & VGS) in the linear region. The transconductance characteristics are determine for the several devices of difference drawn channel length. The effective channel length of submicron LDD (Lightly Doped Drain) NMOSFETs (Metal Oxide Semiconductor Field Effect Transistor) under hot carrier stressing was measured at the stress time varying from zero to 10,000 seconds. It is shown that the effective channel length was increased with time. This is caused by charges trapping in the oxide during stress. The increased of effective channel length (△Leff) is seem to be increased sharply as the gate channel length is decrease.
基金Supported by Hong Kong,Macao and Taiwan Science&Technology Cooperation Program of China under Grant No2014DFH10190the Distinguished Young Scientists Foundation of Jiangsu Province under Grant No BK20130021+1 种基金the National Natural Science Foundation of China under Grant Nos 61204083 and 61306092the Qing Lan Project
文摘The dependencies of hot-carrier-induced degradations on the effective channel length Lch,eff are investigated for n-type metal-oxide-semiconductor field effect transistor (MOSFETs). Our experiments find that, with decreasing Lch,eff, the saturation drain current (Iasat ) degradation is unexpectedly alleviated. The further study demonstrates that the anomalous Lch,eff dependence of Idsat degradation is induced by the increasing influence of the substrate current degradation on the lazar degradation with Lch,eff reducing.
文摘Contrary to general understanding, a test result shows that devices with a shorter channel length have a degraded ESD performance in the advanced silicided CMOS process. Such a phenomenon in a gate-grounded NMOSFET (GGNMOS) was investigated, and the current spreading effect was verified as the predominant factor. Due to transmission line pulse (TLP) measurements and Sentaurus technology computer aided design (TCAD) 2-D numerical simulations, parameters such as current gain, on-resistance and power density were discussed in detail.
文摘This research used the common decomposition of the velocity and pressure in an average part and a fluctuating part, for high Reynolds number, of the Navier-Stokes equation, which leads to the classic problem of turbulent closure. The Prandtl’s mixing length model, based on the Boussinesq hypothesis and traditionally used for free shear flows, was chosen and adapted for internal flows to solve the closure problem. For channel flows, Johann Nikuradse proposed a model for the Prandtl mixing length. In the present paper, which has an academic character, the authors made a return to the model of the mixing length of Prandtl and the model of Nikuradse, to solve turbulent flows inside a plane channel. It was possible to develop an ordinary differential model for the velocity in the direction of the flow whose solution occurs computationally in a simple but extremely accurate way when compared with Direct Numerical Simulation databases. For the viscous stress on the wall, it was possible to determine the exact mathematical solution of the ordinary differential equation. It is a model of great academic value and even to be used as reference for verification of computational codes destined to the solution of complete numerical and computational models.
文摘A hydraulic jump is a localized phenomenon that generates on an open hydraulic channel;however, its mathematical demonstration is not possible in the turbulent area of the phenomenon, especially in the area where the jump occurs and where its length is measured, so the data must be obtained with direct measurements in a laboratory and through empiric equations. This work presents the results of the generated hydraulic jumps and the measure of its length in a series of tests, where we input different flow rates in a transportable open channel hydraulic with a constant gate opening “a” and a slope of S = 0.0035, in the Engineering Faculty Research Centre of the Autonomous University of Chiapas. We also present the experimental method to generate a hydraulic jump, the measure of its length and a comparison with seven empirical equations, including the Sieñchi equation used in H-Canales, the most used software for hydraulic channels design in Latin America. The results show that the calculus of L with the proposed equation has a mean squared error (MSE) of 0.1337, a Bias of -0.0049, a model efficiency (ME) of 0.9991 and a determination coefficient (R2) of 0.9993 when compared with the experimental model. Meanwhile, the comparison of L calculated with the Sieñchi equation versus the experimental model resulted in a MSE of 0.1741, a bias of -0.0437, a ME of 0.9984 and a R2 of 0.9997. Both equations are highly recommended to estimate L in rectangular channels under the conditions presented in this paper, thus, the proposed equation can be applied if??y . Finally, it must be stated that we also proved that the Pavlosky equation is comparable in precision and accuracy concerning to proposed equation and Sieñchi equation.
基金Supported by the Foundation of Ministry of Education of China (211CERS10)
文摘Most of multimedia schemes employ variable-length codes (VLCs) like Huffman code as core components in obtaining high compression rates. However VLC methods are very sensitive to channel noise. The goal of this paper is to salvage as many data from the damaged packets as possible for higher audiovisual quality. This paper proposes an integrated joint source-channel decoder (I-JSCD) at a symbol-level using three-dimensional (3-D) trellis representation for first-order Markov sources encoded with VLC source code and convolutional channel code. This method combines source code and channel code state-spaces and bit-lengths to construct a two-dimensional (2-D) state-space, and then develops a 3-D trellis and a maximum a-posterior (MAP) algorithm to estimate the source sequence symbol by symbol. Experiment results demonstrate that our method results in significant improvement in decoding performance, it can salvage at least half of (50%) data in any channel error rate, and can provide additional error resilience to VLC stream like image, audio, video stream over high error rate links.
文摘A novel framework for non-Manhattan channel routing considering crosstalk and wire length reduction is proposed. To handle crosstalk and wire length reduction problem, an improved non-Manhattan router in the gridded routing model is developed, and a novel rerouting algorithm based on segment-rerouting technique and layer reassignment is presented. Simulation exDeriments demonstrate that our algorithm achieves verv good results.
基金Supported by the National Natural Science Foundation of China(21476037,21606034).
文摘In order to reduce or avoid the fluctuations from interface breakup, a meandering microchannel with curved multi-bends(44 turns) is fabricated, and investigations of scaling bubble/slug length in Taylor flow in a rectangular meandering microchannel are systematically conducted. Based on considerable experimental data,quantitative analyses for the influences of two important characteristic times, liquid phase physical properties and aspect ratio are made on the prediction criteria for the bubble/slug length of Taylor flow in a meandering microchannel. A simple principle is suggested to predict the bubble formation period by using the information of Rayleigh time and capillary time for six gas–liquid systems with average deviation of 10.96%. Considering physical properties of the liquid phase and cross-section configuration of the rectangular mcirochannel,revised scaling laws for bubble length are established by introducing Ca, We, Re and W/h whether for the squeezing-driven or shearing-driven of bubble break. In addition, a simple principle in terms of Garstecki-type model and bubble formation period is set-up to predict slug lengths. A total of 107 sets of experimental data are correlated with the meandering microchannel and operating range: 0.001 b CaTPb 0.05, 0.06 b WeTPb 9.0,18 b ReTPb 460 using the bubble/slug length prediction equation from current work. The average deviation between the correlated data and the experimental data for bubble length and slug length is about 9.42% and9.95%, respectively.
文摘On the basis of the introduction about water saving irrigation that works as a kind of new irrigation pattern,the method of anti-seep quality estimation of the conveying water and distributing channel which acts as an important engineering measure of water saving irrigation will be introduced in te paper.that is,by means of unit length of channel's water utilization coefficient(η 0)to estimate the quality of channel,and the calculative method has been explained by the example of an actual project.It can be referred to irrigational workers.
基金Project supported by the National Key Research and Development Program of China(Grant No.2016YFA0200902)Science and Technology Commission of Shanghai Municipality,China(Grant No.17JC1400801)Young Scientists Fund of the National Natural Science Foundation of China(Grant No.51705369).
文摘Laser focused atomic deposition is a unique and effective way to fabricate highly accurate pitch standards in nanometrology.However,the stability and repeatability of the atom lithography fabrication process remains a challenging problem for massive production.Based on the atom-light interaction theory,channeling is utilized to improve the stability and repeatability.From the comparison of three kinds of atom-light interaction models,the optimal parameters for channeling are obtained based on simulation.According to the experimental observations,the peak to valley height of Cr nano-gratings keeps stable when the cutting proportion changes from 15%to 50%,which means that the channeling shows up under this condition.The channeling proves to be an effective method to optimize the stability and repeatability of laser focused Cr atomic deposition.