Ternary Ti-B-N coatings were synthesized on AISI 304 and Si wafer by plasma-enhanced chemical vapor deposition (PECVD) technique using a gaseous mixture of TiCl4,BCl3,H2,N2,and Ar.By virtue of X-ray diffraction analys...Ternary Ti-B-N coatings were synthesized on AISI 304 and Si wafer by plasma-enhanced chemical vapor deposition (PECVD) technique using a gaseous mixture of TiCl4,BCl3,H2,N2,and Ar.By virtue of X-ray diffraction analysis,X-ray photoelectron spectroscopy,scanning electron microscope,and high-resolution transmission electron microscope,the influences of B content on the microstructure and properties of Ti B N coatings were investigated systematically.The results indicated that the microstructure and mechanical properties of Ti-B-N coatings largely depend on the transformation from FCC-TiN phase to HCP-TiB2 phase.With increasing B content and decreasing N content in the coatings,the coating microstructure evolves gradually from FCC-TiN/a-BN to HCP-TiB2 /a-BN via FCC-TiN+HCP-TiB2/a-BN.The highest microhardness of about 34 GPa is achieved,which corresponds to the nanocomposite Ti-63%B-N (mole fraction) coating consisting of the HCP-TiB2 nano-crystallites and amorphous BN phase.The lowest friction-coefficient was observed for the nanocomposite Ti-41%B-N (mole fraction) coating consisting of the FCC-TiN nanocrystallites and amorphous BN展开更多
In this work, the Zr C-SiC composite coatings were co-deposited by chemical vapor deposition(CVD)using ZrCl4, MTS, CH4 and H2 as raw materials. The morphologies, compositions and phases of the composite coatings were ...In this work, the Zr C-SiC composite coatings were co-deposited by chemical vapor deposition(CVD)using ZrCl4, MTS, CH4 and H2 as raw materials. The morphologies, compositions and phases of the composite coatings were characterized by scanning electron microscopy(SEM), energy dispersive X-ray spectroscopy(EDS) and X-ray diffraction(XRD). The results indicated that the morphologies, compositions and phases of the composite coatings were related to the deposition temperature, the flow rate of the carrier H2 gas, and the ratio of C/Zr. Moreover, the co-deposition mechanism of the composite coatings was also studied. It was found that different deposition temperatures resulted in different deposition mechanisms. At temperatures in the range of 1150–1250℃, the Zr C-SiC co-deposition was controlled by the surface kinetic process. At temperatures in the range of 1250–1400℃, the Zr C-SiC co-deposition was controlled by the mass transport process.展开更多
Aluminum coatings were created onto glass beads by chemical vapor deposition in a fluidized bed reactor at different temperatures. Nitrogen was enriched with Triisobutylaluminum (TIBA) vapor and the latter was thermal...Aluminum coatings were created onto glass beads by chemical vapor deposition in a fluidized bed reactor at different temperatures. Nitrogen was enriched with Triisobutylaluminum (TIBA) vapor and the latter was thermally decomposed inside the fluidized bed to deposit the elemental aluminum. To ensure homogeneous coating on the bed material, the fluidizing conditions necessary to avoid agglomeration were investigated for a broad range of temperatures. The deposition reaction was modeled on the basis of a discrete particle simulation to gain insight into homogeneity and thickness of the coating throughout the bed material. In particular, the take-up of aluminum was traced for selected particles that exhibited a large mass of deposited aluminum.展开更多
The purity,preferred orientation,microstructure,microhardness,bonding strength,thickness uniformity and thermal stability of rhenium(Re)coatings prepared on graphite wafers by chemical vapor deposition(CVD)and electro...The purity,preferred orientation,microstructure,microhardness,bonding strength,thickness uniformity and thermal stability of rhenium(Re)coatings prepared on graphite wafers by chemical vapor deposition(CVD)and electrodeposition(ED)in molten salts were comparatively studied in this paper.It was found that carbon(0.0140 wt%)and oxygen(0.0067 wt%)were the primary impurities for CVD and ED Re coatings,respectively.The diffusion of carbon into CVD Re coating caused higher microhardness near the substrate and helped to improve the bonding strength at the same time.The preferred orientation,microstructure and microhardness of ED Re coating were all susceptible to oxygen.The coating deposition uniformity of ED Re is obviously better than that of CVD Re coating,due to its intrinsic characteristics.The(002)-oriented,coarse columnar CVD Re coating exhibited better thermal stability compared with that of the<110>-oriented,fiber-like columnar ED Re coating,while the ED Re grains grew remarkably and the microstructure evolved toward the similar structure of CVD Re after annealing treatment.The diversity of Re coatings in microstructure could be attributed to the mobility of grain boundaries(affected by temperature and impurity)during deposition processes.展开更多
Four kinds of ZrC coatings with nearly the same thickness have been successfully prepared on graphite substrate by chemical vapor deposition （CVD） through controlling the ratio of inlet reacting gases. From backscat...Four kinds of ZrC coatings with nearly the same thickness have been successfully prepared on graphite substrate by chemical vapor deposition （CVD） through controlling the ratio of inlet reacting gases. From backscat- tered electron images, it can be inferred that ZrCIII coating has the best tightness of all coatings. Meanwhile, line energy spectrum curve shows that zirconium and carbon elements distribute uniformly along the normal direction of the ZrCIII coating. As for varied microstructures, the coatings show different mechanical properties and residue stress. The strength and elastic modulus of ZrCIII coating were up to 89.57 and 1 192.5 GPa, respectively. Those make it near the level of diamond. Value of residue tensile stress of ZrC＋C composite coating was only 7.729 MPa and that of ZrCIII coatings was 349.632 MPa. The strong combination of small-size grains in ZrCIII coating plays a decisive role to the best mechanical properties. However, strong misfit of lattice between ZrCIII coating and substrate can induce high residue stress.展开更多
3C-SiC heteroepitaxial layers were grown on Si substrates using a horizontal,hot-wall low pressure chemical vapor deposition system.The crystal quality,surface morphology and thickness uniformity of the layers were ch...3C-SiC heteroepitaxial layers were grown on Si substrates using a horizontal,hot-wall low pressure chemical vapor deposition system.The crystal quality,surface morphology and thickness uniformity of the layers were characterized by X-ray diffraction,atomic force microcopy and Fourier transform infrared spectroscopy,respectively.Growth of the epitaxial layer was determined to follow a three-dimensional island mode initially and then switch to a step-flow mode as the growth time increases.展开更多
Particle coating is an important method that can be used to expand particle-technology applications. Coated-particle design and preparation for nuclear fuel-element trajectory tracing were focused on in this paper. Pa...Particle coating is an important method that can be used to expand particle-technology applications. Coated-particle design and preparation for nuclear fuel-element trajectory tracing were focused on in this paper. Particles that contain elemental cobalt were selected because of the characteristic gamma ray spectra of 60Co. A novel particle-structure design was proposed by coating particles that contain elemental cobalt with a high-density silicon-carbide （SiC） layer. During the coating process with the high-density SiC layer, cobalt metal was formed and diffused towards the coating, so an inner SiC–CoxSi layer was designed and obtained by fluidized-bed chemical vapor deposition coupled with in-situ chemical reaction. The coating layers were studied by X-ray diffractometry, scanning electron microscopy, and energy dispersive X-ray spectroscopy techniques. The chemical composition was also determined by inductively coupled plasma optical emission spectrometry. The novel particle design can reduce the formation of metallic cobalt and prevent cobalt diffusion in the coating process, which can maintain safety in a nuclear reactor for an extended period. The experimental results also validated that coated particles maintain their structural integrity at extremely high temperatures （～1950 °C）, which meets the requirements of next-generation nuclear reactors.展开更多
Over the past years, great achievements have been made in the development of coating technologies for surface improvement of aluminum alloys. Despite these achievements, the role in the market strongly depends on the ...Over the past years, great achievements have been made in the development of coating technologies for surface improvement of aluminum alloys. Despite these achievements, the role in the market strongly depends on the ability of surface coating technology under technical and economic considerations to meet the increased demands for heavy tribological applications of aluminum alloys. Microplasma oxidation (MPO) technology has recently been studied as a novel and effective means to provide thick and hard ceramic coating with improved properties such as excellent load-bearing and wear resistance properties on aluminum alloys. The present work covers the evaluation of the performances of current single and duplex coatings combining MPO, physical vapor deposition (PVD), and plasma assisted chemical vapor deposition (PACVD) coatings on aluminum alloys. It suggests that the MPO coating is a promising candidate for design engineers to apply aluminum alloys to heavy load-bearing applications. The prospective future for the research on MPO coatings is introduced as well.展开更多
Porous carbon/carbon preforms were infiltrated with melted silicon to form C/C-SiC composites. Three-layer Si-Mo coating prepared by slurry painting and SiC/Si-Mo multilayer coating prepared by chemical vapor depositi...Porous carbon/carbon preforms were infiltrated with melted silicon to form C/C-SiC composites. Three-layer Si-Mo coating prepared by slurry painting and SiC/Si-Mo multilayer coating prepared by chemical vapor deposition(CVD) alternated with slurry painting were applied on C/C-SiC composites, respectively. The oxidation of three samples at 1 500 ℃ was compared. The results show that the C/C-SiC substrate is distorted quickly. Three-layer Si-Mo coating is out of service soon due to the formation of many bubbles on surface. The mass loss of coated sample is 0.76% after 1 h oxidation. The sample with SiC/Si-Mo multilayer coating gains mass even after 105 h oxidation. SiC/Si-Mo multilayer coating can provide longtime protection for C/C-SiC composites and has excellent thermal shock resistance. This is attributed to the combination of dense SiC layer and porous Si-Mo layer. Dense SiC layer plays the dual role of physical and chemical barrier, and resists the oxidation of porous Si-Mo layer. Porous Si-Mo layer improves the thermal shock resistance of the coating.展开更多
3C-SiC又称β-SiC,有着优异的耐高温、耐腐蚀、耐辐照性能,是反应堆这类复杂环境中的理想材料。近年来,一维碳化硅纳米线材料成为碳化硅材料研究领域的热门研究方向,同时也面临加工手段匮乏、加工难度大的问题。我们通过化学气相沉积法...3C-SiC又称β-SiC,有着优异的耐高温、耐腐蚀、耐辐照性能,是反应堆这类复杂环境中的理想材料。近年来,一维碳化硅纳米线材料成为碳化硅材料研究领域的热门研究方向,同时也面临加工手段匮乏、加工难度大的问题。我们通过化学气相沉积法成功制备了含有高密度堆叠层错的3C-SiC纳米线,并采用扫描电子显微镜(Scanning Electron Microscope,SEM)、透射电子显微镜(Transmission Electron Microscope,TEM)、X射线衍射(X-Ray Diffraction,XRD)以及拉曼光谱(Raman spectrum)等多种手段对制备出来的碳化硅纳米线进行了微观结构表征,揭示了其独特的微观形态和晶体结构特征;进一步研究了超声裁剪碳化硅纳米线,利用“气泡-射流”模型结合碳化硅纳米线的形态解释了碳化硅纳米线的超声裁剪过程,探索了碳化硅纳米线的直径、强度、缺陷等对其在超声过程中断裂行为的影响。本研究为碳化硅纳米线的超声裁剪加工和纳米线的强度研究提供了新的视角,对于未来碳化硅纳米线在核能领域的应用具有重要的意义。展开更多
SiC nanowires were prepared on C/C composite surface without catalyst by chemical vapor deposition（CVD） using CH3 SiCl3 as precursor.SEM images of the CVD-product reveal that some long nanowires have grown to tens o...SiC nanowires were prepared on C/C composite surface without catalyst by chemical vapor deposition（CVD） using CH3 SiCl3 as precursor.SEM images of the CVD-product reveal that some long nanowires have grown to tens of micrometers with some gathered as a ball.Some short nanowires agglomerate like chestnut shell with many thorns accompanied by some deposited nano-particles.XRD,Raman-spectrum and FTIR patterns indicate that the product is a typical β-SiC.TEM images show that the nanowires have a wide diameter range from 10 to 100 nm,and some thin nanowires are bonded to the thick one by amorphous CVD-SiC.A SiC branch generates from an amorphous section of a thick one with an angle of 70° between them,which is consistent with the [111] axis stacking angle of the crystal.SAED and fast Fourier transform（FFT） patterns reveal that the nanowires can grow along with different axes,and the bamboo-nodes section is full of stacking faults and twin crystal.The twisted SiC lattice planes reveal that the screw dislocation growth is the main mechanism for the CVD-SiC nanowires.展开更多
Si C陶瓷材料具有许多优异的性能如高比强度、高比模量、低密度、高硬度、高导热系数、低的热膨胀系数、耐腐蚀、抗氧化等 ,从而被广泛用作高温结构部件。CVD工艺灵活 ,制备的 Si C陶瓷具有很高纯度和致密度 ,因而是制备先进 Si C陶瓷...Si C陶瓷材料具有许多优异的性能如高比强度、高比模量、低密度、高硬度、高导热系数、低的热膨胀系数、耐腐蚀、抗氧化等 ,从而被广泛用作高温结构部件。CVD工艺灵活 ,制备的 Si C陶瓷具有很高纯度和致密度 ,因而是制备先进 Si C陶瓷的最有希望的工艺之一。对 CVD法制备 Si C涂层和 Si展开更多
基金funded by a grant from the National Core Research Center(NCRC)Program through the National Research Foundation of Korea funded by the Ministry of Education,Science and Technology(No.2012-0000-957)by a grant from the Fundamental R&D Program for Core Technology of Materials funded by the Ministry of Knowledge Economy,Republic of Korea
文摘Ternary Ti-B-N coatings were synthesized on AISI 304 and Si wafer by plasma-enhanced chemical vapor deposition (PECVD) technique using a gaseous mixture of TiCl4,BCl3,H2,N2,and Ar.By virtue of X-ray diffraction analysis,X-ray photoelectron spectroscopy,scanning electron microscope,and high-resolution transmission electron microscope,the influences of B content on the microstructure and properties of Ti B N coatings were investigated systematically.The results indicated that the microstructure and mechanical properties of Ti-B-N coatings largely depend on the transformation from FCC-TiN phase to HCP-TiB2 phase.With increasing B content and decreasing N content in the coatings,the coating microstructure evolves gradually from FCC-TiN/a-BN to HCP-TiB2 /a-BN via FCC-TiN+HCP-TiB2/a-BN.The highest microhardness of about 34 GPa is achieved,which corresponds to the nanocomposite Ti-63%B-N (mole fraction) coating consisting of the HCP-TiB2 nano-crystallites and amorphous BN phase.The lowest friction-coefficient was observed for the nanocomposite Ti-41%B-N (mole fraction) coating consisting of the FCC-TiN nanocrystallites and amorphous BN
文摘In this work, the Zr C-SiC composite coatings were co-deposited by chemical vapor deposition(CVD)using ZrCl4, MTS, CH4 and H2 as raw materials. The morphologies, compositions and phases of the composite coatings were characterized by scanning electron microscopy(SEM), energy dispersive X-ray spectroscopy(EDS) and X-ray diffraction(XRD). The results indicated that the morphologies, compositions and phases of the composite coatings were related to the deposition temperature, the flow rate of the carrier H2 gas, and the ratio of C/Zr. Moreover, the co-deposition mechanism of the composite coatings was also studied. It was found that different deposition temperatures resulted in different deposition mechanisms. At temperatures in the range of 1150–1250℃, the Zr C-SiC co-deposition was controlled by the surface kinetic process. At temperatures in the range of 1250–1400℃, the Zr C-SiC co-deposition was controlled by the mass transport process.
文摘Aluminum coatings were created onto glass beads by chemical vapor deposition in a fluidized bed reactor at different temperatures. Nitrogen was enriched with Triisobutylaluminum (TIBA) vapor and the latter was thermally decomposed inside the fluidized bed to deposit the elemental aluminum. To ensure homogeneous coating on the bed material, the fluidizing conditions necessary to avoid agglomeration were investigated for a broad range of temperatures. The deposition reaction was modeled on the basis of a discrete particle simulation to gain insight into homogeneity and thickness of the coating throughout the bed material. In particular, the take-up of aluminum was traced for selected particles that exhibited a large mass of deposited aluminum.
基金financially supported by the National Natural Science Foundation of China(No.51501224)。
文摘The purity,preferred orientation,microstructure,microhardness,bonding strength,thickness uniformity and thermal stability of rhenium(Re)coatings prepared on graphite wafers by chemical vapor deposition(CVD)and electrodeposition(ED)in molten salts were comparatively studied in this paper.It was found that carbon(0.0140 wt%)and oxygen(0.0067 wt%)were the primary impurities for CVD and ED Re coatings,respectively.The diffusion of carbon into CVD Re coating caused higher microhardness near the substrate and helped to improve the bonding strength at the same time.The preferred orientation,microstructure and microhardness of ED Re coating were all susceptible to oxygen.The coating deposition uniformity of ED Re is obviously better than that of CVD Re coating,due to its intrinsic characteristics.The(002)-oriented,coarse columnar CVD Re coating exhibited better thermal stability compared with that of the<110>-oriented,fiber-like columnar ED Re coating,while the ED Re grains grew remarkably and the microstructure evolved toward the similar structure of CVD Re after annealing treatment.The diversity of Re coatings in microstructure could be attributed to the mobility of grain boundaries(affected by temperature and impurity)during deposition processes.
基金the National Basic Research Program of (973) China(No.2011CB605805)the Postdoctor Fund of Central South University(No.20101210)
文摘Four kinds of ZrC coatings with nearly the same thickness have been successfully prepared on graphite substrate by chemical vapor deposition （CVD） through controlling the ratio of inlet reacting gases. From backscat- tered electron images, it can be inferred that ZrCIII coating has the best tightness of all coatings. Meanwhile, line energy spectrum curve shows that zirconium and carbon elements distribute uniformly along the normal direction of the ZrCIII coating. As for varied microstructures, the coatings show different mechanical properties and residue stress. The strength and elastic modulus of ZrCIII coating were up to 89.57 and 1 192.5 GPa, respectively. Those make it near the level of diamond. Value of residue tensile stress of ZrC＋C composite coating was only 7.729 MPa and that of ZrCIII coatings was 349.632 MPa. The strong combination of small-size grains in ZrCIII coating plays a decisive role to the best mechanical properties. However, strong misfit of lattice between ZrCIII coating and substrate can induce high residue stress.
基金supported by the National Natural Science Foundation of China(60876061)the Pre-research Project(51308040302)
文摘3C-SiC heteroepitaxial layers were grown on Si substrates using a horizontal,hot-wall low pressure chemical vapor deposition system.The crystal quality,surface morphology and thickness uniformity of the layers were characterized by X-ray diffraction,atomic force microcopy and Fourier transform infrared spectroscopy,respectively.Growth of the epitaxial layer was determined to follow a three-dimensional island mode initially and then switch to a step-flow mode as the growth time increases.
基金This work was supported by the Natural Science Foundation of China （Grant Nos. S1302148, 21306097）, the Research Fund for Independent Research Projects of Tsinghua University （Grant Nos. 20131089217, 20121088038）, the Specialized Research Fund for the Doctoral Program of Higher Education （Grant No. 20110002120023）, and the Higher Education Young Elite Teacher Project of Beijing （Grant No. YETP0155）.
文摘Particle coating is an important method that can be used to expand particle-technology applications. Coated-particle design and preparation for nuclear fuel-element trajectory tracing were focused on in this paper. Particles that contain elemental cobalt were selected because of the characteristic gamma ray spectra of 60Co. A novel particle-structure design was proposed by coating particles that contain elemental cobalt with a high-density silicon-carbide （SiC） layer. During the coating process with the high-density SiC layer, cobalt metal was formed and diffused towards the coating, so an inner SiC–CoxSi layer was designed and obtained by fluidized-bed chemical vapor deposition coupled with in-situ chemical reaction. The coating layers were studied by X-ray diffractometry, scanning electron microscopy, and energy dispersive X-ray spectroscopy techniques. The chemical composition was also determined by inductively coupled plasma optical emission spectrometry. The novel particle design can reduce the formation of metallic cobalt and prevent cobalt diffusion in the coating process, which can maintain safety in a nuclear reactor for an extended period. The experimental results also validated that coated particles maintain their structural integrity at extremely high temperatures （～1950 °C）, which meets the requirements of next-generation nuclear reactors.
文摘Over the past years, great achievements have been made in the development of coating technologies for surface improvement of aluminum alloys. Despite these achievements, the role in the market strongly depends on the ability of surface coating technology under technical and economic considerations to meet the increased demands for heavy tribological applications of aluminum alloys. Microplasma oxidation (MPO) technology has recently been studied as a novel and effective means to provide thick and hard ceramic coating with improved properties such as excellent load-bearing and wear resistance properties on aluminum alloys. The present work covers the evaluation of the performances of current single and duplex coatings combining MPO, physical vapor deposition (PVD), and plasma assisted chemical vapor deposition (PACVD) coatings on aluminum alloys. It suggests that the MPO coating is a promising candidate for design engineers to apply aluminum alloys to heavy load-bearing applications. The prospective future for the research on MPO coatings is introduced as well.
基金Project(2006CB600908) supported by the National Basic Research Program of China
文摘Porous carbon/carbon preforms were infiltrated with melted silicon to form C/C-SiC composites. Three-layer Si-Mo coating prepared by slurry painting and SiC/Si-Mo multilayer coating prepared by chemical vapor deposition(CVD) alternated with slurry painting were applied on C/C-SiC composites, respectively. The oxidation of three samples at 1 500 ℃ was compared. The results show that the C/C-SiC substrate is distorted quickly. Three-layer Si-Mo coating is out of service soon due to the formation of many bubbles on surface. The mass loss of coated sample is 0.76% after 1 h oxidation. The sample with SiC/Si-Mo multilayer coating gains mass even after 105 h oxidation. SiC/Si-Mo multilayer coating can provide longtime protection for C/C-SiC composites and has excellent thermal shock resistance. This is attributed to the combination of dense SiC layer and porous Si-Mo layer. Dense SiC layer plays the dual role of physical and chemical barrier, and resists the oxidation of porous Si-Mo layer. Porous Si-Mo layer improves the thermal shock resistance of the coating.
文摘3C-SiC又称β-SiC,有着优异的耐高温、耐腐蚀、耐辐照性能,是反应堆这类复杂环境中的理想材料。近年来,一维碳化硅纳米线材料成为碳化硅材料研究领域的热门研究方向,同时也面临加工手段匮乏、加工难度大的问题。我们通过化学气相沉积法成功制备了含有高密度堆叠层错的3C-SiC纳米线,并采用扫描电子显微镜(Scanning Electron Microscope,SEM)、透射电子显微镜(Transmission Electron Microscope,TEM)、X射线衍射(X-Ray Diffraction,XRD)以及拉曼光谱(Raman spectrum)等多种手段对制备出来的碳化硅纳米线进行了微观结构表征,揭示了其独特的微观形态和晶体结构特征;进一步研究了超声裁剪碳化硅纳米线,利用“气泡-射流”模型结合碳化硅纳米线的形态解释了碳化硅纳米线的超声裁剪过程,探索了碳化硅纳米线的直径、强度、缺陷等对其在超声过程中断裂行为的影响。本研究为碳化硅纳米线的超声裁剪加工和纳米线的强度研究提供了新的视角,对于未来碳化硅纳米线在核能领域的应用具有重要的意义。
基金Project(201206375003)supported by the China Scholarship Council
文摘SiC nanowires were prepared on C/C composite surface without catalyst by chemical vapor deposition（CVD） using CH3 SiCl3 as precursor.SEM images of the CVD-product reveal that some long nanowires have grown to tens of micrometers with some gathered as a ball.Some short nanowires agglomerate like chestnut shell with many thorns accompanied by some deposited nano-particles.XRD,Raman-spectrum and FTIR patterns indicate that the product is a typical β-SiC.TEM images show that the nanowires have a wide diameter range from 10 to 100 nm,and some thin nanowires are bonded to the thick one by amorphous CVD-SiC.A SiC branch generates from an amorphous section of a thick one with an angle of 70° between them,which is consistent with the [111] axis stacking angle of the crystal.SAED and fast Fourier transform（FFT） patterns reveal that the nanowires can grow along with different axes,and the bamboo-nodes section is full of stacking faults and twin crystal.The twisted SiC lattice planes reveal that the screw dislocation growth is the main mechanism for the CVD-SiC nanowires.
文摘Si C陶瓷材料具有许多优异的性能如高比强度、高比模量、低密度、高硬度、高导热系数、低的热膨胀系数、耐腐蚀、抗氧化等 ,从而被广泛用作高温结构部件。CVD工艺灵活 ,制备的 Si C陶瓷具有很高纯度和致密度 ,因而是制备先进 Si C陶瓷的最有希望的工艺之一。对 CVD法制备 Si C涂层和 Si
