研究了在 Co/Ti/Si结构中加入非晶 Ge Si层对 Co Si2 /Si异质固相外延的影响 ,用离子束溅射方法在Si衬底上制备 Co/Ge Si/Ti/Si结构多层薄膜 ,通过快速热退火使多层薄膜发生固相反应。采用四探针电阻仪、AES、XRD、RBS等方法进行测试。...研究了在 Co/Ti/Si结构中加入非晶 Ge Si层对 Co Si2 /Si异质固相外延的影响 ,用离子束溅射方法在Si衬底上制备 Co/Ge Si/Ti/Si结构多层薄膜 ,通过快速热退火使多层薄膜发生固相反应。采用四探针电阻仪、AES、XRD、RBS等方法进行测试。实验表明 ,利用 Co/Ge Si/Ti/Si固相反应形成的 Co Si2 薄膜具有良好的外延特性和电学特性 ,Ti中间层和非晶 Ge Si中间层具有促进和改善 Co Si2 外延质量 ,减少衬底耗硅量的作用。Ge原子的存在能够改善外延 Co Si2展开更多
Si-Al-Y co-deposition coatings were prepared on Ti-Al alloy by pack cementation processes at 1 050 ℃ for 4 h with different halide activators in the packs for enhancing the high temperature oxidation resistance of Ti...Si-Al-Y co-deposition coatings were prepared on Ti-Al alloy by pack cementation processes at 1 050 ℃ for 4 h with different halide activators in the packs for enhancing the high temperature oxidation resistance of Ti-Al alloy. The structure, constituent phases, formation process and oxidation behavior of the coatings were investigated. The experimental results showed that the coatings prepared respectively with NaF and NH_4Cl as activators were composed of a（Ti, X）_5Si_4,（Ti, X）_5Si_3（X represents Nb and Cr）, and TiSi_2 outer layer, a TiAl_2 inner layer and an Al-rich interdiffusion zone. However, the constituent phases changed into TiSi_2 in the outer layer and（Ti, X）_5Si_4 and（Ti, X）_5Si_3 phases were observed in the middle layer of the coating prepared with AlCl_3·6H_2O activator. Among the halide activators studied, the coating prepared with AlCl_3·6H_2O was thicker and denser, which is the only suitable activator for pack Si-Al-Y co-deposition coatings on a Ti-Al alloy. The oxidation results show that the coating can protect the Ti-Al alloy from oxidation at 1000 ℃ in air for at least 80 h. The excellent oxidation resistance of the coating is attributed to the formation of a dense scale mainly consisted of TiO_2, SiO_2 and Al_2O_3.展开更多
文摘研究了在 Co/Ti/Si结构中加入非晶 Ge Si层对 Co Si2 /Si异质固相外延的影响 ,用离子束溅射方法在Si衬底上制备 Co/Ge Si/Ti/Si结构多层薄膜 ,通过快速热退火使多层薄膜发生固相反应。采用四探针电阻仪、AES、XRD、RBS等方法进行测试。实验表明 ,利用 Co/Ge Si/Ti/Si固相反应形成的 Co Si2 薄膜具有良好的外延特性和电学特性 ,Ti中间层和非晶 Ge Si中间层具有促进和改善 Co Si2 外延质量 ,减少衬底耗硅量的作用。Ge原子的存在能够改善外延 Co Si2
基金the Key Scientific Research Projects in 2017 at North Minzu University(2017KJ05)
文摘Si-Al-Y co-deposition coatings were prepared on Ti-Al alloy by pack cementation processes at 1 050 ℃ for 4 h with different halide activators in the packs for enhancing the high temperature oxidation resistance of Ti-Al alloy. The structure, constituent phases, formation process and oxidation behavior of the coatings were investigated. The experimental results showed that the coatings prepared respectively with NaF and NH_4Cl as activators were composed of a（Ti, X）_5Si_4,（Ti, X）_5Si_3（X represents Nb and Cr）, and TiSi_2 outer layer, a TiAl_2 inner layer and an Al-rich interdiffusion zone. However, the constituent phases changed into TiSi_2 in the outer layer and（Ti, X）_5Si_4 and（Ti, X）_5Si_3 phases were observed in the middle layer of the coating prepared with AlCl_3·6H_2O activator. Among the halide activators studied, the coating prepared with AlCl_3·6H_2O was thicker and denser, which is the only suitable activator for pack Si-Al-Y co-deposition coatings on a Ti-Al alloy. The oxidation results show that the coating can protect the Ti-Al alloy from oxidation at 1000 ℃ in air for at least 80 h. The excellent oxidation resistance of the coating is attributed to the formation of a dense scale mainly consisted of TiO_2, SiO_2 and Al_2O_3.
