Coherent Parameter Measurement Based on Partial Coherent Envelope Demodulation

The key parameters of laser energy concentration and coherence can be characterized by laser linewidth, which determines the detection range, measurement resolution and signal-to-noise ratio of laser precision measurement technology. Up to now, the laser linewidth is mainly measured by the energy distribution width in the frequency domain, but the coherence of the laser has not been measured or characterized directly. In this work, we propose the concept of coherent linewidth based on the coherent envelope of delayed self-heterodyne detection to directly characterize the time-frequency coherence of lasers. In the proof-of-concept experiment, we obtain the coherence coefficient through the Fourier transform of the partial coherence envelope, and then measure the coherence linewidth of the laser. The measured coherent linewidth is smaller than the traditional integral linewidth and larger than the intrinsic Lorentzian linewidth, indicating that the coherent linewidth is less affected by low-frequency 1/f noise. The concept of coherent linewidth proposed in this article can serve as a candidate method for directly characterizing the coherence of narrow linewidth lasers. .

Development of surface reconstruction algorithms for optical interferometric measurement

Optical interferometry is a powerful tool for measuring and characterizing areal surface topography in precision manufacturing.A variety of instruments based on optical interferometry have been developed to meet the measurement needs in various applications,but the existing techniques are simply not enough to meet the ever-increasing requirements in terms of accuracy,speed,robustness,and dynamic range,especially in on-line or on-machine conditions.This paper provides an in-depth perspective of surface topography reconstruction for optical interferometric measurements.Principles,configurations,and applications of typical optical interferometers with different capabilities and limitations are presented.Theoretical background and recent advances of fringe analysis algorithms,including coherence peak sensing and phase-shifting algorithm,are summarized.The new developments in measurement accuracy and repeatability,noise resistance,self-calibration ability,and computational efficiency are discussed.This paper also presents the new challenges that optical interferometry techniques are facing in surface topography measurement.To address these challenges,advanced techniques in image stitching,on-machine measurement,intelligent sampling,parallel computing,and deep learning are explored to improve the functional performance of optical interferometry in future manufacturing metrology.