A novel 60 kW plasma converter with full range soft-switch by utilizing magnetizing inductance, leakage inductance and distributed inductance is introduced. The current injection phase-shifting technique is introduced...A novel 60 kW plasma converter with full range soft-switch by utilizing magnetizing inductance, leakage inductance and distributed inductance is introduced. The current injection phase-shifting technique is introduced into the research of soft-switching plasma converter successfully. The magnetic bias of transformer and the protection of switching parts are solved. The tests state that the power supply has excellent characteristics and higher efficiency and can meet the demand of large power plasma process well.展开更多
基金This project is supported by National Natural Science Foundation of China (No.59975030)Provincial Natural Science Foundation of Guangdong,China(No.04300691).
文摘A novel 60 kW plasma converter with full range soft-switch by utilizing magnetizing inductance, leakage inductance and distributed inductance is introduced. The current injection phase-shifting technique is introduced into the research of soft-switching plasma converter successfully. The magnetic bias of transformer and the protection of switching parts are solved. The tests state that the power supply has excellent characteristics and higher efficiency and can meet the demand of large power plasma process well.