In this paper, graphite-like carbon （GLC） films with Cr buffer layer were fabricated by DC magnetron sputtering technique with the thickness ratio of Cr to GLC films varying from 1：2 to 1：20. The effect of Cr]GLC ...In this paper, graphite-like carbon （GLC） films with Cr buffer layer were fabricated by DC magnetron sputtering technique with the thickness ratio of Cr to GLC films varying from 1：2 to 1：20. The effect of Cr]GLC modulation ratio on microstructure, mechanical and tribological properties in artificial seawater was mainly investigated by scanning electron microscopy （SEM）, energy dispersive spectroscopy （EDS）, nano-indenter and a reciprocating sliding tribo-meter. The propagation of defects plays an important role in the evolution of delamination, which is critical to wear failure of GLC films in artificial seawa- ter. Designing the proper multilayer structure could inhibit the defects propagation and thus protect the basis material. The multilayer Cr/GLC film with optimized ratio of 1：3 demonstrates a low average friction coefficient of 0.08 ± 0.006 and wear rate of （2.3 ± 0.3） × 10^-8 mm3/（N m） in artificial seawater, respectively.展开更多
The oxidation kinetics,surface morphology and phase structure of oxide films grown on 25Cr20Ni alloy in air-H2O and H2-H2O atmospheres at 900 ℃ for 20 h were investigated.The anti-coking performance and resistance to...The oxidation kinetics,surface morphology and phase structure of oxide films grown on 25Cr20Ni alloy in air-H2O and H2-H2O atmospheres at 900 ℃ for 20 h were investigated.The anti-coking performance and resistance to carburization of the two oxide films were compared using 25Cr20Ni alloy tubes with an inner diameter of 10 mm and a length of 850 mm in a bench scale naphtha steam pyrolysis unit.The oxidation kinetics followed a parabolic law in an air-H2O atmosphere and a logarithm law in a H2-H2O atmosphere in the steady-state stage.The oxide film grown in the air-H2O atmosphere had cracks where the elements Fe and Ni were enriched and the un-cracked area was covered with octahedral-shaped MnCr2O4 spinels and Cr1.3Fe0.7O3 oxide clusters,while the oxide film grown in the H2-H2O atmosphere was intact and completely covered with dense standing blade MnCr2O4 spinels.In the pyrolysis tests,the anti-coking performance and resistance to carburization of the oxide film grown in the H2-H2O atmosphere were far better than that in the air-H2O atmosphere.The mass of coke formed in the oxide film grown in the H2-H2O atmosphere was less than 10％ of that in the air-H2O atmosphere.The Cr1.3Fe0.7O3 oxide clusters converted into Cr23C6 carbides and the cracks were filled with carbon in the oxide film grown in the air-H2O atmosphere after repeated coking and decoking tests,while the dense standing blade MnCr2O4 spinels remained unchanged in the oxide film grown in the H2-H2O atmosphere.The ethylene,propylene and butadiene yields in the pyrolysis tests were almost the same for the two oxide films.展开更多
The micro-laminated （ZrO2-Y2O3）/（Al2O3-Y2O3） composite films were prepared on the surface of Fe-13Cr alloy by an electrochemical process and a sintering process alternately. High-resolution field emission scanning...The micro-laminated （ZrO2-Y2O3）/（Al2O3-Y2O3） composite films were prepared on the surface of Fe-13Cr alloy by an electrochemical process and a sintering process alternately. High-resolution field emission scanning electron microscopy （FE-SEM） was used to characterize the laminated films, indicating that the micro-laminated （ZrO2-Y2O3）] （Al2O3-Y2O3） films have nano-structures. SEM, EDS and mass gain measurement were adopted to study the oxidation resistance of films on Fe-13Cr alloy. It is proved that such micro-laminated films are more effective than ZrO2-Y2O3 or Al2O3-Y2O3 films to resist the oxidation of the alloy, and the oxidation resistance is increased with increasing layers in micro-laminated films. These beneficial effects can be contributed to the mechanism, by which such micro-laminated （ZrOE- YEO3）/（Al2O3-Y2O3） composite film combines all the beneficial effects and overcomes all the disadvantages of both ZrOE- Y2O3 film and Al2O3-Y2O3 film during oxidation of alloy.展开更多
Polycrystalline LaCrO3（LCO） thin films are deposited on Pt/Ti/SiO2/Si substrates by pulsed laser deposition and used as the switching material to construct resistive random access memory devices. The unipolar resist...Polycrystalline LaCrO3（LCO） thin films are deposited on Pt/Ti/SiO2/Si substrates by pulsed laser deposition and used as the switching material to construct resistive random access memory devices. The unipolar resistive switching（RS） behavior in the Au/LCO/Pt devices exhibits a high resistance ratio of ~104 between the high resistance state（HRS） and low resistance state（LRS） and exhibits excellent endurance/retention characteristics.The conduction mechanism of the HRS in the high voltage range is dominated by the Schottky emission, while the Ohmic conduction dictates the LRS and the low voltage range of HRS. The RS behavior in the Au/LCO/Pt devices can be understood by the formation and rupture of conducting filaments consisting of oxygen vacancies,which is validated by the temperature dependence of resistance and x-ray photoelectron spectroscopy results.Further analysis shows that the reset current IR and reset power PR in the reset processes exhibit a scaling law with the resistance in LRS（R0）, which indicates that the Joule heating effect plays an essential role in the RS behavior of the Au/LCO/Pt devices.展开更多
Ni80Fe20/Ni48Fe12Cr40 bilayer films and Ni80Fe20 monolayer films were deposited at room temperature on SiO2/Si（100） substrates by electron beam evaporation. The influence of the thickness of the Ni48Fe12Cr40 underla...Ni80Fe20/Ni48Fe12Cr40 bilayer films and Ni80Fe20 monolayer films were deposited at room temperature on SiO2/Si（100） substrates by electron beam evaporation. The influence of the thickness of the Ni48Fe12Cr40 underlayer on the structure, magnetization, and magnetoresistance of the Ni80Fe20/Ni48Fe12Cr40 bilayer film was investigated. The thickness of the Ni48Fe12Cr40 layer varied from about 1 nm to 18 nm while the Ni80Fe20 layer thickness was fixed at 45 nm. For the as-deposited bilayer films the introducing of the Ni48Fe12Cr40 underlayer promotes both the （111） texture and grain growth in the Ni80Fe20 layer. The Ni48Fe12Cr40 underlayer has no significant influence on the magnetic moment of the Ni80Fe20/Ni48Fe12Cr40 bilayer film. However, the coercivity of the bilayer film changes with the thickness of the Ni48Fe12Cr40 undedayer. The optimum thickness of the Ni48Fe12Cr40 underlayer for improving the anisotropic magnetoresistance effect of the Ni80Fe20/Ni48Fe12Cr40 bilayer film is about 5 nm. With a decrease in temperature from 300 K to 81 K, the anisotropic magnetoresistance ratio of the Ni80Fe20 （45 nm）/Ni48Fe12Cr40 （5 nm） bilayer film increases linearly from 2.1% to 4.8% compared with that of the Ni80Fe20 monolayer film from 1.7% to 4.0%.展开更多
The CrN and Cr-Al-Si-N films were deposited on Si wafer and SUS 304 substrates by a hybrid coating system with high power impulse magnetron sputtering (HIPIMS) and a DC pulse sputtering using Cr and AlSi targets under...The CrN and Cr-Al-Si-N films were deposited on Si wafer and SUS 304 substrates by a hybrid coating system with high power impulse magnetron sputtering (HIPIMS) and a DC pulse sputtering using Cr and AlSi targets under N2/Ar atmosphere.By varying the sputtering current of the AlSi target in the range of 0-2.5 A,both the Al and Si contents in the films increased gradually from 0 to 19.1% and 11.1% (mole fraction),respectively.The influences of the AlSi cathode DC pulse current on the microstructure,phase constituents,mechanical properties,and oxidation behaviors of the Cr-Al-Si-N films were investigated systematically.The results indicate that the as-deposited Cr-Al-Si-N films possess the typical nanocomposite structure,namely the face centered cubic (Cr,Al)N nano-crystallites are embedded in the amorphous Si3N4 matrix.With increasing the Al and Si contents,the hardness of the film first increases from 20.8 GPa for the CrN film to the peak value of 29.4 GPa for the Cr0.23Al0.14Si0.07 N film,and then decreases gradually.In the meanwhile,the Cr0.23Al0.14Si0.07N film also possesses excellent high-temperature oxidation resistance that is much better than that of the CrN film at 900 or 1000 °C.展开更多
NdTbCo/Cr amorphous films with high perpendicular magnetic anisotropy were prepared onto glass substrates by rf magnetron sputtering. The effects of Nd substitution on the magnetic and magneto-optical properties of Tb...NdTbCo/Cr amorphous films with high perpendicular magnetic anisotropy were prepared onto glass substrates by rf magnetron sputtering. The effects of Nd substitution on the magnetic and magneto-optical properties of TbCo/Cr films were investigated. It was found that partial Tb substitution by Nd would increase the saturation magnetization and the Kerr rotation angle, change the temperature dependence of magneto-optical characteristics. These results can be explained by the ferrimagnetic structure of the rare earth-transition metal alloy. When the magnetic layer composition was （Nd0.265Tb0.735）31Co69, a saturation magnetization of 247 emu/cm^3 and a coercivity of 3.8 kOe at room temperature could be obtained.展开更多
With the development of industry, much attention has been paid to lengthening the life span of bearings. As reported in this paper, we investigated the Cr/CrN compound films formed on the specimens of W9Cr4V2Mo bearin...With the development of industry, much attention has been paid to lengthening the life span of bearings. As reported in this paper, we investigated the Cr/CrN compound films formed on the specimens of W9Cr4V2Mo bearing steel by ion beam assisted deposition for improving the performance of bearing steels. The Vicker＇s microhardness, pin-on-disc, electrochemical measurement, XRD and SEM tests were used to characterize and analyze the treated samples. All results indicated that the mechanical properties of the treated samples were good, with the microhardness greater than that of the uncoated specimen, and the wear resistance, the passivity and pitting corrosion resistance increased considerably, the films possessed alternate Cr and CrN compound phases and produced different effects on the improvement of the performance of W9Cr4V2Mo bearing steels with different composing phases.展开更多
Hydrogenated Cr-incorporated carbon films （Cr/a-C：H） are deposited successfully by using a dc reactive mag- netron sputtering system. The structure and mechanical properties of the as-deposited Cr/a-C：H films are ...Hydrogenated Cr-incorporated carbon films （Cr/a-C：H） are deposited successfully by using a dc reactive mag- netron sputtering system. The structure and mechanical properties of the as-deposited Cr/a-C：H films are characterized systematically by field-emission scanning electron microscope, x-ray diffraction, Raman spectra, nanoindentation and scratch. It is shown that optimal Cr metal forms nanocrystalline carbide to improve the hardness, toughness and adhesion strength in the amorphous carbon matrix, which possesses relatively higher nano-hardness of 15. 7 CPa, elastic modulus of 126.8 GPa and best adhesion strength with critical load （Lc） of 36 N for the Cr/a-C：H film deposited at CH4 flow rate of 20sccm. The friction and wear behaviors of as-deposited Cr/a-C：H films are evaluated under both the ambient air and deionized water conditions. The results reveal that it can achieve superior low friction and anti-wear performance for the Cr/a-C：H film deposited at CH4 flow rate of 20sccm under the ambient air condition, and the friction coetllcient and wear rate tested in deionized water condition are relatively lower compared with those tested under the ambient air condition for each film. Superior combination of mechanical and tribological properties for the Cr/a-C：H film should be a good candidate for engineering applications.展开更多
Chrome-doped titanium oxide films were prepared by reactive magnetron sputtering method. The films deposited on glass slides at room temperature were investigated by atom force microscope, X-ray diffractometer, X-ray ...Chrome-doped titanium oxide films were prepared by reactive magnetron sputtering method. The films deposited on glass slides at room temperature were investigated by atom force microscope, X-ray diffractometer, X-ray photoelectron spectroscopy, UV-Vis spectrophotometer, the photoluminescence （PL） and ellipse polarization apparatus. The results indicate that TiO2-Cr film exists in the form of amorphous. The prepared films possess a band gap of less than 3.20 eV, and a new absorption peak. The films, irradiated for 5 h under UV light, exhibit excellent photocatalytic activities with the optimum decomposition rate at 98.5% for methylene blue. Consequently, the thickness threshold on these films is 114 nm, at which the rate of photodegradation is 95% in 5 h. When the thickness is over 114 nm, the rate of photodegradation becomes stable. This result is completely different from that of crystalloid TiO2 thin film.展开更多
The thin films of pure Cu and Cu-2.18%Cr(mole fraction,%) were deposited on Si(100) substrates. Then the samples were vacuum-annealed at 573-773 K to investigate the effect of Cr on the microstructural and electrical ...The thin films of pure Cu and Cu-2.18%Cr(mole fraction,%) were deposited on Si(100) substrates. Then the samples were vacuum-annealed at 573-773 K to investigate the effect of Cr on the microstructural and electrical characteristics of Cu/Si systems. The XRD results reveal that the annealed Cu(Cr) film has a strong(111) texture. The results of AFM and FESEM indicate that the Cu(Cr) films with insoluble Cr have compact surface morphology and fine columnar microstructure. Upon annealing,most Cr segregates at the surface and interface. The residual insoluble Cr is enriched in amorphous structure between Cu grains and retards the crystallization of annealed Cu(Cr) films. As a result,the minimal annealing resistivity of the Cu-2.18%Cr film is 2.76 μΩ·cm at 773 K,which approaches to 2.55 μΩ·cm of the Cu film at 673 K. Significant changes in the microstructure and properties are obtained by adding Cr to Cu films after annealing.展开更多
基金supported by the National Natural Science Foundation of China(Nos.51522106 and 51375475)Zhejiang Key Research and Development Program(2017C01001)Public Projects of Zhejiang Province
文摘In this paper, graphite-like carbon （GLC） films with Cr buffer layer were fabricated by DC magnetron sputtering technique with the thickness ratio of Cr to GLC films varying from 1：2 to 1：20. The effect of Cr]GLC modulation ratio on microstructure, mechanical and tribological properties in artificial seawater was mainly investigated by scanning electron microscopy （SEM）, energy dispersive spectroscopy （EDS）, nano-indenter and a reciprocating sliding tribo-meter. The propagation of defects plays an important role in the evolution of delamination, which is critical to wear failure of GLC films in artificial seawa- ter. Designing the proper multilayer structure could inhibit the defects propagation and thus protect the basis material. The multilayer Cr/GLC film with optimized ratio of 1：3 demonstrates a low average friction coefficient of 0.08 ± 0.006 and wear rate of （2.3 ± 0.3） × 10^-8 mm3/（N m） in artificial seawater, respectively.
基金financially supported by the scientific research project of China Petroleum and Chemical Corporation(No.409075)
文摘The oxidation kinetics,surface morphology and phase structure of oxide films grown on 25Cr20Ni alloy in air-H2O and H2-H2O atmospheres at 900 ℃ for 20 h were investigated.The anti-coking performance and resistance to carburization of the two oxide films were compared using 25Cr20Ni alloy tubes with an inner diameter of 10 mm and a length of 850 mm in a bench scale naphtha steam pyrolysis unit.The oxidation kinetics followed a parabolic law in an air-H2O atmosphere and a logarithm law in a H2-H2O atmosphere in the steady-state stage.The oxide film grown in the air-H2O atmosphere had cracks where the elements Fe and Ni were enriched and the un-cracked area was covered with octahedral-shaped MnCr2O4 spinels and Cr1.3Fe0.7O3 oxide clusters,while the oxide film grown in the H2-H2O atmosphere was intact and completely covered with dense standing blade MnCr2O4 spinels.In the pyrolysis tests,the anti-coking performance and resistance to carburization of the oxide film grown in the H2-H2O atmosphere were far better than that in the air-H2O atmosphere.The mass of coke formed in the oxide film grown in the H2-H2O atmosphere was less than 10％ of that in the air-H2O atmosphere.The Cr1.3Fe0.7O3 oxide clusters converted into Cr23C6 carbides and the cracks were filled with carbon in the oxide film grown in the air-H2O atmosphere after repeated coking and decoking tests,while the dense standing blade MnCr2O4 spinels remained unchanged in the oxide film grown in the H2-H2O atmosphere.The ethylene,propylene and butadiene yields in the pyrolysis tests were almost the same for the two oxide films.
文摘The micro-laminated （ZrO2-Y2O3）/（Al2O3-Y2O3） composite films were prepared on the surface of Fe-13Cr alloy by an electrochemical process and a sintering process alternately. High-resolution field emission scanning electron microscopy （FE-SEM） was used to characterize the laminated films, indicating that the micro-laminated （ZrO2-Y2O3）] （Al2O3-Y2O3） films have nano-structures. SEM, EDS and mass gain measurement were adopted to study the oxidation resistance of films on Fe-13Cr alloy. It is proved that such micro-laminated films are more effective than ZrO2-Y2O3 or Al2O3-Y2O3 films to resist the oxidation of the alloy, and the oxidation resistance is increased with increasing layers in micro-laminated films. These beneficial effects can be contributed to the mechanism, by which such micro-laminated （ZrOE- YEO3）/（Al2O3-Y2O3） composite film combines all the beneficial effects and overcomes all the disadvantages of both ZrOE- Y2O3 film and Al2O3-Y2O3 film during oxidation of alloy.
基金Supported by the Joint Funds of the National Natural Science Foundation of China and the Chinese Academy of Sciences’Large-Scale Scientific Facility under Grant No U1532149the National Basic Research Program of China under Grant No2014CB931704
文摘Polycrystalline LaCrO3（LCO） thin films are deposited on Pt/Ti/SiO2/Si substrates by pulsed laser deposition and used as the switching material to construct resistive random access memory devices. The unipolar resistive switching（RS） behavior in the Au/LCO/Pt devices exhibits a high resistance ratio of ~104 between the high resistance state（HRS） and low resistance state（LRS） and exhibits excellent endurance/retention characteristics.The conduction mechanism of the HRS in the high voltage range is dominated by the Schottky emission, while the Ohmic conduction dictates the LRS and the low voltage range of HRS. The RS behavior in the Au/LCO/Pt devices can be understood by the formation and rupture of conducting filaments consisting of oxygen vacancies,which is validated by the temperature dependence of resistance and x-ray photoelectron spectroscopy results.Further analysis shows that the reset current IR and reset power PR in the reset processes exhibit a scaling law with the resistance in LRS（R0）, which indicates that the Joule heating effect plays an essential role in the RS behavior of the Au/LCO/Pt devices.
文摘Ni80Fe20/Ni48Fe12Cr40 bilayer films and Ni80Fe20 monolayer films were deposited at room temperature on SiO2/Si（100） substrates by electron beam evaporation. The influence of the thickness of the Ni48Fe12Cr40 underlayer on the structure, magnetization, and magnetoresistance of the Ni80Fe20/Ni48Fe12Cr40 bilayer film was investigated. The thickness of the Ni48Fe12Cr40 layer varied from about 1 nm to 18 nm while the Ni80Fe20 layer thickness was fixed at 45 nm. For the as-deposited bilayer films the introducing of the Ni48Fe12Cr40 underlayer promotes both the （111） texture and grain growth in the Ni80Fe20 layer. The Ni48Fe12Cr40 underlayer has no significant influence on the magnetic moment of the Ni80Fe20/Ni48Fe12Cr40 bilayer film. However, the coercivity of the bilayer film changes with the thickness of the Ni48Fe12Cr40 undedayer. The optimum thickness of the Ni48Fe12Cr40 underlayer for improving the anisotropic magnetoresistance effect of the Ni80Fe20/Ni48Fe12Cr40 bilayer film is about 5 nm. With a decrease in temperature from 300 K to 81 K, the anisotropic magnetoresistance ratio of the Ni80Fe20 （45 nm）/Ni48Fe12Cr40 （5 nm） bilayer film increases linearly from 2.1% to 4.8% compared with that of the Ni80Fe20 monolayer film from 1.7% to 4.0%.
基金supported by a 2-Year Research Grant of Pusan National University,Korea
文摘The CrN and Cr-Al-Si-N films were deposited on Si wafer and SUS 304 substrates by a hybrid coating system with high power impulse magnetron sputtering (HIPIMS) and a DC pulse sputtering using Cr and AlSi targets under N2/Ar atmosphere.By varying the sputtering current of the AlSi target in the range of 0-2.5 A,both the Al and Si contents in the films increased gradually from 0 to 19.1% and 11.1% (mole fraction),respectively.The influences of the AlSi cathode DC pulse current on the microstructure,phase constituents,mechanical properties,and oxidation behaviors of the Cr-Al-Si-N films were investigated systematically.The results indicate that the as-deposited Cr-Al-Si-N films possess the typical nanocomposite structure,namely the face centered cubic (Cr,Al)N nano-crystallites are embedded in the amorphous Si3N4 matrix.With increasing the Al and Si contents,the hardness of the film first increases from 20.8 GPa for the CrN film to the peak value of 29.4 GPa for the Cr0.23Al0.14Si0.07 N film,and then decreases gradually.In the meanwhile,the Cr0.23Al0.14Si0.07N film also possesses excellent high-temperature oxidation resistance that is much better than that of the CrN film at 900 or 1000 °C.
基金the Major Project of National Natural Science Foundation of China(No.60490290)the National Natural Science Foundation of China(No.60571010)
文摘NdTbCo/Cr amorphous films with high perpendicular magnetic anisotropy were prepared onto glass substrates by rf magnetron sputtering. The effects of Nd substitution on the magnetic and magneto-optical properties of TbCo/Cr films were investigated. It was found that partial Tb substitution by Nd would increase the saturation magnetization and the Kerr rotation angle, change the temperature dependence of magneto-optical characteristics. These results can be explained by the ferrimagnetic structure of the rare earth-transition metal alloy. When the magnetic layer composition was （Nd0.265Tb0.735）31Co69, a saturation magnetization of 247 emu/cm^3 and a coercivity of 3.8 kOe at room temperature could be obtained.
基金The project supported by National Natural Science Foundation of China (No. 90205001)
文摘With the development of industry, much attention has been paid to lengthening the life span of bearings. As reported in this paper, we investigated the Cr/CrN compound films formed on the specimens of W9Cr4V2Mo bearing steel by ion beam assisted deposition for improving the performance of bearing steels. The Vicker＇s microhardness, pin-on-disc, electrochemical measurement, XRD and SEM tests were used to characterize and analyze the treated samples. All results indicated that the mechanical properties of the treated samples were good, with the microhardness greater than that of the uncoated specimen, and the wear resistance, the passivity and pitting corrosion resistance increased considerably, the films possessed alternate Cr and CrN compound phases and produced different effects on the improvement of the performance of W9Cr4V2Mo bearing steels with different composing phases.
基金Supported by the National Natural Science Foundation of China under Grant Nos 51302116 and 51365016the Open Fund Item of State Key Laboratory of Solid Lubrication of Lanzhou Institute of Chemical Physics of Chinese Academy of Sciences under Grant No LSL-1203
文摘Hydrogenated Cr-incorporated carbon films （Cr/a-C：H） are deposited successfully by using a dc reactive mag- netron sputtering system. The structure and mechanical properties of the as-deposited Cr/a-C：H films are characterized systematically by field-emission scanning electron microscope, x-ray diffraction, Raman spectra, nanoindentation and scratch. It is shown that optimal Cr metal forms nanocrystalline carbide to improve the hardness, toughness and adhesion strength in the amorphous carbon matrix, which possesses relatively higher nano-hardness of 15. 7 CPa, elastic modulus of 126.8 GPa and best adhesion strength with critical load （Lc） of 36 N for the Cr/a-C：H film deposited at CH4 flow rate of 20sccm. The friction and wear behaviors of as-deposited Cr/a-C：H films are evaluated under both the ambient air and deionized water conditions. The results reveal that it can achieve superior low friction and anti-wear performance for the Cr/a-C：H film deposited at CH4 flow rate of 20sccm under the ambient air condition, and the friction coetllcient and wear rate tested in deionized water condition are relatively lower compared with those tested under the ambient air condition for each film. Superior combination of mechanical and tribological properties for the Cr/a-C：H film should be a good candidate for engineering applications.
文摘Chrome-doped titanium oxide films were prepared by reactive magnetron sputtering method. The films deposited on glass slides at room temperature were investigated by atom force microscope, X-ray diffractometer, X-ray photoelectron spectroscopy, UV-Vis spectrophotometer, the photoluminescence （PL） and ellipse polarization apparatus. The results indicate that TiO2-Cr film exists in the form of amorphous. The prepared films possess a band gap of less than 3.20 eV, and a new absorption peak. The films, irradiated for 5 h under UV light, exhibit excellent photocatalytic activities with the optimum decomposition rate at 98.5% for methylene blue. Consequently, the thickness threshold on these films is 114 nm, at which the rate of photodegradation is 95% in 5 h. When the thickness is over 114 nm, the rate of photodegradation becomes stable. This result is completely different from that of crystalloid TiO2 thin film.
基金Project (0525) supported by the Shanghai Research Development Fund of Applied Materials
文摘The thin films of pure Cu and Cu-2.18%Cr(mole fraction,%) were deposited on Si(100) substrates. Then the samples were vacuum-annealed at 573-773 K to investigate the effect of Cr on the microstructural and electrical characteristics of Cu/Si systems. The XRD results reveal that the annealed Cu(Cr) film has a strong(111) texture. The results of AFM and FESEM indicate that the Cu(Cr) films with insoluble Cr have compact surface morphology and fine columnar microstructure. Upon annealing,most Cr segregates at the surface and interface. The residual insoluble Cr is enriched in amorphous structure between Cu grains and retards the crystallization of annealed Cu(Cr) films. As a result,the minimal annealing resistivity of the Cu-2.18%Cr film is 2.76 μΩ·cm at 773 K,which approaches to 2.55 μΩ·cm of the Cu film at 673 K. Significant changes in the microstructure and properties are obtained by adding Cr to Cu films after annealing.
