The Cr-Mo-N films were deposited on high speed steel（HSS） substrates by a DC reactive magnetron sputtering equipment coupled with two horizontal magnetron sources.The effects of substrate negative bias voltage（Vb）...The Cr-Mo-N films were deposited on high speed steel（HSS） substrates by a DC reactive magnetron sputtering equipment coupled with two horizontal magnetron sources.The effects of substrate negative bias voltage（Vb）,substrate temperature（Ts） and gas flow ratio（R= N2/（N2+ Ar）） on the microstructure,morphology,as well as the mechanical and tribological properties of the Cr-Mo-N films were investigated by virtue of X-ray diffraction（XRD） analysis,X-ray photoelectron spectroscopy（XPS）,field emission scanning electron microscopy（FESEM）,atomic force microscopy（AFM）,nano-indentation test,ball-on-disk tribometer,and Rockwell indenter et al.With increasing Vbto-100 V,the preferred orientation of the films changed from（111） to（200） and their mechanical and tribological properties were improved gradually,too.It was also found that Tsgave a significant effect on mechanical property enhancement.When the Tsreached 300 ℃,the film obtained the highest hardness and effective elastic modulus of approximately 30.1 and 420.5 GPa,respectively and its critical load increased to about 54 N.With increasing R,the phase transformation from body-centered-cubic（bcc） Cr and hexagonal CrMoNxmultiphase to single face-centered-cubic（fcc） solid solution phase was observed.The correlations between values of hardness（H）,effective elastic modulus（E*）,HIE*,H3/E*2,elastic recovery（1/14） and tribological properties of the films were also investigated.The results showed that the elastic recovery played an important role in the tribological behavior.展开更多
采用直流反应磁控溅射技术在M2高速钢基片上制备了不同Mo含量的Cr Mo N复合涂层,研究了Mo含量的变化对Cr Mo N复合涂层成分、相结构、化学价态、截面形貌、显微硬度和摩擦性能等的影响.结果表明,随着Mo含量的增加,Cr Mo N复合涂层的相...采用直流反应磁控溅射技术在M2高速钢基片上制备了不同Mo含量的Cr Mo N复合涂层,研究了Mo含量的变化对Cr Mo N复合涂层成分、相结构、化学价态、截面形貌、显微硬度和摩擦性能等的影响.结果表明,随着Mo含量的增加,Cr Mo N复合涂层的相结构先转变为以fcc-Cr N相为基础的(Cr,Mo)N置换式固溶体,后转变为以fcc-g-Mo2N相为主的混合相,当Mo含量为69.3%(原子分数)时,伴有少量的bcc-Mo相生成;Cr Mo N复合涂层的显微硬度先增加后降低,在Mo含量为45.4%时具有最高值;当Mo含量大于45.4%时,在与对磨副摩擦过程中会生成大量的Mo O3相,降低了摩擦系数和磨损率.展开更多
基金supported by the National Key Basic Research Program of China (973 Program, No. 2012CB625100)the National Natural Science Foundation of China (NSFC, No. 51171197)the Natural Science Foundation of Liaoning Province of China (No. 2013020093)
文摘The Cr-Mo-N films were deposited on high speed steel（HSS） substrates by a DC reactive magnetron sputtering equipment coupled with two horizontal magnetron sources.The effects of substrate negative bias voltage（Vb）,substrate temperature（Ts） and gas flow ratio（R= N2/（N2+ Ar）） on the microstructure,morphology,as well as the mechanical and tribological properties of the Cr-Mo-N films were investigated by virtue of X-ray diffraction（XRD） analysis,X-ray photoelectron spectroscopy（XPS）,field emission scanning electron microscopy（FESEM）,atomic force microscopy（AFM）,nano-indentation test,ball-on-disk tribometer,and Rockwell indenter et al.With increasing Vbto-100 V,the preferred orientation of the films changed from（111） to（200） and their mechanical and tribological properties were improved gradually,too.It was also found that Tsgave a significant effect on mechanical property enhancement.When the Tsreached 300 ℃,the film obtained the highest hardness and effective elastic modulus of approximately 30.1 and 420.5 GPa,respectively and its critical load increased to about 54 N.With increasing R,the phase transformation from body-centered-cubic（bcc） Cr and hexagonal CrMoNxmultiphase to single face-centered-cubic（fcc） solid solution phase was observed.The correlations between values of hardness（H）,effective elastic modulus（E*）,HIE*,H3/E*2,elastic recovery（1/14） and tribological properties of the films were also investigated.The results showed that the elastic recovery played an important role in the tribological behavior.
文摘采用直流反应磁控溅射技术在M2高速钢基片上制备了不同Mo含量的Cr Mo N复合涂层,研究了Mo含量的变化对Cr Mo N复合涂层成分、相结构、化学价态、截面形貌、显微硬度和摩擦性能等的影响.结果表明,随着Mo含量的增加,Cr Mo N复合涂层的相结构先转变为以fcc-Cr N相为基础的(Cr,Mo)N置换式固溶体,后转变为以fcc-g-Mo2N相为主的混合相,当Mo含量为69.3%(原子分数)时,伴有少量的bcc-Mo相生成;Cr Mo N复合涂层的显微硬度先增加后降低,在Mo含量为45.4%时具有最高值;当Mo含量大于45.4%时,在与对磨副摩擦过程中会生成大量的Mo O3相,降低了摩擦系数和磨损率.
