脉冲偏压电弧离子镀CrAlN薄膜研究

在高速钢和不锈钢基体上用脉冲偏压电弧离子镀技术制备了CrAlN薄膜,研究了脉冲偏压对薄膜成分、结构和性能的影响,并进行了900℃下的高温抗氧化性能检测。结果表明,薄膜中Al的相对含量随着脉冲偏压的增加而降低;薄膜的相结构由立方CrN和Al相组成;薄膜的硬度随脉冲偏压的增加而增大,在偏压幅值为-500 V时,硬度可达21.5 GPa;薄膜具有高达70 N的膜基结合力;此外,薄膜在900℃的大气中保温10 h,没有出现明显的氧化现象;在合成的三种薄膜中,在脉冲偏压为-500 V×40 kHz×40%时的薄膜具有最好的综合性能。

TiAlN,CrAlN和TiCrN涂层的制备及摩擦学性能研究

运用直流和射频磁控共溅射的方法制备TiAlN、CrAlN和TiCrN3种涂层,研究涂层的力学性能及在空气和水基切削液中的摩擦学性能,揭示其磨损机制。研究发现,Al元素主要以固溶体形式存在于TiAlN和CrAlN涂层内;3种涂层的显微硬度分别为HV719.3、HV1022.5和HV973.5。在空气中TiAlN、CrAlN和TiCrN涂层与SUS440C钢球对摩的稳态摩擦因数分别为1.25、1.14和1.31,TiAlN和CrAlN涂层的磨损机制主要是氧化磨损,而CrTiN涂层以磨粒磨损为主;而在水基切削液中3种涂层与SUS440C钢球对摩的摩擦因数明显降低,其对应的稳态摩擦因数分别为0.44、0.47和0.77,但磨痕上的划痕加剧,其磨损机制以磨粒磨损为主。

基体偏压对CrAlN涂层海水环境摩擦学性能的影响

本文采用多弧离子镀技术用5种不同偏压在316L不锈钢上沉积CrAlN涂层。使用X射线衍射(XRD)和扫描型电子显微镜(SEM)表征涂层的结构,并使用纳米压痕测试各涂层的硬度。用球-盘往复式摩擦磨损试验机对涂层在海水环境中的摩擦磨损性能进行测试。结果表明,随着偏压增大,CrAlN涂层表面大颗粒减少,而晶向生长特征也减弱。其结构在80V偏压下较为致密,但100V偏压下显示出典型的柱状晶结构特征。随着偏压增大,硬度也随之提高。各涂层在海水中摩擦系数相差不大,摩擦系数都先增大然后不断降低,最终达到相对平稳。在40V、60V和80V偏压下涂层在海水中的磨损率相对较小,且80V偏压下CrAlN涂层磨损率最低。在100V偏压下CrAlN涂层磨痕表面出现了剥落坑,EDS扫描结果显示该处涂层已完全剥落。

CrAlN涂层刀具的摩擦学研究进展

综述了CrAlN涂层刀具的现状、CrAlN刀具涂层工艺,探讨了CrAlN涂层刀具的摩擦磨损特性及机理,指出了制备多元多层、梯度涂层和纳米超晶格涂层是今后发展的方向。

CrAlN/TiAlN纳米多层膜的微结构及其性能研究

采用磁控反应溅射法制备了不同调制周期的CrAlN/TiAlN纳米多层膜,并通过X射线衍射仪、显微硬度计、扫描电镜分析了调制周期对多层膜的微结构、力学性能和高温抗氧化性能的影响。结果表明:CrAlN/TiAlN纳米多层膜共格外延生长,呈现CrAlN(或TiAlN)面心立方结构,且呈(111)择优取向;CrAlN/TiAlN纳米多层膜在某些调制周期出现硬度异常升高的超硬度效应;CrAlN/TiAlN纳米多层膜比CrAlN,TiAlN单层膜具有更好的高温稳定性,高温时仍具有较高的硬度。

Effect of carbon on microstructure of CrAlC_xN_(1-x) coatings by hybrid coating system

A systematic investigation of the microstructure of CrA1CxN1-x coatings as a function of carbon contents was conducted. Quaternary CrA1CxN1-x coatings were deposited on Si wafers by a hybrid coating system combining an arc-ion plating technique and a DC reactive magnetron sputtering technique using Cr and AI targets in the Ar/N2/CH4 gaseous mixture. The effect of carbon content on microstructure of CrA1C^N~ x coatings was investigated with instrumental analyses of X-ray diffraction, X-ray photoelectron, and high-resolution transmission electron microscopy. The results show that the carbon content of CrA1CxN1-x coatings linearly increases with increasing CH4/（CH4/N2） gas flow rate ratio. The surface roughness of the CrA1CxN1-x coating layer decreases with the increase of carbon content.

Influence of PVD-duplex-treated, Bionic Surface Structures on the Wetting Behavior for Sheet-Bulk Metal Forming Tools

Bionic surface structures, inspired by the flora, were developed for Sheet-Bulk Metal Forming （SBMF） in order to locally control the friction condition by adjusting the wetting behavior. Five bionic structures were micromilled on ASP 2023 in annealed as well as hardened and tempered conditions. Subsequently, the structured surfaces were plasma-nitrided and coated with a CrA1N thin film. The influence of the treatment method on the structural geometry was investigated with the aid of a scanning electron microscope and 3D-profilometer. The wetting behaviors of water and deep drawing oil （Berufluid ST6007） on bionic surfaces were evaluated using contact angle measurements. The resulting micro-milled structures exhibit an almost identical shape as their bionic models. However, the roughness of the structured surfaces is influenced by the microstructure. The combination of plasma-nitriding and Physical Vapor Deposition （PVD） leads to an increase in roughness. All bionic struc- tures possess higher contact angles than that of the unstructured surfaces when wetted by water. This can be explained by the fact that the structural elevations block the spreading. When the bionic surfaces are wetted by deep drawing oil, the lubricant spreads in the structural cavities, leading to smaller contact angles. Furthermore, the anisotropy of the structure has an influence on the wetting behavior.

直流溅射沉积CrAlN和CrN薄膜微观结构与摩擦性能分析研究（英文）

采用直流反应溅射在304不锈钢表面沉积CrAlN和CrN薄膜。利用X射线衍射仪(XRD),扫描电子显微镜(SEM),X射线光电子能谱仪(XPS),原子力显微镜(AFM)等表征Al元素的加入对CrN薄膜成分与组织结构的影响。采用摩擦磨损试验机和3 mm的Si_3N_4作为对偶球测试其在不同环境下的摩擦性能,并利用Nanomap 500LS三维轮廓仪表征磨痕轮廓。研究结果表明,CrN薄膜主要物相是CrN和Cr_2N相,CrAlN薄膜主要物相是CrAlN和Cr_2N相。CrN薄膜的(200)晶面的CrN相呈择优取向,而CrAlN薄膜的(200)晶面的CrAlN相也呈择优取向。在CrAlN沉积的过程中,部分的Cr原子被Al原子替代形成有利于细化晶粒和提高薄膜的综合性能。因此,在所有的实验环境中,CrAlN薄膜都比CrN薄膜具有更好的抗磨损性能和低的磨损率。