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Influence of Ar/N_2 Flow Rate on Structure and Property for TaN/NbN Multilayered Coatings 被引量:1
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作者 Xuehua ZHANG Yuanbin KANG Sipeng LIU Qiang LI Ying YANG Xiangyun DENG Dejun LI 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2007年第4期461-464,共4页
TaN/NbN multilayered coatings with nanoscale bilayer periods were synthesized at different Ar/N2 flow rates by RF (radio frequency) magnetron sputtering. XRD (X-ray diffraction) and Nano Indenter System were emplo... TaN/NbN multilayered coatings with nanoscale bilayer periods were synthesized at different Ar/N2 flow rates by RF (radio frequency) magnetron sputtering. XRD (X-ray diffraction) and Nano Indenter System were employed to investigate the influence of Ar/N2 flow rate (FAr:FN2) on microstructure and mechanical properties of the coatings. The low-angle XRD pattern indicated a well-defined composition modulation and layer structure of the multilayered coating. All multilayered coatings almost revealed higher hardness than the rule-of-mixtures value of monolithic TaN and NbN coatings. At FAr:FN2=10, the multilayered coating possessed desirable hardness, elastic modulus, internal stress, and fracture resistance, compared with ones synthesized at other Ar/N2 flow rates. The layered structure with strong mixture of TaN (110), (111), (200) and Nb2N (101)textures should be related to the enhanced mechanical properties. 展开更多
关键词 RF magnetron sputtering TaN/nbn multilayered coatings Nanoscale mechnical properties
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沉积温度对CrN涂层干摩擦及大豆油润滑下摩擦学性能的影响
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作者 李阳 孙会来 +2 位作者 杨淑燕 曹磊 万勇 《润滑与密封》 CAS CSCD 北大核心 2024年第4期103-110,共8页
为探究沉积温度对CrN涂层摩擦学性能的影响,同时寻找适合CrN涂层润滑的绿色润滑剂,采用磁控溅射技术在不同温度下制备CrN涂层。利用X射线衍射仪、扫描电子显微镜、AFM原子力显微镜、划痕仪、纳米压痕仪和摩擦磨损试验机评价涂层的微观... 为探究沉积温度对CrN涂层摩擦学性能的影响,同时寻找适合CrN涂层润滑的绿色润滑剂,采用磁控溅射技术在不同温度下制备CrN涂层。利用X射线衍射仪、扫描电子显微镜、AFM原子力显微镜、划痕仪、纳米压痕仪和摩擦磨损试验机评价涂层的微观结构、力学性能,以及在干摩擦及大豆油润滑条件下的摩擦磨损性能。结果表明:在250℃下沉积的CrN涂层具有最致密的晶状结构,且力学性能最优。摩擦试验结果显示,在干摩擦和大豆油润滑下250℃下沉积的CrN涂层表现出最优的摩擦学特性。XPS分析表明,由于摩擦的存在,大豆油会在涂层表面发生摩擦化学反应并生成一层化学吸附膜,从而能有效减轻涂层的摩擦和磨损。250℃下沉积的CrN涂层具有最优的力学及摩擦学性能,且大豆油极为适合CrN涂层的润滑。 展开更多
关键词 crn涂层 沉积温度 力学性能 大豆油 摩擦学性能
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TiN/CrN multilayered hard coatings with TiCrN interlayer deposited by a filtered cathodic vacuum arc technique 被引量:1
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作者 ChengmingLi QiHe +3 位作者 GangLin XiaojunSunt WeizhongTang FanxiuLu 《Journal of University of Science and Technology Beijing》 CSCD 2004年第5期420-424,共5页
TiN/CrN multilayered hard coatings with TiCrN interlayer were deposited onhigh speed steel substrates by using a filtered cathodic vacuum arc technique. The structure andcomposition of the coatings were characterized ... TiN/CrN multilayered hard coatings with TiCrN interlayer were deposited onhigh speed steel substrates by using a filtered cathodic vacuum arc technique. The structure andcomposition of the coatings were characterized by scanning electron microscopy (SEM) and Augerelectron spectroscopy (AES). A high adhesion of up to 80 N was demonstrated by scratching tests forthe multi-layered coatings. Nanoindentation tests were performed to determine the hardness andelastic modulus of the coatings as a function of the multiplayer modulation period. It was observedthat the hardness of the multilayered coatings is higher than those of either TiN or CrN singlecoatings, and it increases with decreasing modulation periods, which is consistent with predictionsfrom the Hall-Petch type strengthening mechanism, though at small modulation periods, deviation fromthe Hall-Petch relation has been observed for the multilayered coatings. The life-span of drillscoated with TiN/CrN multilayered is triple as long as that coated with TiN layer. 展开更多
关键词 TiN/crn multilayer hard coatings Ticrn interlayer HARDNESS drilling life
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SUS321不锈钢表面Cr/CrN涂层的制备与抗氧化及耐腐蚀研究
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作者 张林嘉 卢婷 +2 位作者 李恒 李亚茹 许海龙 《热加工工艺》 北大核心 2024年第6期149-156,共8页
采用磁控溅射技术,在SUS321不锈钢表面制备Cr/Cr N涂层,利用扫描电子显微镜(SEM)、X射线衍射仪(XRD)及分析天平等分别表征样品高温氧化及酸性盐雾腐蚀实验后的微结构及增重。结果表明,当磁控溅射气体分压比为P_(Ar)/P_(N_(2))=3∶1的涂... 采用磁控溅射技术,在SUS321不锈钢表面制备Cr/Cr N涂层,利用扫描电子显微镜(SEM)、X射线衍射仪(XRD)及分析天平等分别表征样品高温氧化及酸性盐雾腐蚀实验后的微结构及增重。结果表明,当磁控溅射气体分压比为P_(Ar)/P_(N_(2))=3∶1的涂层样品抗氧化性能及耐腐蚀性能最佳。在此基础上通过循环沉积制备了多层Cr/CrN涂层,6周期涂层样品在600℃氧化200 h后的单位面积增重为3.599 g/m^(2),表面氧化膜致密,没有出现剥落现象;6周期的涂层样品在酸性盐雾环境中能够保持480 h表面无变化,在放置500 h后边缘部位才开始出现轻微锈迹。固定磁控溅射气体分压比为P_(Ar)/P_(N_(2))=3∶1时,制备的6周期Cr/CrN多层膜涂层具有最佳的抗氧化及耐酸性盐雾腐蚀性能。 展开更多
关键词 SUS321不锈钢 磁控溅射 Cr/crn涂层 抗氧化性能 耐腐蚀性能
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Fracture Behavior of CrN Coatings Under Indentation and Dynamic Cycle Impact
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作者 田林海 唐宾 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2012年第3期411-414,共4页
Fracture behavior of CrN coatings deposited on the surface of silicon and AISI52100 steel by different energy ion beam assisted magnetron sputtering technique (IBAMS) was studied using indentation and dynamic cycle ... Fracture behavior of CrN coatings deposited on the surface of silicon and AISI52100 steel by different energy ion beam assisted magnetron sputtering technique (IBAMS) was studied using indentation and dynamic cycle impact. It is found that, for the coatings on silicon substrate, the cracks form in the indentation corners and then propagate outward under Vickers indentation. The coating prepared using ion assisted energy of 800 eV shows the highest fracture resistance due to its compact structure. Under Rockwell indentation, only finer radial cracks are found in the CrN coating on AISI 52100 steel without ion assisting while in the condition of ion assisting energy of 800 eV, radial, lateral cracks and spalling appear in the vicinity of indentation. The fracture of CrN coatings under dynamic cycle impact is similar to fatigue. The impact fracture resistance of CrN coatings increases with the increase of ion assisting energy. 展开更多
关键词 crn coatings IBAMS fracture behaviors INDENTATION dynamic cycle impact
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Effects of intermixing process on bonding strength of IBED CrN coatings
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作者 唐宾 朱晓东 +1 位作者 胡奈赛 何家文 《中国有色金属学会会刊:英文版》 CSCD 2000年第1期64-68,共5页
The coating substrate bonding strengths under different intermixing processes were evaluated by scratch and spherical rolling contact fatigue methods. The results show that for low bombarding energy of N ions dynamic ... The coating substrate bonding strengths under different intermixing processes were evaluated by scratch and spherical rolling contact fatigue methods. The results show that for low bombarding energy of N ions dynamic recoiling at 10 keV and 20 keV, the coating layers are of excellent bonding strengths. The bonding strength of CrN coating with 40 keV static recoiling is higher than that of low energy(20 keV). On the other hand, the bonding strength of coating with 40 keV dynamic recoiling is much lower than that of static recoiling at the same energy and even less than that of dynamic recoiling intermixings at 10 keV and 20 keV energy. The results of scratch and spherical rolling contact fatigue methods exhibit the same trend for each group of recoiling methods, yet the results of the scratch and fatigue tests for two groups do not agree with each other. 展开更多
关键词 IBED crn coating INTER MIXING PROCESSES BONDING strength
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Multilayered gradient CrN/ZrN coatings synthesized by magnetron sputtering
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作者 LIU Feng WANG Ming-xia LIU Qian-xiang LI De-jun 《中国有色金属学会会刊:英文版》 CSCD 2004年第z1期243-246,共4页
The multilayer gradient CrN/ZrN coatings were synthesized by a dual cathode DC magnetron sputtering.The influence of different species of reaction gases and partial pressures on structure and mechanical properties was... The multilayer gradient CrN/ZrN coatings were synthesized by a dual cathode DC magnetron sputtering.The influence of different species of reaction gases and partial pressures on structure and mechanical properties was investigated using XRD, AES, XPS, and nanoindentation. The results show that N2-NH3 mixture process gas is of benefit to the synthesis of superhard multilayered gradient CrN/ZrN coatings. The presence of the preferred orientations of CrN(111), (200) and ZrN (111), (220) in the structure is a main reason for superhardness of multilayered gradient coatings. 展开更多
关键词 MAGNETRON SPUTTERING MULTILAYERED GRADIENT coating crn/ZrN NANOINDENTATION
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Preparation and optical properties of Nb-NbN multilayer films as solar selective absorptive coatings
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作者 WANG Cong DU Xinkang WANG Tianmin ZHOU Long RU Ning CHEN Buliang 《Rare Metals》 SCIE EI CAS CSCD 2006年第z1期355-359,共5页
Based on the cermet double layer structure, Nb-NbN multi-layer films for solar selective coatings were deposited by direct current reactive magnetron sputtering. The Nb/Nb-NbN/Al2O3 trilayered structure was deposited ... Based on the cermet double layer structure, Nb-NbN multi-layer films for solar selective coatings were deposited by direct current reactive magnetron sputtering. The Nb/Nb-NbN/Al2O3 trilayered structure was deposited on a stainless steel (SS) substrate by using a single niobium target. The expected components were adjusted by changing the gas flowing ratios of Ar: N2. The Al2O3 antireflective layer on the top of the film was produced by r. f. magnetron sputtering using Al2O3 ceramic target. A solar absorptivity of 0.94 and a normal emissivity of 0.16 at room temperature have been achieved for the coating. Thermal vacuum aging to the samples was carried out at 350 and 500 ℃ for 1 h. The results show a good thermal stability. Microstructure and its dependence on temperature of the Nb, NbN and Nb-NbN single layers were investigated, respectively. 展开更多
关键词 Nb-nbn CERMET film SOLAR SELECTIVE coating MAGNETRON SPUTTERING
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磁控溅射制备内燃机用Ti600合金表面CrN/NbN涂层的性能表征分析
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作者 张晓晖 姜广君 《真空科学与技术学报》 EI CAS CSCD 北大核心 2020年第4期337-341,共5页
为了提高内燃机用Ti600合金表面性能,通过脉冲磁控溅射的方式在其表面制备CrN/NbN涂层,分析了涂层组织结构与电压、占空比的关系。研究结果表明:在CrN/NbN涂层内形成了许多柱状外形的组织成分,并且当占空比以及电压提高后,形成了致密度... 为了提高内燃机用Ti600合金表面性能,通过脉冲磁控溅射的方式在其表面制备CrN/NbN涂层,分析了涂层组织结构与电压、占空比的关系。研究结果表明:在CrN/NbN涂层内形成了许多柱状外形的组织成分,并且当占空比以及电压提高后,形成了致密度更大的CrN/NbN涂层。厚度随着占空比和电压的增加表现出明显的增加规律,在占空比10μs和电压400 V时,涂层厚度最大值12μm左右。随着占空比和电压的增加,硬度和弹性模量均表现出单调增加。在占空比10μs和电压400 V时,涂层硬度和弹性模量达到最大值,分别为35.6和31.7 GPa。随着占空比增加,残余应力表现出单调减小;随着电压的增加,残余应力表现出先减小后增加,最小值发生在电压380 V时。各涂层试样都产生了具有完整结构的压痕,没有发生膜与基体剥离的情况。随着占空比和电压进一步增大,在试样的压痕边缘部位产生环状分布的裂纹。 展开更多
关键词 crn/nbn涂层 脉冲磁控溅射 微观组织 硬度 力学性能
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CrN和CrAlN涂层热稳定性、力学和摩擦学性能研究
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作者 金玉花 李鑫栋 +3 位作者 柴利强 张学希 乔丽 王鹏 《表面技术》 EI CAS CSCD 北大核心 2023年第8期182-196,共15页
目的针对现有刀具用硬质CrN及CrAlN涂层的热稳定性研究尚属空白,以及对其涂层摩擦学性能的影响尚不清楚等问题,开展CrN和CrAlN涂层的热稳定性、氧化行为、力学性能及摩擦磨损性能研究。方法采用中频反应磁控溅射技术制备CrN和CrAlN涂层... 目的针对现有刀具用硬质CrN及CrAlN涂层的热稳定性研究尚属空白,以及对其涂层摩擦学性能的影响尚不清楚等问题,开展CrN和CrAlN涂层的热稳定性、氧化行为、力学性能及摩擦磨损性能研究。方法采用中频反应磁控溅射技术制备CrN和CrAlN涂层,利用真空热脱附系统、场发射扫描电镜、原子力显微镜、能谱仪、X射线衍射、拉曼光谱仪、纳米压痕仪和摩擦磨损试验机等探究2种涂层的结构、热稳定性、力学性能和摩擦学性能。结果在真空温度为646℃左右时,CrN涂层开始发生N分解和释放,在885℃左右时N的释放速率达到峰值。CrAlN涂层在真空温度为722℃左右时才开始发生N分解和释放,而在1000℃下N的释放速率并未达到峰值。在大气温度600℃下,CrN涂层开始发生氧化,并生成Cr_(2)O_(3)相,且Cr_(2)O_(3)层的厚度随着温度的升高而增加,在900℃时涂层完全氧化。CrAlN涂层在900℃时才开始发生氧化,生成更为致密的Cr_(2)O_(3)和Al_(2)O_(3)混合氧化层,阻止涂层进一步氧化。在大气高温条件下,CrAlN涂层均具有比CrN涂层更高的硬度和弹性模量。随着温度的升高,2种涂层的表面粗糙度逐渐增加,摩擦因数逐渐降低,CrAlN涂层在600、800℃下的表面粗糙度和磨损率均低于CrN涂层。结论在真空下,CrAlN涂层中键能较高的Al-N共价键改善了涂层的热稳定性,提高了CrAlN涂层中N的分解温度。在大气中,CrAlN涂层具有比CrN涂层更高的抗氧化性、硬度和弹性模量,CrAlN涂层在高温氧化过程中生成了连续且致密的Cr_(2)O_(3)和Al_(2)O_(3)混合氧化层,能够减缓O原子向涂层内部的扩散。CrAlN涂层具有比CrN涂层更优异的耐磨性,更适合作为高温工况下服役的刀具和模具等易磨损材料的防护涂层。 展开更多
关键词 crn涂层 CrAlN涂层 热稳定性 氧化行为 力学性能 摩擦磨损性能
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Mechanical and Tribological Properties of CrN Coated Inconel X750 被引量:1
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作者 刘吉良 廖日东 +2 位作者 LIAO Bin LUO Jun BAO Ke 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2019年第4期804-810,共7页
Three CrN coatings were deposited on the Inconel X750 through the metal vapor vacuum arc ion implantation and the magnetic filtered cathodic vacuum arc deposition system(MEVVA-FCVA) with the N2 flow rates of 10,50,and... Three CrN coatings were deposited on the Inconel X750 through the metal vapor vacuum arc ion implantation and the magnetic filtered cathodic vacuum arc deposition system(MEVVA-FCVA) with the N2 flow rates of 10,50,and 100sccm, respectively.The surface morphologies and cross-section morphologies of the CrN coatings were obtained through scanning electron microscopy(SEM) and an optical profilometer.The microstructures of the coatings were characterized through X-ray diffraction(XRD).The hardness and the elastic modulus of the coatings were tested by a nano-hardness tester.The adhesion strength and friction coefficients were investigated through scratch tests and ball-on-disk tests and the wear tracks were tested by the optical profilometer. The experimental results indicate that the CrN coating deposited on the Inconel X750 substrate displays a uniform thickness and a smooth surface. The mechanical properties behaves well as the N2 flow rate varies.The CrN coating significantly reduces the friction coefficient fluctuation and improves the antiadhesion and anti-wear properties of the Inconel X750. 展开更多
关键词 INCONEL X750 N2 flow rate crn coating MECHANICAL PROPERTIES TRIBOLOGICAL PROPERTIES
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45钢表面TD-Cr/PVD-CrN复合涂层磨蚀性能 被引量:1
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作者 罗银 万强 +5 位作者 曹道成 杨泽华 李善军 孟亮 肖洋轶 韩明兴 《表面技术》 EI CAS CSCD 北大核心 2023年第7期455-463,共9页
目的采用热扩散(TD)渗金属技术和物理气相沉积(PVD)技术对45钢表面进行强化,以提升45钢表面硬度和抗磨蚀性能,延长45钢的使用寿命。方法采用热扩散渗金属技术和物理气相沉积技术制备TD-Cr、PVD-CrN及TD-Cr/PVD-Cr N(Cr/CrN复合涂层)3种... 目的采用热扩散(TD)渗金属技术和物理气相沉积(PVD)技术对45钢表面进行强化,以提升45钢表面硬度和抗磨蚀性能,延长45钢的使用寿命。方法采用热扩散渗金属技术和物理气相沉积技术制备TD-Cr、PVD-CrN及TD-Cr/PVD-Cr N(Cr/CrN复合涂层)3种涂层。利用扫描电镜(SEM)、X射线衍射仪(XRD)研究涂层的微观形貌、元素分布和物相组成。通过纳米压痕研究涂层的硬度、弹性模量。通过摩擦磨损实验和电化学腐蚀实验,研究涂层的摩擦性能和腐蚀性能。结果TD-Cr、PVD-Cr N、TD-Cr/PVD-Cr N 3种涂层的组织结构均致密均匀,厚度分别为19.78、1.075、32.24μm。TD-Cr/PVD-Cr N涂层的硬度达到28.7 GPa,高于其他涂层,同时,Cr/Cr N复合涂层的弹性模量和弹性恢复能力均优于其他涂层。在盐水环境下,TD-Cr、PVD-Cr N、TD-Cr/PVD-CrN的摩擦因数分别为0.52、0.38、0.35,磨损体积分别为26、0.15、0.05,TD-Cr/PVD-CrN展现出较好的耐磨性能。在盐水环境下,TD-Cr/PVD-CrN涂层的抗腐蚀性能略低于TD-CrN涂层。结论综合看来,TD-Cr/PVD-CrN复合涂层可以有效提升45钢的表面抗磨蚀能力,延长其使用寿命。 展开更多
关键词 45钢 TD-Cr/PVD-crn涂层 力学性能 摩擦磨损 抗腐蚀性能
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Tribological behavior of CrN-coated Cr–Mo–V steels used as die materials
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作者 Gulsah Aktas Celik Seyda Polat S.Hakan Atapek 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 2017年第12期1394-1402,共9页
DIN 1.2343 and 1.2367 steels are commonly used as die materials in aluminum extrusion, and single/duplex/multi-coatings enhance their surface properties. The design of an appropriate substrate/coating system is import... DIN 1.2343 and 1.2367 steels are commonly used as die materials in aluminum extrusion, and single/duplex/multi-coatings enhance their surface properties. The design of an appropriate substrate/coating system is important for improving the tribological performance of these steels under service conditions because the load-carrying capacity of the system can be increased by decreasing the plastic deformation of the substrate. In this study, the tribological behavior of CrN-coated Cr–Mo–V steels(DIN 1.2343, 1.2367, and 1.2999 grades) was investigated using different setups and tribological pairs at room and elevated temperatures. The aim of this study was to reveal the wear resistance of a suggested system(1.2999/CrN) not yet studied and to understand both the wear and the failure characteristics of coated systems. The results showed that(i) among the steels studied, the DIN 1.2999 grade steel exhibited the lowest friction coefficient because it had the highest load-carrying capacity as a result of secondary hardening at elevated temperatures;(ii) at room temperature, both abrasive tracks and adhesive layers were observed on the worn surfaces; and(iii) a combination of chemical reactions and progressive oxidation caused aluminum adhesion on the worn surface, and the detachment of droplets and microcracking were the characteristic damage mechanisms at high temperatures. 展开更多
关键词 Cr–Mo–V STEELS crn coating aluminum extrusion TRIBOLOGICAL behavior
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Inconel 718合金表面纳米多层CrAlN/CrN涂层的制备及高温摩擦学性能研究
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作者 宋宇涛 李春玲 +2 位作者 张淑珍 尚伦霖 张广安 《材料保护》 CAS CSCD 2023年第5期63-70,共8页
为提高Inconel 718合金的表面硬度和高温摩擦磨损性能,采用多弧离子镀技术在其表面制备CrAlN/CrN涂层。使用X射线衍射仪(XRD)、X射线光电子能谱仪(XPS)、扫描电镜(SEM)、纳米压痕仪和划痕仪等对涂层的微观结构、力学性能进行分析表征。... 为提高Inconel 718合金的表面硬度和高温摩擦磨损性能,采用多弧离子镀技术在其表面制备CrAlN/CrN涂层。使用X射线衍射仪(XRD)、X射线光电子能谱仪(XPS)、扫描电镜(SEM)、纳米压痕仪和划痕仪等对涂层的微观结构、力学性能进行分析表征。使用UMT摩擦磨损试验机测试涂层在室温、350℃和650℃下的摩擦性能,并对磨痕的形貌特征、元素分布和物相进行分析,分析涂层在不同温度下的摩擦磨损机制。结果表明:纳米多层CrAlN/CrN涂层微观结构致密,主要由fcc-CrN相组成,择优取向为(200)晶面;CrAlN/CrN涂层在Inconel 718合金表面具有良好的力学性能,其硬度和结合力分别为(29.3±1.2)GPa和70.4 N;涂层在室温和350℃下具有优异的耐磨性,磨损率分别低至1.5×10^(-6)mm^(3)/(N·m)和1.7×10^(-6)mm^(3)/(N·m),主导的磨损机制分别为磨粒磨损和疲劳磨损;650℃时涂层达到最低摩擦系数(0.33),但磨损率有所升高,主要表现为磨粒磨损。 展开更多
关键词 纳米多层 CrAlN/crn涂层 微观结构 力学性能 高温摩擦学性能
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复合zigzag结构CrN涂层的设计制备及冲蚀性能
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作者 王丽 王振玉 +2 位作者 陈仁德 柯培玲 汪爱英 《中国表面工程》 EI CAS CSCD 北大核心 2023年第3期65-73,共9页
飞机在沙漠等恶劣环境中服役,空气中的固体颗粒在高速气流作用下对叶片表面产生高速冲击。为提高钛合金叶片的抗冲蚀性能,采用掠角磁控溅射技术制备复合zigzag结构CrN涂层(简称CrN-zigzag),并利用掠角X射线衍射仪(GIXRD)、扫描电子显微... 飞机在沙漠等恶劣环境中服役,空气中的固体颗粒在高速气流作用下对叶片表面产生高速冲击。为提高钛合金叶片的抗冲蚀性能,采用掠角磁控溅射技术制备复合zigzag结构CrN涂层(简称CrN-zigzag),并利用掠角X射线衍射仪(GIXRD)、扫描电子显微镜(SEM)、划痕测试系统(CSM Revetest)、白光干涉仪、纳米压痕仪、冲蚀设备等表征涂层的成分、组织结构、力学性能和冲蚀性能。研究结果表明,CrN-zigzag涂层组织致密呈现柱状结构,厚度约为3.7μm,纳米硬度达到(19.2±2)GPa,具有良好的膜基结合强度(>48 N)。相比于常规CrN涂层,CrN-zigzag涂层在90°冲蚀角度下的抗冲蚀性能提高了57.67%。CrN涂层表现为明显的脆性失效特征,CrN-zigzag涂层表现为明显的脆性和韧性失效双特征,符合变形磨损理论和二次冲蚀理论。CrN-zigzag涂层在砂砾冲蚀试验中表现出良好的抗冲蚀性能主要归因于其特有的zigzag晶界取向设计,提高了材料的损伤容限。 展开更多
关键词 磁控溅射 Zigzag结构 crn涂层 冲蚀性能
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The Study of Deposition Parameters, Properties for PVD Ti_xN and Cr_xN Coatings Using a Closed Field Unbalanced Magnetron Sputter Ion Plating System
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作者 HailinSun SusanField +1 位作者 JianChen Dennis.G.Teer 《材料热处理学报》 EI CAS CSCD 北大核心 2004年第05B期841-846,共6页
Closed Field Unbalanced Magnetron Sputter Ion Plating (CFUBMSIP) systems have been used increasingly for PVD coating in recent years. TiN and CrN coatings, commonly used as the basic coating for a number of different ... Closed Field Unbalanced Magnetron Sputter Ion Plating (CFUBMSIP) systems have been used increasingly for PVD coating in recent years. TiN and CrN coatings, commonly used as the basic coating for a number of different hard coatings, have been chosen to study the coating process parameters for the CFUBMSIP system. In this paper, the process parameters, such as substrate temperature, substrate bias and OEM control, have been carefully examined to achieve hard and wear-resistance coatings with good adhesion. The coating structure and orientation were found to change according to the coating parameters. The Rockwell test and Scratch test were carried out to examine the coating adhesion; pin-on-disc testing was used to estimate the wear-resistant; micro-hardness was also used to determine coating hardness. HSS drill testing has been carried out to study the general properties of the coating for cutting tool application. A combination of process parameters can be selected to achieve good performance for the TiN and CrN coatings. 展开更多
关键词 PVD 衬底温度 磁控管溅射 TixN涂层 CrxN涂层 OEM
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钛合金表面CrN涂层高温氧化及力学性能
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作者 徐帅 周艳文 +4 位作者 李金龙 张开策 粟志伟 王鼎 袁霞 《辽宁科技大学学报》 CAS 2023年第3期187-195,共9页
采用热丝增强等离子体磁控溅射技术,在Ti6Al4V(TC4)基体表面沉积单相CrN涂层,并分别在温度为400、500、600、700、800℃下空气中退火。采用X射线衍射仪(XRD)、扫描电子显微镜(SEM)与能谱(EDS)、Raman光谱、原子力显微镜(AFM)、X射线荧... 采用热丝增强等离子体磁控溅射技术,在Ti6Al4V(TC4)基体表面沉积单相CrN涂层,并分别在温度为400、500、600、700、800℃下空气中退火。采用X射线衍射仪(XRD)、扫描电子显微镜(SEM)与能谱(EDS)、Raman光谱、原子力显微镜(AFM)、X射线荧光光谱仪(XRF)、划痕仪、纳米压痕仪、台阶仪和摩擦磨损仪分析涂层的物相组成、微观形貌、成分及力学性能。随着退火温度的升高,CrN所有取向的峰位均向右移动接近标准峰位,内应力得到释放。当退火温度达到600℃后,涂层表面氧化迹象明显,粗糙度升高,出现白色颗粒状Cr_(2)O_(3)。随退火温度升高,涂层与基体结合力提高,在800℃时临界失效载荷达到25.2 N;涂层硬度和弹性模量下降,硬度从未退火的24.86 GPa降至800℃的15.23 GPa,弹性模量从327 GPa降至260 GPa;涂层耐磨性小幅下降,磨损量从未退火的0.78×10^(-16)m^(3)/(m·N)上升至11.74×10^(-16)m^(3)/(m·N),但均远低于TC4基体的磨损量10371.61×10^(-16)m^(3)/(m·N)。划痕与摩擦磨损检测结果中,涂层均未出现分层及剥落现象。采用热丝增强等离子体磁控溅射技术在钛合金表面制备的CrN涂层,在高温环境下保持较高的耐磨损性能和与基体良好的结合力,提高了软质不耐磨的TC4基体在高温磨损环境的使用寿命。 展开更多
关键词 TC4钛合金 热丝增强等离子体磁控溅射 crn涂层 抗氧化性 耐磨性
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冷热复合处理对CrN涂层结构及力学性能的影响
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作者 朱睿 王谦之 《材料保护》 CAS CSCD 2023年第9期48-53,共6页
为了改善CrN涂层的塑性变形能力,通过增强阴极弧磁控溅射技术在316L不锈钢上制备了CrN涂层。利用管式炉和液氮对CrN涂层分别进行冷处理、热处理以及冷热复合处理。通过X射线衍射仪(XRD)、X射线光电子能谱仪(XPS)、扫描电子显微镜(SEM)... 为了改善CrN涂层的塑性变形能力,通过增强阴极弧磁控溅射技术在316L不锈钢上制备了CrN涂层。利用管式炉和液氮对CrN涂层分别进行冷处理、热处理以及冷热复合处理。通过X射线衍射仪(XRD)、X射线光电子能谱仪(XPS)、扫描电子显微镜(SEM)以及纳米压痕仪表征涂层在后处理前后的微观结构、形貌特征、残余应力及力学性能。结果表明:经过后处理的CrN涂层硬度均有小幅度降低,但其塑性变形能力均提高。其中,先热后冷复合处理几乎保持CrN涂层硬度不变(仅降低0.7%),同时提高了其塑性变形能力(提高3.1%),增强了其韧性。 展开更多
关键词 crn涂层 增强阴极弧磁控溅射 热处理 冷处理 冷热复合处理 力学性能
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氮气流量对CrN⁃DLC薄膜的摩擦学性能及腐蚀行为的影响
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作者 胡杨 何沐阳 《材料保护》 CAS CSCD 2023年第12期36-43,95,共9页
为了促进类金刚石(DLC)薄膜在恶劣的海洋环境中的应用,采用磁控溅射技术在304不锈钢上沉积CrN⁃DLC薄膜。利用SEM、拉曼光谱仪、XPS、EDS、纳米压痕仪、摩擦试验机、三维轮廓仪、电化学工作站测试表征了不同氮气流量条件下制备的CrN⁃DLC... 为了促进类金刚石(DLC)薄膜在恶劣的海洋环境中的应用,采用磁控溅射技术在304不锈钢上沉积CrN⁃DLC薄膜。利用SEM、拉曼光谱仪、XPS、EDS、纳米压痕仪、摩擦试验机、三维轮廓仪、电化学工作站测试表征了不同氮气流量条件下制备的CrN⁃DLC薄膜的表面和截面形貌、微观键合结构、化学键状态、成分和元素分布、硬度、摩擦学性能和耐腐蚀性能。结果表明:CrN⁃DLC薄膜的表面组织结构致密,无明显的缺陷,同时沉积的薄膜均为非晶结构。通入2 mL/min N2时,薄膜的弹性回复率达到55%,表明CrN⁃DLC薄膜具有良好的韧性,该条件下制备的薄膜在模拟海水中与Si_(3)N4球摩擦的磨损率仅为8.63×10^(-10)m^(3)/(N·m)。在电化学测试中,所有CrN⁃DLC薄膜的阳极极化曲线均表现出明显的钝化现象,其中,通入2 mL/min N2时,薄膜的腐蚀电流密度比304不锈钢低2个数量级,表现出良好的耐腐蚀性能。CrN⁃DLC薄膜的结构设计及元素掺杂能有效提高304不锈钢的减摩耐磨性能及耐腐蚀性能,拓宽了DLC薄膜在海洋环境中的应用。 展开更多
关键词 类金刚石复合薄膜 crn 摩擦磨损性能 腐蚀性能 氮气流量 磁控溅射
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CrN和CrAlN涂层海水环境摩擦学性能研究 被引量:22
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作者 单磊 王永欣 +2 位作者 李金龙 鲁侠 陈建敏 《摩擦学学报》 EI CAS CSCD 北大核心 2014年第4期468-476,共9页
采用多弧离子镀在316L不锈钢上沉积CrN和CrAlN涂层.采用X射线衍射仪(XRD)、X射线光电子能谱仪(XPS)和扫描型电子显微镜(SEM)表征涂层的成分和结构,并用纳米压痕和划痕仪测试其硬度和结合力.采用UMT-3往复式摩擦磨损试验机对涂层在海水... 采用多弧离子镀在316L不锈钢上沉积CrN和CrAlN涂层.采用X射线衍射仪(XRD)、X射线光电子能谱仪(XPS)和扫描型电子显微镜(SEM)表征涂层的成分和结构,并用纳米压痕和划痕仪测试其硬度和结合力.采用UMT-3往复式摩擦磨损试验机对涂层在海水环境中的摩擦磨损性能进行测试.结果表明:CrN和CrAlN涂层在海水中摩擦系数相差不大,而316L摩擦系数明显大于涂层,且摩擦系数震荡剧烈,表明316L在海水中润滑性较差.涂层在海水中磨损率远小于316L,且CrAlN涂层比CrN涂层在海水环境中具有更优的耐磨性.CrN涂层的磨痕表面出现大量剥落坑,这是由于CrN涂层表面的大颗粒剥落形成的.而CrAlN涂层致密的结构、较为优越的耐蚀性以及摩擦时产生的具有自润滑效果的Al2O3保护层,使其在硬度值较低的情况下仍具有优异的耐磨性.因此海水环境中摩擦性能需综合考虑材料的机械性能、结构、耐蚀性以及耐磨性. 展开更多
关键词 crn基涂层 磨损 摩擦 海水
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