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TiN/CrN multilayered hard coatings with TiCrN interlayer deposited by a filtered cathodic vacuum arc technique 被引量:1
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作者 ChengmingLi QiHe +3 位作者 GangLin XiaojunSunt WeizhongTang FanxiuLu 《Journal of University of Science and Technology Beijing》 CSCD 2004年第5期420-424,共5页
TiN/CrN multilayered hard coatings with TiCrN interlayer were deposited onhigh speed steel substrates by using a filtered cathodic vacuum arc technique. The structure andcomposition of the coatings were characterized ... TiN/CrN multilayered hard coatings with TiCrN interlayer were deposited onhigh speed steel substrates by using a filtered cathodic vacuum arc technique. The structure andcomposition of the coatings were characterized by scanning electron microscopy (SEM) and Augerelectron spectroscopy (AES). A high adhesion of up to 80 N was demonstrated by scratching tests forthe multi-layered coatings. Nanoindentation tests were performed to determine the hardness andelastic modulus of the coatings as a function of the multiplayer modulation period. It was observedthat the hardness of the multilayered coatings is higher than those of either TiN or CrN singlecoatings, and it increases with decreasing modulation periods, which is consistent with predictionsfrom the Hall-Petch type strengthening mechanism, though at small modulation periods, deviation fromthe Hall-Petch relation has been observed for the multilayered coatings. The life-span of drillscoated with TiN/CrN multilayered is triple as long as that coated with TiN layer. 展开更多
关键词 tin/crn multilayer hard coatings Ticrn interlayer HARDNESS drilling life
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Tribological Behavior of Magnesium Alloy AZ91 Coated with TiN/CrN by Arc-glow Plasma Depositing 被引量:5
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作者 缪强 崔彩娥 +2 位作者 潘俊德 段良辉 刘亚萍 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2006年第3期266-270,共5页
With advantages of high specific strength, low elastic module, good damping property et al., the magnesium alloys exhibit great potential applications in aerospace. But poor wear behavior results in limited use of mag... With advantages of high specific strength, low elastic module, good damping property et al., the magnesium alloys exhibit great potential applications in aerospace. But poor wear behavior results in limited use of magnesium alloy to static components. In this study, a 2 μm thick coating with 12 sub-layers of CrN and TiN is deposited alternately on the surface of magnesium alloy AZ91 by a novel method of arc-glow plasma depositing to improve its wear resistance. The composition and microstructure of the coating layer are analyzed by means of SEM, XRD and GDS. The friction coefficient is measured by ball on disc rubbing test, and the wear rates are also calculated. The results indicate that the friction coefficient is increased, but the wear rate is dropped sharply as compared with bare metal. The surface hardness is about HK0.01 1400. 展开更多
关键词 arc-glow plasma depositing magnesium alloy tin/crn coating WEAR friction coefficient micro-hardness
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The Study of Deposition Parameters, Properties for PVD Ti_xN and Cr_xN Coatings Using a Closed Field Unbalanced Magnetron Sputter Ion Plating System
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作者 HailinSun SusanField +1 位作者 JianChen Dennis.G.Teer 《材料热处理学报》 EI CAS CSCD 北大核心 2004年第05B期841-846,共6页
Closed Field Unbalanced Magnetron Sputter Ion Plating (CFUBMSIP) systems have been used increasingly for PVD coating in recent years. TiN and CrN coatings, commonly used as the basic coating for a number of different ... Closed Field Unbalanced Magnetron Sputter Ion Plating (CFUBMSIP) systems have been used increasingly for PVD coating in recent years. TiN and CrN coatings, commonly used as the basic coating for a number of different hard coatings, have been chosen to study the coating process parameters for the CFUBMSIP system. In this paper, the process parameters, such as substrate temperature, substrate bias and OEM control, have been carefully examined to achieve hard and wear-resistance coatings with good adhesion. The coating structure and orientation were found to change according to the coating parameters. The Rockwell test and Scratch test were carried out to examine the coating adhesion; pin-on-disc testing was used to estimate the wear-resistant; micro-hardness was also used to determine coating hardness. HSS drill testing has been carried out to study the general properties of the coating for cutting tool application. A combination of process parameters can be selected to achieve good performance for the TiN and CrN coatings. 展开更多
关键词 PVD 衬底温度 磁控管溅射 TixN涂层 CrxN涂层 OEM
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201不锈钢表面弧光离子镀TiN和CrN薄膜的耐蚀性
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作者 马志康 高原 +4 位作者 蔡航伟 王成磊 袁琳 张焱 吴炜钦 《腐蚀与防护》 CAS 北大核心 2013年第8期670-672,689,共4页
利用弧光离子镀设备,对201不锈钢表面进行离子沉积TiN薄膜和CrN薄膜。分别在3.5%NaCl溶液、1mol·L-1 NaOH溶液和1mol·L-1 H2SO4溶液中进行电化学腐蚀性能测试。结果表明,通过弧光离子镀技术在201不锈钢表面分别形成了厚度为1.... 利用弧光离子镀设备,对201不锈钢表面进行离子沉积TiN薄膜和CrN薄膜。分别在3.5%NaCl溶液、1mol·L-1 NaOH溶液和1mol·L-1 H2SO4溶液中进行电化学腐蚀性能测试。结果表明,通过弧光离子镀技术在201不锈钢表面分别形成了厚度为1.2μm的致密TiN薄膜和3μm的致密CrN薄膜;201不锈钢、TiN薄膜和CrN薄膜在3.5%的NaCl溶液中耐蚀性相当;在1mol·L-1的NaOH溶液中,TiN薄膜的耐蚀性约是201不锈钢的2倍,CrN薄膜的耐蚀性是201不锈钢的24倍,TiN薄膜的12倍;在1mol·L-1的H2SO4溶液中,TiN薄膜和CrN薄膜的耐蚀性相比201不锈钢分别提高20倍和26倍。 展开更多
关键词 弧光离子镀 tin薄膜 crn薄膜 耐蚀性
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深振荡磁控溅射复合沉积CrN/TiN超晶格涂层的摩擦学性能 被引量:3
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作者 欧伊翔 王浩琦 +5 位作者 庞盼 罗军 陈琳 廖斌 雷明凯 欧阳晓平 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2020年第7期2476-2479,共4页
研究了IN718高温合金、WC-6%Co硬质合金和Si(100)基体上深振荡磁控溅射复合沉积CrN/TiN超晶格涂层的摩擦学性能。研究表明,涂层的生长对基体的类型没有选择性。随着基体硬度的升高,划痕结合力失效临界载荷增大,涂层结合力失效机制由翘... 研究了IN718高温合金、WC-6%Co硬质合金和Si(100)基体上深振荡磁控溅射复合沉积CrN/TiN超晶格涂层的摩擦学性能。研究表明,涂层的生长对基体的类型没有选择性。随着基体硬度的升高,划痕结合力失效临界载荷增大,涂层结合力失效机制由翘曲失效转变为基体/涂层协同变形,未发现涂层的剥落失效。载荷为2N时,磨损机制由磨粒磨损和氧化磨损转变为轻微磨粒磨损。载荷为4 N时,IN 718基体上涂层的磨损机制为严重的氧化磨损,WC-6%Co基体上的涂层的磨损机制为磨粒磨损和氧化磨损,氧化物的产生、堆积和转移导致摩擦系数的波动。 展开更多
关键词 深振荡磁控溅射 crn/tin超晶格涂层 结合力 磨损
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深振荡磁控溅射复合沉积CrN/TiN超晶格薄膜的结构和性能 被引量:3
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作者 欧伊翔 潘伟 雷明凯 《稀有金属材料与工程》 SCIE EI CAS CSCD 北大核心 2018年第S1期330-334,共5页
分别采用深振荡磁控溅射(deep oscillation magnetron sputtering,DOMS)复合脉冲直流磁控溅射(pulsed dc magnetron sputtering,PDCMS)技术和单一的PDCMS技术,沉积厚度为2μm、调制周期为6.3 nm的Cr N/Ti N超晶格薄膜。利用XRD、SEM和TE... 分别采用深振荡磁控溅射(deep oscillation magnetron sputtering,DOMS)复合脉冲直流磁控溅射(pulsed dc magnetron sputtering,PDCMS)技术和单一的PDCMS技术,沉积厚度为2μm、调制周期为6.3 nm的Cr N/Ti N超晶格薄膜。利用XRD、SEM和TEM表征薄膜的结构。利用纳米压痕仪、划痕仪和空气电阻炉分别测试薄膜的力学性能、结合力和热稳定性。利用球-盘式摩擦磨损试验机测试薄膜的摩擦学性能。利用阳极极化实验测试薄膜在3.5%(质量分数)Na Cl溶液中腐蚀性能。研究表明,与单一的PDCMS技术相比,DOMS+PDCMS复合技术显著改善了Cr N/Ti N超晶格薄膜结构,薄膜具有更优异的力学性能、持久的耐磨减摩性和抗腐蚀性能。 展开更多
关键词 crn/tin超晶格薄膜 深振荡磁控溅射 脉冲直流磁控溅射 摩擦磨损 腐蚀
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Deposition of TiN/TiAlN multilayers by plasma-activated EB-PVD:tailored microstructure by jumping beam technology 被引量:5
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作者 Guo-Yuan Yang Hui Peng +1 位作者 Hong-Bo Guo Sheng-Kai Gong 《Rare Metals》 SCIE EI CAS CSCD 2017年第8期651-658,共8页
Plasma-activated electron beam-physical vapor deposition(EB-PVD)was used for depositing nitride multilayer coatings in this work.Different from the conventional coating methods,the multilayers were obtained by manip... Plasma-activated electron beam-physical vapor deposition(EB-PVD)was used for depositing nitride multilayer coatings in this work.Different from the conventional coating methods,the multilayers were obtained by manipulating electron beam(EB)to jump between two different evaporation sources alternately with variable frequencies(jumping beam technology).The plasma activation was generated by a hollow cathode plasma unit.The deposition process was demonstrated by means of tailoring TiN/TiAlN multilayers with different modulation periods(M1:26.5 nm,M2:80.0 nm,M3:6.0 nm,M4:4.0 nm).The microstructure and hardness of the multilayer coatings were comparatively studied with TiN and TiAlN singlelayer coatings.The columnar structure of the coatings(TiN,TiAlN,M1,M2)is replaced by a glassy-like microstructure when the modulation period decreases to less than 10 nm(M3,M4).Simultaneously,superlattice growth occurs.With the decrease of modulation period,both the hardness and the plastic deformation resistance(H^3/E^2,H-hardness and E-elastic modulus)increase.M4coating exhibits the maximum hardness of(49.6±2.7)GPa and the maximum plastic deformation resistance of^0.74 GPa. 展开更多
关键词 Nano-multilayer coatings superlattice Plasmaactivation tin/TiAlN EB-PVD Hardness
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