Up-scaled deposition process of Teer-UDP850/4 has been established and used for massive production of CrTiAIN hard coatings in applications of anti-wear, cutting and forming tools. This deposition system uses four mag...Up-scaled deposition process of Teer-UDP850/4 has been established and used for massive production of CrTiAIN hard coatings in applications of anti-wear, cutting and forming tools. This deposition system uses four magnetrons that are arranged by unbalanced magnets to form closed magnetic field enabling the system running in high current density. Elemental metals of Cr, Ti and Al are used as the target materials which are co-deposited with nitrogen forming multialloy nitride, nanoscale multi-layer or superlattice hard coatings. The substrate turntable is desfgned as planet rotation mechanism with three folds so that components or tools with complicate geometry can be uniformly coated onto all their surfaces and cutting edges. The power units for the magnetrons are straight dc whilst the substrate is biased by pulsed dc. Two solid heaters are installed in the system to enable running a wide range of deposition temperature from 200°C to 500°C. The pumping system is powerful that incorporated with a polycold to pump the system to a good vacuum in a very short time. A front door and a movable substrate table are available to benefit easily loading and unloading. Deposition procedure, properties and performance of the coatings is also presented in this paper.展开更多
CrTiAIN coatings were prepared by using a home-made industrial scale multi-arc ion plating system. The coatings were found to be composites of face-center-cubic CrN and TiN. The surface roughness, microhardness, and t...CrTiAIN coatings were prepared by using a home-made industrial scale multi-arc ion plating system. The coatings were found to be composites of face-center-cubic CrN and TiN. The surface roughness, microhardness, and tribological properties of the films were significantly affected by the nitrogen pressure and dc-pulsed bias voltage applied to the substrate. The CrTiA1N coatings with the smoothest surfaces were obtained at optimum conditions of nitrogen pressure of 5.0 Pa and bias voltage of -200 V. The samples were found to exhibit a hardness of 2900 HV0.05 with an average friction coefficient of 0.16 and wear rate of 1.5× 10^-16 m^3/N.m against cemented carbide.展开更多
文摘Up-scaled deposition process of Teer-UDP850/4 has been established and used for massive production of CrTiAIN hard coatings in applications of anti-wear, cutting and forming tools. This deposition system uses four magnetrons that are arranged by unbalanced magnets to form closed magnetic field enabling the system running in high current density. Elemental metals of Cr, Ti and Al are used as the target materials which are co-deposited with nitrogen forming multialloy nitride, nanoscale multi-layer or superlattice hard coatings. The substrate turntable is desfgned as planet rotation mechanism with three folds so that components or tools with complicate geometry can be uniformly coated onto all their surfaces and cutting edges. The power units for the magnetrons are straight dc whilst the substrate is biased by pulsed dc. Two solid heaters are installed in the system to enable running a wide range of deposition temperature from 200°C to 500°C. The pumping system is powerful that incorporated with a polycold to pump the system to a good vacuum in a very short time. A front door and a movable substrate table are available to benefit easily loading and unloading. Deposition procedure, properties and performance of the coatings is also presented in this paper.
基金supported by the China Ministry of Industry and Information Technology (No. 2009ZX04012-032)Basic Research Fund of Central Universities
文摘CrTiAIN coatings were prepared by using a home-made industrial scale multi-arc ion plating system. The coatings were found to be composites of face-center-cubic CrN and TiN. The surface roughness, microhardness, and tribological properties of the films were significantly affected by the nitrogen pressure and dc-pulsed bias voltage applied to the substrate. The CrTiA1N coatings with the smoothest surfaces were obtained at optimum conditions of nitrogen pressure of 5.0 Pa and bias voltage of -200 V. The samples were found to exhibit a hardness of 2900 HV0.05 with an average friction coefficient of 0.16 and wear rate of 1.5× 10^-16 m^3/N.m against cemented carbide.
