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Design and fabrication of multi-channel photodetector array monolithic with arrayed waveguide grating 被引量:1
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作者 吕倩倩 潘盼 +4 位作者 叶焓 尹冬冬 王玉冰 杨晓红 韩勤 《Chinese Physics B》 SCIE EI CAS CSCD 2016年第3期453-457,共5页
We have provided optical simulations of the evanescently coupled waveguide photodiodes integrated with a 13- channels AWGs. The photodiode could exhibit high internal efficiency by appropriate choice of layers geometr... We have provided optical simulations of the evanescently coupled waveguide photodiodes integrated with a 13- channels AWGs. The photodiode could exhibit high internal efficiency by appropriate choice of layers geometry and refrac- tive index. Aseamless joint structure has been designed and fabricated for integrating the output waveguides of AWGs with the evanescently coupled waveguide photodiode array. The highest simulation quantum efficiency could achieve 92% when the matching layer thickfiess of the PD is 120 nm and the insertion length is 2 μm. The fabricated PD with 320-nm-thick match.ing layer and 2-μm-length insertion matching layer present a responsivity of 0.87 A/W. 展开更多
关键词 photodetector array MONOLITHIC evanescent coupling arrayed waveguide grating
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Ultra-wideband low radar cross-section metasurface and its application on waveguide slot antenna array 被引量:2
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作者 丛丽丽 曹祥玉 +1 位作者 宋涛 高军 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第11期466-471,共6页
A novel approach devoted to achieving ultra-wideband radar cross section reduction(RCSR) of a waveguide slot antenna array(WGSAA) while maintaining its radiation performance is proposed. Three kinds of artificial ... A novel approach devoted to achieving ultra-wideband radar cross section reduction(RCSR) of a waveguide slot antenna array(WGSAA) while maintaining its radiation performance is proposed. Three kinds of artificial magnetic conductors(AMCs) tiles consisting of three types of basic units resonant at different frequencies are designed and arranged in a novel quadruple-triangle-type configuration to create a composite planar metasurface. The proposed metasurface is characterized by low radar feature over an ultra-wideband based on the principle of phase cancellation. Both simulated and measured results demonstrate that after the composite metasurface is used to cover part of the antenna array, an ultrawideband RCSR involving in-band and out-of-band is achieved for co-and cross-polarized incident waves based on energy cancellation, while the radiation performance is well retained. The proposed method is simple, low-cost, and easy-tofabricate, providing a new method for ultra-wideband RCSR of an antenna array. Moreover, the method proposed in this paper can easily be applied to other antenna architectures. 展开更多
关键词 metasurface polarization-independent artificial magnetic conductor (PIDAMC) waveguide slot antenna array (WGSAA) radar cross section reduction
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Coupled-ridge waveguide quantum cascade laser array lasing at λ~5μm 被引量:1
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作者 Pengchang Yang Jinchuan Zhang +9 位作者 Zenghui Gu Chuanwei Liu Yue Zhao Fengmin Cheng Shenqiang Zhai Ning Zhuo Junqi Liu Lijun Wang Shuman Liu Fengqi Liu 《Journal of Semiconductors》 EI CAS CSCD 2021年第9期72-76,共5页
In this work,we demonstrated high-power quantum cascade laser(QCL)arrays lasing at λ~5μm by employing an optimized coupled-ridge waveguide(CRW)structure.Five-element QCL arrays were simulated and fabricated through ... In this work,we demonstrated high-power quantum cascade laser(QCL)arrays lasing at λ~5μm by employing an optimized coupled-ridge waveguide(CRW)structure.Five-element QCL arrays were simulated and fabricated through a two-step etching method to extend the CRW structure to a mid-wave infrared regime.A lateral far-field with the main peak near a diffraction-limited intensity curve of about 10°was observed by properly designing a geometric shape of the ridges and interspaces.By introducing a buried 2nd-order distributed feedback(DFB)grating,substrate emission with a radiation power above 1 W at 25℃ is achieved.Single longitudinal mode operation is obtained by changing the temperature of the heatsink with a good linear wavelength tuning coefficient of -0.2 cm^(-1)/K. 展开更多
关键词 quantum cascade laser array coupled-ridge waveguide MID-INFRARED
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Improved Performance of a Wavelength-Tunable Arrayed Waveguide Grating in Silicon on Insulator
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作者 袁配 张晓光 +3 位作者 安俊明 殷鹏刚 王玥 吴远大 《Chinese Physics Letters》 SCIE CAS CSCD 2019年第5期40-43,共4页
The improved performance of a wavelength-tunable arrayed waveguide grating (AWG) is demonstrated, including the crosstalk, insertion loss and the wavelength tuning efficiency. A reduced impact of the fabrication proce... The improved performance of a wavelength-tunable arrayed waveguide grating (AWG) is demonstrated, including the crosstalk, insertion loss and the wavelength tuning efficiency. A reduced impact of the fabrication process on the AWG is achieved by the design of bi-level tapers. The wavelength tuning of the AWG is achieved according to the thermo-optic effect of silicon, and uniform heating of the silicon waveguide layer is achieved by optimizing the heater design. The fabricated AWG shows a minimum crosstalk of 16 dB, a maximum insertion loss of 3.91 dB and a wavelength tuning efficiency of 8.92 nm/W, exhibiting a ~8 dB improvement of crosstalk, ~2.1 dB improvement of insertion loss and ~5 nm/W improvement of wavelength tuning efficiency, compared to our previous reported results. 展开更多
关键词 Improved Performance of a Wavelength-Tunable arrayed waveguide Grating in Silicon on INSULATOR AWG
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Novel wavelength-accurate InP-based arrayed waveguide grating
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作者 潘盼 安俊明 +7 位作者 王红杰 王玥 张家顺 王亮亮 代红庆 张晓光 吴远大 胡雄伟 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第4期314-318,共5页
A 13-channel, InP-based arrayed waveguide grating (AWG) is designed and fabricated in which the on-chip loss of the central channel is about -5 dB and the crosstalk is less than -23 dB in the center of the spectrum ... A 13-channel, InP-based arrayed waveguide grating (AWG) is designed and fabricated in which the on-chip loss of the central channel is about -5 dB and the crosstalk is less than -23 dB in the center of the spectrum response. However, the central wavelength and channel spacing are deviated from the design values. To improve their accuracy, an optimized design is adopted to compensate the process error. As a result, the central wavelength 1549.9 nm and channel spacing 1.59 nm are obtained in the experiment, while their design values are 1549.32 nm and 1.6 nm, respectively. The route capability and thermo-optic characteristic of the AWG are also discussed in detail. 展开更多
关键词 arrayed waveguide grating wavelength accuracy thermo-optical characteristic ROUTER
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Output mode characteristics of an in-phase locked gain waveguide array CO_2 laser
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作者 沙鹏飞 辛建国 +1 位作者 周英 刘正帆 《Chinese Physics B》 SCIE EI CAS CSCD 2011年第8期222-226,共5页
In this paper, experimental and theoretical studies of the output mode characteristics of an in-phase locked gain waveguide array CO2 laser are reported. The experimental results of the optical oscillation mode freque... In this paper, experimental and theoretical studies of the output mode characteristics of an in-phase locked gain waveguide array CO2 laser are reported. The experimental results of the optical oscillation mode frequency, the far-field intensity distribution and the burnt pattern of the sliced waveguide array laser are obtained. A revised mode expression of the rectangle waveguide, which is suited for this waveguide array CO2 laser, is proposed. The theoretical simulation results based on the revised mode expression are shown to be in good agreement with the experimental results. 展开更多
关键词 waveguide array phase coupling CO2 laser
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A 32-channel 100 GHz wavelength division multiplexer by interleaving two silicon arrayed waveguide gratings
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作者 解长健 邹喜华 +3 位作者 邹放 闫连山 潘炜 张永 《Chinese Physics B》 SCIE EI CAS CSCD 2021年第12期339-342,共4页
A 32-channel wavelength division multiplexer with 100 GHz spacing is designed and fabricated by interleaving two silicon arrayed waveguide gratings(AWGs).It has a parallel structure consisting of two silicon 16-channe... A 32-channel wavelength division multiplexer with 100 GHz spacing is designed and fabricated by interleaving two silicon arrayed waveguide gratings(AWGs).It has a parallel structure consisting of two silicon 16-channel AWGs with200 GHz spacing and a Mach-Zehnder interferometer(MZI)with 200 GHz free spectral range.The 16 channels of one silicon AWG are interleaved with those of the other AWG in spectrum,but with an identical spacing of 200 GHz.For the composed wavelength division multiplexer,the experiment results reveal 32 wavelength channels in C-band,a wavelength spacing of 100 GHz,and a channel crosstalk lower than-15 dB. 展开更多
关键词 wavelength division multiplexer arrayed waveguide grating silicon photonics Mach-Zehnder interferometer
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Presentation of Design Equations for Array of Circumferential Slot on Cylindrical Waveguide
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作者 Ali Khayati Amir Amirabadi Behnam Rajabi 《Open Journal of Antennas and Propagation》 2017年第4期180-187,共8页
In this paper the design equations for an array of circumferential slots on a cylindrical waveguide are obtained, following the procedure introduced by Elliott for slots on rectangular waveguides. The minimization of ... In this paper the design equations for an array of circumferential slots on a cylindrical waveguide are obtained, following the procedure introduced by Elliott for slots on rectangular waveguides. The minimization of the error function is achieved for optimization of slot array parameters. The optimization of slot parameters is not goal of this paper but a numerical example are presented as illustrations of the proposed synthesis method. The results of array designs by the method of the least squares are verified by two computer simulation softwares, namely CST and HFSS. 展开更多
关键词 array SLOT arrays CYLINDRICAL waveguide SLOT array CYLINDRICAL waveguide CIRCUMFERENTIAL SLOT array Design Equations
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Design and Fabrication of a 400 GHz InP-Based Arrayed Waveguide Grating with Flattened Spectral Response
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作者 张希林 刘松涛 +2 位作者 陆丹 张瑞康 吉晨 《Chinese Physics Letters》 SCIE CAS CSCD 2015年第5期55-58,共4页
A four-channel 400 GHz channel spacing InP-based arrayed waveguide grating with a flattened wavelength re- sponse by employing a multimode interference coupler at the input waveguide of the filter is prepared. The fab... A four-channel 400 GHz channel spacing InP-based arrayed waveguide grating with a flattened wavelength re- sponse by employing a multimode interference coupler at the input waveguide of the filter is prepared. The fabricated devices show a flattened spectral response with a broadened 3-dB bandwidth up to 3.5 nm, interchan- nel non-uniformity of 〈0. 7dB and excellent match to the simulation results. 展开更多
关键词 AWG InP Design and Fabrication of a 400 GHz InP-Based arrayed waveguide Grating with Flattened Spectral Response
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Substrate Integrated Waveguide Based Monopulse Slot Antenna Arrays for 60 GHz Applications
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作者 ZHU Jianfeng XUE Quan LIAO Shaowei 《ZTE Communications》 2016年第B12期2-6,共5页
Monopulse slot antenna arrays based on substrate integrated waveguide (SIW) are proposed for the application of 60 GHz mono- pulse tracking systems in this paper. The sum-difference monopulse comparator can provide ... Monopulse slot antenna arrays based on substrate integrated waveguide (SIW) are proposed for the application of 60 GHz mono- pulse tracking systems in this paper. The sum-difference monopulse comparator can provide a high amplitude and phase balance over wide frequency band and no phase delay technique is required for the difference channel. Resonant slot antennas are adopted as the radiating elements since they can be integrated with the sum-difference monopulse comparator in a single layer with a compact size. Two monopulse arrays with 2× 4 and 4×4 slot elements are designed, fabricated, and measured. Measured results show that the proposed antenna arrays have wide bandwidth covering the unlicensed 60-GHz band. The peak sum beam gain is 13.85 dBi for the 2 ×4 element array and 16.24 dBi for the 4×4 element array. The peak difference beam gain is 11.20 dBi for the 2×4 element array and 12.11 dBi for the 4×4 element array and the maximum null depth can reach -40 dB. 展开更多
关键词 resonant slot antenna array MONOPULSE substrate integrated waveguide (SIW) millimeter-wave (mmWave)
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An Array Consisting of 10 High-Speed Side-Illuminated Evanescently Coupled Waveguide Photodetectors Each with a Bandwidth of 20 GHz
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作者 吕倩倩 叶焓 +2 位作者 尹冬冬 杨晓红 韩勤 《Chinese Physics Letters》 SCIE CAS CSCD 2015年第12期171-173,共3页
We design and fabricate a parallel system with 10 high speed side-illuminated evanescently coupled waveguide photodetectors (ECPDs). The 10 ECPDs exhibit a uniform 3dB bandwidth of 20 GHz and low dark current of abo... We design and fabricate a parallel system with 10 high speed side-illuminated evanescently coupled waveguide photodetectors (ECPDs). The 10 ECPDs exhibit a uniform 3dB bandwidth of 20 GHz and low dark current of about i nA at 2 V reverse bias. The 10 ECPDs also exhibit uniform photo-responsivity of about 0.23A/W with an active region of 5 × 25μmS. The photodetector array has a total bandwidth of more than 200 GHz and can be integrated with other optoelectronic devices. 展开更多
关键词 PD An array Consisting of 10 High-Speed Side-Illuminated Evanescently Coupled waveguide Photodetectors Each with a Bandwidth of 20 GHz length
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A Linear Array Antenna of Microstrip Patch Antennas Fed by the Open-End of Coplanar Waveguides
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作者 Toshihisa Kamei Hiromi Shima +1 位作者 Syotaro Fukuda Seishiro Ishii 《Wireless Engineering and Technology》 2017年第2期37-49,共13页
In this study, we constructed a 4-element linear array antenna using four 20 GHz band microstrip patch antennas with a structure such that the signal is fed to the patch antennas from open-end coplanar waveguides with... In this study, we constructed a 4-element linear array antenna using four 20 GHz band microstrip patch antennas with a structure such that the signal is fed to the patch antennas from open-end coplanar waveguides without contact. We investigated factors related to the design of linear array patch antennas. To adjust the maximum radiation direction and reduce return loss, we optimized the spacing between the elements and their shape. With an element spacing of 11.50 mm, patch width of 3.90 mm, and patch length of 4.15 mm, we obtained a resonance frequency of 20.05 GHz and a return loss of -29.59 dB at the resonance frequency. However, in the case of a 4-element linear array antenna structure, undesired resonances occurred in frequency bands other than the design resonance frequency band of 20 GHz. To suppress these undesired resonances and obtaining stable operation at the design frequency, we propose a new structure in which the feed line is loaded with a short stub, and show through computer simulations that the occurrence of undesired resonances can be sufficiently suppressed. Furthermore, we demonstrate the problem of radiation gain reduction caused by introducing a short stub, propose a design method for a new structure in which the feed line has slits between the stubs, and show improvement of the antenna gain by 0.5 dBi. 展开更多
关键词 MICROSTRIP PATCH ANTENNA COPLANAR waveguide Linear array ANTENNA Short STUB Undesired Resonance Suppression
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Ultralow cross talk arrayed waveguide grating integrated with tunable microring filter array
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作者 胡鹤鸣 刘世平 +3 位作者 李天文 范永杰 陈华 方青 《Chinese Optics Letters》 SCIE EI CAS CSCD 2024年第3期50-54,共5页
The silicon-based arrayed waveguide grating(AWG)is widely used due to its compact footprint and its compatibility with the mature CMOS process.However,except for AWGs with ridged waveguides of a few micrometers of cro... The silicon-based arrayed waveguide grating(AWG)is widely used due to its compact footprint and its compatibility with the mature CMOS process.However,except for AWGs with ridged waveguides of a few micrometers of cross section,any small process error will cause a large phase deviation in other AWGs,resulting in an increasing cross talk.In this paper,an ultralow cross talk AWG via a tunable microring resonator(MRR)filter is demonstrated on the SOI platform.The measured insertion loss and minimum adjacent cross talk of the designed AWG are approximately 3.2 and-45.1 d B,respectively.Compared with conventional AWG,its cross talk is greatly reduced. 展开更多
关键词 SOI platform arrayed waveguide grating cross talk microring filter array thermo-optic effect
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Progress and realization platforms of dynamic topological photonics
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作者 闫秋辰 马睿 +1 位作者 胡小永 龚旗煌 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第1期75-87,共13页
Dynamic topological photonics is a novel research field, combining the time-domain optics and topological physics.In this review, the recent progress and realization platforms of dynamic topological photonics have bee... Dynamic topological photonics is a novel research field, combining the time-domain optics and topological physics.In this review, the recent progress and realization platforms of dynamic topological photonics have been well introduced.The definition, measurement methods and the evolution process of the dynamic topological photonics are demonstrated to better understand the physical diagram. This review is meant to bring the readers a different perspective on topological photonics, grasp the advanced progress of dynamic topology, and inspire ideas about future prospects. 展开更多
关键词 dynamic topological photonics optical waveguide array topological optical lattice ultrafast spectroscopy
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Analysis and Deskgn of Radiated Element and Array for a Radial Line Slot Antenna
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作者 马汉炎 吴群 +1 位作者 张静 傅佳辉 《Journal of Harbin Institute of Technology(New Series)》 EI CAS 1997年第2期72-76,共5页
AnalysisandDeskgnofRadiatedElementandArrayforaRadialLineSlotAntennaMAHanyan(马汉炎)WUQun(吴群)ZHANGJing(张静)FUJiah... AnalysisandDeskgnofRadiatedElementandArrayforaRadialLineSlotAntennaMAHanyan(马汉炎)WUQun(吴群)ZHANGJing(张静)FUJiahui(傅佳辉)(Dept.ofEl... 展开更多
关键词 RADIAL LINE waveguide SLOT array planar ANTENNA
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Enhanced optical transmission through double-layer gold slit arrays
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作者 谢素霞 李宏建 +2 位作者 周昕 徐海清 付少丽 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第7期570-575,共6页
We investigate the relationship between the transmission and the layer distance of double-layer gold slit arrays by using the finite-difference time-domain method. The results show that the transmission properties can... We investigate the relationship between the transmission and the layer distance of double-layer gold slit arrays by using the finite-difference time-domain method. The results show that the transmission properties can be influenced strongly by layer distance. We attribute the two types of resonant modes to surface plasmon resonance and the localised waveguide resonance. We find that the localised waveguide transmission peak redshifts and becomes broader with increasing layer distance D. We also describe and explain the splitting, shift, and degeneration of the surface plasmon resonant transmission peak theoretically. In addition, to clarify the physical mechanism of the transmission behaviours, we analyse the distributions of electric field and total energy for the three transmission peaks with distance D = 45 nm for the double-layer system. Light transporting behaviours are mostly concentrated in the region of the slits as well as the interspaces of the two layers, and for different resonant wavelengths the electric field and energy distributions are different. It is expected that the results obtained here will be helpful for designing subwavelength metallic grating devices. 展开更多
关键词 slit array layer distance localised waveguide resonance surface plasmon resonance
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Electromagnetic coupling reduction in dual-band microstrip antenna array using ultra-compact single-negative electric metamaterials for MIMO application
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作者 付孝龙 吴国成 +2 位作者 白渭雄 王光明 梁建刚 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第2期194-199,共6页
In this paper, an ultra-compact single negative(SNG) electric waveguided metamaterial(WG-MTM) is first investigated and used to reduce the mutual coupling in E & H planes of a dual-band microstrip antenna array. ... In this paper, an ultra-compact single negative(SNG) electric waveguided metamaterial(WG-MTM) is first investigated and used to reduce the mutual coupling in E & H planes of a dual-band microstrip antenna array. The proposed SNG electric WG-MTM unit cell is designed by etching two different symmetrical spiral lines on the ground, and has two stopbands operating at 1.86 GHz and 2.40 GHz. The circuit size is very compact, which is only λ_0/33.6 ×λ_0/15.1(where λ_0 is the wavelength at 1.86 GHz in free space). Taking advantage of the dual-stopband property of the proposed SNG electric WG-MTM, a dual-band microstrip antenna array operating at 1.86 GHz and 2.40 GHz with very low mutual coupling is designed by embedding a cross shaped array of the proposed SNG electric WG-MTM. The measured and simulated results of the designed dual-band antenna array are in good agreement with each other, indicating that the mutual coupling of the fabricated dual-band antenna array realizes 9.8/11.1 d B reductions in the H plane, 8.5/7.9 d B reductions in the E plane at1.86 GHz and 2.40 GHz, respectively. Besides, the distance of the antenna elements in the array is only 0.35 λ_0(where λ_0 is the wavelength at 1.86 GHz in free space). The proposed strategy is used for the first time to reduce the mutual coupling in E & H planes of the dual-band microstrip antenna array by using ultra-compact SNG electric WG-MTM. 展开更多
关键词 waveguided metamaterial(WG-MTM) dual-band microstrip antenna array mutual coupling reduction ultra-compact circuit size
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Toward optical coherence tomography on a chip: in vivo three-dimensional human retinal imaging using photonic integrated circuit-based arrayed waveguide gratings 被引量:4
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作者 Elisabet A.Rank Ryan Sentosa +12 位作者 Danielle J.Harper Matthias Salas Anna Gaugutz Dana Seyringer Stefan Nevlacsil Alejandro Maese-Novo Moritz Eggeling Paul Muellner Rainer Hainberger Martin Sagmeister Jochen Kraft Rainer ALeitgeb Wolfgang Drexler 《Light(Science & Applications)》 SCIE EI CAS CSCD 2021年第1期71-85,共15页
In this work,we present a significant step toward in vivo ophthalmic optical coherence tomography and angiography on a photonic integrated chip.The diffraction gratings used in spectral-domain optical coherence tomogr... In this work,we present a significant step toward in vivo ophthalmic optical coherence tomography and angiography on a photonic integrated chip.The diffraction gratings used in spectral-domain optical coherence tomography can be replaced by photonic integrated circuits comprising an arrayed waveguide grating.Two arrayed waveguide grating designs with 256 channels were tested,which enabled the first chip-based optical coherence tomography and angiography in vivo three-dimensional human retinal measurements.Design 1 supports a bandwidth of 22nm,with which a sensitivity of up to 91 dB(830μW) and an axial resolution of 10.7 pm was measured.Design 2 supports a bandwidth of 48 nm,with which a sensitivity of 90 dB(480μW) and an axial resolution of 6.5μm was measured.The silicon nitride-based integrated optical waveguides were fabricated with a fully CMOS-compatible process,which allows their monolithic co-integration on top of an optoelectronic silicon chip.As a benchmark for chip-based optical coherence tomography,tomograms generated by a commercially available clinical spectral-domain optical coherence tomography system were compared to those acquired with on-chip gratings.The similarities in the tomograms demonstrate the significant clinical potential for further integration of optical coherence tomography on a chip system. 展开更多
关键词 waveguide arrayed OPTICAL
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Design and Fabrication of Polymer Arrayed Waveguide Grating 被引量:2
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作者 ZHANG Da ming, WANG Fei, ZHANG Zhen guo, ZHAO Yu, YI Mao bin, LIU Shi yong (State Key Laboratory of Integrated Optoelectronics, Jilin University, Changchun 130023, P.R.China) 《The Journal of China Universities of Posts and Telecommunications》 EI CSCD 2003年第2期11-15,共5页
In this paper, based on the principle of Arrayed Waveguide Grating (AWG)theory, some important parameters are optimized for polymer AWG around the central wavelength of1.55μm with the wavelength spacing of 1.6 nm. Th... In this paper, based on the principle of Arrayed Waveguide Grating (AWG)theory, some important parameters are optimized for polymer AWG around the central wavelength of1.55μm with the wavelength spacing of 1.6 nm. Then, a 9 X 9 polymer AWG is designed and thefabricating process are described . The cladding material is poly-methyl-methacrylate-co-glyciclylmethacrylate (PMMA-GMA) and the core material is the mixture of PMMA-GMA and bis-phonel-A epoxy. Inorder to obtain a better shape of the waveguide after the Reactive Ion Etching (RIE) using oxygen,an aluminum mask is used on polymer instead of conventional photoresist as mask in the fabricationprocess. The measuring results indicate that the fabricated optical waveguide achieves single-modetransmission. 展开更多
关键词 arrayed waveguide grating POLYMER wavelength division multiplexing
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16 channel 200 GHz arrayed waveguide grating based on Si nanowire waveguides 被引量:1
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作者 赵雷 安俊明 +3 位作者 张家顺 宋世娇 吴远大 胡雄伟 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2011年第2期65-68,共4页
A 16 channel arrayed waveguide grating demultiplexer with 200 GHz channel spacing based on Si nanowire waveguides is designed. The transmission spectra response simulated by transmission function method shows that the... A 16 channel arrayed waveguide grating demultiplexer with 200 GHz channel spacing based on Si nanowire waveguides is designed. The transmission spectra response simulated by transmission function method shows that the device has channel spacing of 1.6 nm and crosstalk of 31 dB. The device is fabricated by 193 nm deep UV lithography in silicon-on-substrate. The demultiplexing characteristics are observed with crosstalk of 5-8 dB, central channel's insertion loss of 2.2 dB, flee spectral range of 24.7 nm and average channel spacing of 1.475 nm. The cause of the spectral distortion is analyzed specifically. 展开更多
关键词 integrated optics arrayed waveguide grating Si nanowire waveguides
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