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Optimal migration route of Cu in HfO_2 被引量:1
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作者 卢金龙 罗京 +5 位作者 赵宏鹏 杨金 蒋先伟 刘琦 李晓风 代月花 《Journal of Semiconductors》 EI CAS CSCD 2014年第1期7-11,共5页
The movement of Cu in a HfO2-based resistive random access memory (RRAM) device is investigated in depth by first-principle calculations. Thermodynamics analysis shows that the dominant motion of Cu tends to be alon... The movement of Cu in a HfO2-based resistive random access memory (RRAM) device is investigated in depth by first-principle calculations. Thermodynamics analysis shows that the dominant motion of Cu tends to be along the [001] orientation with a faster speed. The migration barriers along different routes are compared and reveal that the [001] orientation is the optimal migration route of Cu in HfO2, which is more favorable for Cu transportation. Furthermore, the preferable HfOz growth orientation along [100], corresponding to Cu migration along [001], is also observed. Therefore, it is proposed that the HfO2 material should grow along [100] and the operating voltage should be applied along [001], which will contribute to the improvement of the response speed and the reduction of power consumption of RRAM. 展开更多
关键词 HFO2 RRAM cu migration lattice orientation migration speed
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