随着摩尔定律推进至纳米级节点,以硅通孔(TSV)、重布线层(RDL)、薄芯片堆叠键合等为支撑的三维集成被认为是延续摩尔定律的重要途径.Cu/SiO_(2)混合键合可以持续缩小芯片间三维互连节距、增大三维互连密度,是芯片堆叠键合前沿技术.近年...随着摩尔定律推进至纳米级节点,以硅通孔(TSV)、重布线层(RDL)、薄芯片堆叠键合等为支撑的三维集成被认为是延续摩尔定律的重要途径.Cu/SiO_(2)混合键合可以持续缩小芯片间三维互连节距、增大三维互连密度,是芯片堆叠键合前沿技术.近年来它在互补金属氧化物半导体(CMOS)图像传感器(CIS)、Xtacking 3D NAND、2.5D/3D集成等商业化应用突破,使之成为国内外领先半导体研究机构研究关注的热点话题.本文将系统梳理混合键合技术的研究历史与产业应用现状,重点分析近年来国内外代表性研究工作的技术路线、研究方法、关键问题等,在此基础上,对混合键合技术的未来发展方向进行展望.展开更多
The title complex [Cu(NO3)2(H2O)2(3,3-azpy)2] (3,3?azpy = 3,3?azobispyridine) has been synthesized and characterized, and its crystal belongs to the triclinic system, space group P with the following crystallographic ...The title complex [Cu(NO3)2(H2O)2(3,3-azpy)2] (3,3?azpy = 3,3?azobispyridine) has been synthesized and characterized, and its crystal belongs to the triclinic system, space group P with the following crystallographic parameters: a = 7.4161(2), b = 8.1754(3), c = 10.7545(4) ? a = 92.958(2), b = 109.978(1), g = 93.369(2)? V = 609.96(4) ?, C20H20N10CuO8, Mr = 592.00, Dc = 1.612 g/cm3, m(MoKa) = 0.964 mm-1, F(000) = 303, Z = 1, the final R = 0.0494 and wR = 0.1269 for 1945 observed reflections (I > 2s(I)). X-ray analysis reveals that the Cu atom adopts a distorted octahedral (4 + 2) coordination. The four closer donor atoms include two N atoms of 3,3?azpy and two O atoms of the coordination aqua with the CuN and CuO distances of 2.014(3) and 1.974(3) ? respectively. Two longer out-of-plane CuO bonds (2.450(3) ? from nitrate complete the strongly distorted octahedral coordination of the Cu atom. Hydrogen bonds are formed through H atoms of each coordination aqua with the remaining N atoms of 3,3?azpy and O atoms of nitrate. A two-dimensional network is constructed by hydrogen bonds and p-p interactions.展开更多
Under hydrothermal conditions, two new ribbon-like structures, [Cu(C14H9O4)- (C14H10O4)(C12H12N2)2] 1 and [Ag(C14H9O4)(C13H14N2)]0.5H2O 2, were obtained. X-ray crystal analysis revealed that these structures were cons...Under hydrothermal conditions, two new ribbon-like structures, [Cu(C14H9O4)- (C14H10O4)(C12H12N2)2] 1 and [Ag(C14H9O4)(C13H14N2)]0.5H2O 2, were obtained. X-ray crystal analysis revealed that these structures were constructed by mixed ligands. The coordination polymer forms the basic architecture while the weak interactions extend the framework into a secondary structure. The whole structures of them are governed by collaboration of the strong and weak interactions. Compound 1 crystallizes in monoclinic, space group C2/c with a = 17.0485(3), b = 11.0558(3), c = 22.7623(4) ? ?= 102.465(1), V = 4189.2(2) 3, Z = 4, Mr = 915.44, Dc = 1.451 g/mL, F(000) = 1904 and m(MoKa) = 0.587 cm-1. The final R and wR are 0.0430 and 0.1022, respectively for 3037 observed reflections with I > 2s(I). Compound 2 crystallizes in monoclinic, space group P21/c with a = 11.5963(4), b = 11.7004(5), c = 17.1254(5) ? ?= 95.620(1), V = 2312.4(1) 3, Z = 4, Mr = 556.35, Dc = 1.598 g/mL, F(000) = 1132 and m(MoKa) = 0.912 cm-1. The final R and wR are 0.0431 and 0.1050, respectively for 2629 observed reflections with I > 2σ(I).展开更多
A new Cu(Ⅱ) coordination polymer [Cu(inio)2(H2O)] (inio = isonicotinic acid N-oxide) with chemical formula C12H10CuN2O7 was prepared and its crystal structure has been determined by X-ray analysis. The complex crysta...A new Cu(Ⅱ) coordination polymer [Cu(inio)2(H2O)] (inio = isonicotinic acid N-oxide) with chemical formula C12H10CuN2O7 was prepared and its crystal structure has been determined by X-ray analysis. The complex crystallizes in the monoclinic system, space group C2/c with a = 12.455(3), b = 6.202(1), c = 16.555(3) ? b = 106.776(3), V = 1224.3(4) 3, Z = 4, Mr = 357.76, Dc =1.941 g/cm3, m(MoKa) = 1.827 mm-1, F(000) = 724, R = 0.0601 and wR = 0.1417 for 908 observed reflections (I > 2s(I)). The Cu(Ⅱ) atom is coordinated by an elongated square pyramid geometry. The deprotonated isonicotinic acid N-oxides form a double-bridge between each pair of Cu(Ⅱ) ions in trans form through two oxygen atoms from the carboxyl groups and two other oxygen atoms from the -NO groups, respectively, which leads to an infinite one dimensional chain. The two adjacent elongated Cu(Ⅱ) square pyramidal geometries are arranged in trans form in the same chain. The OH…O hydrogen bonds extend the chain structure into two-dimensional layers.展开更多
文摘随着摩尔定律推进至纳米级节点,以硅通孔(TSV)、重布线层(RDL)、薄芯片堆叠键合等为支撑的三维集成被认为是延续摩尔定律的重要途径.Cu/SiO_(2)混合键合可以持续缩小芯片间三维互连节距、增大三维互连密度,是芯片堆叠键合前沿技术.近年来它在互补金属氧化物半导体(CMOS)图像传感器(CIS)、Xtacking 3D NAND、2.5D/3D集成等商业化应用突破,使之成为国内外领先半导体研究机构研究关注的热点话题.本文将系统梳理混合键合技术的研究历史与产业应用现状,重点分析近年来国内外代表性研究工作的技术路线、研究方法、关键问题等,在此基础上,对混合键合技术的未来发展方向进行展望.
基金the funds of the Key Laboratory of Organic Syntheses of Jiansu province, and the funds of the State Key Laboratory of Structural Chemistry
文摘The title complex [Cu(NO3)2(H2O)2(3,3-azpy)2] (3,3?azpy = 3,3?azobispyridine) has been synthesized and characterized, and its crystal belongs to the triclinic system, space group P with the following crystallographic parameters: a = 7.4161(2), b = 8.1754(3), c = 10.7545(4) ? a = 92.958(2), b = 109.978(1), g = 93.369(2)? V = 609.96(4) ?, C20H20N10CuO8, Mr = 592.00, Dc = 1.612 g/cm3, m(MoKa) = 0.964 mm-1, F(000) = 303, Z = 1, the final R = 0.0494 and wR = 0.1269 for 1945 observed reflections (I > 2s(I)). X-ray analysis reveals that the Cu atom adopts a distorted octahedral (4 + 2) coordination. The four closer donor atoms include two N atoms of 3,3?azpy and two O atoms of the coordination aqua with the CuN and CuO distances of 2.014(3) and 1.974(3) ? respectively. Two longer out-of-plane CuO bonds (2.450(3) ? from nitrate complete the strongly distorted octahedral coordination of the Cu atom. Hydrogen bonds are formed through H atoms of each coordination aqua with the remaining N atoms of 3,3?azpy and O atoms of nitrate. A two-dimensional network is constructed by hydrogen bonds and p-p interactions.
基金This work was supported by the grants from State Key Laboratory of Structural Chemistry Fujian Institute of Research on the Structure of Matter+1 种基金 the Chinese Academy of Sciences (CAS) and the Science Foundation of CAS and Fujian province (2002F014,
文摘Under hydrothermal conditions, two new ribbon-like structures, [Cu(C14H9O4)- (C14H10O4)(C12H12N2)2] 1 and [Ag(C14H9O4)(C13H14N2)]0.5H2O 2, were obtained. X-ray crystal analysis revealed that these structures were constructed by mixed ligands. The coordination polymer forms the basic architecture while the weak interactions extend the framework into a secondary structure. The whole structures of them are governed by collaboration of the strong and weak interactions. Compound 1 crystallizes in monoclinic, space group C2/c with a = 17.0485(3), b = 11.0558(3), c = 22.7623(4) ? ?= 102.465(1), V = 4189.2(2) 3, Z = 4, Mr = 915.44, Dc = 1.451 g/mL, F(000) = 1904 and m(MoKa) = 0.587 cm-1. The final R and wR are 0.0430 and 0.1022, respectively for 3037 observed reflections with I > 2s(I). Compound 2 crystallizes in monoclinic, space group P21/c with a = 11.5963(4), b = 11.7004(5), c = 17.1254(5) ? ?= 95.620(1), V = 2312.4(1) 3, Z = 4, Mr = 556.35, Dc = 1.598 g/mL, F(000) = 1132 and m(MoKa) = 0.912 cm-1. The final R and wR are 0.0431 and 0.1050, respectively for 2629 observed reflections with I > 2σ(I).
基金the Natural Science Foundation of Xuzhou Normal University (01BXL009)
文摘A new Cu(Ⅱ) coordination polymer [Cu(inio)2(H2O)] (inio = isonicotinic acid N-oxide) with chemical formula C12H10CuN2O7 was prepared and its crystal structure has been determined by X-ray analysis. The complex crystallizes in the monoclinic system, space group C2/c with a = 12.455(3), b = 6.202(1), c = 16.555(3) ? b = 106.776(3), V = 1224.3(4) 3, Z = 4, Mr = 357.76, Dc =1.941 g/cm3, m(MoKa) = 1.827 mm-1, F(000) = 724, R = 0.0601 and wR = 0.1417 for 908 observed reflections (I > 2s(I)). The Cu(Ⅱ) atom is coordinated by an elongated square pyramid geometry. The deprotonated isonicotinic acid N-oxides form a double-bridge between each pair of Cu(Ⅱ) ions in trans form through two oxygen atoms from the carboxyl groups and two other oxygen atoms from the -NO groups, respectively, which leads to an infinite one dimensional chain. The two adjacent elongated Cu(Ⅱ) square pyramidal geometries are arranged in trans form in the same chain. The OH…O hydrogen bonds extend the chain structure into two-dimensional layers.
