The CuxSi（1-x） thin films have been grown by pulsed laser deposition（PLD） with in situ annealing on Si（001） and Si（111）,respectively.The transformation of phase was detected by X-ray diffraction（XRD）.The res...The CuxSi（1-x） thin films have been grown by pulsed laser deposition（PLD） with in situ annealing on Si（001） and Si（111）,respectively.The transformation of phase was detected by X-ray diffraction（XRD）.The results showed that the as-deposited films were composed of Cu on both Si（001） and Si（111）.The annealed thin films consisted of Cu ＋η ＂-Cu3Si on Si（001） while Cu ＋η＇-Cu3Si on Si（111）,respectively,at annealed temperature（Ta）= 300-600℃.With the further increasing of Ta,at Ta= 700℃,there was only one main phase,η＂-Cu3Si on Si（001） while η＇-Cu3Si on Si（111）,respectively.The annealed thin films transformed from continuous dense structure to scattered-grain morphology with increasing Ta detected by field emission scanning electron microscope（FESEM）.It was also showed that the grain size would enlarge with increasing annealing time（ta）.展开更多
基金Funded by National Natural Science Foundation of China(Nos.51102101,51272196,51372188,51521001)the 111 Project(No.B13035)+2 种基金the International Science&Technology Cooperation Program of China(No.2014DFA53090)the Natural Science Foundation of Hubei Province,China(No.2014CFB870)the Fundamental Research Funds for the Central Universities,China(No.WUT:2015III023)
文摘The CuxSi（1-x） thin films have been grown by pulsed laser deposition（PLD） with in situ annealing on Si（001） and Si（111）,respectively.The transformation of phase was detected by X-ray diffraction（XRD）.The results showed that the as-deposited films were composed of Cu on both Si（001） and Si（111）.The annealed thin films consisted of Cu ＋η ＂-Cu3Si on Si（001） while Cu ＋η＇-Cu3Si on Si（111）,respectively,at annealed temperature（Ta）= 300-600℃.With the further increasing of Ta,at Ta= 700℃,there was only one main phase,η＂-Cu3Si on Si（001） while η＇-Cu3Si on Si（111）,respectively.The annealed thin films transformed from continuous dense structure to scattered-grain morphology with increasing Ta detected by field emission scanning electron microscope（FESEM）.It was also showed that the grain size would enlarge with increasing annealing time（ta）.
