根据薄膜理论和工艺实验,采用直流磁控溅射技术对薄膜沉积的工艺参数进行了优化,获得了电阻温度系数TCR≤20×10-6/℃的锰铜薄膜,与块材接近,实现了锰铜压力传感器的薄膜化.同时对影响锰铜薄膜TCR(Temperature Coeffcient of Resist...根据薄膜理论和工艺实验,采用直流磁控溅射技术对薄膜沉积的工艺参数进行了优化,获得了电阻温度系数TCR≤20×10-6/℃的锰铜薄膜,与块材接近,实现了锰铜压力传感器的薄膜化.同时对影响锰铜薄膜TCR(Temperature Coeffcient of Resistance)值的因素及机理进行了讨论.展开更多
Large area YBCO superconductive films prepared by d.c. magnetron sputtering have reached: T c>89 K, J c>3.5×10 6 A/cm 2 (77 K, 0 T), R s=0.25 mΩ, at 77.5 K, 9894 MHz. The microstructure an...Large area YBCO superconductive films prepared by d.c. magnetron sputtering have reached: T c>89 K, J c>3.5×10 6 A/cm 2 (77 K, 0 T), R s=0.25 mΩ, at 77.5 K, 9894 MHz. The microstructure analysis of the film showed it has fine monocrystalline structure and the crystalline perfectness is satisfactory. The oscillator, filter and antenna made from these films are good in performance. Therefore, YBCO superconductive films have great prospect in application.展开更多
Flower-like Bi2Te3 nanostructures were successfully synthesised for the first time by a simple magnetron technique or D.C. sputtering method. The phase and morphology of the products were characterized by X-ray diffra...Flower-like Bi2Te3 nanostructures were successfully synthesised for the first time by a simple magnetron technique or D.C. sputtering method. The phase and morphology of the products were characterized by X-ray diffraction （XRD）, manning electron microscope （SEM） and atomic force microscope （AFM）. It was found that the as-deposited Bi2Te3 has a well re-crystallized Rhombohedral phase and consisted of a wealth of flower-like structure, also the thermo-electric properties of Bi2Te3 were examined and we find that the Seebeck coefficient is 136.6μ volt/K.展开更多
文摘根据薄膜理论和工艺实验,采用直流磁控溅射技术对薄膜沉积的工艺参数进行了优化,获得了电阻温度系数TCR≤20×10-6/℃的锰铜薄膜,与块材接近,实现了锰铜压力传感器的薄膜化.同时对影响锰铜薄膜TCR(Temperature Coeffcient of Resistance)值的因素及机理进行了讨论.
文摘Large area YBCO superconductive films prepared by d.c. magnetron sputtering have reached: T c>89 K, J c>3.5×10 6 A/cm 2 (77 K, 0 T), R s=0.25 mΩ, at 77.5 K, 9894 MHz. The microstructure analysis of the film showed it has fine monocrystalline structure and the crystalline perfectness is satisfactory. The oscillator, filter and antenna made from these films are good in performance. Therefore, YBCO superconductive films have great prospect in application.
文摘Flower-like Bi2Te3 nanostructures were successfully synthesised for the first time by a simple magnetron technique or D.C. sputtering method. The phase and morphology of the products were characterized by X-ray diffraction （XRD）, manning electron microscope （SEM） and atomic force microscope （AFM）. It was found that the as-deposited Bi2Te3 has a well re-crystallized Rhombohedral phase and consisted of a wealth of flower-like structure, also the thermo-electric properties of Bi2Te3 were examined and we find that the Seebeck coefficient is 136.6μ volt/K.
