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Improving the high frequency response of a loudspeaker using hydrogen-free diamond-like carbon film coating at low temperature 被引量:2
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作者 LIN ChiiRuey LIU ShinHwa +1 位作者 LIOU WangJeng CHANG ChienKuo 《Science China(Physics,Mechanics & Astronomy)》 SCIE EI CAS 2012年第3期385-391,共7页
Hydrogen-free diamond-like carbon (DLC) thin films were deposited at low temperature (less than 100~C) by an RF magne- tron sputtering facility. DLC films have the ability to change the sound velocity (E/p) in l... Hydrogen-free diamond-like carbon (DLC) thin films were deposited at low temperature (less than 100~C) by an RF magne- tron sputtering facility. DLC films have the ability to change the sound velocity (E/p) in loudspeakers for applications of hard coating. The hydrogen-free DLC films were coated onto PEI diaphragm substrates. The ID/IG ratio and the surface roughness are 2.09 and less than 0.86 nm (Ra) with a scanning area of 50 um x 50 um, respectively. Frequency response analysis of the DLC films on the diaphragm shows that the high frequency response increases by 0.2 dB-5.1 dB (6 kHz-ll.2 kHz), -0.4 dB-1.8 dB (11.8 kHz-20 kHz) on average. On the basis of the results of this study, we validated that it was feasible to sputter hydrogen-free DLC films on polymer substrates for mass production. These results also provided useful parameters for future applications of electro-acoustic devices. 展开更多
关键词 dlc thin films coating DIAPHRAGM frequency response physical vapor deposition
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