通过APC(Advance Process Control)的建模和研磨实验,研究了APC的闭环控制(Close Loop Control)和开环控制(Open Loop Control)在DSTI CMP(Direct STI CMP)制程中的应用。比较了固定时间、终点监测和闭环APC控制下的氮化硅去除量及晶圆...通过APC(Advance Process Control)的建模和研磨实验,研究了APC的闭环控制(Close Loop Control)和开环控制(Open Loop Control)在DSTI CMP(Direct STI CMP)制程中的应用。比较了固定时间、终点监测和闭环APC控制下的氮化硅去除量及晶圆片间差异分布。进一步分析了在双研磨液工艺中一步式研磨自动化过程的开环控制。展开更多
After the reform of China’s economic system,how to establish an information resource support system for the full life management of military and civilian products has become an urgent task placed before the national ...After the reform of China’s economic system,how to establish an information resource support system for the full life management of military and civilian products has become an urgent task placed before the national defense scientific and technical information institutions.The article divides the national defense scientific and technical information users into 5 systems.It gives a detailed description of the information demand of each system as well as its characteristics.展开更多
Based on a summary of the characteristics of information demand of basic level defense scientific research institutions,this article analyzes the constitution of information capacity of basic level defense scientific ...Based on a summary of the characteristics of information demand of basic level defense scientific research institutions,this article analyzes the constitution of information capacity of basic level defense scientific research institutions.It also discusses the corresponding ways to develop information capacities.展开更多
文摘通过APC(Advance Process Control)的建模和研磨实验,研究了APC的闭环控制(Close Loop Control)和开环控制(Open Loop Control)在DSTI CMP(Direct STI CMP)制程中的应用。比较了固定时间、终点监测和闭环APC控制下的氮化硅去除量及晶圆片间差异分布。进一步分析了在双研磨液工艺中一步式研磨自动化过程的开环控制。
文摘After the reform of China’s economic system,how to establish an information resource support system for the full life management of military and civilian products has become an urgent task placed before the national defense scientific and technical information institutions.The article divides the national defense scientific and technical information users into 5 systems.It gives a detailed description of the information demand of each system as well as its characteristics.
文摘Based on a summary of the characteristics of information demand of basic level defense scientific research institutions,this article analyzes the constitution of information capacity of basic level defense scientific research institutions.It also discusses the corresponding ways to develop information capacities.