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Strain-induced the dark current characteristics in InAs/GaSb type-Ⅱ superlattice for mid-wave detector 被引量:2
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作者 H.J.Lee S.Y.Ko +1 位作者 Y.H.Kim J.Nah 《Journal of Semiconductors》 EI CAS CSCD 2020年第6期35-38,共4页
Type-Ⅱsuperlattice(T2SL)materials are the key element for infrared(IR)detectors.However,it is well known that the characteristics of the detectors with the T2SL layer are greatly affected by the strain developed duri... Type-Ⅱsuperlattice(T2SL)materials are the key element for infrared(IR)detectors.However,it is well known that the characteristics of the detectors with the T2SL layer are greatly affected by the strain developed during the growth process,which determines the performance of IR detectors.Therefore,great efforts have been made to properly control the strain effect and develop relevant analysis methods to evaluate the strain-induced dark current characteristics.In this work,we report the strain-induced dark current characteristics in InAs/GaSb T2SL MWIR photodetector.The overall strain of InAs/GaSb T2SL layer was analyzed by both high-resolution X-ray diffraction(HRXRD)and the dark current measured from the absorber layer at the elevated temperatures(≥110 K),where the major leakage current component is originated from the reduced minority carrier lifetime in the absorber layer.Our findings indicate that minority carrier lifetime increases as the tensile strain on the InAs/GaSb T2SL is more compensated by the compressive strain through‘InSb-like’interface,which reduces the dark current density of the device.Specifically,tensile strain compensated devices exhibited the dark current density of less than 2×10^-5 A/cm^2 at 120 K,which is more than one order of magnitude lower value compared to that of the device without tensile strain relaxation. 展开更多
关键词 mid-wave detector InAs/GaSb typeⅡsuper lattice dark current
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Dark Current Compensation and Sensitivity Adjustment on Gallium Arsenide Linear Array Detector for X-Ray Imaging
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作者 Mikhail Polkovnikov 《Journal of Biomedical Science and Engineering》 2016年第11期532-543,共13页
For the last several years, the linear array x-ray detector for x-ray imaging with gallium arsenide direct conversion sensitive elements has been developed and tested at the In-stitute for High Energy Physics. The arr... For the last several years, the linear array x-ray detector for x-ray imaging with gallium arsenide direct conversion sensitive elements has been developed and tested at the In-stitute for High Energy Physics. The array consists of 16 sensitive modules. Each module has 128 gallium arsenide (GaAs) sensitive elements with 200 μm pitch. Current article describes two key program procedures of initial dark current compensation of each sensitive element in the linear array, and sensitivity adjustment for alignment of strip pattern in the raw image data. As a part of evaluation process a modular transfer function (MTF) was measured with the slanted sharp-edge object under RQA5 technique as it described in the International Electrotechnical Commission 62220-1 standard (high voltage 70 kVp, additional aluminium filter 21 mm) for images with compensated dark currents and adjusted sensitivity of detector elements. The 10% level of the calculated MTF function has spatial resolution within 2 - 3 pair of lines per mm for both vertical and horizontal orientation. 展开更多
关键词 Linear Array Gallium Arsenide CALIBRATION dark current Sensitivity Modular Transfer Function Normalized Noise Power Spectrum
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Scalability of dark current in silicon PIN photodiode
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作者 丰亚洁 李冲 +4 位作者 刘巧莉 王华强 胡安琪 何晓颖 郭霞 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第4期526-528,共3页
The mechanism for electrical conduction is investigated by the dark temperature-dependent current–voltage characteristics of Si PIN photodiodes with different photosensitive areas.The characteristic tunneling energy ... The mechanism for electrical conduction is investigated by the dark temperature-dependent current–voltage characteristics of Si PIN photodiodes with different photosensitive areas.The characteristic tunneling energy E_(00) can be obtained to be 1.40 me V,1.53 me V,1.74 me V,1.87 me V,and 2.01 me V,respectively,for the photodiodes with L = 0.25 mm,0.5 mm,1 mm,1.5 mm,and 2 mm by fitting the ideality factor n versus temperature curves according to the tunneling-enhanced recombination mechanism.The trap-assisted tunneling-enhanced recombination in the i-layer plays an important role in our device,which is consistent with the experimental result that area-dependent leakage current is dominant with the side length larger than 1 mm of the photosensitive area.Our results reveal that the quality of the bulk material plays an important role in the electrical conduction mechanism of the devices with the side length larger than 1 mm of the photosensitive area. 展开更多
关键词 光电二极管 大头针 可伸缩性 暗电流 温度依赖 电流电压 公里
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Influence of Different Surface Modifications on the Photovoltaic Performance and Dark Current of Dye-Sensitized Solar Cells
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作者 徐炜炜 戴松元 +5 位作者 胡林华 张昌能 肖尚峰 罗向东 景为平 王孔嘉 《Plasma Science and Technology》 SCIE EI CAS CSCD 2007年第5期556-559,共4页
The TiO_2 nanoporous film photoelectrode,as a crucial component of dye-sensitizedsolar cells,has been investigated.The photovoltaic properties and the dark current were studiedby two surface modification methods.One w... The TiO_2 nanoporous film photoelectrode,as a crucial component of dye-sensitizedsolar cells,has been investigated.The photovoltaic properties and the dark current were studiedby two surface modification methods.One was to apply a compact layer between the conductiveglass substrate and nanoporous TiO_2 film.Another was to produce TiO_2 nanoparticles amongthe microstructure by TICl_4 treatment.A suitable concentration and number of times for TiCl_4treatment were found in our experiment.The dark current is suppressed by surface modifications,leading to a significant improvement in the solar cells performance.An excessive concentrationof TICl_4 will produce more surface states and introduce a larger dark current reversely.The dyeis also regarded as a source of charge recombination in dark to some extent,due to an amountof surface protonations introduced by the interfacial link in the conductive glass substrate/dyeinterface and dye/TiO_2 interface. 展开更多
关键词 太阳能电池 光电性能 表面修饰 暗电流
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New dark current component of InGaAs/InP HPDs confirmed by DLTS
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作者 WANGKaiyuan XUWeihong 《Semiconductor Photonics and Technology》 CAS 1995年第1期20-23,共4页
NewdarkcurrentcomponentofInGaAs/InPHPDsconfirmedbyDLTSWANGKaiyuan,XUWeihong(Dept.ofElectronicEngineering,Sou... NewdarkcurrentcomponentofInGaAs/InPHPDsconfirmedbyDLTSWANGKaiyuan,XUWeihong(Dept.ofElectronicEngineering,SoutheastUniversity,... 展开更多
关键词 发光二极管 特征测度 暗电流 光纤通信 磷化铟 铟镓砷三元化合物
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NEW DARK CURRENT SUPPRESSION CMOS READOUT CIRCUIT WITH NOVEL CDS STRUCTURE FOR LARGE FORMAT QWIP FPA
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作者 ZhangZhi YuanXianghui +1 位作者 HuangYoushu LuGuolin 《Journal of Electronics(China)》 2004年第5期384-391,共8页
A new Dark Current Suppression (DCS) CMOS readout circuits for large format Quantum-Well-Infrared Photo-detector (QWIP) Focal-Plane-Array (FPA) with novel CorrelatedDouble-Sampling (CDS) structure based on dynamic sou... A new Dark Current Suppression (DCS) CMOS readout circuits for large format Quantum-Well-Infrared Photo-detector (QWIP) Focal-Plane-Array (FPA) with novel CorrelatedDouble-Sampling (CDS) structure based on dynamic source-follower are proposed, which can overcome the drawbacks of the present techniques, such as sensitive to the non-uniformity of the QWIP materials, poor readout noise features, low frame frequency, limited injection efficiency and dynamic range, etc. The dummy is adopted to realize dark current suppression, while the integration time. Through the novel CDS structure, the output waveform is boxcar, and the frame frequency is increased. Simulation results demonstrate that, in high background sense, the proposed DCS circuit can suppress the dark current, achieve good readout performance, such as low power consumption, high charge sensitivity, high resolution, large dynamic range, and insensitive to the non-uniformity of the QWIP materials. 展开更多
关键词 CMOS CDS FPA DCS 暗电流抑制 QWIP
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CIS生产工艺对暗电流(Dark Current)性能的影响
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作者 秋沉沉 魏峥颖 +1 位作者 钱俊 孙昌 《集成电路应用》 2021年第8期16-19,共4页
研究工艺对CIS图像传感器(CMOS image sensor)的影响。通过隔离注入的优化、沉积薄膜膜质的优化、干法刻蚀工艺的优化及热制程的优化可减少硅氧界面载流子与声子群的散射,可大大减少Si-SiO2界面附近陷阱,从而降低CIS传感器的暗电流(Dark... 研究工艺对CIS图像传感器(CMOS image sensor)的影响。通过隔离注入的优化、沉积薄膜膜质的优化、干法刻蚀工艺的优化及热制程的优化可减少硅氧界面载流子与声子群的散射,可大大减少Si-SiO2界面附近陷阱,从而降低CIS传感器的暗电流(Dark Current,DC)。实验数据表明,暗电流可改善30%~82.5%,可适用于不同像素尺寸(0.7~18μm)的CIS产品。 展开更多
关键词 集成电路制造 CMOS图形传感器CIS 暗电流 干法刻蚀 热制程 自对准硅化物阻挡层 SAB
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Mid-wavelength nBn photodetector with high operating temperature and low dark current based on InAs/InAsSb superlattice absorber
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作者 曹澎 王天财 +3 位作者 彭红玲 李占国 Qiandong Zhuang 郑婉华 《Chinese Optics Letters》 SCIE EI CAS CSCD 2024年第1期123-127,共5页
In this paper,we demonstrate nBn InAs/InAsSb type II superlattice(T2SL)photodetectors with AlAsSb as the barrier that targets mid-wavelength infrared(MWIR)detection.To improve operating temperature and suppress dark c... In this paper,we demonstrate nBn InAs/InAsSb type II superlattice(T2SL)photodetectors with AlAsSb as the barrier that targets mid-wavelength infrared(MWIR)detection.To improve operating temperature and suppress dark current,a specific Sb soaking technique was employed to improve the interface abruptness of the superlattice with device passivation using a SiO_(2) layer.These result in ultralow dark current density of 6.28×10^(-6)A/cm^(2)and 0.31 A/cm^(2)under-600 mV at 97 K and297 K,respectively,which is lower than most reported InAs/InAsSb-based MWIR photodetectors.Corresponding resistance area product values of 3.20×10^(4)Ω·cm^(2)and 1.32Ω·cm^(2)were obtained at 97 K and 297 K.A peak responsivity of 0.39 A/W with a cutoff wavelength around 5.5μm and a peak detectivity of 2.1×10^(9)cm·Hz^(1/2)/W were obtained at a high operating temperature up to 237 K. 展开更多
关键词 mid-wavelength infrared photodetector InAs/InAsSb superlattice high operating temperature dark current
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Simulation of the effects of defects in low temperature Ge buffer layer on dark current of Si-based Ge photodiodes
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作者 Xiaohui Yi Zhiwei Huang +5 位作者 Guangyang Lin Cheng Li Songyan Chen Wei Huang Jun Li Jianyuan Wang 《Journal of Semiconductors》 EI CAS CSCD 2017年第4期1-5,共5页
The influence of defects in low temperature Ge layer on electrical characteristics of p-Ge/i-Ge/n-Si and n-Ge/i-Ge/p-Ge photodiodes(PDs) was studied.Due to a two-step growth method,there are high defect densities in l... The influence of defects in low temperature Ge layer on electrical characteristics of p-Ge/i-Ge/n-Si and n-Ge/i-Ge/p-Ge photodiodes(PDs) was studied.Due to a two-step growth method,there are high defect densities in low-temperature buffer Ge layer.It is shown that the defects in low-temperature Ge layer change the band diagrams and the distribution of electric field,leading to the increase of the total dark current for p-Ge/i-Ge/n-Si PDs,whereas these defects have no influence on the dark current for n-Ge/i-Ge/p-Ge PDs.As a complement,a three-dimensional simulation of the total current under illumination was also performed. 展开更多
关键词 GERMANIUM photodiodes DEFECTS dark current SIMULATION
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Dark current modeling of thick perovskite X‑ray detectors
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作者 Shan Zhao Xinyuan Du +6 位作者 Jincong Pang Haodi Wu Zihao Song Zhiping Zheng Ling Xu Jiang Tang Guangda Niu 《Frontiers of Optoelectronics》 EI CSCD 2022年第4期19-29,共11页
Metal halide perovskites(MHPs)have demonstrated excellent performances in detection of X-rays and gamma-rays.Most studies focus on improving the sensitivity of single-pixel MHP detectors.However,little work pays atten... Metal halide perovskites(MHPs)have demonstrated excellent performances in detection of X-rays and gamma-rays.Most studies focus on improving the sensitivity of single-pixel MHP detectors.However,little work pays attention to the dark current,which is crucial for the back-end circuit integration.Herein,the requirement of dark current is quantitatively evaluated as low as 10^(−9)A/cm^(2)for X-ray imagers integrated on pixel circuits.Moreover,through the semiconductor device analysis and simulation,we reveal that the main current compositions of thick perovskite X-ray detectors are the thermionic-emission current(J_(T))and the generation-recombination current(J_(g-r)).The typical observed failures of p-n junctions in thick detectors are caused by the high generation-recombination current due to the band mismatch and interface defects.This work provides a deep insight into the design of high sensitivity and low dark current perovskite X-ray detectors. 展开更多
关键词 PEROVSKITE X-ray detection dark current Semiconductor simulation Junction device
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Dark current mechanism of unpassivated mid wavelength type II InAs/GaSb superlattice infrared photodetector 被引量:4
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作者 Qiong Li Wenquan Ma +8 位作者 Yanhua Zhang Kai Cui Jianliang Huang Yang Wei Ke Liu Yulian Cao Weiying Wang Yali Liu Peng Jin 《Chinese Science Bulletin》 SCIE EI CAS 2014年第28期3696-3700,共5页
We investigate the dark current mechanism for an unpassivated mid wavelength(MW) type II InAs/GaSb superlattice infrared photodetector by doing the variablearea diode tests. The bulk resistance-area product and the re... We investigate the dark current mechanism for an unpassivated mid wavelength(MW) type II InAs/GaSb superlattice infrared photodetector by doing the variablearea diode tests. The bulk resistance-area product and the resistivity due to the surface current are determined to be17.72 X cm2 and 704.23 X cm at 77 K, respectively. It is found that for all the mesa sizes used, the dark current is dominated or predominated by the surface component, and with scaling back the mesa size, the surface current increases while the bulk component decreases. The activation energy is determined to be 145 meV for the temperature range around 140–280 K, while it is 6 meV when temperature is below 100 K. It is also found that the dark current is dominated by the generation-recombination current for the MW device when temperature is between140 and 280 K. 展开更多
关键词 INAS 电流机制 红外光电探测器 波长型 超晶格 锑化镓 钝化 温度范围
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Influence of hydrogenation on the dark current mechanism of HgCdTe photovoltaic detectors 被引量:1
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作者 乔辉 胡伟达 +2 位作者 叶振华 李向阳 龚海梅 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2010年第3期116-118,共3页
The influence of hydrogenation on the dark current mechanism of HgCdTe photovoltaic detectors is studied. The hydrogenation is achieved by exposing samples to a H_2/Ar plasma atmosphere that was produced during a reac... The influence of hydrogenation on the dark current mechanism of HgCdTe photovoltaic detectors is studied. The hydrogenation is achieved by exposing samples to a H_2/Ar plasma atmosphere that was produced during a reactive ion etching process.A set of variable-area photomask was specially designed to evaluate the hydrogenation effect. It was found that the current-voltage characteristics were gradually improved when detectors were hydrogenated by different areas.The fitting results of experimental results at reverse bias conditions sustained that the improvement of current-voltage curves was due to the suppression of trap assisted tunneling current and the enhancement of minority lifetime in the depletion region.It was also found that the dominative forward current was gradually converted from a generation-recombination current to a diffusion current with the enlargement of the hydrogenation area,which was infered from the ideality factors by abstraction of forward resistance-voltage curves of different detectors. 展开更多
关键词 光伏探测器 电流机制 加氢 碲镉汞 Ar等离子体 电流电压特性 电压曲线 电压检测器
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碲镉汞PIN结构雪崩器件的I区材料晶体质量研究
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作者 沈川 张竞 +5 位作者 杨辽 郭慧君 谢浩 周梅华 陈路 何力 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 2024年第2期174-178,共5页
本文对中波红外PIN结构的碲镉汞(HgCdTe)雪崩器件关键雪崩区域的材料晶体质量进行研究。通过在实验材料上对PIN结构雪崩器件的全过程工艺模拟,采用微分霍尔、微分少子寿命等测试手段进行材料表征,评估获得了关键雪崩区域的真实材料晶体... 本文对中波红外PIN结构的碲镉汞(HgCdTe)雪崩器件关键雪崩区域的材料晶体质量进行研究。通过在实验材料上对PIN结构雪崩器件的全过程工艺模拟,采用微分霍尔、微分少子寿命等测试手段进行材料表征,评估获得了关键雪崩区域的真实材料晶体质量。研究发现,现有优化工艺下雪崩区域的晶体质量良好,拟合材料的SRH寿命最好能达到20.7μs,可达到原生材料SRH寿命的相当水平,满足高质量中波碲镉汞雪崩器件的研制要求。同时,我们以获得的雪崩区域SRH寿命为基础,对HgCdTe APD结构器件进行相应2维数值模拟,获得理论最优的暗电流密度8.7×10^(-10) A/cm^(2)。 展开更多
关键词 碲镉汞 雪崩器件 少子寿命 暗电流
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Double-ended passivator enables dark-current-suppressed colloidal quantum dot photodiodes for CMOS-integrated infrared imagers
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作者 Peilin Liu Shuaicheng Lu +13 位作者 Jing Liu Bing Xia Gaoyuan Yang Mo Ke Xuezhi Zhao Junrui Yang Yuxuan Liu Ciyu Ge Guijie Liang Wei Chen Xinzheng Lan Jianbing Zhang Liang Gao Jiang Tang 《InfoMat》 SCIE CSCD 2024年第1期108-122,共15页
Lead sulfide(PbS)colloidal quantum dot(CQD)photodiodes integrated with silicon-based readout integrated circuits(ROICs)offer a promising solution for the next-generation short-wave infrared(SWIR)imaging technology.Des... Lead sulfide(PbS)colloidal quantum dot(CQD)photodiodes integrated with silicon-based readout integrated circuits(ROICs)offer a promising solution for the next-generation short-wave infrared(SWIR)imaging technology.Despite their potential,large-size CQD photodiodes pose a challenge due to high dark currents resulting from surface states on nonpassivated(100)facets and trap states generated by CQD fusion.In this work,we present a novel approach to address this issue by introducing double-ended ligands that supplementally passivate(100)facets of halidecapped large-size CQDs,leading to suppressed bandtail states and reduced defect concentration.Our results demonstrate that the dark current density is highly suppressed by about an order of magnitude to 9.6 nA cm^(2) at -10 mV,which is among the lowest reported for PbS CQD photodiodes.Furthermore,the performance of the photodiodes is exemplary,yielding an external quantum efficiency of 50.8%(which corresponds to a responsivity of 0.532 A W^(-1))and a specific detectivity of 2.5×10^(12) Jones at 1300 nm.By integrating CQD photodiodes with CMOS ROICs,the CQD imager provides high-resolution(640×512)SWIR imaging for infrared penetration and material discrimination. 展开更多
关键词 CMOS integration colloidal quantum dots dark current suppression double-ended passivation infrared imager
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非均匀GaAs/AlGaAs量子阱红外探测器材料表征和器件性能研究
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作者 苏家平 周孝好 +4 位作者 唐舟 范柳燕 夏顺吉 陈平平 陈泽中 《红外与毫米波学报》 SCIE EI CAS CSCD 北大核心 2024年第1期7-14,共8页
本文利用分子束外延(MBE)技术成功生长了GaAs/AlGaAs非均匀量子阱红外探测器材料,并对相关微结构作了细致表征。分析比较了非均匀量子阱结构和常规量子阱红外探测器性能差异,并对比研究了不同势阱宽度下非均匀量子阱红外探测器的性能变... 本文利用分子束外延(MBE)技术成功生长了GaAs/AlGaAs非均匀量子阱红外探测器材料,并对相关微结构作了细致表征。分析比较了非均匀量子阱结构和常规量子阱红外探测器性能差异,并对比研究了不同势阱宽度下非均匀量子阱红外探测器的性能变化。通过高分辨透射电子显微镜(HRTEM)结合能谱仪(EDS)对非均匀量子阱红外探测器材料微结构进行了分析,并利用二次离子质谱仪(SIMS)对非均匀势阱掺杂进行了表征。结果表明,该量子阱外延材料晶体质量很好,量子阱结构和掺杂浓度也与设计值符合较好。对于非均匀量子阱红外探测器,通过改变每个阱的掺杂浓度和势垒宽度,可以改变量子阱电场分布,而与传统的均匀量子阱红外探测器相比,其暗电流显著下降(约一个数量级)。在不同阱宽下,非均匀量子阱的跃迁模式发生改变,束缚态到准束缚态跃迁模式下(B-QB)的器件具有较高的黑体响应率以及较低的暗电流。 展开更多
关键词 非均匀 量子阱 高分辨电镜 二次离子质谱 暗电流
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A New Method for Fitting Current–Voltage Curves of Planar Heterojunction Perovskite Solar Cells 被引量:4
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作者 Peizhe Liao Xiaojuan Zhao +2 位作者 Guolong Li Yan Shen Mingkui Wang 《Nano-Micro Letters》 SCIE EI CAS 2018年第1期45-52,共8页
Herein we propose a new equivalent circuit including double heterojunctions in series to simulate the current–voltage characteristic of P–I–N planar structure perovskite solar cells. This new method can theoretical... Herein we propose a new equivalent circuit including double heterojunctions in series to simulate the current–voltage characteristic of P–I–N planar structure perovskite solar cells. This new method can theoretically solve the dilemma of the parameter diode ideal factor being larger than2 from an ideal single heterojunction equivalent circuit,which usually is in the range from 1 to 2. The diode ideal factor reflects PN junction quality, which influences the recombination at electron transport layer/perovskite and perovskite/hole transport layer interface. Based on the double PN junction equivalent circuit, we can also simulate the dark current–voltage curve for analyzing recombination current(Shockley–Read–Hall recombination) and diffusion current(including direct recombination), and thus carrier recombination and transportation characteristics. This new model offers an efficacious and simple method to investigate interfaces condition, film quality of perovskite absorbing layer and performance of transport layer, helping us furtherimprove the device efficiency and analyze the working mechanism. 展开更多
关键词 dark current Device simulation Junction property PEROVSKITE Solar cell
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Metal–organic framework wafer enabled fast response radiation detection with ultra-low dark current
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作者 Meng Xu Jianxi Liu +6 位作者 Wei Wu Yang Chen Donghao Ma Sixin Chen Wanqi Jie Menghua Zhu Yadong Xu 《Nano Research》 SCIE EI 2024年第4期2988-2993,共6页
Semiconductive metal–organic frameworks(MOFs)have attracted great interest for the electronic applications.However,dark currents of present hybrid organic–inorganic materials are 1000–10,000 times higher than those... Semiconductive metal–organic frameworks(MOFs)have attracted great interest for the electronic applications.However,dark currents of present hybrid organic–inorganic materials are 1000–10,000 times higher than those of commercial inorganic detectors,leading to poor charge transportation.Here,we demonstrate a ZIF-8(Zn(mim)_(2),mim=2-methylimidazolate)wafer with ultra-low dark current of 1.27 pA·mm^(-2) under high electric fields of 322 V·mm^(-1).The isostatic pressing preparation process provides ZIF-8 wafers with good transmittance.Besides,the presence of redox-active metals and small spatial separation between components promotes the charge hopping.The ZIF-8-based semiconductor detector shows promising X-ray detection sensitivity of 70.82μC·Gy^(-1)·cm^(-2) with low doses exposures,contributing to superior X-ray imaging capability with a relatively high spatial resolution of 1.2 lp·mm^(-1).Simultaneously,good peak discrimination with the energy resolution of~43.78%is disclosed when the detector is illuminated by uncollimated 241Am@5.48 MeVα-particles.These results provide a broad prospect of MOFs for future radiation detection applications. 展开更多
关键词 MOFs lead-free α-particles X-ray detection and imaging dark current fast response
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低能电子轰击引起氧化铝钝化膜BCMOS传感器暗电流变化研究
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作者 闫磊 石峰 +7 位作者 程宏昌 焦岗成 杨晔 肖超 樊海波 郑舟 董海晨 何惠洋 《红外技术》 CSCD 北大核心 2024年第3期342-346,共5页
针对低能电子(电子能量为300~1500 eV)轰击引起氧化铝钝化层BCMOS(Back-thinned Complementary Metal-Oxide-Semiconductor,BCMOS)图像传感器暗电流增加问题,设计了电子轰击BCMOS图像传感器实验,经统计发现,对于厚度为10 nm的氧化铝钝化... 针对低能电子(电子能量为300~1500 eV)轰击引起氧化铝钝化层BCMOS(Back-thinned Complementary Metal-Oxide-Semiconductor,BCMOS)图像传感器暗电流增加问题,设计了电子轰击BCMOS图像传感器实验,经统计发现,对于厚度为10 nm的氧化铝钝化层BCMOS图像传感器,轰击能量大于600 eV时暗电流增加速率明显;轰击电子能量不超过1.5 keV时,暗电流存在最大值,约为12000 e-/pixel/s;电子轰击后的BCMOS图像传感器在电子干燥柜中静置时,其暗电流呈指数趋势下降。通过分析指出入射电子引起氧化铝钝化层与硅界面处缺陷态增加,是引起上述现象的主要原因。 展开更多
关键词 暗电流 电子轰击 背减薄CMOS 氧化铝钝化层
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分子束外延碲镉汞探测器的变结面积Ⅰ-Ⅴ测试研究
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作者 赵成城 王丹 +1 位作者 何斌 戴永喜 《红外》 CAS 2024年第3期1-6,共6页
碲镉汞红外探测器的表面钝化处理对器件暗电流有较大影响,决定了器件的探测性能。为了研究表面钝化层不同生长方式对暗电流的抑制效果,使用分子束外延(Molecular Beam Epitaxy, MBE)系统在Si基衬底上生长碲镉汞材料,分别通过磁控溅射和... 碲镉汞红外探测器的表面钝化处理对器件暗电流有较大影响,决定了器件的探测性能。为了研究表面钝化层不同生长方式对暗电流的抑制效果,使用分子束外延(Molecular Beam Epitaxy, MBE)系统在Si基衬底上生长碲镉汞材料,分别通过磁控溅射和原位钝化方法生长CdTe/ZnS钝化膜层。采用半导体工艺在碲镉汞材料上制备了变面积光伏探测器。通过测试不同钝化膜层器件的暗电流,分析零偏电阻和面积乘积(R0A)与周长面积之比(p/A)的关系。结果表明,磁控溅射生长钝化层的Si基碲镉汞器件存在较大的隧穿电流,而原位钝化生长钝化层的Si基碲镉汞器件能更有效地抑制表面漏电流。拟合器件R0A因子随PN结面积的变化,得出原位生长钝化层的器件具有更好的钝化效果。变面积器件的制备和测试能够有效且直观地反映器件性能。 展开更多
关键词 碲镉汞 原位钝化 变结面积 暗电流测试
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Au掺杂碲镉汞长波探测器技术研究
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作者 宋林伟 孔金丞 +5 位作者 赵鹏 姜军 李雄军 方东 杨超伟 舒畅 《红外与激光工程》 EI CSCD 北大核心 2023年第4期1-8,共8页
昆明物理研究所多年来持续开展了对Au掺杂碲镉汞材料、器件结构设计、可重复的工艺开发等研究,突破了Au掺杂碲镉汞材料电学可控掺杂、器件暗电流控制等关键技术,将n-on-p型碲镉汞长波器件品质因子(R_(0)A)从31.3Ω·cm^(2)提升到了... 昆明物理研究所多年来持续开展了对Au掺杂碲镉汞材料、器件结构设计、可重复的工艺开发等研究,突破了Au掺杂碲镉汞材料电学可控掺杂、器件暗电流控制等关键技术,将n-on-p型碲镉汞长波器件品质因子(R_(0)A)从31.3Ω·cm^(2)提升到了363Ω·cm^(2)(λ_(cutoff)=10.5μm@80 K),器件暗电流较本征汞空位n-on-p型器件降低了一个数量级以上。研制的非本征Au掺杂长波探测器经历了超过7年的时间贮存,性能无明显变化,显示了良好的长期稳定性。基于Au掺杂碲镉汞探测器技术,昆明物理研究所实现了256×256(30μm pitch)、640×512(25μm pitch)、640×512(15μm pitch)、1024×768(10μm pitch)等规格的长波探测器研制和批量能力,实现了非本征Au掺杂长波碲镉汞器件系列化发展。 展开更多
关键词 Au掺杂 暗电流 长波红外 碲镉汞(HgCdTe) 焦平面
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