Ultra-precision machine tool is the most important physical tool to machining the workpiece with the frequency domain error requirement, in the design process of which the dynamic accuracy design(DAD) is indispensable...Ultra-precision machine tool is the most important physical tool to machining the workpiece with the frequency domain error requirement, in the design process of which the dynamic accuracy design(DAD) is indispensable and the related research is rarely available. In light of above reasons, a DAD method of ultra-precision machine tool is proposed in this paper, which is based on the frequency domain error allocation.The basic procedure and enabling knowledge of the DAD method is introduced. The application case of DAD method in the ultra-precision flycutting machine tool for KDP crystal machining is described to show the procedure detailedly. In this case, the KDP workpiece surface has the requirements in four different spatial frequency bands, and the emphasis for this study is put on the middle-frequency band with the PSD specifications. The results of the application case basically show the feasibility of the proposed DAD method. The DAD method of ultra-precision machine tool can effectively minimize the technical risk and improve the machining reliability of the designed machine tool. This paper will play an important role in the design and manufacture of new ultra-precision machine tool.展开更多
Refractive index inhomogeneity is one of the important characteristics of optical coating material, which is one of the key factors to produce loss to the ultra-low residual reflection coatings except using the refrac...Refractive index inhomogeneity is one of the important characteristics of optical coating material, which is one of the key factors to produce loss to the ultra-low residual reflection coatings except using the refractive index inhomogeneity to obtain gradient-index coating. In the normal structure of antireflection coatings for center wavelength at 532 nm, the physical thicknesses of layer H and layer L are 22.18 nm and 118.86 nm, respectively. The residual reflectance caused by refractive index inhomogeneity(the degree of inhomogeneous is between -0.2 and 0.2) is about 200 ppm, and the minimum reflectivity wavelength is between 528.2 nm and 535.2 nm. A new numerical method adding the refractive index inhomogeneity to the spectra calculation was proposed to design the laser antireflection coatings, which can achieve the design of antireflection coatings with ppm residual reflection by adjusting physical thickness of the couple layers. When the degree of refractive index inhomogeneity of the layer H and layer L is-0.08 and 0.05 respectively, the residual reflectance increase from zero to 0.0769% at 532 nm. According to the above accuracy numerical method, if layer H physical thickness increases by 1.30 nm and layer L decrease by 4.50 nm, residual reflectance of thin film will achieve to 2.06 ppm. When the degree of refractive index inhomogeneity of the layer H and layer L is 0.08 and -0.05 respectively, the residual reflectance increase from zero to 0.0784% at 532 nm. The residual reflectance of designed thin film can be reduced to 0.8 ppm by decreasing the layer H of 1.55 nm while increasing the layer L of 4.94 nm.展开更多
The accuracy distribution of measuring instrument for 3-Ineter leadscrew by laser is studied according toerror theory. In this paper, the tables of overall accuracy distribution used as foundation of design and manufa...The accuracy distribution of measuring instrument for 3-Ineter leadscrew by laser is studied according toerror theory. In this paper, the tables of overall accuracy distribution used as foundation of design and manufactureare drafted.展开更多
An exact-designed mesh shape with favorable surface accuracy is of practical significance to the performance of large cable-network antenna reflectors. In this study, a novel design approach that could guide the gener...An exact-designed mesh shape with favorable surface accuracy is of practical significance to the performance of large cable-network antenna reflectors. In this study, a novel design approach that could guide the generation of exact spatial parabolic mesh configurations of such reflector was proposed. By incorporating the traditional force density method with the standard finite element method, this proposed approach had taken the deformation effects of flexible ring truss supports into consideration, and searched for the desired mesh shapes that can satisfy the requirement that all the free nodes are exactly located on the objective paraboloid. Compared with the conventional design method,a remarkable improvement of surface accuracy in the obtained mesh shapes had been demonstrated by numerical examples. The present work would provide a helpful technical reference for the mesh shape design of such cable-network antenna reflector in engineering practice.展开更多
基金Supported by Zhejiang Provincial Natural Science Foundation of China(Grant No.LQ16E050012)National Natural Science Foundation of China(Grant Nos.51705462 and 51275115)International Science and Technology Cooperation Program of China(Grant No.2015DFA70630)
文摘Ultra-precision machine tool is the most important physical tool to machining the workpiece with the frequency domain error requirement, in the design process of which the dynamic accuracy design(DAD) is indispensable and the related research is rarely available. In light of above reasons, a DAD method of ultra-precision machine tool is proposed in this paper, which is based on the frequency domain error allocation.The basic procedure and enabling knowledge of the DAD method is introduced. The application case of DAD method in the ultra-precision flycutting machine tool for KDP crystal machining is described to show the procedure detailedly. In this case, the KDP workpiece surface has the requirements in four different spatial frequency bands, and the emphasis for this study is put on the middle-frequency band with the PSD specifications. The results of the application case basically show the feasibility of the proposed DAD method. The DAD method of ultra-precision machine tool can effectively minimize the technical risk and improve the machining reliability of the designed machine tool. This paper will play an important role in the design and manufacture of new ultra-precision machine tool.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.61405145 and 61235011)the Natural Science Foundation of Tianjin,China(Grant No.15JCZDJC31900)the China Postdoctoral Science Foundation(Grant Nos.2015T80115 and 2014M560104)
文摘Refractive index inhomogeneity is one of the important characteristics of optical coating material, which is one of the key factors to produce loss to the ultra-low residual reflection coatings except using the refractive index inhomogeneity to obtain gradient-index coating. In the normal structure of antireflection coatings for center wavelength at 532 nm, the physical thicknesses of layer H and layer L are 22.18 nm and 118.86 nm, respectively. The residual reflectance caused by refractive index inhomogeneity(the degree of inhomogeneous is between -0.2 and 0.2) is about 200 ppm, and the minimum reflectivity wavelength is between 528.2 nm and 535.2 nm. A new numerical method adding the refractive index inhomogeneity to the spectra calculation was proposed to design the laser antireflection coatings, which can achieve the design of antireflection coatings with ppm residual reflection by adjusting physical thickness of the couple layers. When the degree of refractive index inhomogeneity of the layer H and layer L is-0.08 and 0.05 respectively, the residual reflectance increase from zero to 0.0769% at 532 nm. According to the above accuracy numerical method, if layer H physical thickness increases by 1.30 nm and layer L decrease by 4.50 nm, residual reflectance of thin film will achieve to 2.06 ppm. When the degree of refractive index inhomogeneity of the layer H and layer L is 0.08 and -0.05 respectively, the residual reflectance increase from zero to 0.0784% at 532 nm. The residual reflectance of designed thin film can be reduced to 0.8 ppm by decreasing the layer H of 1.55 nm while increasing the layer L of 4.94 nm.
文摘The accuracy distribution of measuring instrument for 3-Ineter leadscrew by laser is studied according toerror theory. In this paper, the tables of overall accuracy distribution used as foundation of design and manufactureare drafted.
文摘An exact-designed mesh shape with favorable surface accuracy is of practical significance to the performance of large cable-network antenna reflectors. In this study, a novel design approach that could guide the generation of exact spatial parabolic mesh configurations of such reflector was proposed. By incorporating the traditional force density method with the standard finite element method, this proposed approach had taken the deformation effects of flexible ring truss supports into consideration, and searched for the desired mesh shapes that can satisfy the requirement that all the free nodes are exactly located on the objective paraboloid. Compared with the conventional design method,a remarkable improvement of surface accuracy in the obtained mesh shapes had been demonstrated by numerical examples. The present work would provide a helpful technical reference for the mesh shape design of such cable-network antenna reflector in engineering practice.