Study on Abrasion Resistance Anisotropy of Natural Diamond Crystals

This paper studies the abrasion mechanism of natural diamond crystals,proposes a new theory on soft and hard directions to grind diamonds in different planes.Examination of the micro-structure of polished surface by SEM shows diamond is mainly removed through a micro-cleavage process in (111) planes and the abrasion resistance of diamond relates to the orientation of cleavage planes,and the abrasion resistance anisotropy of diamond crystals is mainly due to the different levels of difficulty in micro-cleavage,while they are lapped in different directions.The results of analysis are in conformance with experimental results.

金刚石刀具技术的发展状况

介绍了应用人工目测法、X射线法和激光法进行金刚石刀具晶体定向的技术 ,论述了传统的机械研磨、热化学抛光、无损伤机械化学抛光、化学辅助机械抛光与光整等多种金刚石刀具刃磨工艺方法及其刃口检测技术的发展状况 ,并对各种相应的检测技术作了比较。最后 ,论述了金刚石刀具刃磨的材料去除机理 。

机械研磨单晶金刚石刀具前刀面精度

为提高金刚石刀具的精度,理论分析机械研磨法加工金刚石前刀面的模型,并实验研究研磨盘表面质量和研磨晶向对金刚石刀具前刀面粗糙度的影响。结果表明:研磨盘经过充分平整后,刀具前刀面的粗糙度R_a由1.308 nm下降到0.920 nm。在(110)晶面精细研磨时,<100>晶向研磨后的表面粗糙度为0.540 nm,<110>晶向研磨后的表面粗糙度为0.430 nm,实现了对金刚石刀具的精密研磨。

基于金刚石微粉的单晶蓝宝石CMP工艺研究

单晶蓝宝石具有高的机械和光学性能,已被广泛应用于光电子、通讯、国防等领域。以提高加工后单晶蓝宝石表面质量和缩短加工时间为最终目标,采用化学机械抛光的方法抛光蓝宝石,得到了一种可行有效的抛光单晶蓝宝石的加工工艺路线。试验结果表明,采用6μm金刚石磨料粗抛蓝宝石晶片1.5 h,表面粗糙度值由220.05 nm快速降到7.88 nm;然后采用3μm金刚石磨料精抛蓝宝石晶片3 h,可以获得Ra约为2.82 nm(测量区域700μm×530μm)的表面粗糙度值。此抛光工艺能满足蓝宝石衬底高效、低损伤的抛光要求。