Diamond-like carbon (DLC) is a metastable amorphous film that exhibits unique properties. However, many limitations exist regarding the use of DLC, for example, its tribological characteristics at high temperature, as...Diamond-like carbon (DLC) is a metastable amorphous film that exhibits unique properties. However, many limitations exist regarding the use of DLC, for example, its tribological characteristics at high temperature, as well as its limited thermal stability. In this study, silicon/oxygen and silicon/nitrogen co-incorporated diamond-like carbon (Si-O-DLC and Si-N-DLC) films are studied, taking into account the thermal stability and tribological performance of these films compared with pure DLC. All the films were prepared on Si wafers, WC-Co materials, and aluminum foils using a plasma-based ion implantation (PBII) technique using acetylene (C2H2), tetramethylsilane (TMS, Si(CH3)4), oxygen (O2) and nitrogen (N2) as plasma sources. The structure of the films was characterized using Raman spectroscopy. The thermal stability of the films was measured using thermogravimetric and differential thermal analysis (TG-DTA). The friction coefficient of the films was assessed using ball-on-disk friction testing. The results indicate that Si-N-DLC films present better thermal stability due to the presence of Si-O networks in the films. The Si-N-DLC (23 at.%Si, 8 at.%N) film was affected using thermal annealing in an air atmosphere with increasing temperature until 500°C. The film can also resist thermal shock by cycling 10 times between the various temperatures and air atmosphere until 500°C. Further, Si-O-DLC and Si-N-DLC films exhibit excellent tribological performance, especially the Si-N-DLC (23 at.%Si, 8 at.%N) film, which exhibits excellent tribological performance at 500°C in an air atmosphere. It is concluded that Si-O-DLC and Si-N-DLC films improve upon the thermal stability and tribological performance of DLC.展开更多
Nitrogen doped diamond-like carbon (DLC:N) films were prepared by electron cyclotron resonance chemical vapor deposition (ECR-CVD) on polycrystalline Si chips. Film thickness is about 50 nm. Auger electron spectr...Nitrogen doped diamond-like carbon (DLC:N) films were prepared by electron cyclotron resonance chemical vapor deposition (ECR-CVD) on polycrystalline Si chips. Film thickness is about 50 nm. Auger electron spectroscopy (AES) was used to evaluate nitrogen content, and increasing N2 flow improved N content from 0 to 7.6%. Raman and X-ray photoelectron spectroscopy (XPS) analysis results reveal CN-sp^3C and N-sp^2C structure. With increasing the N2 flow, sp^3C decreases from 73.74% down to 42.66%, and so does N-sp^3C from 68.04% down to 20.23%. The hardness decreases from 29.18 GPa down to 19.74 GPa, and the Young's modulus from 193.03 GPa down to 144.52 GPa.展开更多
Fluorinated amorphous carbon films were deposited using microwave electron cyclotron resonance chemical vapor deposition (ECR-CVD) reactor with CF4 and C8H6 as source gas and were annealed in nitrogen ambience for the...Fluorinated amorphous carbon films were deposited using microwave electron cyclotron resonance chemical vapor deposition (ECR-CVD) reactor with CF4 and C8H6 as source gas and were annealed in nitrogen ambience for the investigating of their thermal stability .The relative concentration of C=C bond and optical bandgap were obtained by Fourier Transform Infrared (FTIR) spectroscopy and Ultraviolet-Visible (UV-VIS ) spectrum, respectively. It has been demonstrated that there is a close relationship between relative concentration of C=C bond and optical bandgap, and the films deposited at a higher microwave power have a lower optical bandgap and a better thermal stability.展开更多
Nitrogen doping fluorinated amorphous carbon (a-C∶F) films were deposited using radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) and annealed in Ar environment in order to investigate their therma...Nitrogen doping fluorinated amorphous carbon (a-C∶F) films were deposited using radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) and annealed in Ar environment in order to investigate their thermal stability. Surface morphology and the thickness of the films before and after annealing were characterized by AFM and ellipsometer. Raman spectra and FTIR were used to analyze the chemical structure of the films. The results show that the surface of the films becomes more homogeneous either by the addition of N2 or after annealing. Deposition rate of the films increases a little at first and then decreases sharply with the increase of N2 source gas flux. It is also found that the fraction of aromatic rings structure increases and the thermal stability of the films is strengthened with the increase of N2 flux. Nitrogen doping is a feasible approach to improve the thermal stability of a-C∶F films.展开更多
The immobilized photocatalyst, TiO2 film supported on activated carbon fibers (TiO2/ACFs) prepared with molecular adsorption-deposition (MAD), exhibits high stability in cyclic photodegradation runs. The interposition...The immobilized photocatalyst, TiO2 film supported on activated carbon fibers (TiO2/ACFs) prepared with molecular adsorption-deposition (MAD), exhibits high stability in cyclic photodegradation runs. The interposition fixing structure between TiO2 film and carbon fiber was investigated by means of SEM-EDX, XRD, XPS and FTIR, and a model was proposed to explain this structure. With SEM examination of carbon fiber surface after removing the deposited TiO2 film, a residual TiO2 super-thin film was found to exist still. By determining surface groups on ACFs, titanium sulfate (Ti2(SO4)3) in burnt remainders of the TiO2/ACFs was thought to be formed with an interfacial reaction between TiO2 film and carbon fibers. These provide some evidence of firm attachment of TiO2 film to carbon fiber surface. In the consideration of characteristics of the MAD, the deposition mechanism of TiO2 film on ACFs was proposed, and the interposition fixing structure was inferred to intercrossedly form between TiO2 film and ACFs’ surface. This structure leaded to firm attachment and high stability of the TiO2 film.展开更多
Nitrogen doped fluorinated amorphous carbon thin films(a-C:N:F)were prepared by radio frequency plasma enhanced chemical vapor deposition(rf-PECVD)under different deposited condition usingCH_4,CF_4,and N_2 as source g...Nitrogen doped fluorinated amorphous carbon thin films(a-C:N:F)were prepared by radio frequency plasma enhanced chemical vapor deposition(rf-PECVD)under different deposited condition usingCH_4,CF_4,and N_2 as source gases.The thin films were annealed at different temperature.The influence of doped nitrogen on the chemical structure, tribological and thermal properties of thin films were investigated by Atomic force microscopy(AFM),Fourier transform infrared absorption spectrometry(FTIR),X-ray photoelectron spectrum spectra(XPS),and thermogravimetry(TG).The results indicated that the thin films presence a compact and smooth morphology surface after the nitrogen doped.After incorporation of nitrogen,the H atoms are replaced partially by the N atoms in the thin films.The degree of cross-linking of the carbon network in the thin films is enhanced.The chemical bonds of C=N,C≡N,and C—N_x(x=1,2,3) have formed in the films.The relative content of sp^2 graphite phase increases.The thermal stability temperature of the films deposited at r=0.5(r=N_2/[CF_4+CH_4+N_2])is 420℃.The tribological properties improve greatly,and the friction coefficient of the a-C:N:F thin films ranges approximately from 0.20 to 0.36.展开更多
The structural stability of C60 films under the bombardment of 1.95 GeV Kr ions is investigated.The irradiated C60 films were analyzed by Fourier Transform Infrared(FTIR) spectroscopy and Raman scattering technique.Th...The structural stability of C60 films under the bombardment of 1.95 GeV Kr ions is investigated.The irradiated C60 films were analyzed by Fourier Transform Infrared(FTIR) spectroscopy and Raman scattering technique.The analytical results indicate that the irradiation induced a decrease of icosahedral symmetry of C60 molecule and damage of C60 films;different vibration modes of C60 molecule have different irradiation sensitivities;the mean efficient damage radius obtained from experimental data is about 1.47 nm,which is in good agreement with thermal spike model prediction.展开更多
A floating-catalyst spray pyrolysis method was used to synthesize carbon nanotube(CNT)thin films.With the use of ammonium chloride as a pore-former and epoxy resin(EP)as an adhesive,CNT/EP composite films with a porou...A floating-catalyst spray pyrolysis method was used to synthesize carbon nanotube(CNT)thin films.With the use of ammonium chloride as a pore-former and epoxy resin(EP)as an adhesive,CNT/EP composite films with a porous structure were prepared through the post-heat treatment.These films have excellent thermal insulation(0.029–0.048 W·m^−1·K^−1)at the thickness direction as well as a good thermal conductivity(40–60 Wm^−1·K^−1)in the film plane.This study provides a new film material for thermal control systems that demand a good thermal conductivity in the plane but outstanding thermal insulation at the thickness direction.展开更多
文摘Diamond-like carbon (DLC) is a metastable amorphous film that exhibits unique properties. However, many limitations exist regarding the use of DLC, for example, its tribological characteristics at high temperature, as well as its limited thermal stability. In this study, silicon/oxygen and silicon/nitrogen co-incorporated diamond-like carbon (Si-O-DLC and Si-N-DLC) films are studied, taking into account the thermal stability and tribological performance of these films compared with pure DLC. All the films were prepared on Si wafers, WC-Co materials, and aluminum foils using a plasma-based ion implantation (PBII) technique using acetylene (C2H2), tetramethylsilane (TMS, Si(CH3)4), oxygen (O2) and nitrogen (N2) as plasma sources. The structure of the films was characterized using Raman spectroscopy. The thermal stability of the films was measured using thermogravimetric and differential thermal analysis (TG-DTA). The friction coefficient of the films was assessed using ball-on-disk friction testing. The results indicate that Si-N-DLC films present better thermal stability due to the presence of Si-O networks in the films. The Si-N-DLC (23 at.%Si, 8 at.%N) film was affected using thermal annealing in an air atmosphere with increasing temperature until 500°C. The film can also resist thermal shock by cycling 10 times between the various temperatures and air atmosphere until 500°C. Further, Si-O-DLC and Si-N-DLC films exhibit excellent tribological performance, especially the Si-N-DLC (23 at.%Si, 8 at.%N) film, which exhibits excellent tribological performance at 500°C in an air atmosphere. It is concluded that Si-O-DLC and Si-N-DLC films improve upon the thermal stability and tribological performance of DLC.
文摘Nitrogen doped diamond-like carbon (DLC:N) films were prepared by electron cyclotron resonance chemical vapor deposition (ECR-CVD) on polycrystalline Si chips. Film thickness is about 50 nm. Auger electron spectroscopy (AES) was used to evaluate nitrogen content, and increasing N2 flow improved N content from 0 to 7.6%. Raman and X-ray photoelectron spectroscopy (XPS) analysis results reveal CN-sp^3C and N-sp^2C structure. With increasing the N2 flow, sp^3C decreases from 73.74% down to 42.66%, and so does N-sp^3C from 68.04% down to 20.23%. The hardness decreases from 29.18 GPa down to 19.74 GPa, and the Young's modulus from 193.03 GPa down to 144.52 GPa.
文摘Fluorinated amorphous carbon films were deposited using microwave electron cyclotron resonance chemical vapor deposition (ECR-CVD) reactor with CF4 and C8H6 as source gas and were annealed in nitrogen ambience for the investigating of their thermal stability .The relative concentration of C=C bond and optical bandgap were obtained by Fourier Transform Infrared (FTIR) spectroscopy and Ultraviolet-Visible (UV-VIS ) spectrum, respectively. It has been demonstrated that there is a close relationship between relative concentration of C=C bond and optical bandgap, and the films deposited at a higher microwave power have a lower optical bandgap and a better thermal stability.
文摘Nitrogen doping fluorinated amorphous carbon (a-C∶F) films were deposited using radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) and annealed in Ar environment in order to investigate their thermal stability. Surface morphology and the thickness of the films before and after annealing were characterized by AFM and ellipsometer. Raman spectra and FTIR were used to analyze the chemical structure of the films. The results show that the surface of the films becomes more homogeneous either by the addition of N2 or after annealing. Deposition rate of the films increases a little at first and then decreases sharply with the increase of N2 source gas flux. It is also found that the fraction of aromatic rings structure increases and the thermal stability of the films is strengthened with the increase of N2 flux. Nitrogen doping is a feasible approach to improve the thermal stability of a-C∶F films.
文摘The immobilized photocatalyst, TiO2 film supported on activated carbon fibers (TiO2/ACFs) prepared with molecular adsorption-deposition (MAD), exhibits high stability in cyclic photodegradation runs. The interposition fixing structure between TiO2 film and carbon fiber was investigated by means of SEM-EDX, XRD, XPS and FTIR, and a model was proposed to explain this structure. With SEM examination of carbon fiber surface after removing the deposited TiO2 film, a residual TiO2 super-thin film was found to exist still. By determining surface groups on ACFs, titanium sulfate (Ti2(SO4)3) in burnt remainders of the TiO2/ACFs was thought to be formed with an interfacial reaction between TiO2 film and carbon fibers. These provide some evidence of firm attachment of TiO2 film to carbon fiber surface. In the consideration of characteristics of the MAD, the deposition mechanism of TiO2 film on ACFs was proposed, and the interposition fixing structure was inferred to intercrossedly form between TiO2 film and ACFs’ surface. This structure leaded to firm attachment and high stability of the TiO2 film.
基金Item Sponsored by National Natural Science Foundation of China[No.11064003]
文摘Nitrogen doped fluorinated amorphous carbon thin films(a-C:N:F)were prepared by radio frequency plasma enhanced chemical vapor deposition(rf-PECVD)under different deposited condition usingCH_4,CF_4,and N_2 as source gases.The thin films were annealed at different temperature.The influence of doped nitrogen on the chemical structure, tribological and thermal properties of thin films were investigated by Atomic force microscopy(AFM),Fourier transform infrared absorption spectrometry(FTIR),X-ray photoelectron spectrum spectra(XPS),and thermogravimetry(TG).The results indicated that the thin films presence a compact and smooth morphology surface after the nitrogen doped.After incorporation of nitrogen,the H atoms are replaced partially by the N atoms in the thin films.The degree of cross-linking of the carbon network in the thin films is enhanced.The chemical bonds of C=N,C≡N,and C—N_x(x=1,2,3) have formed in the films.The relative content of sp^2 graphite phase increases.The thermal stability temperature of the films deposited at r=0.5(r=N_2/[CF_4+CH_4+N_2])is 420℃.The tribological properties improve greatly,and the friction coefficient of the a-C:N:F thin films ranges approximately from 0.20 to 0.36.
基金supported by the National Natural Science Foundation of China (10835010,10675150,10175084)the National Basic Research Program of China (2010CB832902)
文摘The structural stability of C60 films under the bombardment of 1.95 GeV Kr ions is investigated.The irradiated C60 films were analyzed by Fourier Transform Infrared(FTIR) spectroscopy and Raman scattering technique.The analytical results indicate that the irradiation induced a decrease of icosahedral symmetry of C60 molecule and damage of C60 films;different vibration modes of C60 molecule have different irradiation sensitivities;the mean efficient damage radius obtained from experimental data is about 1.47 nm,which is in good agreement with thermal spike model prediction.
基金This research was supported by the National Key R&D Program of China(2018YFA0208404)the National Natural Science Foundation of China(U1362104)the Innovation Program of Shanghai Municipal Education Commission.
文摘A floating-catalyst spray pyrolysis method was used to synthesize carbon nanotube(CNT)thin films.With the use of ammonium chloride as a pore-former and epoxy resin(EP)as an adhesive,CNT/EP composite films with a porous structure were prepared through the post-heat treatment.These films have excellent thermal insulation(0.029–0.048 W·m^−1·K^−1)at the thickness direction as well as a good thermal conductivity(40–60 Wm^−1·K^−1)in the film plane.This study provides a new film material for thermal control systems that demand a good thermal conductivity in the plane but outstanding thermal insulation at the thickness direction.