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Optical properties of He^(+)-implanted and diamond blade-diced terbium gallium garnet crystal planar and ridge waveguides
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作者 Jia-Li You Yu-Song Wang +5 位作者 Tong Wang Li-Li Fu Qing-Yang Yue Xiang-Fu Wang Rui-Lin Zheng Chun-Xiao Liu 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第11期324-328,共5页
Terbium gallium garnet(Tb_(3)Ga_(5)O_(12),TGG)crystal can be used to fabricate various magneto-optical devices due to its optimal Faraday effect.In this work,400-keV He^(+)ions with a fluence of 6.0×10^(16)ions/c... Terbium gallium garnet(Tb_(3)Ga_(5)O_(12),TGG)crystal can be used to fabricate various magneto-optical devices due to its optimal Faraday effect.In this work,400-keV He^(+)ions with a fluence of 6.0×10^(16)ions/cm^(2)are irradiated into the TGG crystal for the planar waveguide formation.The precise diamond blade dicing with a rotation speed of 2×10^(4)rpm and a cutting velocity of 0.1 mm/s is performed on the He^(+)-implanted TGG planar waveguide for the ridge structure.The darkmode spectrum of the He^(+)-implanted TGG planar waveguide is measured by the prism-coupling method,thereby obtaining the relationship between the reflected light intensity and the effective refractive index.The refractive index profile of the planar waveguide is reconstructed by the reflectivity calculation method.The near-field light intensity distribution of the planar waveguide and the ridge waveguide are recorded by the end-face coupling method.The He^(+)-implanted and diamond blade-diced TGG crystal planar and ridge waveguides are promising candidates for integrated magneto-optical devices. 展开更多
关键词 TGG crystal optical waveguide ion implantation precise diamond blade dicing
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Lithium niobate planar and ridge waveguides fabricated by 3 MeV oxygen ion implantation and precise diamond dicing 被引量:2
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作者 Jinhua Zhao Xueshuai Jiao +4 位作者 Yingying Ren Jinjun Gu Sumei Wang Mingyang Bu Lei Wang 《Chinese Optics Letters》 SCIE EI CAS CSCD 2021年第6期38-43,共6页
We report on the fabrication and optimization of lithium niobate planar and ridge waveguides at the wavelength of 633 nm.To obtain a planar waveguide, oxygen ions with an energy of 3.0 Me V and a fluence of 1.5 ×... We report on the fabrication and optimization of lithium niobate planar and ridge waveguides at the wavelength of 633 nm.To obtain a planar waveguide, oxygen ions with an energy of 3.0 Me V and a fluence of 1.5 × 10^(15) ions=cm^(2) are implanted in the polished face of Li Nb O_(3) crystals. For planar waveguides, a loss of 0.5 d B/cm is obtained after annealing at 300°C for30 min. The ridge waveguide is fabricated by the diamond blade dicing method on optimized planar waveguides. The guiding properties are investigated by prism coupling and end-face coupling methods. 展开更多
关键词 lithium niobate WAVEGUIDE precise dicing
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