Process technology of multiple cylindrical micro-pins by wire-electrical discharge machining （wire-EDM） and electrochemical etching was presented. A row of rectangular micro-columns were machined by wire-EDM and the...Process technology of multiple cylindrical micro-pins by wire-electrical discharge machining （wire-EDM） and electrochemical etching was presented. A row of rectangular micro-columns were machined by wire-EDM and then machined into cylindrical shape by electrochemical etching. However, the shape of the multiple electrodes and the consistent sizes of the electrodes row are not easy to be controlled. In the electrochemical process, the shape of the cathode electrode determines the current density distribution on the anode and so the forming of multiple electrodes. This paper proposes a finite element method （FEM） to accurately optimize the electrode profile. The microelectrodes row with uniformity diameters with size from hundreds micrometers to several decades could be fabricated, and mathematical model controlling the shape and diameter of multiple microelectrodes was provided. Furthermore, a good agreement between experimental and theoretical results was confirmed.展开更多
基金the financial support from China Aviation Science Foundation (04H52055).
文摘Process technology of multiple cylindrical micro-pins by wire-electrical discharge machining （wire-EDM） and electrochemical etching was presented. A row of rectangular micro-columns were machined by wire-EDM and then machined into cylindrical shape by electrochemical etching. However, the shape of the multiple electrodes and the consistent sizes of the electrodes row are not easy to be controlled. In the electrochemical process, the shape of the cathode electrode determines the current density distribution on the anode and so the forming of multiple electrodes. This paper proposes a finite element method （FEM） to accurately optimize the electrode profile. The microelectrodes row with uniformity diameters with size from hundreds micrometers to several decades could be fabricated, and mathematical model controlling the shape and diameter of multiple microelectrodes was provided. Furthermore, a good agreement between experimental and theoretical results was confirmed.
文摘本文利用电化学腐蚀方法制备出曲率半径<100 nm的钨针尖,并在FEI Quantum 600型扫描电镜(SEM)中作为反射靶材以搭建微焦点X射线显微系统。通过SEM发射电子束轰击纳米钨针尖,以减少电子束和靶材的物理作用区域,进而减小X射线源的光斑尺寸,实现高分辨率的X射线显微成像。采用线对卡来评价系统的最佳成像分辨率,实验结果表明:系统在加速电压30 k V、电子束束流120 n A、SEM的工作距离5 mm、放大倍数为100倍、探测器采集时间为180 s的条件下,可以获得优于1μm的分辨率图像。
